10/25/2011	7:32:27 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/25/2011	7:32:28 AM	Recipe started at 7:32 AM
10/25/2011	7:32:28 AM	Helium valve closed
10/25/2011	7:32:28 AM	H2 valve closed
10/25/2011	7:32:28 AM	BCl3 valve closed
10/25/2011	7:32:28 AM	PH3 valve closed
10/25/2011	7:32:28 AM	SiCl4 pre valve closed
10/25/2011	7:32:28 AM	SiCl4 post valve closed
10/25/2011	7:32:28 AM	Main Vac valve closed
10/25/2011	7:32:28 AM	Bypass valve closed
10/25/2011	7:32:28 AM	Bubbler valve closed
10/25/2011	7:32:28 AM	Helium MFC set to  0.000000
10/25/2011	7:32:28 AM	H2 MFC set to  0.000000
10/25/2011	7:32:28 AM	BCl3 MFC set to  0.000000
10/25/2011	7:32:28 AM	PHl3 MFC set to  0.000000
10/25/2011	7:32:28 AM	SiCl4 MFC set to  0.000000
10/25/2011	7:32:28 AM	Bypass solenoid MFC set to  0.000000
10/25/2011	7:32:28 AM	Tube furnace set to 0
10/25/2011	7:32:31 AM	H2 valve closed
10/25/2011	7:32:31 AM	BCl3 valve closed
10/25/2011	7:32:31 AM	PH3 valve closed
10/25/2011	7:32:31 AM	SiCl4 pre valve closed
10/25/2011	7:32:31 AM	SiCl4 post valve closed
10/25/2011	7:32:31 AM	Main Vac valve closed
10/25/2011	7:32:31 AM	Bypass valve closed
10/25/2011	7:32:31 AM	Bubbler valve closed
10/25/2011	7:32:31 AM	Helium valve opened
10/25/2011	7:32:31 AM	Helium MFC set to  500.000000
10/25/2011	7:32:31 AM	H2 MFC set to  0.000000
10/25/2011	7:32:31 AM	BCl3 MFC set to  0.000000
10/25/2011	7:32:31 AM	PHl3 MFC set to  0.000000
10/25/2011	7:32:31 AM	SiCl4 MFC set to  0.000000
10/25/2011	7:32:31 AM	Bypass solenoid MFC set to  0.000000
10/25/2011	7:32:31 AM	Tube furnace set to 0
10/25/2011	7:32:47 AM	Helium valve closed
10/25/2011	7:32:47 AM	H2 valve closed
10/25/2011	7:32:47 AM	BCl3 valve closed
10/25/2011	7:32:47 AM	PH3 valve closed
10/25/2011	7:32:47 AM	SiCl4 pre valve closed
10/25/2011	7:32:47 AM	SiCl4 post valve closed
10/25/2011	7:32:47 AM	Main Vac valve closed
10/25/2011	7:32:47 AM	Bypass valve closed
10/25/2011	7:32:47 AM	Bubbler valve closed
10/25/2011	7:32:47 AM	Helium MFC set to  0.000000
10/25/2011	7:32:47 AM	H2 MFC set to  0.000000
10/25/2011	7:32:47 AM	BCl3 MFC set to  0.000000
10/25/2011	7:32:47 AM	PHl3 MFC set to  0.000000
10/25/2011	7:32:47 AM	SiCl4 MFC set to  0.000000
10/25/2011	7:32:47 AM	Bypass solenoid MFC set to  0.000000
10/25/2011	7:32:47 AM	Tube furnace set to 0
10/25/2011	7:32:48 AM	Run finished at 7:32 AM
10/25/2011	7:32:48 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/25/2011	7:41:43 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/25/2011	7:41:43 AM	Recipe started at 7:41 AM
10/25/2011	7:41:43 AM	Helium valve closed
10/25/2011	7:41:43 AM	H2 valve closed
10/25/2011	7:41:43 AM	BCl3 valve closed
10/25/2011	7:41:43 AM	PH3 valve closed
10/25/2011	7:41:43 AM	SiCl4 pre valve closed
10/25/2011	7:41:43 AM	SiCl4 post valve closed
10/25/2011	7:41:43 AM	Main Vac valve closed
10/25/2011	7:41:43 AM	Bubbler valve closed
10/25/2011	7:41:43 AM	Bypass valve opened
10/25/2011	7:41:43 AM	Helium MFC set to  0.000000
10/25/2011	7:41:43 AM	H2 MFC set to  0.000000
10/25/2011	7:41:43 AM	BCl3 MFC set to  0.000000
10/25/2011	7:41:43 AM	PHl3 MFC set to  0.000000
10/25/2011	7:41:43 AM	SiCl4 MFC set to  0.000000
10/25/2011	7:41:43 AM	Bypass solenoid MFC set to  0.000000
10/25/2011	7:41:44 AM	Tube furnace set to 0
10/25/2011	7:43:13 AM	Helium valve closed
10/25/2011	7:43:13 AM	H2 valve closed
10/25/2011	7:43:13 AM	BCl3 valve closed
10/25/2011	7:43:13 AM	PH3 valve closed
10/25/2011	7:43:13 AM	SiCl4 pre valve closed
10/25/2011	7:43:13 AM	SiCl4 post valve closed
10/25/2011	7:43:13 AM	Main Vac valve closed
10/25/2011	7:43:13 AM	Bubbler valve closed
10/25/2011	7:43:13 AM	Bypass valve opened
10/25/2011	7:43:13 AM	Helium MFC set to  0.000000
10/25/2011	7:43:13 AM	H2 MFC set to  0.000000
10/25/2011	7:43:13 AM	BCl3 MFC set to  0.000000
10/25/2011	7:43:13 AM	PHl3 MFC set to  0.000000
10/25/2011	7:43:13 AM	SiCl4 MFC set to  0.000000
10/25/2011	7:43:13 AM	Bypass solenoid MFC set to  0.000000
10/25/2011	7:43:13 AM	Tube furnace set to 0
10/25/2011	7:44:13 AM	Helium valve closed
10/25/2011	7:44:13 AM	H2 valve closed
10/25/2011	7:44:13 AM	BCl3 valve closed
10/25/2011	7:44:13 AM	PH3 valve closed
10/25/2011	7:44:13 AM	SiCl4 pre valve closed
10/25/2011	7:44:13 AM	SiCl4 post valve closed
10/25/2011	7:44:13 AM	Bypass valve closed
10/25/2011	7:44:13 AM	Bubbler valve closed
10/25/2011	7:44:13 AM	Main Vac valve opened
10/25/2011	7:44:13 AM	Helium MFC set to  0.000000
10/25/2011	7:44:13 AM	H2 MFC set to  0.000000
10/25/2011	7:44:13 AM	BCl3 MFC set to  0.000000
10/25/2011	7:44:13 AM	PHl3 MFC set to  0.000000
10/25/2011	7:44:13 AM	SiCl4 MFC set to  0.000000
10/25/2011	7:44:13 AM	Bypass solenoid MFC set to  0.000000
10/25/2011	7:44:13 AM	Tube furnace set to 0
10/25/2011	7:44:14 AM	Run finished at 7:44 AM
10/25/2011	7:44:14 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/25/2011	7:46:34 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
10/25/2011	7:46:47 AM	Recipe started at 7:46 AM
10/25/2011	7:46:47 AM	Helium valve closed
10/25/2011	7:46:47 AM	H2 valve closed
10/25/2011	7:46:47 AM	BCl3 valve closed
10/25/2011	7:46:47 AM	PH3 valve closed
10/25/2011	7:46:47 AM	SiCl4 pre valve closed
10/25/2011	7:46:47 AM	SiCl4 post valve closed
10/25/2011	7:46:47 AM	Main Vac valve closed
10/25/2011	7:46:47 AM	Bubbler valve closed
10/25/2011	7:46:47 AM	Bypass valve opened
10/25/2011	7:46:47 AM	Helium MFC set to  0.000000
10/25/2011	7:46:47 AM	H2 MFC set to  0.000000
10/25/2011	7:46:47 AM	BCl3 MFC set to  0.000000
10/25/2011	7:46:47 AM	PHl3 MFC set to  0.000000
10/25/2011	7:46:47 AM	SiCl4 MFC set to  0.000000
10/25/2011	7:46:47 AM	Bypass solenoid MFC set to  0.000000
10/25/2011	7:46:47 AM	Tube furnace set to 0
10/25/2011	7:46:47 AM	Helium valve closed
10/25/2011	7:46:47 AM	H2 valve closed
10/25/2011	7:46:47 AM	BCl3 valve closed
10/25/2011	7:46:47 AM	PH3 valve closed
10/25/2011	7:46:47 AM	SiCl4 pre valve closed
10/25/2011	7:46:47 AM	SiCl4 post valve closed
10/25/2011	7:46:47 AM	Main Vac valve closed
10/25/2011	7:46:47 AM	Bubbler valve closed
10/25/2011	7:46:47 AM	Bypass valve opened
10/25/2011	7:46:47 AM	Helium MFC set to  0.000000
10/25/2011	7:46:47 AM	H2 MFC set to  0.000000
10/25/2011	7:46:47 AM	BCl3 MFC set to  0.000000
10/25/2011	7:46:47 AM	PHl3 MFC set to  0.000000
10/25/2011	7:46:47 AM	SiCl4 MFC set to  0.000000
10/25/2011	7:46:47 AM	Bypass solenoid MFC set to  0.000000
10/25/2011	7:46:47 AM	Tube furnace set to 0
10/25/2011	7:47:17 AM	Helium valve closed
10/25/2011	7:47:17 AM	H2 valve closed
10/25/2011	7:47:17 AM	BCl3 valve closed
10/25/2011	7:47:17 AM	PH3 valve closed
10/25/2011	7:47:17 AM	SiCl4 pre valve closed
10/25/2011	7:47:17 AM	SiCl4 post valve closed
10/25/2011	7:47:17 AM	Bypass valve closed
10/25/2011	7:47:17 AM	Bubbler valve closed
10/25/2011	7:47:17 AM	Main Vac valve opened
10/25/2011	7:47:17 AM	Helium MFC set to  0.000000
10/25/2011	7:47:17 AM	H2 MFC set to  0.000000
10/25/2011	7:47:17 AM	BCl3 MFC set to  0.000000
10/25/2011	7:47:17 AM	PHl3 MFC set to  0.000000
10/25/2011	7:47:17 AM	SiCl4 MFC set to  0.000000
10/25/2011	7:47:17 AM	Bypass solenoid MFC set to  0.000000
10/25/2011	7:47:17 AM	Tube furnace set to 0
10/25/2011	7:47:47 AM	H2 valve closed
10/25/2011	7:47:47 AM	BCl3 valve closed
10/25/2011	7:47:47 AM	PH3 valve closed
10/25/2011	7:47:47 AM	SiCl4 pre valve closed
10/25/2011	7:47:47 AM	SiCl4 post valve closed
10/25/2011	7:47:47 AM	Bypass valve closed
10/25/2011	7:47:47 AM	Bubbler valve closed
10/25/2011	7:47:47 AM	Helium valve opened
10/25/2011	7:47:47 AM	Main Vac valve opened
10/25/2011	7:47:47 AM	Helium MFC set to  20.000000
10/25/2011	7:47:47 AM	H2 MFC set to  0.000000
10/25/2011	7:47:47 AM	BCl3 MFC set to  0.000000
10/25/2011	7:47:47 AM	PHl3 MFC set to  0.000000
10/25/2011	7:47:47 AM	SiCl4 MFC set to  0.000000
10/25/2011	7:47:47 AM	Bypass solenoid MFC set to  0.000000
10/25/2011	7:47:48 AM	Tube furnace set to 0
10/25/2011	7:48:18 AM	Helium valve closed
10/25/2011	7:48:18 AM	H2 valve closed
10/25/2011	7:48:18 AM	BCl3 valve closed
10/25/2011	7:48:18 AM	PH3 valve closed
10/25/2011	7:48:18 AM	SiCl4 pre valve closed
10/25/2011	7:48:18 AM	SiCl4 post valve closed
10/25/2011	7:48:18 AM	Bypass valve closed
10/25/2011	7:48:18 AM	Bubbler valve closed
10/25/2011	7:48:18 AM	Main Vac valve opened
10/25/2011	7:48:18 AM	Helium MFC set to  0.000000
10/25/2011	7:48:18 AM	H2 MFC set to  0.000000
10/25/2011	7:48:18 AM	BCl3 MFC set to  0.000000
10/25/2011	7:48:18 AM	PHl3 MFC set to  0.000000
10/25/2011	7:48:18 AM	SiCl4 MFC set to  0.000000
10/25/2011	7:48:18 AM	Bypass solenoid MFC set to  0.000000
10/25/2011	7:48:18 AM	Tube furnace set to 0
10/25/2011	7:48:48 AM	H2 valve closed
10/25/2011	7:48:48 AM	BCl3 valve closed
10/25/2011	7:48:48 AM	PH3 valve closed
10/25/2011	7:48:48 AM	SiCl4 pre valve closed
10/25/2011	7:48:48 AM	SiCl4 post valve closed
10/25/2011	7:48:48 AM	Bypass valve closed
10/25/2011	7:48:48 AM	Bubbler valve closed
10/25/2011	7:48:48 AM	Helium valve opened
10/25/2011	7:48:48 AM	Main Vac valve opened
10/25/2011	7:48:48 AM	Helium MFC set to  20.000000
10/25/2011	7:48:48 AM	H2 MFC set to  0.000000
10/25/2011	7:48:48 AM	BCl3 MFC set to  0.000000
10/25/2011	7:48:48 AM	PHl3 MFC set to  0.000000
10/25/2011	7:48:48 AM	SiCl4 MFC set to  0.000000
10/25/2011	7:48:48 AM	Bypass solenoid MFC set to  0.000000
10/25/2011	7:48:48 AM	Tube furnace set to 0
10/25/2011	7:49:18 AM	Helium valve closed
10/25/2011	7:49:18 AM	H2 valve closed
10/25/2011	7:49:18 AM	BCl3 valve closed
10/25/2011	7:49:18 AM	PH3 valve closed
10/25/2011	7:49:18 AM	SiCl4 pre valve closed
10/25/2011	7:49:18 AM	SiCl4 post valve closed
10/25/2011	7:49:18 AM	Bypass valve closed
10/25/2011	7:49:18 AM	Bubbler valve closed
10/25/2011	7:49:18 AM	Main Vac valve opened
10/25/2011	7:49:18 AM	Helium MFC set to  0.000000
10/25/2011	7:49:18 AM	H2 MFC set to  0.000000
10/25/2011	7:49:18 AM	BCl3 MFC set to  0.000000
10/25/2011	7:49:18 AM	PHl3 MFC set to  0.000000
10/25/2011	7:49:18 AM	SiCl4 MFC set to  0.000000
10/25/2011	7:49:18 AM	Bypass solenoid MFC set to  0.000000
10/25/2011	7:49:18 AM	Tube furnace set to 0
10/25/2011	7:49:48 AM	H2 valve closed
10/25/2011	7:49:48 AM	BCl3 valve closed
10/25/2011	7:49:48 AM	PH3 valve closed
10/25/2011	7:49:48 AM	SiCl4 pre valve closed
10/25/2011	7:49:48 AM	SiCl4 post valve closed
10/25/2011	7:49:48 AM	Bypass valve closed
10/25/2011	7:49:48 AM	Bubbler valve closed
10/25/2011	7:49:48 AM	Helium valve opened
10/25/2011	7:49:48 AM	Main Vac valve opened
10/25/2011	7:49:48 AM	Helium MFC set to  20.000000
10/25/2011	7:49:48 AM	H2 MFC set to  0.000000
10/25/2011	7:49:48 AM	BCl3 MFC set to  0.000000
10/25/2011	7:49:48 AM	PHl3 MFC set to  0.000000
10/25/2011	7:49:48 AM	SiCl4 MFC set to  0.000000
10/25/2011	7:49:48 AM	Bypass solenoid MFC set to  0.000000
10/25/2011	7:49:48 AM	Tube furnace set to 0
10/25/2011	7:50:18 AM	Helium valve closed
10/25/2011	7:50:18 AM	H2 valve closed
10/25/2011	7:50:18 AM	BCl3 valve closed
10/25/2011	7:50:18 AM	PH3 valve closed
10/25/2011	7:50:18 AM	SiCl4 pre valve closed
10/25/2011	7:50:18 AM	SiCl4 post valve closed
10/25/2011	7:50:18 AM	Bypass valve closed
10/25/2011	7:50:18 AM	Bubbler valve closed
10/25/2011	7:50:18 AM	Main Vac valve opened
10/25/2011	7:50:18 AM	Helium MFC set to  0.000000
10/25/2011	7:50:18 AM	H2 MFC set to  0.000000
10/25/2011	7:50:18 AM	BCl3 MFC set to  0.000000
10/25/2011	7:50:18 AM	PHl3 MFC set to  0.000000
10/25/2011	7:50:18 AM	SiCl4 MFC set to  0.000000
10/25/2011	7:50:18 AM	Bypass solenoid MFC set to  0.000000
10/25/2011	7:50:19 AM	Tube furnace set to 0
10/25/2011	7:50:49 AM	H2 valve closed
10/25/2011	7:50:49 AM	BCl3 valve closed
10/25/2011	7:50:49 AM	PH3 valve closed
10/25/2011	7:50:49 AM	SiCl4 pre valve closed
10/25/2011	7:50:49 AM	SiCl4 post valve closed
10/25/2011	7:50:49 AM	Bypass valve closed
10/25/2011	7:50:49 AM	Bubbler valve closed
10/25/2011	7:50:49 AM	Helium valve opened
10/25/2011	7:50:49 AM	Main Vac valve opened
10/25/2011	7:50:49 AM	Helium MFC set to  20.000000
10/25/2011	7:50:49 AM	H2 MFC set to  0.000000
10/25/2011	7:50:49 AM	BCl3 MFC set to  0.000000
10/25/2011	7:50:49 AM	PHl3 MFC set to  0.000000
10/25/2011	7:50:49 AM	SiCl4 MFC set to  0.000000
10/25/2011	7:50:49 AM	Bypass solenoid MFC set to  0.000000
10/25/2011	7:50:49 AM	Tube furnace set to 0
10/25/2011	7:51:19 AM	Helium valve closed
10/25/2011	7:51:19 AM	H2 valve closed
10/25/2011	7:51:19 AM	BCl3 valve closed
10/25/2011	7:51:19 AM	PH3 valve closed
10/25/2011	7:51:19 AM	SiCl4 pre valve closed
10/25/2011	7:51:19 AM	SiCl4 post valve closed
10/25/2011	7:51:19 AM	Bypass valve closed
10/25/2011	7:51:19 AM	Bubbler valve closed
10/25/2011	7:51:19 AM	Main Vac valve opened
10/25/2011	7:51:19 AM	Helium MFC set to  0.000000
10/25/2011	7:51:19 AM	H2 MFC set to  0.000000
10/25/2011	7:51:19 AM	BCl3 MFC set to  0.000000
10/25/2011	7:51:19 AM	PHl3 MFC set to  0.000000
10/25/2011	7:51:19 AM	SiCl4 MFC set to  0.000000
10/25/2011	7:51:19 AM	Bypass solenoid MFC set to  0.000000
10/25/2011	7:51:19 AM	Tube furnace set to 0
10/25/2011	7:51:49 AM	H2 valve closed
10/25/2011	7:51:49 AM	BCl3 valve closed
10/25/2011	7:51:49 AM	PH3 valve closed
10/25/2011	7:51:49 AM	SiCl4 pre valve closed
10/25/2011	7:51:49 AM	SiCl4 post valve closed
10/25/2011	7:51:49 AM	Bypass valve closed
10/25/2011	7:51:49 AM	Bubbler valve closed
10/25/2011	7:51:49 AM	Helium valve opened
10/25/2011	7:51:49 AM	Main Vac valve opened
10/25/2011	7:51:49 AM	Helium MFC set to  20.000000
10/25/2011	7:51:49 AM	H2 MFC set to  0.000000
10/25/2011	7:51:49 AM	BCl3 MFC set to  0.000000
10/25/2011	7:51:49 AM	PHl3 MFC set to  0.000000
10/25/2011	7:51:49 AM	SiCl4 MFC set to  0.000000
10/25/2011	7:51:49 AM	Bypass solenoid MFC set to  0.000000
10/25/2011	7:51:49 AM	Tube furnace set to 0
10/25/2011	7:52:19 AM	Helium valve closed
10/25/2011	7:52:19 AM	H2 valve closed
10/25/2011	7:52:19 AM	BCl3 valve closed
10/25/2011	7:52:19 AM	PH3 valve closed
10/25/2011	7:52:19 AM	SiCl4 pre valve closed
10/25/2011	7:52:19 AM	SiCl4 post valve closed
10/25/2011	7:52:19 AM	Bypass valve closed
10/25/2011	7:52:19 AM	Bubbler valve closed
10/25/2011	7:52:19 AM	Main Vac valve opened
10/25/2011	7:52:19 AM	Helium MFC set to  0.000000
10/25/2011	7:52:19 AM	H2 MFC set to  0.000000
10/25/2011	7:52:19 AM	BCl3 MFC set to  0.000000
10/25/2011	7:52:19 AM	PHl3 MFC set to  0.000000
10/25/2011	7:52:19 AM	SiCl4 MFC set to  0.000000
10/25/2011	7:52:19 AM	Bypass solenoid MFC set to  0.000000
10/25/2011	7:52:19 AM	Tube furnace set to 0
10/25/2011	7:52:49 AM	H2 valve closed
10/25/2011	7:52:49 AM	BCl3 valve closed
10/25/2011	7:52:49 AM	PH3 valve closed
10/25/2011	7:52:49 AM	SiCl4 pre valve closed
10/25/2011	7:52:49 AM	SiCl4 post valve closed
10/25/2011	7:52:49 AM	Bypass valve closed
10/25/2011	7:52:49 AM	Bubbler valve closed
10/25/2011	7:52:49 AM	Helium valve opened
10/25/2011	7:52:49 AM	Main Vac valve opened
10/25/2011	7:52:49 AM	Helium MFC set to  20.000000
10/25/2011	7:52:49 AM	H2 MFC set to  0.000000
10/25/2011	7:52:49 AM	BCl3 MFC set to  0.000000
10/25/2011	7:52:49 AM	PHl3 MFC set to  0.000000
10/25/2011	7:52:49 AM	SiCl4 MFC set to  0.000000
10/25/2011	7:52:49 AM	Bypass solenoid MFC set to  0.000000
10/25/2011	7:52:50 AM	Tube furnace set to 0
10/25/2011	7:53:20 AM	Helium valve closed
10/25/2011	7:53:20 AM	H2 valve closed
10/25/2011	7:53:20 AM	BCl3 valve closed
10/25/2011	7:53:20 AM	PH3 valve closed
10/25/2011	7:53:20 AM	SiCl4 pre valve closed
10/25/2011	7:53:20 AM	SiCl4 post valve closed
10/25/2011	7:53:20 AM	Bypass valve closed
10/25/2011	7:53:20 AM	Bubbler valve closed
10/25/2011	7:53:20 AM	Main Vac valve opened
10/25/2011	7:53:20 AM	Helium MFC set to  0.000000
10/25/2011	7:53:20 AM	H2 MFC set to  0.000000
10/25/2011	7:53:20 AM	BCl3 MFC set to  0.000000
10/25/2011	7:53:20 AM	PHl3 MFC set to  0.000000
10/25/2011	7:53:20 AM	SiCl4 MFC set to  0.000000
10/25/2011	7:53:20 AM	Bypass solenoid MFC set to  0.000000
10/25/2011	7:53:20 AM	Tube furnace set to 0
10/25/2011	7:53:50 AM	H2 valve closed
10/25/2011	7:53:50 AM	BCl3 valve closed
10/25/2011	7:53:50 AM	PH3 valve closed
10/25/2011	7:53:50 AM	SiCl4 pre valve closed
10/25/2011	7:53:50 AM	SiCl4 post valve closed
10/25/2011	7:53:50 AM	Bypass valve closed
10/25/2011	7:53:50 AM	Bubbler valve closed
10/25/2011	7:53:50 AM	Helium valve opened
10/25/2011	7:53:50 AM	Main Vac valve opened
10/25/2011	7:53:50 AM	Helium MFC set to  20.000000
10/25/2011	7:53:50 AM	H2 MFC set to  0.000000
10/25/2011	7:53:50 AM	BCl3 MFC set to  0.000000
10/25/2011	7:53:50 AM	PHl3 MFC set to  0.000000
10/25/2011	7:53:50 AM	SiCl4 MFC set to  0.000000
10/25/2011	7:53:50 AM	Bypass solenoid MFC set to  0.000000
10/25/2011	7:53:50 AM	Tube furnace set to 0
10/25/2011	7:54:20 AM	Helium valve closed
10/25/2011	7:54:20 AM	H2 valve closed
10/25/2011	7:54:20 AM	BCl3 valve closed
10/25/2011	7:54:20 AM	PH3 valve closed
10/25/2011	7:54:20 AM	SiCl4 pre valve closed
10/25/2011	7:54:20 AM	SiCl4 post valve closed
10/25/2011	7:54:20 AM	Bypass valve closed
10/25/2011	7:54:20 AM	Bubbler valve closed
10/25/2011	7:54:20 AM	Main Vac valve opened
10/25/2011	7:54:20 AM	Helium MFC set to  0.000000
10/25/2011	7:54:20 AM	H2 MFC set to  0.000000
10/25/2011	7:54:20 AM	BCl3 MFC set to  0.000000
10/25/2011	7:54:20 AM	PHl3 MFC set to  0.000000
10/25/2011	7:54:20 AM	SiCl4 MFC set to  0.000000
10/25/2011	7:54:20 AM	Bypass solenoid MFC set to  0.000000
10/25/2011	7:54:20 AM	Tube furnace set to 0
10/25/2011	7:54:50 AM	H2 valve closed
10/25/2011	7:54:50 AM	BCl3 valve closed
10/25/2011	7:54:50 AM	PH3 valve closed
10/25/2011	7:54:50 AM	SiCl4 pre valve closed
10/25/2011	7:54:50 AM	SiCl4 post valve closed
10/25/2011	7:54:50 AM	Bypass valve closed
10/25/2011	7:54:50 AM	Bubbler valve closed
10/25/2011	7:54:50 AM	Helium valve opened
10/25/2011	7:54:50 AM	Main Vac valve opened
10/25/2011	7:54:50 AM	Helium MFC set to  20.000000
10/25/2011	7:54:50 AM	H2 MFC set to  0.000000
10/25/2011	7:54:50 AM	BCl3 MFC set to  0.000000
10/25/2011	7:54:50 AM	PHl3 MFC set to  0.000000
10/25/2011	7:54:50 AM	SiCl4 MFC set to  0.000000
10/25/2011	7:54:50 AM	Bypass solenoid MFC set to  0.000000
10/25/2011	7:54:50 AM	Tube furnace set to 0
10/25/2011	7:55:20 AM	Helium valve closed
10/25/2011	7:55:20 AM	H2 valve closed
10/25/2011	7:55:20 AM	BCl3 valve closed
10/25/2011	7:55:20 AM	PH3 valve closed
10/25/2011	7:55:20 AM	SiCl4 pre valve closed
10/25/2011	7:55:20 AM	SiCl4 post valve closed
10/25/2011	7:55:20 AM	Bypass valve closed
10/25/2011	7:55:20 AM	Bubbler valve closed
10/25/2011	7:55:20 AM	Main Vac valve opened
10/25/2011	7:55:20 AM	Helium MFC set to  0.000000
10/25/2011	7:55:20 AM	H2 MFC set to  0.000000
10/25/2011	7:55:20 AM	BCl3 MFC set to  0.000000
10/25/2011	7:55:20 AM	PHl3 MFC set to  0.000000
10/25/2011	7:55:20 AM	SiCl4 MFC set to  0.000000
10/25/2011	7:55:20 AM	Bypass solenoid MFC set to  0.000000
10/25/2011	7:55:21 AM	Tube furnace set to 0
10/25/2011	7:55:51 AM	H2 valve closed
10/25/2011	7:55:51 AM	BCl3 valve closed
10/25/2011	7:55:51 AM	PH3 valve closed
10/25/2011	7:55:51 AM	SiCl4 pre valve closed
10/25/2011	7:55:51 AM	SiCl4 post valve closed
10/25/2011	7:55:51 AM	Bypass valve closed
10/25/2011	7:55:51 AM	Bubbler valve closed
10/25/2011	7:55:51 AM	Helium valve opened
10/25/2011	7:55:51 AM	Main Vac valve opened
10/25/2011	7:55:51 AM	Helium MFC set to  20.000000
10/25/2011	7:55:51 AM	H2 MFC set to  0.000000
10/25/2011	7:55:51 AM	BCl3 MFC set to  0.000000
10/25/2011	7:55:51 AM	PHl3 MFC set to  0.000000
10/25/2011	7:55:51 AM	SiCl4 MFC set to  0.000000
10/25/2011	7:55:51 AM	Bypass solenoid MFC set to  0.000000
10/25/2011	7:55:51 AM	Tube furnace set to 0
10/25/2011	7:56:21 AM	Helium valve closed
10/25/2011	7:56:21 AM	H2 valve closed
10/25/2011	7:56:21 AM	BCl3 valve closed
10/25/2011	7:56:21 AM	PH3 valve closed
10/25/2011	7:56:21 AM	SiCl4 pre valve closed
10/25/2011	7:56:21 AM	SiCl4 post valve closed
10/25/2011	7:56:21 AM	Bypass valve closed
10/25/2011	7:56:21 AM	Bubbler valve closed
10/25/2011	7:56:21 AM	Main Vac valve opened
10/25/2011	7:56:21 AM	Helium MFC set to  0.000000
10/25/2011	7:56:21 AM	H2 MFC set to  0.000000
10/25/2011	7:56:21 AM	BCl3 MFC set to  0.000000
10/25/2011	7:56:21 AM	PHl3 MFC set to  0.000000
10/25/2011	7:56:21 AM	SiCl4 MFC set to  0.000000
10/25/2011	7:56:21 AM	Bypass solenoid MFC set to  0.000000
10/25/2011	7:56:21 AM	Tube furnace set to 0
10/25/2011	7:56:51 AM	H2 valve closed
10/25/2011	7:56:51 AM	BCl3 valve closed
10/25/2011	7:56:51 AM	PH3 valve closed
10/25/2011	7:56:51 AM	SiCl4 pre valve closed
10/25/2011	7:56:51 AM	SiCl4 post valve closed
10/25/2011	7:56:51 AM	Bypass valve closed
10/25/2011	7:56:51 AM	Bubbler valve closed
10/25/2011	7:56:51 AM	Helium valve opened
10/25/2011	7:56:51 AM	Main Vac valve opened
10/25/2011	7:56:51 AM	Helium MFC set to  20.000000
10/25/2011	7:56:51 AM	H2 MFC set to  0.000000
10/25/2011	7:56:51 AM	BCl3 MFC set to  0.000000
10/25/2011	7:56:51 AM	PHl3 MFC set to  0.000000
10/25/2011	7:56:51 AM	SiCl4 MFC set to  0.000000
10/25/2011	7:56:51 AM	Bypass solenoid MFC set to  0.000000
10/25/2011	7:56:51 AM	Tube furnace set to 0
10/25/2011	7:57:21 AM	Helium valve closed
10/25/2011	7:57:21 AM	H2 valve closed
10/25/2011	7:57:21 AM	BCl3 valve closed
10/25/2011	7:57:21 AM	PH3 valve closed
10/25/2011	7:57:21 AM	SiCl4 pre valve closed
10/25/2011	7:57:21 AM	SiCl4 post valve closed
10/25/2011	7:57:21 AM	Bypass valve closed
10/25/2011	7:57:21 AM	Bubbler valve closed
10/25/2011	7:57:21 AM	Main Vac valve opened
10/25/2011	7:57:21 AM	Helium MFC set to  0.000000
10/25/2011	7:57:21 AM	H2 MFC set to  0.000000
10/25/2011	7:57:21 AM	BCl3 MFC set to  0.000000
10/25/2011	7:57:21 AM	PHl3 MFC set to  0.000000
10/25/2011	7:57:21 AM	SiCl4 MFC set to  0.000000
10/25/2011	7:57:21 AM	Bypass solenoid MFC set to  0.000000
10/25/2011	7:57:21 AM	Tube furnace set to 0
10/25/2011	7:57:22 AM	Run finished at 7:57 AM
10/25/2011	7:57:22 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
10/25/2011	8:13:36 AM	Recipe started at 8:13 AM
10/25/2011	8:13:36 AM	Helium valve closed
10/25/2011	8:13:36 AM	H2 valve closed
10/25/2011	8:13:36 AM	BCl3 valve closed
10/25/2011	8:13:36 AM	PH3 valve closed
10/25/2011	8:13:36 AM	SiCl4 pre valve closed
10/25/2011	8:13:36 AM	SiCl4 post valve closed
10/25/2011	8:13:36 AM	Main Vac valve closed
10/25/2011	8:13:36 AM	Bypass valve closed
10/25/2011	8:13:36 AM	Bubbler valve closed
10/25/2011	8:13:36 AM	Helium MFC set to  0.000000
10/25/2011	8:13:36 AM	H2 MFC set to  0.000000
10/25/2011	8:13:36 AM	BCl3 MFC set to  0.000000
10/25/2011	8:13:36 AM	PHl3 MFC set to  0.000000
10/25/2011	8:13:36 AM	SiCl4 MFC set to  0.000000
10/25/2011	8:13:36 AM	Bypass solenoid MFC set to  0.000000
10/25/2011	8:13:36 AM	Tube furnace set to 0
10/25/2011	8:13:39 AM	Helium valve closed
10/25/2011	8:13:39 AM	BCl3 valve closed
10/25/2011	8:13:39 AM	PH3 valve closed
10/25/2011	8:13:39 AM	SiCl4 pre valve closed
10/25/2011	8:13:39 AM	SiCl4 post valve closed
10/25/2011	8:13:39 AM	Main Vac valve closed
10/25/2011	8:13:39 AM	Bypass valve closed
10/25/2011	8:13:39 AM	Bubbler valve closed
10/25/2011	8:13:39 AM	H2 valve opened
10/25/2011	8:13:39 AM	Helium MFC set to  0.000000
10/25/2011	8:13:39 AM	H2 MFC set to  500.000000
10/25/2011	8:13:39 AM	BCl3 MFC set to  0.000000
10/25/2011	8:13:39 AM	PHl3 MFC set to  0.000000
10/25/2011	8:13:39 AM	SiCl4 MFC set to  0.000000
10/25/2011	8:13:39 AM	Bypass solenoid MFC set to  0.000000
10/25/2011	8:13:39 AM	Tube furnace set to 0
10/25/2011	8:14:48 AM	Helium valve closed
10/25/2011	8:14:48 AM	BCl3 valve closed
10/25/2011	8:14:48 AM	PH3 valve closed
10/25/2011	8:14:48 AM	SiCl4 pre valve closed
10/25/2011	8:14:48 AM	SiCl4 post valve closed
10/25/2011	8:14:48 AM	Main Vac valve closed
10/25/2011	8:14:48 AM	Bypass valve closed
10/25/2011	8:14:48 AM	H2 valve opened
10/25/2011	8:14:48 AM	Bubbler valve opened
10/25/2011	8:14:48 AM	Helium MFC set to  0.000000
10/25/2011	8:14:48 AM	H2 MFC set to  500.000000
10/25/2011	8:14:48 AM	BCl3 MFC set to  0.000000
10/25/2011	8:14:48 AM	PHl3 MFC set to  0.000000
10/25/2011	8:14:48 AM	SiCl4 MFC set to  0.000000
10/25/2011	8:14:48 AM	Bypass solenoid MFC set to  0.000000
10/25/2011	8:14:48 AM	Tube furnace set to 0
10/25/2011	8:14:49 AM	Helium valve closed
10/25/2011	8:14:49 AM	BCl3 valve closed
10/25/2011	8:14:49 AM	PH3 valve closed
10/25/2011	8:14:49 AM	SiCl4 pre valve closed
10/25/2011	8:14:49 AM	SiCl4 post valve closed
10/25/2011	8:14:49 AM	Main Vac valve closed
10/25/2011	8:14:49 AM	Bypass valve closed
10/25/2011	8:14:49 AM	H2 valve opened
10/25/2011	8:14:49 AM	Bubbler valve opened
10/25/2011	8:14:49 AM	Helium MFC set to  0.000000
10/25/2011	8:14:49 AM	H2 MFC set to  500.000000
10/25/2011	8:14:49 AM	BCl3 MFC set to  0.000000
10/25/2011	8:14:49 AM	PHl3 MFC set to  0.000000
10/25/2011	8:14:49 AM	SiCl4 MFC set to  0.000000
10/25/2011	8:14:49 AM	Bypass solenoid MFC set to  0.000000
10/25/2011	8:14:49 AM	Tube furnace set to 1010
10/25/2011	8:34:49 AM	Helium valve closed
10/25/2011	8:34:49 AM	BCl3 valve closed
10/25/2011	8:34:49 AM	PH3 valve closed
10/25/2011	8:34:49 AM	Main Vac valve closed
10/25/2011	8:34:49 AM	Bypass valve closed
10/25/2011	8:34:49 AM	H2 valve opened
10/25/2011	8:34:49 AM	SiCl4 pre valve opened
10/25/2011	8:34:49 AM	SiCl4 post valve opened
10/25/2011	8:34:49 AM	Bubbler valve opened
10/25/2011	8:34:49 AM	Helium MFC set to  0.000000
10/25/2011	8:34:49 AM	H2 MFC set to  500.000000
10/25/2011	8:34:49 AM	BCl3 MFC set to  0.000000
10/25/2011	8:34:49 AM	PHl3 MFC set to  0.000000
10/25/2011	8:34:49 AM	SiCl4 MFC set to  40.000000
10/25/2011	8:34:49 AM	Bypass solenoid MFC set to  0.000000
10/25/2011	8:34:49 AM	Tube furnace set to 1010
10/25/2011	8:44:49 AM	H2 valve closed
10/25/2011	8:44:49 AM	BCl3 valve closed
10/25/2011	8:44:49 AM	PH3 valve closed
10/25/2011	8:44:49 AM	SiCl4 pre valve closed
10/25/2011	8:44:49 AM	SiCl4 post valve closed
10/25/2011	8:44:49 AM	Main Vac valve closed
10/25/2011	8:44:49 AM	Bypass valve closed
10/25/2011	8:44:49 AM	Helium valve opened
10/25/2011	8:44:49 AM	Bubbler valve opened
10/25/2011	8:44:49 AM	Helium MFC set to  500.000000
10/25/2011	8:44:49 AM	H2 MFC set to  0.000000
10/25/2011	8:44:49 AM	BCl3 MFC set to  0.000000
10/25/2011	8:44:49 AM	PHl3 MFC set to  0.000000
10/25/2011	8:44:49 AM	SiCl4 MFC set to  0.000000
10/25/2011	8:44:49 AM	Bypass solenoid MFC set to  0.000000
10/25/2011	8:44:49 AM	Tube furnace set to 0
10/25/2011	9:00:55 AM	Helium valve closed
10/25/2011	9:00:55 AM	H2 valve closed
10/25/2011	9:00:55 AM	BCl3 valve closed
10/25/2011	9:00:55 AM	PH3 valve closed
10/25/2011	9:00:55 AM	SiCl4 pre valve closed
10/25/2011	9:00:55 AM	SiCl4 post valve closed
10/25/2011	9:00:55 AM	Main Vac valve closed
10/25/2011	9:00:55 AM	Bubbler valve closed
10/25/2011	9:00:55 AM	Bypass valve closed
10/25/2011	9:00:55 AM	Helium MFC set to  0.000000
10/25/2011	9:00:55 AM	H2 MFC set to  0.000000
10/25/2011	9:00:55 AM	BCl3 MFC set to  0.000000
10/25/2011	9:00:55 AM	PHl3 MFC set to  0.000000
10/25/2011	9:00:55 AM	SiCl4 MFC set to  0.000000
10/25/2011	9:00:55 AM	Bypass solenoid MFC set to  760.000000
10/25/2011	9:00:55 AM	Tube furnace set to 0
10/25/2011	9:00:55 AM	Baratron reads 744.380805 Torr and NaOH valve is open.  Emergency exit.
10/25/2011	9:01:58 AM	Run aborted at 9:01 AM
10/25/2011	9:05:59 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/25/2011	9:06:00 AM	Recipe started at 9:06 AM
10/25/2011	9:06:00 AM	Helium valve closed
10/25/2011	9:06:00 AM	H2 valve closed
10/25/2011	9:06:00 AM	BCl3 valve closed
10/25/2011	9:06:00 AM	PH3 valve closed
10/25/2011	9:06:00 AM	SiCl4 pre valve closed
10/25/2011	9:06:00 AM	SiCl4 post valve closed
10/25/2011	9:06:00 AM	Main Vac valve closed
10/25/2011	9:06:00 AM	Bubbler valve closed
10/25/2011	9:06:00 AM	Bypass valve opened
10/25/2011	9:06:00 AM	Helium MFC set to  0.000000
10/25/2011	9:06:00 AM	H2 MFC set to  0.000000
10/25/2011	9:06:00 AM	BCl3 MFC set to  0.000000
10/25/2011	9:06:00 AM	PHl3 MFC set to  0.000000
10/25/2011	9:06:00 AM	SiCl4 MFC set to  0.000000
10/25/2011	9:06:00 AM	Bypass solenoid MFC set to  0.000000
10/25/2011	9:06:00 AM	Tube furnace set to 0
10/25/2011	9:07:07 AM	Helium valve closed
10/25/2011	9:07:07 AM	H2 valve closed
10/25/2011	9:07:07 AM	BCl3 valve closed
10/25/2011	9:07:07 AM	PH3 valve closed
10/25/2011	9:07:07 AM	SiCl4 pre valve closed
10/25/2011	9:07:07 AM	SiCl4 post valve closed
10/25/2011	9:07:07 AM	Main Vac valve closed
10/25/2011	9:07:07 AM	Bubbler valve closed
10/25/2011	9:07:07 AM	Bypass valve opened
10/25/2011	9:07:07 AM	Helium MFC set to  0.000000
10/25/2011	9:07:07 AM	H2 MFC set to  0.000000
10/25/2011	9:07:07 AM	BCl3 MFC set to  0.000000
10/25/2011	9:07:07 AM	PHl3 MFC set to  0.000000
10/25/2011	9:07:07 AM	SiCl4 MFC set to  0.000000
10/25/2011	9:07:07 AM	Bypass solenoid MFC set to  0.000000
10/25/2011	9:07:07 AM	Tube furnace set to 0
10/25/2011	9:08:07 AM	Helium valve closed
10/25/2011	9:08:07 AM	H2 valve closed
10/25/2011	9:08:07 AM	BCl3 valve closed
10/25/2011	9:08:07 AM	PH3 valve closed
10/25/2011	9:08:07 AM	SiCl4 pre valve closed
10/25/2011	9:08:07 AM	SiCl4 post valve closed
10/25/2011	9:08:07 AM	Bypass valve closed
10/25/2011	9:08:07 AM	Bubbler valve closed
10/25/2011	9:08:07 AM	Main Vac valve opened
10/25/2011	9:08:07 AM	Helium MFC set to  0.000000
10/25/2011	9:08:07 AM	H2 MFC set to  0.000000
10/25/2011	9:08:07 AM	BCl3 MFC set to  0.000000
10/25/2011	9:08:07 AM	PHl3 MFC set to  0.000000
10/25/2011	9:08:07 AM	SiCl4 MFC set to  0.000000
10/25/2011	9:08:07 AM	Bypass solenoid MFC set to  0.000000
10/25/2011	9:08:07 AM	Tube furnace set to 0
10/25/2011	9:08:08 AM	Run finished at 9:08 AM
10/25/2011	9:08:08 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/25/2011	9:12:25 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
10/25/2011	9:12:37 AM	Recipe started at 9:12 AM
10/25/2011	9:12:37 AM	Helium valve closed
10/25/2011	9:12:37 AM	H2 valve closed
10/25/2011	9:12:38 AM	BCl3 valve closed
10/25/2011	9:12:38 AM	PH3 valve closed
10/25/2011	9:12:38 AM	SiCl4 pre valve closed
10/25/2011	9:12:38 AM	SiCl4 post valve closed
10/25/2011	9:12:38 AM	Main Vac valve closed
10/25/2011	9:12:38 AM	Bubbler valve closed
10/25/2011	9:12:38 AM	Bypass valve opened
10/25/2011	9:12:38 AM	Helium MFC set to  0.000000
10/25/2011	9:12:38 AM	H2 MFC set to  0.000000
10/25/2011	9:12:38 AM	BCl3 MFC set to  0.000000
10/25/2011	9:12:38 AM	PHl3 MFC set to  0.000000
10/25/2011	9:12:38 AM	SiCl4 MFC set to  0.000000
10/25/2011	9:12:38 AM	Bypass solenoid MFC set to  0.000000
10/25/2011	9:12:38 AM	Tube furnace set to 0
10/25/2011	9:12:38 AM	Helium valve closed
10/25/2011	9:12:38 AM	H2 valve closed
10/25/2011	9:12:38 AM	BCl3 valve closed
10/25/2011	9:12:38 AM	PH3 valve closed
10/25/2011	9:12:38 AM	SiCl4 pre valve closed
10/25/2011	9:12:38 AM	SiCl4 post valve closed
10/25/2011	9:12:38 AM	Main Vac valve closed
10/25/2011	9:12:38 AM	Bubbler valve closed
10/25/2011	9:12:38 AM	Bypass valve opened
10/25/2011	9:12:38 AM	Helium MFC set to  0.000000
10/25/2011	9:12:38 AM	H2 MFC set to  0.000000
10/25/2011	9:12:38 AM	BCl3 MFC set to  0.000000
10/25/2011	9:12:38 AM	PHl3 MFC set to  0.000000
10/25/2011	9:12:38 AM	SiCl4 MFC set to  0.000000
10/25/2011	9:12:38 AM	Bypass solenoid MFC set to  0.000000
10/25/2011	9:12:38 AM	Tube furnace set to 0
10/25/2011	9:13:08 AM	Helium valve closed
10/25/2011	9:13:08 AM	H2 valve closed
10/25/2011	9:13:08 AM	BCl3 valve closed
10/25/2011	9:13:08 AM	PH3 valve closed
10/25/2011	9:13:08 AM	SiCl4 pre valve closed
10/25/2011	9:13:08 AM	SiCl4 post valve closed
10/25/2011	9:13:08 AM	Bypass valve closed
10/25/2011	9:13:08 AM	Bubbler valve closed
10/25/2011	9:13:08 AM	Main Vac valve opened
10/25/2011	9:13:08 AM	Helium MFC set to  0.000000
10/25/2011	9:13:08 AM	H2 MFC set to  0.000000
10/25/2011	9:13:08 AM	BCl3 MFC set to  0.000000
10/25/2011	9:13:08 AM	PHl3 MFC set to  0.000000
10/25/2011	9:13:08 AM	SiCl4 MFC set to  0.000000
10/25/2011	9:13:08 AM	Bypass solenoid MFC set to  0.000000
10/25/2011	9:13:08 AM	Tube furnace set to 0
10/25/2011	9:13:38 AM	H2 valve closed
10/25/2011	9:13:38 AM	BCl3 valve closed
10/25/2011	9:13:38 AM	PH3 valve closed
10/25/2011	9:13:38 AM	SiCl4 pre valve closed
10/25/2011	9:13:38 AM	SiCl4 post valve closed
10/25/2011	9:13:38 AM	Bypass valve closed
10/25/2011	9:13:38 AM	Bubbler valve closed
10/25/2011	9:13:38 AM	Helium valve opened
10/25/2011	9:13:38 AM	Main Vac valve opened
10/25/2011	9:13:38 AM	Helium MFC set to  20.000000
10/25/2011	9:13:38 AM	H2 MFC set to  0.000000
10/25/2011	9:13:38 AM	BCl3 MFC set to  0.000000
10/25/2011	9:13:38 AM	PHl3 MFC set to  0.000000
10/25/2011	9:13:38 AM	SiCl4 MFC set to  0.000000
10/25/2011	9:13:38 AM	Bypass solenoid MFC set to  0.000000
10/25/2011	9:13:39 AM	Tube furnace set to 0
10/25/2011	9:14:09 AM	Helium valve closed
10/25/2011	9:14:09 AM	H2 valve closed
10/25/2011	9:14:09 AM	BCl3 valve closed
10/25/2011	9:14:09 AM	PH3 valve closed
10/25/2011	9:14:09 AM	SiCl4 pre valve closed
10/25/2011	9:14:09 AM	SiCl4 post valve closed
10/25/2011	9:14:09 AM	Bypass valve closed
10/25/2011	9:14:09 AM	Bubbler valve closed
10/25/2011	9:14:09 AM	Main Vac valve opened
10/25/2011	9:14:09 AM	Helium MFC set to  0.000000
10/25/2011	9:14:09 AM	H2 MFC set to  0.000000
10/25/2011	9:14:09 AM	BCl3 MFC set to  0.000000
10/25/2011	9:14:09 AM	PHl3 MFC set to  0.000000
10/25/2011	9:14:09 AM	SiCl4 MFC set to  0.000000
10/25/2011	9:14:09 AM	Bypass solenoid MFC set to  0.000000
10/25/2011	9:14:09 AM	Tube furnace set to 0
10/25/2011	9:14:39 AM	H2 valve closed
10/25/2011	9:14:39 AM	BCl3 valve closed
10/25/2011	9:14:39 AM	PH3 valve closed
10/25/2011	9:14:39 AM	SiCl4 pre valve closed
10/25/2011	9:14:39 AM	SiCl4 post valve closed
10/25/2011	9:14:39 AM	Bypass valve closed
10/25/2011	9:14:39 AM	Bubbler valve closed
10/25/2011	9:14:39 AM	Helium valve opened
10/25/2011	9:14:39 AM	Main Vac valve opened
10/25/2011	9:14:39 AM	Helium MFC set to  20.000000
10/25/2011	9:14:39 AM	H2 MFC set to  0.000000
10/25/2011	9:14:39 AM	BCl3 MFC set to  0.000000
10/25/2011	9:14:39 AM	PHl3 MFC set to  0.000000
10/25/2011	9:14:39 AM	SiCl4 MFC set to  0.000000
10/25/2011	9:14:39 AM	Bypass solenoid MFC set to  0.000000
10/25/2011	9:14:39 AM	Tube furnace set to 0
10/25/2011	9:15:09 AM	Helium valve closed
10/25/2011	9:15:09 AM	H2 valve closed
10/25/2011	9:15:09 AM	BCl3 valve closed
10/25/2011	9:15:09 AM	PH3 valve closed
10/25/2011	9:15:09 AM	SiCl4 pre valve closed
10/25/2011	9:15:09 AM	SiCl4 post valve closed
10/25/2011	9:15:09 AM	Bypass valve closed
10/25/2011	9:15:09 AM	Bubbler valve closed
10/25/2011	9:15:09 AM	Main Vac valve opened
10/25/2011	9:15:09 AM	Helium MFC set to  0.000000
10/25/2011	9:15:09 AM	H2 MFC set to  0.000000
10/25/2011	9:15:09 AM	BCl3 MFC set to  0.000000
10/25/2011	9:15:09 AM	PHl3 MFC set to  0.000000
10/25/2011	9:15:09 AM	SiCl4 MFC set to  0.000000
10/25/2011	9:15:09 AM	Bypass solenoid MFC set to  0.000000
10/25/2011	9:15:09 AM	Tube furnace set to 0
10/25/2011	9:15:39 AM	H2 valve closed
10/25/2011	9:15:39 AM	BCl3 valve closed
10/25/2011	9:15:39 AM	PH3 valve closed
10/25/2011	9:15:39 AM	SiCl4 pre valve closed
10/25/2011	9:15:39 AM	SiCl4 post valve closed
10/25/2011	9:15:39 AM	Bypass valve closed
10/25/2011	9:15:39 AM	Bubbler valve closed
10/25/2011	9:15:39 AM	Helium valve opened
10/25/2011	9:15:39 AM	Main Vac valve opened
10/25/2011	9:15:39 AM	Helium MFC set to  20.000000
10/25/2011	9:15:39 AM	H2 MFC set to  0.000000
10/25/2011	9:15:39 AM	BCl3 MFC set to  0.000000
10/25/2011	9:15:39 AM	PHl3 MFC set to  0.000000
10/25/2011	9:15:39 AM	SiCl4 MFC set to  0.000000
10/25/2011	9:15:39 AM	Bypass solenoid MFC set to  0.000000
10/25/2011	9:15:39 AM	Tube furnace set to 0
10/25/2011	9:16:09 AM	Helium valve closed
10/25/2011	9:16:09 AM	H2 valve closed
10/25/2011	9:16:09 AM	BCl3 valve closed
10/25/2011	9:16:09 AM	PH3 valve closed
10/25/2011	9:16:09 AM	SiCl4 pre valve closed
10/25/2011	9:16:09 AM	SiCl4 post valve closed
10/25/2011	9:16:09 AM	Bypass valve closed
10/25/2011	9:16:09 AM	Bubbler valve closed
10/25/2011	9:16:09 AM	Main Vac valve opened
10/25/2011	9:16:09 AM	Helium MFC set to  0.000000
10/25/2011	9:16:09 AM	H2 MFC set to  0.000000
10/25/2011	9:16:09 AM	BCl3 MFC set to  0.000000
10/25/2011	9:16:09 AM	PHl3 MFC set to  0.000000
10/25/2011	9:16:09 AM	SiCl4 MFC set to  0.000000
10/25/2011	9:16:09 AM	Bypass solenoid MFC set to  0.000000
10/25/2011	9:16:10 AM	Tube furnace set to 0
10/25/2011	9:16:40 AM	H2 valve closed
10/25/2011	9:16:40 AM	BCl3 valve closed
10/25/2011	9:16:40 AM	PH3 valve closed
10/25/2011	9:16:40 AM	SiCl4 pre valve closed
10/25/2011	9:16:40 AM	SiCl4 post valve closed
10/25/2011	9:16:40 AM	Bypass valve closed
10/25/2011	9:16:40 AM	Bubbler valve closed
10/25/2011	9:16:40 AM	Helium valve opened
10/25/2011	9:16:40 AM	Main Vac valve opened
10/25/2011	9:16:40 AM	Helium MFC set to  20.000000
10/25/2011	9:16:40 AM	H2 MFC set to  0.000000
10/25/2011	9:16:40 AM	BCl3 MFC set to  0.000000
10/25/2011	9:16:40 AM	PHl3 MFC set to  0.000000
10/25/2011	9:16:40 AM	SiCl4 MFC set to  0.000000
10/25/2011	9:16:40 AM	Bypass solenoid MFC set to  0.000000
10/25/2011	9:16:40 AM	Tube furnace set to 0
10/25/2011	9:17:10 AM	Helium valve closed
10/25/2011	9:17:10 AM	H2 valve closed
10/25/2011	9:17:10 AM	BCl3 valve closed
10/25/2011	9:17:10 AM	PH3 valve closed
10/25/2011	9:17:10 AM	SiCl4 pre valve closed
10/25/2011	9:17:10 AM	SiCl4 post valve closed
10/25/2011	9:17:10 AM	Bypass valve closed
10/25/2011	9:17:10 AM	Bubbler valve closed
10/25/2011	9:17:10 AM	Main Vac valve opened
10/25/2011	9:17:10 AM	Helium MFC set to  0.000000
10/25/2011	9:17:10 AM	H2 MFC set to  0.000000
10/25/2011	9:17:10 AM	BCl3 MFC set to  0.000000
10/25/2011	9:17:10 AM	PHl3 MFC set to  0.000000
10/25/2011	9:17:10 AM	SiCl4 MFC set to  0.000000
10/25/2011	9:17:10 AM	Bypass solenoid MFC set to  0.000000
10/25/2011	9:17:10 AM	Tube furnace set to 0
10/25/2011	9:17:40 AM	H2 valve closed
10/25/2011	9:17:40 AM	BCl3 valve closed
10/25/2011	9:17:40 AM	PH3 valve closed
10/25/2011	9:17:40 AM	SiCl4 pre valve closed
10/25/2011	9:17:40 AM	SiCl4 post valve closed
10/25/2011	9:17:40 AM	Bypass valve closed
10/25/2011	9:17:40 AM	Bubbler valve closed
10/25/2011	9:17:40 AM	Helium valve opened
10/25/2011	9:17:40 AM	Main Vac valve opened
10/25/2011	9:17:40 AM	Helium MFC set to  20.000000
10/25/2011	9:17:40 AM	H2 MFC set to  0.000000
10/25/2011	9:17:40 AM	BCl3 MFC set to  0.000000
10/25/2011	9:17:40 AM	PHl3 MFC set to  0.000000
10/25/2011	9:17:40 AM	SiCl4 MFC set to  0.000000
10/25/2011	9:17:40 AM	Bypass solenoid MFC set to  0.000000
10/25/2011	9:17:40 AM	Tube furnace set to 0
10/25/2011	9:18:10 AM	Helium valve closed
10/25/2011	9:18:10 AM	H2 valve closed
10/25/2011	9:18:10 AM	BCl3 valve closed
10/25/2011	9:18:10 AM	PH3 valve closed
10/25/2011	9:18:10 AM	SiCl4 pre valve closed
10/25/2011	9:18:10 AM	SiCl4 post valve closed
10/25/2011	9:18:10 AM	Bypass valve closed
10/25/2011	9:18:10 AM	Bubbler valve closed
10/25/2011	9:18:10 AM	Main Vac valve opened
10/25/2011	9:18:10 AM	Helium MFC set to  0.000000
10/25/2011	9:18:10 AM	H2 MFC set to  0.000000
10/25/2011	9:18:10 AM	BCl3 MFC set to  0.000000
10/25/2011	9:18:10 AM	PHl3 MFC set to  0.000000
10/25/2011	9:18:10 AM	SiCl4 MFC set to  0.000000
10/25/2011	9:18:10 AM	Bypass solenoid MFC set to  0.000000
10/25/2011	9:18:10 AM	Tube furnace set to 0
10/25/2011	9:18:40 AM	H2 valve closed
10/25/2011	9:18:40 AM	BCl3 valve closed
10/25/2011	9:18:40 AM	PH3 valve closed
10/25/2011	9:18:40 AM	SiCl4 pre valve closed
10/25/2011	9:18:40 AM	SiCl4 post valve closed
10/25/2011	9:18:40 AM	Bypass valve closed
10/25/2011	9:18:40 AM	Bubbler valve closed
10/25/2011	9:18:40 AM	Helium valve opened
10/25/2011	9:18:40 AM	Main Vac valve opened
10/25/2011	9:18:40 AM	Helium MFC set to  20.000000
10/25/2011	9:18:40 AM	H2 MFC set to  0.000000
10/25/2011	9:18:40 AM	BCl3 MFC set to  0.000000
10/25/2011	9:18:40 AM	PHl3 MFC set to  0.000000
10/25/2011	9:18:40 AM	SiCl4 MFC set to  0.000000
10/25/2011	9:18:40 AM	Bypass solenoid MFC set to  0.000000
10/25/2011	9:18:41 AM	Tube furnace set to 0
10/25/2011	9:19:11 AM	Helium valve closed
10/25/2011	9:19:11 AM	H2 valve closed
10/25/2011	9:19:11 AM	BCl3 valve closed
10/25/2011	9:19:11 AM	PH3 valve closed
10/25/2011	9:19:11 AM	SiCl4 pre valve closed
10/25/2011	9:19:11 AM	SiCl4 post valve closed
10/25/2011	9:19:11 AM	Bypass valve closed
10/25/2011	9:19:11 AM	Bubbler valve closed
10/25/2011	9:19:11 AM	Main Vac valve opened
10/25/2011	9:19:11 AM	Helium MFC set to  0.000000
10/25/2011	9:19:11 AM	H2 MFC set to  0.000000
10/25/2011	9:19:11 AM	BCl3 MFC set to  0.000000
10/25/2011	9:19:11 AM	PHl3 MFC set to  0.000000
10/25/2011	9:19:11 AM	SiCl4 MFC set to  0.000000
10/25/2011	9:19:11 AM	Bypass solenoid MFC set to  0.000000
10/25/2011	9:19:11 AM	Tube furnace set to 0
10/25/2011	9:19:41 AM	H2 valve closed
10/25/2011	9:19:41 AM	BCl3 valve closed
10/25/2011	9:19:41 AM	PH3 valve closed
10/25/2011	9:19:41 AM	SiCl4 pre valve closed
10/25/2011	9:19:41 AM	SiCl4 post valve closed
10/25/2011	9:19:41 AM	Bypass valve closed
10/25/2011	9:19:41 AM	Bubbler valve closed
10/25/2011	9:19:41 AM	Helium valve opened
10/25/2011	9:19:41 AM	Main Vac valve opened
10/25/2011	9:19:41 AM	Helium MFC set to  20.000000
10/25/2011	9:19:41 AM	H2 MFC set to  0.000000
10/25/2011	9:19:41 AM	BCl3 MFC set to  0.000000
10/25/2011	9:19:41 AM	PHl3 MFC set to  0.000000
10/25/2011	9:19:41 AM	SiCl4 MFC set to  0.000000
10/25/2011	9:19:41 AM	Bypass solenoid MFC set to  0.000000
10/25/2011	9:19:41 AM	Tube furnace set to 0
10/25/2011	9:20:11 AM	Helium valve closed
10/25/2011	9:20:11 AM	H2 valve closed
10/25/2011	9:20:11 AM	BCl3 valve closed
10/25/2011	9:20:11 AM	PH3 valve closed
10/25/2011	9:20:11 AM	SiCl4 pre valve closed
10/25/2011	9:20:11 AM	SiCl4 post valve closed
10/25/2011	9:20:11 AM	Bypass valve closed
10/25/2011	9:20:11 AM	Bubbler valve closed
10/25/2011	9:20:11 AM	Main Vac valve opened
10/25/2011	9:20:11 AM	Helium MFC set to  0.000000
10/25/2011	9:20:11 AM	H2 MFC set to  0.000000
10/25/2011	9:20:11 AM	BCl3 MFC set to  0.000000
10/25/2011	9:20:11 AM	PHl3 MFC set to  0.000000
10/25/2011	9:20:11 AM	SiCl4 MFC set to  0.000000
10/25/2011	9:20:11 AM	Bypass solenoid MFC set to  0.000000
10/25/2011	9:20:11 AM	Tube furnace set to 0
10/25/2011	9:20:41 AM	H2 valve closed
10/25/2011	9:20:41 AM	BCl3 valve closed
10/25/2011	9:20:41 AM	PH3 valve closed
10/25/2011	9:20:41 AM	SiCl4 pre valve closed
10/25/2011	9:20:41 AM	SiCl4 post valve closed
10/25/2011	9:20:41 AM	Bypass valve closed
10/25/2011	9:20:41 AM	Bubbler valve closed
10/25/2011	9:20:41 AM	Helium valve opened
10/25/2011	9:20:41 AM	Main Vac valve opened
10/25/2011	9:20:41 AM	Helium MFC set to  20.000000
10/25/2011	9:20:41 AM	H2 MFC set to  0.000000
10/25/2011	9:20:41 AM	BCl3 MFC set to  0.000000
10/25/2011	9:20:41 AM	PHl3 MFC set to  0.000000
10/25/2011	9:20:41 AM	SiCl4 MFC set to  0.000000
10/25/2011	9:20:41 AM	Bypass solenoid MFC set to  0.000000
10/25/2011	9:20:41 AM	Tube furnace set to 0
10/25/2011	9:21:11 AM	Helium valve closed
10/25/2011	9:21:11 AM	H2 valve closed
10/25/2011	9:21:12 AM	BCl3 valve closed
10/25/2011	9:21:12 AM	PH3 valve closed
10/25/2011	9:21:12 AM	SiCl4 pre valve closed
10/25/2011	9:21:12 AM	SiCl4 post valve closed
10/25/2011	9:21:12 AM	Bypass valve closed
10/25/2011	9:21:12 AM	Bubbler valve closed
10/25/2011	9:21:12 AM	Main Vac valve opened
10/25/2011	9:21:12 AM	Helium MFC set to  0.000000
10/25/2011	9:21:12 AM	H2 MFC set to  0.000000
10/25/2011	9:21:12 AM	BCl3 MFC set to  0.000000
10/25/2011	9:21:12 AM	PHl3 MFC set to  0.000000
10/25/2011	9:21:12 AM	SiCl4 MFC set to  0.000000
10/25/2011	9:21:12 AM	Bypass solenoid MFC set to  0.000000
10/25/2011	9:21:12 AM	Tube furnace set to 0
10/25/2011	9:21:42 AM	H2 valve closed
10/25/2011	9:21:42 AM	BCl3 valve closed
10/25/2011	9:21:42 AM	PH3 valve closed
10/25/2011	9:21:42 AM	SiCl4 pre valve closed
10/25/2011	9:21:42 AM	SiCl4 post valve closed
10/25/2011	9:21:42 AM	Bypass valve closed
10/25/2011	9:21:42 AM	Bubbler valve closed
10/25/2011	9:21:42 AM	Helium valve opened
10/25/2011	9:21:42 AM	Main Vac valve opened
10/25/2011	9:21:42 AM	Helium MFC set to  20.000000
10/25/2011	9:21:42 AM	H2 MFC set to  0.000000
10/25/2011	9:21:42 AM	BCl3 MFC set to  0.000000
10/25/2011	9:21:42 AM	PHl3 MFC set to  0.000000
10/25/2011	9:21:42 AM	SiCl4 MFC set to  0.000000
10/25/2011	9:21:42 AM	Bypass solenoid MFC set to  0.000000
10/25/2011	9:21:42 AM	Tube furnace set to 0
10/25/2011	9:22:12 AM	Helium valve closed
10/25/2011	9:22:12 AM	H2 valve closed
10/25/2011	9:22:12 AM	BCl3 valve closed
10/25/2011	9:22:12 AM	PH3 valve closed
10/25/2011	9:22:12 AM	SiCl4 pre valve closed
10/25/2011	9:22:12 AM	SiCl4 post valve closed
10/25/2011	9:22:12 AM	Bypass valve closed
10/25/2011	9:22:12 AM	Bubbler valve closed
10/25/2011	9:22:12 AM	Main Vac valve opened
10/25/2011	9:22:12 AM	Helium MFC set to  0.000000
10/25/2011	9:22:12 AM	H2 MFC set to  0.000000
10/25/2011	9:22:12 AM	BCl3 MFC set to  0.000000
10/25/2011	9:22:12 AM	PHl3 MFC set to  0.000000
10/25/2011	9:22:12 AM	SiCl4 MFC set to  0.000000
10/25/2011	9:22:12 AM	Bypass solenoid MFC set to  0.000000
10/25/2011	9:22:12 AM	Tube furnace set to 0
10/25/2011	9:22:42 AM	H2 valve closed
10/25/2011	9:22:42 AM	BCl3 valve closed
10/25/2011	9:22:42 AM	PH3 valve closed
10/25/2011	9:22:42 AM	SiCl4 pre valve closed
10/25/2011	9:22:42 AM	SiCl4 post valve closed
10/25/2011	9:22:42 AM	Bypass valve closed
10/25/2011	9:22:42 AM	Bubbler valve closed
10/25/2011	9:22:42 AM	Helium valve opened
10/25/2011	9:22:42 AM	Main Vac valve opened
10/25/2011	9:22:42 AM	Helium MFC set to  20.000000
10/25/2011	9:22:42 AM	H2 MFC set to  0.000000
10/25/2011	9:22:42 AM	BCl3 MFC set to  0.000000
10/25/2011	9:22:42 AM	PHl3 MFC set to  0.000000
10/25/2011	9:22:42 AM	SiCl4 MFC set to  0.000000
10/25/2011	9:22:42 AM	Bypass solenoid MFC set to  0.000000
10/25/2011	9:22:42 AM	Tube furnace set to 0
10/25/2011	9:23:12 AM	Helium valve closed
10/25/2011	9:23:12 AM	H2 valve closed
10/25/2011	9:23:12 AM	BCl3 valve closed
10/25/2011	9:23:12 AM	PH3 valve closed
10/25/2011	9:23:12 AM	SiCl4 pre valve closed
10/25/2011	9:23:12 AM	SiCl4 post valve closed
10/25/2011	9:23:12 AM	Bypass valve closed
10/25/2011	9:23:12 AM	Bubbler valve closed
10/25/2011	9:23:12 AM	Main Vac valve opened
10/25/2011	9:23:12 AM	Helium MFC set to  0.000000
10/25/2011	9:23:12 AM	H2 MFC set to  0.000000
10/25/2011	9:23:12 AM	BCl3 MFC set to  0.000000
10/25/2011	9:23:12 AM	PHl3 MFC set to  0.000000
10/25/2011	9:23:12 AM	SiCl4 MFC set to  0.000000
10/25/2011	9:23:12 AM	Bypass solenoid MFC set to  0.000000
10/25/2011	9:23:13 AM	Tube furnace set to 0
10/25/2011	9:23:14 AM	Run finished at 9:23 AM
10/25/2011	9:23:14 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
10/25/2011	9:45:37 AM	Recipe started at 9:45 AM
10/25/2011	9:45:37 AM	Helium valve closed
10/25/2011	9:45:37 AM	H2 valve closed
10/25/2011	9:45:37 AM	BCl3 valve closed
10/25/2011	9:45:37 AM	PH3 valve closed
10/25/2011	9:45:37 AM	SiCl4 pre valve closed
10/25/2011	9:45:37 AM	SiCl4 post valve closed
10/25/2011	9:45:37 AM	Main Vac valve closed
10/25/2011	9:45:37 AM	Bypass valve closed
10/25/2011	9:45:37 AM	Bubbler valve closed
10/25/2011	9:45:37 AM	Helium MFC set to  0.000000
10/25/2011	9:45:37 AM	H2 MFC set to  0.000000
10/25/2011	9:45:37 AM	BCl3 MFC set to  0.000000
10/25/2011	9:45:37 AM	PHl3 MFC set to  0.000000
10/25/2011	9:45:37 AM	SiCl4 MFC set to  0.000000
10/25/2011	9:45:37 AM	Bypass solenoid MFC set to  0.000000
10/25/2011	9:45:37 AM	Tube furnace set to 0
10/25/2011	9:45:40 AM	Helium valve closed
10/25/2011	9:45:40 AM	BCl3 valve closed
10/25/2011	9:45:40 AM	PH3 valve closed
10/25/2011	9:45:40 AM	SiCl4 pre valve closed
10/25/2011	9:45:40 AM	SiCl4 post valve closed
10/25/2011	9:45:40 AM	Main Vac valve closed
10/25/2011	9:45:40 AM	Bypass valve closed
10/25/2011	9:45:40 AM	Bubbler valve closed
10/25/2011	9:45:40 AM	H2 valve opened
10/25/2011	9:45:40 AM	Helium MFC set to  0.000000
10/25/2011	9:45:40 AM	H2 MFC set to  500.000000
10/25/2011	9:45:40 AM	BCl3 MFC set to  0.000000
10/25/2011	9:45:40 AM	PHl3 MFC set to  0.000000
10/25/2011	9:45:40 AM	SiCl4 MFC set to  0.000000
10/25/2011	9:45:40 AM	Bypass solenoid MFC set to  0.000000
10/25/2011	9:45:41 AM	Tube furnace set to 0
10/25/2011	9:46:48 AM	Helium valve closed
10/25/2011	9:46:48 AM	BCl3 valve closed
10/25/2011	9:46:48 AM	PH3 valve closed
10/25/2011	9:46:48 AM	SiCl4 pre valve closed
10/25/2011	9:46:48 AM	SiCl4 post valve closed
10/25/2011	9:46:48 AM	Main Vac valve closed
10/25/2011	9:46:48 AM	Bypass valve closed
10/25/2011	9:46:48 AM	H2 valve opened
10/25/2011	9:46:48 AM	Bubbler valve opened
10/25/2011	9:46:48 AM	Helium MFC set to  0.000000
10/25/2011	9:46:48 AM	H2 MFC set to  500.000000
10/25/2011	9:46:48 AM	BCl3 MFC set to  0.000000
10/25/2011	9:46:48 AM	PHl3 MFC set to  0.000000
10/25/2011	9:46:48 AM	SiCl4 MFC set to  0.000000
10/25/2011	9:46:48 AM	Bypass solenoid MFC set to  0.000000
10/25/2011	9:46:48 AM	Tube furnace set to 0
10/25/2011	9:46:49 AM	Helium valve closed
10/25/2011	9:46:49 AM	BCl3 valve closed
10/25/2011	9:46:49 AM	PH3 valve closed
10/25/2011	9:46:49 AM	SiCl4 pre valve closed
10/25/2011	9:46:49 AM	SiCl4 post valve closed
10/25/2011	9:46:49 AM	Main Vac valve closed
10/25/2011	9:46:49 AM	Bypass valve closed
10/25/2011	9:46:49 AM	H2 valve opened
10/25/2011	9:46:49 AM	Bubbler valve opened
10/25/2011	9:46:49 AM	Helium MFC set to  0.000000
10/25/2011	9:46:49 AM	H2 MFC set to  500.000000
10/25/2011	9:46:49 AM	BCl3 MFC set to  0.000000
10/25/2011	9:46:49 AM	PHl3 MFC set to  0.000000
10/25/2011	9:46:49 AM	SiCl4 MFC set to  0.000000
10/25/2011	9:46:49 AM	Bypass solenoid MFC set to  0.000000
10/25/2011	9:46:50 AM	Tube furnace set to 1010
10/25/2011	10:06:49 AM	Helium valve closed
10/25/2011	10:06:49 AM	BCl3 valve closed
10/25/2011	10:06:49 AM	PH3 valve closed
10/25/2011	10:06:49 AM	Main Vac valve closed
10/25/2011	10:06:49 AM	Bypass valve closed
10/25/2011	10:06:49 AM	H2 valve opened
10/25/2011	10:06:50 AM	SiCl4 pre valve opened
10/25/2011	10:06:50 AM	SiCl4 post valve opened
10/25/2011	10:06:50 AM	Bubbler valve opened
10/25/2011	10:06:50 AM	Helium MFC set to  0.000000
10/25/2011	10:06:50 AM	H2 MFC set to  500.000000
10/25/2011	10:06:50 AM	BCl3 MFC set to  0.000000
10/25/2011	10:06:50 AM	PHl3 MFC set to  0.000000
10/25/2011	10:06:50 AM	SiCl4 MFC set to  42.000000
10/25/2011	10:06:50 AM	Bypass solenoid MFC set to  0.000000
10/25/2011	10:06:50 AM	Tube furnace set to 1010
10/25/2011	10:16:50 AM	H2 valve closed
10/25/2011	10:16:50 AM	BCl3 valve closed
10/25/2011	10:16:50 AM	PH3 valve closed
10/25/2011	10:16:50 AM	SiCl4 pre valve closed
10/25/2011	10:16:50 AM	SiCl4 post valve closed
10/25/2011	10:16:50 AM	Main Vac valve closed
10/25/2011	10:16:50 AM	Bypass valve closed
10/25/2011	10:16:50 AM	Helium valve opened
10/25/2011	10:16:50 AM	Bubbler valve opened
10/25/2011	10:16:50 AM	Helium MFC set to  500.000000
10/25/2011	10:16:50 AM	H2 MFC set to  0.000000
10/25/2011	10:16:50 AM	BCl3 MFC set to  0.000000
10/25/2011	10:16:50 AM	PHl3 MFC set to  0.000000
10/25/2011	10:16:50 AM	SiCl4 MFC set to  0.000000
10/25/2011	10:16:50 AM	Bypass solenoid MFC set to  0.000000
10/25/2011	10:16:50 AM	Tube furnace set to 0
10/25/2011	10:44:33 AM	Helium valve closed
10/25/2011	10:44:33 AM	H2 valve closed
10/25/2011	10:44:33 AM	BCl3 valve closed
10/25/2011	10:44:33 AM	PH3 valve closed
10/25/2011	10:44:33 AM	SiCl4 pre valve closed
10/25/2011	10:44:33 AM	SiCl4 post valve closed
10/25/2011	10:44:33 AM	Main Vac valve closed
10/25/2011	10:44:33 AM	Bubbler valve closed
10/25/2011	10:44:33 AM	Bypass valve closed
10/25/2011	10:44:33 AM	Helium MFC set to  0.000000
10/25/2011	10:44:33 AM	H2 MFC set to  0.000000
10/25/2011	10:44:33 AM	BCl3 MFC set to  0.000000
10/25/2011	10:44:33 AM	PHl3 MFC set to  0.000000
10/25/2011	10:44:33 AM	SiCl4 MFC set to  0.000000
10/25/2011	10:44:33 AM	Bypass solenoid MFC set to  760.000000
10/25/2011	10:44:33 AM	Tube furnace set to 0
10/25/2011	10:44:33 AM	Baratron reads 743.359977 Torr and NaOH valve is open.  Emergency exit.
10/25/2011	10:53:07 AM	Run aborted at 10:53 AM
10/25/2011	10:53:09 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/25/2011	10:53:10 AM	Recipe started at 10:53 AM
10/25/2011	10:53:10 AM	Helium valve closed
10/25/2011	10:53:10 AM	H2 valve closed
10/25/2011	10:53:10 AM	BCl3 valve closed
10/25/2011	10:53:10 AM	PH3 valve closed
10/25/2011	10:53:10 AM	SiCl4 pre valve closed
10/25/2011	10:53:10 AM	SiCl4 post valve closed
10/25/2011	10:53:10 AM	Main Vac valve closed
10/25/2011	10:53:10 AM	Bubbler valve closed
10/25/2011	10:53:10 AM	Bypass valve opened
10/25/2011	10:53:10 AM	Helium MFC set to  0.000000
10/25/2011	10:53:10 AM	H2 MFC set to  0.000000
10/25/2011	10:53:10 AM	BCl3 MFC set to  0.000000
10/25/2011	10:53:10 AM	PHl3 MFC set to  0.000000
10/25/2011	10:53:10 AM	SiCl4 MFC set to  0.000000
10/25/2011	10:53:10 AM	Bypass solenoid MFC set to  0.000000
10/25/2011	10:53:10 AM	Tube furnace set to 0
10/25/2011	10:54:30 AM	Helium valve closed
10/25/2011	10:54:30 AM	H2 valve closed
10/25/2011	10:54:30 AM	BCl3 valve closed
10/25/2011	10:54:30 AM	PH3 valve closed
10/25/2011	10:54:30 AM	SiCl4 pre valve closed
10/25/2011	10:54:30 AM	SiCl4 post valve closed
10/25/2011	10:54:30 AM	Main Vac valve closed
10/25/2011	10:54:30 AM	Bubbler valve closed
10/25/2011	10:54:30 AM	Bypass valve opened
10/25/2011	10:54:30 AM	Helium MFC set to  0.000000
10/25/2011	10:54:30 AM	H2 MFC set to  0.000000
10/25/2011	10:54:30 AM	BCl3 MFC set to  0.000000
10/25/2011	10:54:30 AM	PHl3 MFC set to  0.000000
10/25/2011	10:54:30 AM	SiCl4 MFC set to  0.000000
10/25/2011	10:54:30 AM	Bypass solenoid MFC set to  0.000000
10/25/2011	10:54:30 AM	Tube furnace set to 0
10/25/2011	10:55:30 AM	Helium valve closed
10/25/2011	10:55:30 AM	H2 valve closed
10/25/2011	10:55:30 AM	BCl3 valve closed
10/25/2011	10:55:30 AM	PH3 valve closed
10/25/2011	10:55:30 AM	SiCl4 pre valve closed
10/25/2011	10:55:30 AM	SiCl4 post valve closed
10/25/2011	10:55:30 AM	Bypass valve closed
10/25/2011	10:55:30 AM	Bubbler valve closed
10/25/2011	10:55:30 AM	Main Vac valve opened
10/25/2011	10:55:30 AM	Helium MFC set to  0.000000
10/25/2011	10:55:30 AM	H2 MFC set to  0.000000
10/25/2011	10:55:30 AM	BCl3 MFC set to  0.000000
10/25/2011	10:55:30 AM	PHl3 MFC set to  0.000000
10/25/2011	10:55:30 AM	SiCl4 MFC set to  0.000000
10/25/2011	10:55:30 AM	Bypass solenoid MFC set to  0.000000
10/25/2011	10:55:30 AM	Tube furnace set to 0
10/25/2011	10:55:31 AM	Run finished at 10:55 AM
10/25/2011	10:55:31 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/25/2011	11:20:33 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
10/25/2011	11:20:47 AM	Recipe started at 11:20 AM
10/25/2011	11:20:47 AM	Helium valve closed
10/25/2011	11:20:47 AM	H2 valve closed
10/25/2011	11:20:47 AM	BCl3 valve closed
10/25/2011	11:20:47 AM	PH3 valve closed
10/25/2011	11:20:47 AM	SiCl4 pre valve closed
10/25/2011	11:20:47 AM	SiCl4 post valve closed
10/25/2011	11:20:47 AM	Main Vac valve closed
10/25/2011	11:20:47 AM	Bubbler valve closed
10/25/2011	11:20:47 AM	Bypass valve opened
10/25/2011	11:20:47 AM	Helium MFC set to  0.000000
10/25/2011	11:20:47 AM	H2 MFC set to  0.000000
10/25/2011	11:20:47 AM	BCl3 MFC set to  0.000000
10/25/2011	11:20:47 AM	PHl3 MFC set to  0.000000
10/25/2011	11:20:47 AM	SiCl4 MFC set to  0.000000
10/25/2011	11:20:47 AM	Bypass solenoid MFC set to  0.000000
10/25/2011	11:20:47 AM	Tube furnace set to 0
10/25/2011	11:20:47 AM	Helium valve closed
10/25/2011	11:20:47 AM	H2 valve closed
10/25/2011	11:20:47 AM	BCl3 valve closed
10/25/2011	11:20:47 AM	PH3 valve closed
10/25/2011	11:20:47 AM	SiCl4 pre valve closed
10/25/2011	11:20:47 AM	SiCl4 post valve closed
10/25/2011	11:20:47 AM	Main Vac valve closed
10/25/2011	11:20:47 AM	Bubbler valve closed
10/25/2011	11:20:47 AM	Bypass valve opened
10/25/2011	11:20:47 AM	Helium MFC set to  0.000000
10/25/2011	11:20:47 AM	H2 MFC set to  0.000000
10/25/2011	11:20:47 AM	BCl3 MFC set to  0.000000
10/25/2011	11:20:47 AM	PHl3 MFC set to  0.000000
10/25/2011	11:20:47 AM	SiCl4 MFC set to  0.000000
10/25/2011	11:20:47 AM	Bypass solenoid MFC set to  0.000000
10/25/2011	11:20:47 AM	Tube furnace set to 0
10/25/2011	11:21:17 AM	Helium valve closed
10/25/2011	11:21:17 AM	H2 valve closed
10/25/2011	11:21:17 AM	BCl3 valve closed
10/25/2011	11:21:17 AM	PH3 valve closed
10/25/2011	11:21:17 AM	SiCl4 pre valve closed
10/25/2011	11:21:17 AM	SiCl4 post valve closed
10/25/2011	11:21:17 AM	Bypass valve closed
10/25/2011	11:21:17 AM	Bubbler valve closed
10/25/2011	11:21:17 AM	Main Vac valve opened
10/25/2011	11:21:17 AM	Helium MFC set to  0.000000
10/25/2011	11:21:17 AM	H2 MFC set to  0.000000
10/25/2011	11:21:17 AM	BCl3 MFC set to  0.000000
10/25/2011	11:21:17 AM	PHl3 MFC set to  0.000000
10/25/2011	11:21:17 AM	SiCl4 MFC set to  0.000000
10/25/2011	11:21:17 AM	Bypass solenoid MFC set to  0.000000
10/25/2011	11:21:18 AM	Tube furnace set to 0
10/25/2011	11:21:48 AM	H2 valve closed
10/25/2011	11:21:48 AM	BCl3 valve closed
10/25/2011	11:21:48 AM	PH3 valve closed
10/25/2011	11:21:48 AM	SiCl4 pre valve closed
10/25/2011	11:21:48 AM	SiCl4 post valve closed
10/25/2011	11:21:48 AM	Bypass valve closed
10/25/2011	11:21:48 AM	Bubbler valve closed
10/25/2011	11:21:48 AM	Helium valve opened
10/25/2011	11:21:48 AM	Main Vac valve opened
10/25/2011	11:21:48 AM	Helium MFC set to  20.000000
10/25/2011	11:21:48 AM	H2 MFC set to  0.000000
10/25/2011	11:21:48 AM	BCl3 MFC set to  0.000000
10/25/2011	11:21:48 AM	PHl3 MFC set to  0.000000
10/25/2011	11:21:48 AM	SiCl4 MFC set to  0.000000
10/25/2011	11:21:48 AM	Bypass solenoid MFC set to  0.000000
10/25/2011	11:21:48 AM	Tube furnace set to 0
10/25/2011	11:22:18 AM	Helium valve closed
10/25/2011	11:22:18 AM	H2 valve closed
10/25/2011	11:22:18 AM	BCl3 valve closed
10/25/2011	11:22:18 AM	PH3 valve closed
10/25/2011	11:22:18 AM	SiCl4 pre valve closed
10/25/2011	11:22:18 AM	SiCl4 post valve closed
10/25/2011	11:22:18 AM	Bypass valve closed
10/25/2011	11:22:18 AM	Bubbler valve closed
10/25/2011	11:22:18 AM	Main Vac valve opened
10/25/2011	11:22:18 AM	Helium MFC set to  0.000000
10/25/2011	11:22:18 AM	H2 MFC set to  0.000000
10/25/2011	11:22:18 AM	BCl3 MFC set to  0.000000
10/25/2011	11:22:18 AM	PHl3 MFC set to  0.000000
10/25/2011	11:22:18 AM	SiCl4 MFC set to  0.000000
10/25/2011	11:22:18 AM	Bypass solenoid MFC set to  0.000000
10/25/2011	11:22:18 AM	Tube furnace set to 0
10/25/2011	11:22:48 AM	H2 valve closed
10/25/2011	11:22:48 AM	BCl3 valve closed
10/25/2011	11:22:48 AM	PH3 valve closed
10/25/2011	11:22:48 AM	SiCl4 pre valve closed
10/25/2011	11:22:48 AM	SiCl4 post valve closed
10/25/2011	11:22:48 AM	Bypass valve closed
10/25/2011	11:22:48 AM	Bubbler valve closed
10/25/2011	11:22:48 AM	Helium valve opened
10/25/2011	11:22:48 AM	Main Vac valve opened
10/25/2011	11:22:48 AM	Helium MFC set to  20.000000
10/25/2011	11:22:48 AM	H2 MFC set to  0.000000
10/25/2011	11:22:48 AM	BCl3 MFC set to  0.000000
10/25/2011	11:22:48 AM	PHl3 MFC set to  0.000000
10/25/2011	11:22:48 AM	SiCl4 MFC set to  0.000000
10/25/2011	11:22:48 AM	Bypass solenoid MFC set to  0.000000
10/25/2011	11:22:48 AM	Tube furnace set to 0
10/25/2011	11:23:18 AM	Helium valve closed
10/25/2011	11:23:18 AM	H2 valve closed
10/25/2011	11:23:18 AM	BCl3 valve closed
10/25/2011	11:23:18 AM	PH3 valve closed
10/25/2011	11:23:18 AM	SiCl4 pre valve closed
10/25/2011	11:23:18 AM	SiCl4 post valve closed
10/25/2011	11:23:18 AM	Bypass valve closed
10/25/2011	11:23:18 AM	Bubbler valve closed
10/25/2011	11:23:18 AM	Main Vac valve opened
10/25/2011	11:23:18 AM	Helium MFC set to  0.000000
10/25/2011	11:23:18 AM	H2 MFC set to  0.000000
10/25/2011	11:23:18 AM	BCl3 MFC set to  0.000000
10/25/2011	11:23:18 AM	PHl3 MFC set to  0.000000
10/25/2011	11:23:18 AM	SiCl4 MFC set to  0.000000
10/25/2011	11:23:18 AM	Bypass solenoid MFC set to  0.000000
10/25/2011	11:23:18 AM	Tube furnace set to 0
10/25/2011	11:23:48 AM	H2 valve closed
10/25/2011	11:23:48 AM	BCl3 valve closed
10/25/2011	11:23:48 AM	PH3 valve closed
10/25/2011	11:23:48 AM	SiCl4 pre valve closed
10/25/2011	11:23:48 AM	SiCl4 post valve closed
10/25/2011	11:23:48 AM	Bypass valve closed
10/25/2011	11:23:48 AM	Bubbler valve closed
10/25/2011	11:23:48 AM	Helium valve opened
10/25/2011	11:23:48 AM	Main Vac valve opened
10/25/2011	11:23:48 AM	Helium MFC set to  20.000000
10/25/2011	11:23:48 AM	H2 MFC set to  0.000000
10/25/2011	11:23:48 AM	BCl3 MFC set to  0.000000
10/25/2011	11:23:48 AM	PHl3 MFC set to  0.000000
10/25/2011	11:23:48 AM	SiCl4 MFC set to  0.000000
10/25/2011	11:23:48 AM	Bypass solenoid MFC set to  0.000000
10/25/2011	11:23:49 AM	Tube furnace set to 0
10/25/2011	11:24:19 AM	Helium valve closed
10/25/2011	11:24:19 AM	H2 valve closed
10/25/2011	11:24:19 AM	BCl3 valve closed
10/25/2011	11:24:19 AM	PH3 valve closed
10/25/2011	11:24:19 AM	SiCl4 pre valve closed
10/25/2011	11:24:19 AM	SiCl4 post valve closed
10/25/2011	11:24:19 AM	Bypass valve closed
10/25/2011	11:24:19 AM	Bubbler valve closed
10/25/2011	11:24:19 AM	Main Vac valve opened
10/25/2011	11:24:19 AM	Helium MFC set to  0.000000
10/25/2011	11:24:19 AM	H2 MFC set to  0.000000
10/25/2011	11:24:19 AM	BCl3 MFC set to  0.000000
10/25/2011	11:24:19 AM	PHl3 MFC set to  0.000000
10/25/2011	11:24:19 AM	SiCl4 MFC set to  0.000000
10/25/2011	11:24:19 AM	Bypass solenoid MFC set to  0.000000
10/25/2011	11:24:19 AM	Tube furnace set to 0
10/25/2011	11:24:49 AM	H2 valve closed
10/25/2011	11:24:49 AM	BCl3 valve closed
10/25/2011	11:24:49 AM	PH3 valve closed
10/25/2011	11:24:49 AM	SiCl4 pre valve closed
10/25/2011	11:24:49 AM	SiCl4 post valve closed
10/25/2011	11:24:49 AM	Bypass valve closed
10/25/2011	11:24:49 AM	Bubbler valve closed
10/25/2011	11:24:49 AM	Helium valve opened
10/25/2011	11:24:49 AM	Main Vac valve opened
10/25/2011	11:24:49 AM	Helium MFC set to  20.000000
10/25/2011	11:24:49 AM	H2 MFC set to  0.000000
10/25/2011	11:24:49 AM	BCl3 MFC set to  0.000000
10/25/2011	11:24:49 AM	PHl3 MFC set to  0.000000
10/25/2011	11:24:49 AM	SiCl4 MFC set to  0.000000
10/25/2011	11:24:49 AM	Bypass solenoid MFC set to  0.000000
10/25/2011	11:24:49 AM	Tube furnace set to 0
10/25/2011	11:25:19 AM	Helium valve closed
10/25/2011	11:25:19 AM	H2 valve closed
10/25/2011	11:25:19 AM	BCl3 valve closed
10/25/2011	11:25:19 AM	PH3 valve closed
10/25/2011	11:25:19 AM	SiCl4 pre valve closed
10/25/2011	11:25:19 AM	SiCl4 post valve closed
10/25/2011	11:25:19 AM	Bypass valve closed
10/25/2011	11:25:19 AM	Bubbler valve closed
10/25/2011	11:25:19 AM	Main Vac valve opened
10/25/2011	11:25:19 AM	Helium MFC set to  0.000000
10/25/2011	11:25:19 AM	H2 MFC set to  0.000000
10/25/2011	11:25:19 AM	BCl3 MFC set to  0.000000
10/25/2011	11:25:19 AM	PHl3 MFC set to  0.000000
10/25/2011	11:25:19 AM	SiCl4 MFC set to  0.000000
10/25/2011	11:25:19 AM	Bypass solenoid MFC set to  0.000000
10/25/2011	11:25:19 AM	Tube furnace set to 0
10/25/2011	11:25:49 AM	H2 valve closed
10/25/2011	11:25:49 AM	BCl3 valve closed
10/25/2011	11:25:49 AM	PH3 valve closed
10/25/2011	11:25:49 AM	SiCl4 pre valve closed
10/25/2011	11:25:49 AM	SiCl4 post valve closed
10/25/2011	11:25:49 AM	Bypass valve closed
10/25/2011	11:25:49 AM	Bubbler valve closed
10/25/2011	11:25:49 AM	Helium valve opened
10/25/2011	11:25:49 AM	Main Vac valve opened
10/25/2011	11:25:49 AM	Helium MFC set to  20.000000
10/25/2011	11:25:49 AM	H2 MFC set to  0.000000
10/25/2011	11:25:49 AM	BCl3 MFC set to  0.000000
10/25/2011	11:25:49 AM	PHl3 MFC set to  0.000000
10/25/2011	11:25:49 AM	SiCl4 MFC set to  0.000000
10/25/2011	11:25:49 AM	Bypass solenoid MFC set to  0.000000
10/25/2011	11:25:49 AM	Tube furnace set to 0
10/25/2011	11:26:19 AM	Helium valve closed
10/25/2011	11:26:19 AM	H2 valve closed
10/25/2011	11:26:19 AM	BCl3 valve closed
10/25/2011	11:26:19 AM	PH3 valve closed
10/25/2011	11:26:19 AM	SiCl4 pre valve closed
10/25/2011	11:26:19 AM	SiCl4 post valve closed
10/25/2011	11:26:19 AM	Bypass valve closed
10/25/2011	11:26:19 AM	Bubbler valve closed
10/25/2011	11:26:19 AM	Main Vac valve opened
10/25/2011	11:26:19 AM	Helium MFC set to  0.000000
10/25/2011	11:26:19 AM	H2 MFC set to  0.000000
10/25/2011	11:26:19 AM	BCl3 MFC set to  0.000000
10/25/2011	11:26:19 AM	PHl3 MFC set to  0.000000
10/25/2011	11:26:19 AM	SiCl4 MFC set to  0.000000
10/25/2011	11:26:19 AM	Bypass solenoid MFC set to  0.000000
10/25/2011	11:26:20 AM	Tube furnace set to 0
10/25/2011	11:26:50 AM	H2 valve closed
10/25/2011	11:26:50 AM	BCl3 valve closed
10/25/2011	11:26:50 AM	PH3 valve closed
10/25/2011	11:26:50 AM	SiCl4 pre valve closed
10/25/2011	11:26:50 AM	SiCl4 post valve closed
10/25/2011	11:26:50 AM	Bypass valve closed
10/25/2011	11:26:50 AM	Bubbler valve closed
10/25/2011	11:26:50 AM	Helium valve opened
10/25/2011	11:26:50 AM	Main Vac valve opened
10/25/2011	11:26:50 AM	Helium MFC set to  20.000000
10/25/2011	11:26:50 AM	H2 MFC set to  0.000000
10/25/2011	11:26:50 AM	BCl3 MFC set to  0.000000
10/25/2011	11:26:50 AM	PHl3 MFC set to  0.000000
10/25/2011	11:26:50 AM	SiCl4 MFC set to  0.000000
10/25/2011	11:26:50 AM	Bypass solenoid MFC set to  0.000000
10/25/2011	11:26:50 AM	Tube furnace set to 0
10/25/2011	11:27:20 AM	Helium valve closed
10/25/2011	11:27:20 AM	H2 valve closed
10/25/2011	11:27:20 AM	BCl3 valve closed
10/25/2011	11:27:20 AM	PH3 valve closed
10/25/2011	11:27:20 AM	SiCl4 pre valve closed
10/25/2011	11:27:20 AM	SiCl4 post valve closed
10/25/2011	11:27:20 AM	Bypass valve closed
10/25/2011	11:27:20 AM	Bubbler valve closed
10/25/2011	11:27:20 AM	Main Vac valve opened
10/25/2011	11:27:20 AM	Helium MFC set to  0.000000
10/25/2011	11:27:20 AM	H2 MFC set to  0.000000
10/25/2011	11:27:20 AM	BCl3 MFC set to  0.000000
10/25/2011	11:27:20 AM	PHl3 MFC set to  0.000000
10/25/2011	11:27:20 AM	SiCl4 MFC set to  0.000000
10/25/2011	11:27:20 AM	Bypass solenoid MFC set to  0.000000
10/25/2011	11:27:20 AM	Tube furnace set to 0
10/25/2011	11:27:50 AM	H2 valve closed
10/25/2011	11:27:50 AM	BCl3 valve closed
10/25/2011	11:27:50 AM	PH3 valve closed
10/25/2011	11:27:50 AM	SiCl4 pre valve closed
10/25/2011	11:27:50 AM	SiCl4 post valve closed
10/25/2011	11:27:50 AM	Bypass valve closed
10/25/2011	11:27:50 AM	Bubbler valve closed
10/25/2011	11:27:50 AM	Helium valve opened
10/25/2011	11:27:50 AM	Main Vac valve opened
10/25/2011	11:27:50 AM	Helium MFC set to  20.000000
10/25/2011	11:27:50 AM	H2 MFC set to  0.000000
10/25/2011	11:27:50 AM	BCl3 MFC set to  0.000000
10/25/2011	11:27:50 AM	PHl3 MFC set to  0.000000
10/25/2011	11:27:50 AM	SiCl4 MFC set to  0.000000
10/25/2011	11:27:50 AM	Bypass solenoid MFC set to  0.000000
10/25/2011	11:27:50 AM	Tube furnace set to 0
10/25/2011	11:28:20 AM	Helium valve closed
10/25/2011	11:28:20 AM	H2 valve closed
10/25/2011	11:28:20 AM	BCl3 valve closed
10/25/2011	11:28:20 AM	PH3 valve closed
10/25/2011	11:28:20 AM	SiCl4 pre valve closed
10/25/2011	11:28:20 AM	SiCl4 post valve closed
10/25/2011	11:28:20 AM	Bypass valve closed
10/25/2011	11:28:20 AM	Bubbler valve closed
10/25/2011	11:28:20 AM	Main Vac valve opened
10/25/2011	11:28:20 AM	Helium MFC set to  0.000000
10/25/2011	11:28:20 AM	H2 MFC set to  0.000000
10/25/2011	11:28:20 AM	BCl3 MFC set to  0.000000
10/25/2011	11:28:20 AM	PHl3 MFC set to  0.000000
10/25/2011	11:28:20 AM	SiCl4 MFC set to  0.000000
10/25/2011	11:28:20 AM	Bypass solenoid MFC set to  0.000000
10/25/2011	11:28:20 AM	Tube furnace set to 0
10/25/2011	11:28:50 AM	H2 valve closed
10/25/2011	11:28:50 AM	BCl3 valve closed
10/25/2011	11:28:50 AM	PH3 valve closed
10/25/2011	11:28:50 AM	SiCl4 pre valve closed
10/25/2011	11:28:50 AM	SiCl4 post valve closed
10/25/2011	11:28:50 AM	Bypass valve closed
10/25/2011	11:28:50 AM	Bubbler valve closed
10/25/2011	11:28:50 AM	Helium valve opened
10/25/2011	11:28:50 AM	Main Vac valve opened
10/25/2011	11:28:50 AM	Helium MFC set to  20.000000
10/25/2011	11:28:50 AM	H2 MFC set to  0.000000
10/25/2011	11:28:50 AM	BCl3 MFC set to  0.000000
10/25/2011	11:28:50 AM	PHl3 MFC set to  0.000000
10/25/2011	11:28:50 AM	SiCl4 MFC set to  0.000000
10/25/2011	11:28:50 AM	Bypass solenoid MFC set to  0.000000
10/25/2011	11:28:51 AM	Tube furnace set to 0
10/25/2011	11:29:21 AM	Helium valve closed
10/25/2011	11:29:21 AM	H2 valve closed
10/25/2011	11:29:21 AM	BCl3 valve closed
10/25/2011	11:29:21 AM	PH3 valve closed
10/25/2011	11:29:21 AM	SiCl4 pre valve closed
10/25/2011	11:29:21 AM	SiCl4 post valve closed
10/25/2011	11:29:21 AM	Bypass valve closed
10/25/2011	11:29:21 AM	Bubbler valve closed
10/25/2011	11:29:21 AM	Main Vac valve opened
10/25/2011	11:29:21 AM	Helium MFC set to  0.000000
10/25/2011	11:29:21 AM	H2 MFC set to  0.000000
10/25/2011	11:29:21 AM	BCl3 MFC set to  0.000000
10/25/2011	11:29:21 AM	PHl3 MFC set to  0.000000
10/25/2011	11:29:21 AM	SiCl4 MFC set to  0.000000
10/25/2011	11:29:21 AM	Bypass solenoid MFC set to  0.000000
10/25/2011	11:29:21 AM	Tube furnace set to 0
10/25/2011	11:29:51 AM	H2 valve closed
10/25/2011	11:29:51 AM	BCl3 valve closed
10/25/2011	11:29:51 AM	PH3 valve closed
10/25/2011	11:29:51 AM	SiCl4 pre valve closed
10/25/2011	11:29:51 AM	SiCl4 post valve closed
10/25/2011	11:29:51 AM	Bypass valve closed
10/25/2011	11:29:51 AM	Bubbler valve closed
10/25/2011	11:29:51 AM	Helium valve opened
10/25/2011	11:29:51 AM	Main Vac valve opened
10/25/2011	11:29:51 AM	Helium MFC set to  20.000000
10/25/2011	11:29:51 AM	H2 MFC set to  0.000000
10/25/2011	11:29:51 AM	BCl3 MFC set to  0.000000
10/25/2011	11:29:51 AM	PHl3 MFC set to  0.000000
10/25/2011	11:29:51 AM	SiCl4 MFC set to  0.000000
10/25/2011	11:29:51 AM	Bypass solenoid MFC set to  0.000000
10/25/2011	11:29:51 AM	Tube furnace set to 0
10/25/2011	11:30:21 AM	Helium valve closed
10/25/2011	11:30:21 AM	H2 valve closed
10/25/2011	11:30:21 AM	BCl3 valve closed
10/25/2011	11:30:21 AM	PH3 valve closed
10/25/2011	11:30:21 AM	SiCl4 pre valve closed
10/25/2011	11:30:21 AM	SiCl4 post valve closed
10/25/2011	11:30:21 AM	Bypass valve closed
10/25/2011	11:30:21 AM	Bubbler valve closed
10/25/2011	11:30:21 AM	Main Vac valve opened
10/25/2011	11:30:21 AM	Helium MFC set to  0.000000
10/25/2011	11:30:21 AM	H2 MFC set to  0.000000
10/25/2011	11:30:21 AM	BCl3 MFC set to  0.000000
10/25/2011	11:30:21 AM	PHl3 MFC set to  0.000000
10/25/2011	11:30:21 AM	SiCl4 MFC set to  0.000000
10/25/2011	11:30:21 AM	Bypass solenoid MFC set to  0.000000
10/25/2011	11:30:21 AM	Tube furnace set to 0
10/25/2011	11:30:51 AM	H2 valve closed
10/25/2011	11:30:51 AM	BCl3 valve closed
10/25/2011	11:30:51 AM	PH3 valve closed
10/25/2011	11:30:51 AM	SiCl4 pre valve closed
10/25/2011	11:30:51 AM	SiCl4 post valve closed
10/25/2011	11:30:51 AM	Bypass valve closed
10/25/2011	11:30:51 AM	Bubbler valve closed
10/25/2011	11:30:51 AM	Helium valve opened
10/25/2011	11:30:51 AM	Main Vac valve opened
10/25/2011	11:30:51 AM	Helium MFC set to  20.000000
10/25/2011	11:30:51 AM	H2 MFC set to  0.000000
10/25/2011	11:30:51 AM	BCl3 MFC set to  0.000000
10/25/2011	11:30:51 AM	PHl3 MFC set to  0.000000
10/25/2011	11:30:51 AM	SiCl4 MFC set to  0.000000
10/25/2011	11:30:51 AM	Bypass solenoid MFC set to  0.000000
10/25/2011	11:30:52 AM	Tube furnace set to 0
10/25/2011	11:31:22 AM	Helium valve closed
10/25/2011	11:31:22 AM	H2 valve closed
10/25/2011	11:31:22 AM	BCl3 valve closed
10/25/2011	11:31:22 AM	PH3 valve closed
10/25/2011	11:31:22 AM	SiCl4 pre valve closed
10/25/2011	11:31:22 AM	SiCl4 post valve closed
10/25/2011	11:31:22 AM	Bypass valve closed
10/25/2011	11:31:22 AM	Bubbler valve closed
10/25/2011	11:31:22 AM	Main Vac valve opened
10/25/2011	11:31:22 AM	Helium MFC set to  0.000000
10/25/2011	11:31:22 AM	H2 MFC set to  0.000000
10/25/2011	11:31:22 AM	BCl3 MFC set to  0.000000
10/25/2011	11:31:22 AM	PHl3 MFC set to  0.000000
10/25/2011	11:31:22 AM	SiCl4 MFC set to  0.000000
10/25/2011	11:31:22 AM	Bypass solenoid MFC set to  0.000000
10/25/2011	11:31:22 AM	Tube furnace set to 0
10/25/2011	11:31:23 AM	Run finished at 11:31 AM
10/25/2011	11:31:23 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
10/25/2011	11:34:46 AM	Recipe started at 11:34 AM
10/25/2011	11:34:46 AM	Helium valve closed
10/25/2011	11:34:46 AM	H2 valve closed
10/25/2011	11:34:46 AM	BCl3 valve closed
10/25/2011	11:34:46 AM	PH3 valve closed
10/25/2011	11:34:46 AM	SiCl4 pre valve closed
10/25/2011	11:34:46 AM	SiCl4 post valve closed
10/25/2011	11:34:46 AM	Main Vac valve closed
10/25/2011	11:34:46 AM	Bypass valve closed
10/25/2011	11:34:46 AM	Bubbler valve closed
10/25/2011	11:34:46 AM	Helium MFC set to  0.000000
10/25/2011	11:34:46 AM	H2 MFC set to  0.000000
10/25/2011	11:34:46 AM	BCl3 MFC set to  0.000000
10/25/2011	11:34:46 AM	PHl3 MFC set to  0.000000
10/25/2011	11:34:46 AM	SiCl4 MFC set to  0.000000
10/25/2011	11:34:46 AM	Bypass solenoid MFC set to  0.000000
10/25/2011	11:34:46 AM	Tube furnace set to 0
10/25/2011	11:34:49 AM	Helium valve closed
10/25/2011	11:34:49 AM	BCl3 valve closed
10/25/2011	11:34:49 AM	PH3 valve closed
10/25/2011	11:34:49 AM	SiCl4 pre valve closed
10/25/2011	11:34:49 AM	SiCl4 post valve closed
10/25/2011	11:34:49 AM	Main Vac valve closed
10/25/2011	11:34:49 AM	Bypass valve closed
10/25/2011	11:34:49 AM	Bubbler valve closed
10/25/2011	11:34:49 AM	H2 valve opened
10/25/2011	11:34:49 AM	Helium MFC set to  0.000000
10/25/2011	11:34:49 AM	H2 MFC set to  500.000000
10/25/2011	11:34:49 AM	BCl3 MFC set to  0.000000
10/25/2011	11:34:49 AM	PHl3 MFC set to  0.000000
10/25/2011	11:34:49 AM	SiCl4 MFC set to  0.000000
10/25/2011	11:34:49 AM	Bypass solenoid MFC set to  0.000000
10/25/2011	11:34:49 AM	Tube furnace set to 0
10/25/2011	11:35:53 AM	Helium valve closed
10/25/2011	11:35:53 AM	BCl3 valve closed
10/25/2011	11:35:53 AM	PH3 valve closed
10/25/2011	11:35:53 AM	SiCl4 pre valve closed
10/25/2011	11:35:53 AM	SiCl4 post valve closed
10/25/2011	11:35:53 AM	Main Vac valve closed
10/25/2011	11:35:53 AM	Bypass valve closed
10/25/2011	11:35:53 AM	H2 valve opened
10/25/2011	11:35:53 AM	Bubbler valve opened
10/25/2011	11:35:53 AM	Helium MFC set to  0.000000
10/25/2011	11:35:53 AM	H2 MFC set to  500.000000
10/25/2011	11:35:53 AM	BCl3 MFC set to  0.000000
10/25/2011	11:35:53 AM	PHl3 MFC set to  0.000000
10/25/2011	11:35:53 AM	SiCl4 MFC set to  0.000000
10/25/2011	11:35:53 AM	Bypass solenoid MFC set to  0.000000
10/25/2011	11:35:53 AM	Tube furnace set to 0
10/25/2011	11:35:55 AM	Helium valve closed
10/25/2011	11:35:55 AM	BCl3 valve closed
10/25/2011	11:35:55 AM	PH3 valve closed
10/25/2011	11:35:55 AM	SiCl4 pre valve closed
10/25/2011	11:35:55 AM	SiCl4 post valve closed
10/25/2011	11:35:55 AM	Main Vac valve closed
10/25/2011	11:35:55 AM	Bypass valve closed
10/25/2011	11:35:55 AM	H2 valve opened
10/25/2011	11:35:55 AM	Bubbler valve opened
10/25/2011	11:35:55 AM	Helium MFC set to  0.000000
10/25/2011	11:35:55 AM	H2 MFC set to  500.000000
10/25/2011	11:35:55 AM	BCl3 MFC set to  0.000000
10/25/2011	11:35:55 AM	PHl3 MFC set to  0.000000
10/25/2011	11:35:55 AM	SiCl4 MFC set to  0.000000
10/25/2011	11:35:55 AM	Bypass solenoid MFC set to  0.000000
10/25/2011	11:35:55 AM	Tube furnace set to 1010
10/25/2011	11:55:55 AM	Helium valve closed
10/25/2011	11:55:55 AM	BCl3 valve closed
10/25/2011	11:55:55 AM	PH3 valve closed
10/25/2011	11:55:55 AM	Main Vac valve closed
10/25/2011	11:55:55 AM	Bypass valve closed
10/25/2011	11:55:55 AM	H2 valve opened
10/25/2011	11:55:55 AM	SiCl4 pre valve opened
10/25/2011	11:55:55 AM	SiCl4 post valve opened
10/25/2011	11:55:55 AM	Bubbler valve opened
10/25/2011	11:55:55 AM	Helium MFC set to  0.000000
10/25/2011	11:55:55 AM	H2 MFC set to  500.000000
10/25/2011	11:55:55 AM	BCl3 MFC set to  0.000000
10/25/2011	11:55:55 AM	PHl3 MFC set to  0.000000
10/25/2011	11:55:55 AM	SiCl4 MFC set to  35.000000
10/25/2011	11:55:55 AM	Bypass solenoid MFC set to  0.000000
10/25/2011	11:55:55 AM	Tube furnace set to 1010
10/25/2011	12:05:55 PM	H2 valve closed
10/25/2011	12:05:55 PM	BCl3 valve closed
10/25/2011	12:05:55 PM	PH3 valve closed
10/25/2011	12:05:55 PM	SiCl4 pre valve closed
10/25/2011	12:05:55 PM	SiCl4 post valve closed
10/25/2011	12:05:55 PM	Main Vac valve closed
10/25/2011	12:05:55 PM	Bypass valve closed
10/25/2011	12:05:55 PM	Helium valve opened
10/25/2011	12:05:55 PM	Bubbler valve opened
10/25/2011	12:05:55 PM	Helium MFC set to  500.000000
10/25/2011	12:05:55 PM	H2 MFC set to  0.000000
10/25/2011	12:05:55 PM	BCl3 MFC set to  0.000000
10/25/2011	12:05:55 PM	PHl3 MFC set to  0.000000
10/25/2011	12:05:55 PM	SiCl4 MFC set to  0.000000
10/25/2011	12:05:55 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	12:05:55 PM	Tube furnace set to 0
10/25/2011	12:31:50 PM	Helium valve closed
10/25/2011	12:31:50 PM	H2 valve closed
10/25/2011	12:31:50 PM	BCl3 valve closed
10/25/2011	12:31:50 PM	PH3 valve closed
10/25/2011	12:31:50 PM	SiCl4 pre valve closed
10/25/2011	12:31:50 PM	SiCl4 post valve closed
10/25/2011	12:31:50 PM	Main Vac valve closed
10/25/2011	12:31:50 PM	Bypass valve closed
10/25/2011	12:31:50 PM	Bubbler valve closed
10/25/2011	12:31:50 PM	Helium MFC set to  0.000000
10/25/2011	12:31:50 PM	H2 MFC set to  0.000000
10/25/2011	12:31:50 PM	BCl3 MFC set to  0.000000
10/25/2011	12:31:50 PM	PHl3 MFC set to  0.000000
10/25/2011	12:31:50 PM	SiCl4 MFC set to  0.000000
10/25/2011	12:31:50 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	12:31:50 PM	Tube furnace set to 0
10/25/2011	12:31:51 PM	Run finished at 12:31 PM
10/25/2011	12:33:22 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/25/2011	12:33:23 PM	Recipe started at 12:33 PM
10/25/2011	12:33:23 PM	Helium valve closed
10/25/2011	12:33:23 PM	H2 valve closed
10/25/2011	12:33:23 PM	BCl3 valve closed
10/25/2011	12:33:23 PM	PH3 valve closed
10/25/2011	12:33:23 PM	SiCl4 pre valve closed
10/25/2011	12:33:23 PM	SiCl4 post valve closed
10/25/2011	12:33:23 PM	Main Vac valve closed
10/25/2011	12:33:23 PM	Bubbler valve closed
10/25/2011	12:33:23 PM	Bypass valve opened
10/25/2011	12:33:23 PM	Helium MFC set to  0.000000
10/25/2011	12:33:23 PM	H2 MFC set to  0.000000
10/25/2011	12:33:23 PM	BCl3 MFC set to  0.000000
10/25/2011	12:33:23 PM	PHl3 MFC set to  0.000000
10/25/2011	12:33:23 PM	SiCl4 MFC set to  0.000000
10/25/2011	12:33:23 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	12:33:23 PM	Tube furnace set to 0
10/25/2011	12:34:26 PM	Helium valve closed
10/25/2011	12:34:26 PM	H2 valve closed
10/25/2011	12:34:26 PM	BCl3 valve closed
10/25/2011	12:34:26 PM	PH3 valve closed
10/25/2011	12:34:26 PM	SiCl4 pre valve closed
10/25/2011	12:34:26 PM	SiCl4 post valve closed
10/25/2011	12:34:26 PM	Main Vac valve closed
10/25/2011	12:34:26 PM	Bubbler valve closed
10/25/2011	12:34:26 PM	Bypass valve opened
10/25/2011	12:34:26 PM	Helium MFC set to  0.000000
10/25/2011	12:34:26 PM	H2 MFC set to  0.000000
10/25/2011	12:34:26 PM	BCl3 MFC set to  0.000000
10/25/2011	12:34:26 PM	PHl3 MFC set to  0.000000
10/25/2011	12:34:26 PM	SiCl4 MFC set to  0.000000
10/25/2011	12:34:26 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	12:34:26 PM	Tube furnace set to 0
10/25/2011	12:35:26 PM	Helium valve closed
10/25/2011	12:35:26 PM	H2 valve closed
10/25/2011	12:35:26 PM	BCl3 valve closed
10/25/2011	12:35:26 PM	PH3 valve closed
10/25/2011	12:35:26 PM	SiCl4 pre valve closed
10/25/2011	12:35:26 PM	SiCl4 post valve closed
10/25/2011	12:35:26 PM	Bypass valve closed
10/25/2011	12:35:26 PM	Bubbler valve closed
10/25/2011	12:35:26 PM	Main Vac valve opened
10/25/2011	12:35:26 PM	Helium MFC set to  0.000000
10/25/2011	12:35:26 PM	H2 MFC set to  0.000000
10/25/2011	12:35:26 PM	BCl3 MFC set to  0.000000
10/25/2011	12:35:26 PM	PHl3 MFC set to  0.000000
10/25/2011	12:35:26 PM	SiCl4 MFC set to  0.000000
10/25/2011	12:35:26 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	12:35:26 PM	Tube furnace set to 0
10/25/2011	12:35:27 PM	Run finished at 12:35 PM
10/25/2011	12:35:27 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/25/2011	2:25:15 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/25/2011	2:25:15 PM	Recipe started at 2:25 PM
10/25/2011	2:25:15 PM	Helium valve closed
10/25/2011	2:25:15 PM	H2 valve closed
10/25/2011	2:25:15 PM	BCl3 valve closed
10/25/2011	2:25:15 PM	PH3 valve closed
10/25/2011	2:25:15 PM	SiCl4 pre valve closed
10/25/2011	2:25:15 PM	SiCl4 post valve closed
10/25/2011	2:25:15 PM	Main Vac valve closed
10/25/2011	2:25:15 PM	Bypass valve closed
10/25/2011	2:25:15 PM	Bubbler valve closed
10/25/2011	2:25:15 PM	Helium MFC set to  0.000000
10/25/2011	2:25:15 PM	H2 MFC set to  0.000000
10/25/2011	2:25:15 PM	BCl3 MFC set to  0.000000
10/25/2011	2:25:15 PM	PHl3 MFC set to  0.000000
10/25/2011	2:25:15 PM	SiCl4 MFC set to  0.000000
10/25/2011	2:25:15 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	2:25:16 PM	Tube furnace set to 0
10/25/2011	2:25:19 PM	H2 valve closed
10/25/2011	2:25:19 PM	BCl3 valve closed
10/25/2011	2:25:19 PM	PH3 valve closed
10/25/2011	2:25:19 PM	SiCl4 pre valve closed
10/25/2011	2:25:19 PM	SiCl4 post valve closed
10/25/2011	2:25:19 PM	Main Vac valve closed
10/25/2011	2:25:19 PM	Bypass valve closed
10/25/2011	2:25:19 PM	Bubbler valve closed
10/25/2011	2:25:19 PM	Helium valve opened
10/25/2011	2:25:19 PM	Helium MFC set to  500.000000
10/25/2011	2:25:19 PM	H2 MFC set to  0.000000
10/25/2011	2:25:19 PM	BCl3 MFC set to  0.000000
10/25/2011	2:25:19 PM	PHl3 MFC set to  0.000000
10/25/2011	2:25:19 PM	SiCl4 MFC set to  0.000000
10/25/2011	2:25:19 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	2:25:19 PM	Tube furnace set to 0
10/25/2011	2:26:22 PM	Helium valve closed
10/25/2011	2:26:22 PM	H2 valve closed
10/25/2011	2:26:22 PM	BCl3 valve closed
10/25/2011	2:26:22 PM	PH3 valve closed
10/25/2011	2:26:22 PM	SiCl4 pre valve closed
10/25/2011	2:26:22 PM	SiCl4 post valve closed
10/25/2011	2:26:22 PM	Main Vac valve closed
10/25/2011	2:26:22 PM	Bypass valve closed
10/25/2011	2:26:22 PM	Bubbler valve closed
10/25/2011	2:26:22 PM	Helium MFC set to  0.000000
10/25/2011	2:26:22 PM	H2 MFC set to  0.000000
10/25/2011	2:26:22 PM	BCl3 MFC set to  0.000000
10/25/2011	2:26:22 PM	PHl3 MFC set to  0.000000
10/25/2011	2:26:22 PM	SiCl4 MFC set to  0.000000
10/25/2011	2:26:22 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	2:26:22 PM	Tube furnace set to 0
10/25/2011	2:26:23 PM	Run finished at 2:26 PM
10/25/2011	2:26:23 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/25/2011	2:37:36 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/25/2011	2:37:37 PM	Recipe started at 2:37 PM
10/25/2011	2:37:37 PM	Helium valve closed
10/25/2011	2:37:37 PM	H2 valve closed
10/25/2011	2:37:37 PM	BCl3 valve closed
10/25/2011	2:37:37 PM	PH3 valve closed
10/25/2011	2:37:37 PM	SiCl4 pre valve closed
10/25/2011	2:37:37 PM	SiCl4 post valve closed
10/25/2011	2:37:37 PM	Main Vac valve closed
10/25/2011	2:37:37 PM	Bubbler valve closed
10/25/2011	2:37:37 PM	Bypass valve opened
10/25/2011	2:37:37 PM	Helium MFC set to  0.000000
10/25/2011	2:37:37 PM	H2 MFC set to  0.000000
10/25/2011	2:37:37 PM	BCl3 MFC set to  0.000000
10/25/2011	2:37:37 PM	PHl3 MFC set to  0.000000
10/25/2011	2:37:37 PM	SiCl4 MFC set to  0.000000
10/25/2011	2:37:37 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	2:37:37 PM	Tube furnace set to 0
10/25/2011	2:38:18 PM	Run aborted at 2:38 PM
10/25/2011	2:38:18 PM	Helium valve closed
10/25/2011	2:38:18 PM	H2 valve closed
10/25/2011	2:38:18 PM	BCl3 valve closed
10/25/2011	2:38:18 PM	PH3 valve closed
10/25/2011	2:38:18 PM	SiCl4 pre valve closed
10/25/2011	2:38:18 PM	SiCl4 post valve closed
10/25/2011	2:38:18 PM	Bypass valve closed
10/25/2011	2:38:18 PM	Main Vac valve closed
10/25/2011	2:38:18 PM	Bubbler valve closed
10/25/2011	2:38:18 PM	Helium MFC set to  0.000000
10/25/2011	2:38:18 PM	H2 MFC set to  0.000000
10/25/2011	2:38:18 PM	BCl3 MFC set to  0.000000
10/25/2011	2:38:18 PM	PHl3 MFC set to  0.000000
10/25/2011	2:38:18 PM	SiCl4 MFC set to  0.000000
10/25/2011	2:38:18 PM	Tube furnace set to 0
10/25/2011	2:38:18 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/25/2011	2:47:32 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/25/2011	2:47:32 PM	Recipe started at 2:47 PM
10/25/2011	2:47:33 PM	Helium valve closed
10/25/2011	2:47:33 PM	H2 valve closed
10/25/2011	2:47:33 PM	BCl3 valve closed
10/25/2011	2:47:33 PM	PH3 valve closed
10/25/2011	2:47:33 PM	SiCl4 pre valve closed
10/25/2011	2:47:33 PM	SiCl4 post valve closed
10/25/2011	2:47:33 PM	Main Vac valve closed
10/25/2011	2:47:33 PM	Bubbler valve closed
10/25/2011	2:47:33 PM	Bypass valve opened
10/25/2011	2:47:33 PM	Helium MFC set to  0.000000
10/25/2011	2:47:33 PM	H2 MFC set to  0.000000
10/25/2011	2:47:33 PM	BCl3 MFC set to  0.000000
10/25/2011	2:47:33 PM	PHl3 MFC set to  0.000000
10/25/2011	2:47:33 PM	SiCl4 MFC set to  0.000000
10/25/2011	2:47:33 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	2:47:33 PM	Tube furnace set to 0
10/25/2011	2:47:44 PM	Run aborted at 2:47 PM
10/25/2011	2:47:44 PM	Helium valve closed
10/25/2011	2:47:44 PM	H2 valve closed
10/25/2011	2:47:44 PM	BCl3 valve closed
10/25/2011	2:47:44 PM	PH3 valve closed
10/25/2011	2:47:44 PM	SiCl4 pre valve closed
10/25/2011	2:47:44 PM	SiCl4 post valve closed
10/25/2011	2:47:44 PM	Bypass valve closed
10/25/2011	2:47:44 PM	Main Vac valve closed
10/25/2011	2:47:44 PM	Bubbler valve closed
10/25/2011	2:47:44 PM	Helium MFC set to  0.000000
10/25/2011	2:47:44 PM	H2 MFC set to  0.000000
10/25/2011	2:47:44 PM	BCl3 MFC set to  0.000000
10/25/2011	2:47:44 PM	PHl3 MFC set to  0.000000
10/25/2011	2:47:44 PM	SiCl4 MFC set to  0.000000
10/25/2011	2:47:45 PM	Tube furnace set to 0
10/25/2011	2:47:45 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/25/2011	2:48:04 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/25/2011	2:48:05 PM	Recipe started at 2:48 PM
10/25/2011	2:48:05 PM	Helium valve closed
10/25/2011	2:48:05 PM	H2 valve closed
10/25/2011	2:48:05 PM	BCl3 valve closed
10/25/2011	2:48:05 PM	PH3 valve closed
10/25/2011	2:48:05 PM	SiCl4 pre valve closed
10/25/2011	2:48:05 PM	SiCl4 post valve closed
10/25/2011	2:48:05 PM	Main Vac valve closed
10/25/2011	2:48:05 PM	Bubbler valve closed
10/25/2011	2:48:05 PM	Bypass valve opened
10/25/2011	2:48:05 PM	Helium MFC set to  0.000000
10/25/2011	2:48:05 PM	H2 MFC set to  0.000000
10/25/2011	2:48:05 PM	BCl3 MFC set to  0.000000
10/25/2011	2:48:05 PM	PHl3 MFC set to  0.000000
10/25/2011	2:48:05 PM	SiCl4 MFC set to  0.000000
10/25/2011	2:48:05 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	2:48:05 PM	Tube furnace set to 0
10/25/2011	2:48:13 PM	Run aborted at 2:48 PM
10/25/2011	2:48:13 PM	Helium valve closed
10/25/2011	2:48:13 PM	H2 valve closed
10/25/2011	2:48:13 PM	BCl3 valve closed
10/25/2011	2:48:13 PM	PH3 valve closed
10/25/2011	2:48:13 PM	SiCl4 pre valve closed
10/25/2011	2:48:13 PM	SiCl4 post valve closed
10/25/2011	2:48:13 PM	Bypass valve closed
10/25/2011	2:48:13 PM	Main Vac valve closed
10/25/2011	2:48:13 PM	Bubbler valve closed
10/25/2011	2:48:13 PM	Helium MFC set to  0.000000
10/25/2011	2:48:13 PM	H2 MFC set to  0.000000
10/25/2011	2:48:13 PM	BCl3 MFC set to  0.000000
10/25/2011	2:48:13 PM	PHl3 MFC set to  0.000000
10/25/2011	2:48:13 PM	SiCl4 MFC set to  0.000000
10/25/2011	2:48:14 PM	Tube furnace set to 0
10/25/2011	2:48:14 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/25/2011	2:49:22 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/25/2011	2:49:23 PM	Recipe started at 2:49 PM
10/25/2011	2:49:23 PM	Helium valve closed
10/25/2011	2:49:23 PM	H2 valve closed
10/25/2011	2:49:23 PM	BCl3 valve closed
10/25/2011	2:49:23 PM	PH3 valve closed
10/25/2011	2:49:23 PM	SiCl4 pre valve closed
10/25/2011	2:49:23 PM	SiCl4 post valve closed
10/25/2011	2:49:23 PM	Main Vac valve closed
10/25/2011	2:49:23 PM	Bypass valve closed
10/25/2011	2:49:23 PM	Bubbler valve closed
10/25/2011	2:49:23 PM	Helium MFC set to  0.000000
10/25/2011	2:49:23 PM	H2 MFC set to  0.000000
10/25/2011	2:49:23 PM	BCl3 MFC set to  0.000000
10/25/2011	2:49:23 PM	PHl3 MFC set to  0.000000
10/25/2011	2:49:23 PM	SiCl4 MFC set to  0.000000
10/25/2011	2:49:23 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	2:49:23 PM	Tube furnace set to 0
10/25/2011	2:49:26 PM	H2 valve closed
10/25/2011	2:49:26 PM	BCl3 valve closed
10/25/2011	2:49:26 PM	PH3 valve closed
10/25/2011	2:49:26 PM	SiCl4 pre valve closed
10/25/2011	2:49:26 PM	SiCl4 post valve closed
10/25/2011	2:49:26 PM	Main Vac valve closed
10/25/2011	2:49:26 PM	Bypass valve closed
10/25/2011	2:49:26 PM	Bubbler valve closed
10/25/2011	2:49:26 PM	Helium valve opened
10/25/2011	2:49:26 PM	Helium MFC set to  500.000000
10/25/2011	2:49:26 PM	H2 MFC set to  0.000000
10/25/2011	2:49:26 PM	BCl3 MFC set to  0.000000
10/25/2011	2:49:26 PM	PHl3 MFC set to  0.000000
10/25/2011	2:49:26 PM	SiCl4 MFC set to  0.000000
10/25/2011	2:49:26 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	2:49:26 PM	Tube furnace set to 0
10/25/2011	2:49:27 PM	Helium valve closed
10/25/2011	2:49:27 PM	H2 valve closed
10/25/2011	2:49:27 PM	BCl3 valve closed
10/25/2011	2:49:27 PM	PH3 valve closed
10/25/2011	2:49:27 PM	SiCl4 pre valve closed
10/25/2011	2:49:27 PM	SiCl4 post valve closed
10/25/2011	2:49:27 PM	Main Vac valve closed
10/25/2011	2:49:27 PM	Bypass valve closed
10/25/2011	2:49:27 PM	Bubbler valve closed
10/25/2011	2:49:27 PM	Helium MFC set to  0.000000
10/25/2011	2:49:27 PM	H2 MFC set to  0.000000
10/25/2011	2:49:27 PM	BCl3 MFC set to  0.000000
10/25/2011	2:49:27 PM	PHl3 MFC set to  0.000000
10/25/2011	2:49:27 PM	SiCl4 MFC set to  0.000000
10/25/2011	2:49:27 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	2:49:27 PM	Tube furnace set to 0
10/25/2011	2:49:28 PM	Run finished at 2:49 PM
10/25/2011	2:49:28 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/25/2011	2:50:13 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/25/2011	2:50:14 PM	Recipe started at 2:50 PM
10/25/2011	2:50:14 PM	Helium valve closed
10/25/2011	2:50:14 PM	H2 valve closed
10/25/2011	2:50:14 PM	BCl3 valve closed
10/25/2011	2:50:14 PM	PH3 valve closed
10/25/2011	2:50:14 PM	SiCl4 pre valve closed
10/25/2011	2:50:14 PM	SiCl4 post valve closed
10/25/2011	2:50:14 PM	Main Vac valve closed
10/25/2011	2:50:14 PM	Bubbler valve closed
10/25/2011	2:50:14 PM	Bypass valve opened
10/25/2011	2:50:14 PM	Helium MFC set to  0.000000
10/25/2011	2:50:14 PM	H2 MFC set to  0.000000
10/25/2011	2:50:14 PM	BCl3 MFC set to  0.000000
10/25/2011	2:50:14 PM	PHl3 MFC set to  0.000000
10/25/2011	2:50:14 PM	SiCl4 MFC set to  0.000000
10/25/2011	2:50:14 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	2:50:14 PM	Tube furnace set to 0
10/25/2011	2:50:22 PM	Run aborted at 2:50 PM
10/25/2011	2:50:22 PM	Helium valve closed
10/25/2011	2:50:22 PM	H2 valve closed
10/25/2011	2:50:22 PM	BCl3 valve closed
10/25/2011	2:50:22 PM	PH3 valve closed
10/25/2011	2:50:22 PM	SiCl4 pre valve closed
10/25/2011	2:50:22 PM	SiCl4 post valve closed
10/25/2011	2:50:22 PM	Bypass valve closed
10/25/2011	2:50:22 PM	Main Vac valve closed
10/25/2011	2:50:22 PM	Bubbler valve closed
10/25/2011	2:50:22 PM	Helium MFC set to  0.000000
10/25/2011	2:50:22 PM	H2 MFC set to  0.000000
10/25/2011	2:50:22 PM	BCl3 MFC set to  0.000000
10/25/2011	2:50:22 PM	PHl3 MFC set to  0.000000
10/25/2011	2:50:22 PM	SiCl4 MFC set to  0.000000
10/25/2011	2:50:22 PM	Tube furnace set to 0
10/25/2011	2:50:22 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/25/2011	2:50:29 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/25/2011	2:50:30 PM	Recipe started at 2:50 PM
10/25/2011	2:50:30 PM	Helium valve closed
10/25/2011	2:50:30 PM	H2 valve closed
10/25/2011	2:50:30 PM	BCl3 valve closed
10/25/2011	2:50:30 PM	PH3 valve closed
10/25/2011	2:50:30 PM	SiCl4 pre valve closed
10/25/2011	2:50:30 PM	SiCl4 post valve closed
10/25/2011	2:50:30 PM	Main Vac valve closed
10/25/2011	2:50:30 PM	Bypass valve closed
10/25/2011	2:50:30 PM	Bubbler valve closed
10/25/2011	2:50:30 PM	Helium MFC set to  0.000000
10/25/2011	2:50:30 PM	H2 MFC set to  0.000000
10/25/2011	2:50:30 PM	BCl3 MFC set to  0.000000
10/25/2011	2:50:30 PM	PHl3 MFC set to  0.000000
10/25/2011	2:50:30 PM	SiCl4 MFC set to  0.000000
10/25/2011	2:50:30 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	2:50:30 PM	Tube furnace set to 0
10/25/2011	2:50:33 PM	H2 valve closed
10/25/2011	2:50:33 PM	BCl3 valve closed
10/25/2011	2:50:33 PM	PH3 valve closed
10/25/2011	2:50:33 PM	SiCl4 pre valve closed
10/25/2011	2:50:33 PM	SiCl4 post valve closed
10/25/2011	2:50:33 PM	Main Vac valve closed
10/25/2011	2:50:33 PM	Bypass valve closed
10/25/2011	2:50:33 PM	Bubbler valve closed
10/25/2011	2:50:33 PM	Helium valve opened
10/25/2011	2:50:33 PM	Helium MFC set to  500.000000
10/25/2011	2:50:33 PM	H2 MFC set to  0.000000
10/25/2011	2:50:33 PM	BCl3 MFC set to  0.000000
10/25/2011	2:50:33 PM	PHl3 MFC set to  0.000000
10/25/2011	2:50:33 PM	SiCl4 MFC set to  0.000000
10/25/2011	2:50:33 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	2:50:33 PM	Tube furnace set to 0
10/25/2011	2:50:33 PM	Helium valve closed
10/25/2011	2:50:33 PM	H2 valve closed
10/25/2011	2:50:33 PM	BCl3 valve closed
10/25/2011	2:50:33 PM	PH3 valve closed
10/25/2011	2:50:33 PM	SiCl4 pre valve closed
10/25/2011	2:50:33 PM	SiCl4 post valve closed
10/25/2011	2:50:33 PM	Main Vac valve closed
10/25/2011	2:50:33 PM	Bypass valve closed
10/25/2011	2:50:33 PM	Bubbler valve closed
10/25/2011	2:50:33 PM	Helium MFC set to  0.000000
10/25/2011	2:50:33 PM	H2 MFC set to  0.000000
10/25/2011	2:50:33 PM	BCl3 MFC set to  0.000000
10/25/2011	2:50:33 PM	PHl3 MFC set to  0.000000
10/25/2011	2:50:33 PM	SiCl4 MFC set to  0.000000
10/25/2011	2:50:33 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	2:50:34 PM	Tube furnace set to 0
10/25/2011	2:50:35 PM	Run finished at 2:50 PM
10/25/2011	2:50:35 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/25/2011	2:56:21 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/25/2011	2:56:22 PM	Recipe started at 2:56 PM
10/25/2011	2:56:22 PM	Helium valve closed
10/25/2011	2:56:22 PM	H2 valve closed
10/25/2011	2:56:22 PM	BCl3 valve closed
10/25/2011	2:56:22 PM	PH3 valve closed
10/25/2011	2:56:22 PM	SiCl4 pre valve closed
10/25/2011	2:56:22 PM	SiCl4 post valve closed
10/25/2011	2:56:22 PM	Main Vac valve closed
10/25/2011	2:56:22 PM	Bubbler valve closed
10/25/2011	2:56:22 PM	Bypass valve opened
10/25/2011	2:56:22 PM	Helium MFC set to  0.000000
10/25/2011	2:56:22 PM	H2 MFC set to  0.000000
10/25/2011	2:56:22 PM	BCl3 MFC set to  0.000000
10/25/2011	2:56:22 PM	PHl3 MFC set to  0.000000
10/25/2011	2:56:22 PM	SiCl4 MFC set to  0.000000
10/25/2011	2:56:22 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	2:56:22 PM	Tube furnace set to 0
10/25/2011	2:57:17 PM	Run aborted at 2:57 PM
10/25/2011	2:57:17 PM	Helium valve closed
10/25/2011	2:57:17 PM	H2 valve closed
10/25/2011	2:57:17 PM	BCl3 valve closed
10/25/2011	2:57:17 PM	PH3 valve closed
10/25/2011	2:57:17 PM	SiCl4 pre valve closed
10/25/2011	2:57:17 PM	SiCl4 post valve closed
10/25/2011	2:57:17 PM	Bypass valve closed
10/25/2011	2:57:17 PM	Main Vac valve closed
10/25/2011	2:57:17 PM	Bubbler valve closed
10/25/2011	2:57:17 PM	Helium MFC set to  0.000000
10/25/2011	2:57:17 PM	H2 MFC set to  0.000000
10/25/2011	2:57:17 PM	BCl3 MFC set to  0.000000
10/25/2011	2:57:17 PM	PHl3 MFC set to  0.000000
10/25/2011	2:57:17 PM	SiCl4 MFC set to  0.000000
10/25/2011	2:57:17 PM	Tube furnace set to 0
10/25/2011	2:57:17 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/25/2011	3:01:19 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/25/2011	3:01:19 PM	Recipe started at 3:01 PM
10/25/2011	3:01:19 PM	Helium valve closed
10/25/2011	3:01:19 PM	H2 valve closed
10/25/2011	3:01:19 PM	BCl3 valve closed
10/25/2011	3:01:19 PM	PH3 valve closed
10/25/2011	3:01:19 PM	SiCl4 pre valve closed
10/25/2011	3:01:19 PM	SiCl4 post valve closed
10/25/2011	3:01:19 PM	Main Vac valve closed
10/25/2011	3:01:19 PM	Bubbler valve closed
10/25/2011	3:01:19 PM	Bypass valve opened
10/25/2011	3:01:19 PM	Helium MFC set to  0.000000
10/25/2011	3:01:19 PM	H2 MFC set to  0.000000
10/25/2011	3:01:19 PM	BCl3 MFC set to  0.000000
10/25/2011	3:01:19 PM	PHl3 MFC set to  0.000000
10/25/2011	3:01:19 PM	SiCl4 MFC set to  0.000000
10/25/2011	3:01:19 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	3:01:20 PM	Tube furnace set to 0
10/25/2011	3:01:51 PM	Run aborted at 3:01 PM
10/25/2011	3:01:51 PM	Helium valve closed
10/25/2011	3:01:51 PM	H2 valve closed
10/25/2011	3:01:51 PM	BCl3 valve closed
10/25/2011	3:01:51 PM	PH3 valve closed
10/25/2011	3:01:51 PM	SiCl4 pre valve closed
10/25/2011	3:01:51 PM	SiCl4 post valve closed
10/25/2011	3:01:51 PM	Bypass valve closed
10/25/2011	3:01:51 PM	Main Vac valve closed
10/25/2011	3:01:51 PM	Bubbler valve closed
10/25/2011	3:01:51 PM	Helium MFC set to  0.000000
10/25/2011	3:01:51 PM	H2 MFC set to  0.000000
10/25/2011	3:01:51 PM	BCl3 MFC set to  0.000000
10/25/2011	3:01:51 PM	PHl3 MFC set to  0.000000
10/25/2011	3:01:51 PM	SiCl4 MFC set to  0.000000
10/25/2011	3:01:51 PM	Tube furnace set to 0
10/25/2011	3:01:51 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/25/2011	3:01:54 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/25/2011	3:01:54 PM	Recipe started at 3:01 PM
10/25/2011	3:01:54 PM	Helium valve closed
10/25/2011	3:01:54 PM	H2 valve closed
10/25/2011	3:01:54 PM	BCl3 valve closed
10/25/2011	3:01:54 PM	PH3 valve closed
10/25/2011	3:01:54 PM	SiCl4 pre valve closed
10/25/2011	3:01:54 PM	SiCl4 post valve closed
10/25/2011	3:01:54 PM	Main Vac valve closed
10/25/2011	3:01:54 PM	Bypass valve closed
10/25/2011	3:01:54 PM	Bubbler valve closed
10/25/2011	3:01:54 PM	Helium MFC set to  0.000000
10/25/2011	3:01:54 PM	H2 MFC set to  0.000000
10/25/2011	3:01:54 PM	BCl3 MFC set to  0.000000
10/25/2011	3:01:54 PM	PHl3 MFC set to  0.000000
10/25/2011	3:01:54 PM	SiCl4 MFC set to  0.000000
10/25/2011	3:01:54 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	3:01:55 PM	Tube furnace set to 0
10/25/2011	3:01:58 PM	H2 valve closed
10/25/2011	3:01:58 PM	BCl3 valve closed
10/25/2011	3:01:58 PM	PH3 valve closed
10/25/2011	3:01:58 PM	SiCl4 pre valve closed
10/25/2011	3:01:58 PM	SiCl4 post valve closed
10/25/2011	3:01:58 PM	Main Vac valve closed
10/25/2011	3:01:58 PM	Bypass valve closed
10/25/2011	3:01:58 PM	Bubbler valve closed
10/25/2011	3:01:58 PM	Helium valve opened
10/25/2011	3:01:58 PM	Helium MFC set to  500.000000
10/25/2011	3:01:58 PM	H2 MFC set to  0.000000
10/25/2011	3:01:58 PM	BCl3 MFC set to  0.000000
10/25/2011	3:01:58 PM	PHl3 MFC set to  0.000000
10/25/2011	3:01:58 PM	SiCl4 MFC set to  0.000000
10/25/2011	3:01:58 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	3:01:58 PM	Tube furnace set to 0
10/25/2011	3:01:58 PM	Helium valve closed
10/25/2011	3:01:58 PM	H2 valve closed
10/25/2011	3:01:58 PM	BCl3 valve closed
10/25/2011	3:01:58 PM	PH3 valve closed
10/25/2011	3:01:58 PM	SiCl4 pre valve closed
10/25/2011	3:01:58 PM	SiCl4 post valve closed
10/25/2011	3:01:58 PM	Main Vac valve closed
10/25/2011	3:01:58 PM	Bypass valve closed
10/25/2011	3:01:58 PM	Bubbler valve closed
10/25/2011	3:01:58 PM	Helium MFC set to  0.000000
10/25/2011	3:01:58 PM	H2 MFC set to  0.000000
10/25/2011	3:01:58 PM	BCl3 MFC set to  0.000000
10/25/2011	3:01:58 PM	PHl3 MFC set to  0.000000
10/25/2011	3:01:58 PM	SiCl4 MFC set to  0.000000
10/25/2011	3:01:58 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	3:01:58 PM	Tube furnace set to 0
10/25/2011	3:01:59 PM	Run finished at 3:01 PM
10/25/2011	3:01:59 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/25/2011	3:14:28 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/25/2011	3:14:29 PM	Recipe started at 3:14 PM
10/25/2011	3:14:29 PM	Helium valve closed
10/25/2011	3:14:29 PM	H2 valve closed
10/25/2011	3:14:29 PM	BCl3 valve closed
10/25/2011	3:14:29 PM	PH3 valve closed
10/25/2011	3:14:29 PM	SiCl4 pre valve closed
10/25/2011	3:14:29 PM	SiCl4 post valve closed
10/25/2011	3:14:29 PM	Main Vac valve closed
10/25/2011	3:14:29 PM	Bubbler valve closed
10/25/2011	3:14:29 PM	Bypass valve opened
10/25/2011	3:14:29 PM	Helium MFC set to  0.000000
10/25/2011	3:14:29 PM	H2 MFC set to  0.000000
10/25/2011	3:14:29 PM	BCl3 MFC set to  0.000000
10/25/2011	3:14:29 PM	PHl3 MFC set to  0.000000
10/25/2011	3:14:29 PM	SiCl4 MFC set to  0.000000
10/25/2011	3:14:29 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	3:14:29 PM	Tube furnace set to 0
10/25/2011	3:15:22 PM	Helium valve closed
10/25/2011	3:15:22 PM	H2 valve closed
10/25/2011	3:15:22 PM	BCl3 valve closed
10/25/2011	3:15:22 PM	PH3 valve closed
10/25/2011	3:15:22 PM	SiCl4 pre valve closed
10/25/2011	3:15:22 PM	SiCl4 post valve closed
10/25/2011	3:15:23 PM	Main Vac valve closed
10/25/2011	3:15:23 PM	Bubbler valve closed
10/25/2011	3:15:23 PM	Bypass valve opened
10/25/2011	3:15:23 PM	Helium MFC set to  0.000000
10/25/2011	3:15:23 PM	H2 MFC set to  0.000000
10/25/2011	3:15:23 PM	BCl3 MFC set to  0.000000
10/25/2011	3:15:23 PM	PHl3 MFC set to  0.000000
10/25/2011	3:15:23 PM	SiCl4 MFC set to  0.000000
10/25/2011	3:15:23 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	3:15:23 PM	Tube furnace set to 0
10/25/2011	3:16:23 PM	Helium valve closed
10/25/2011	3:16:23 PM	H2 valve closed
10/25/2011	3:16:23 PM	BCl3 valve closed
10/25/2011	3:16:23 PM	PH3 valve closed
10/25/2011	3:16:23 PM	SiCl4 pre valve closed
10/25/2011	3:16:23 PM	SiCl4 post valve closed
10/25/2011	3:16:23 PM	Bypass valve closed
10/25/2011	3:16:23 PM	Bubbler valve closed
10/25/2011	3:16:23 PM	Main Vac valve opened
10/25/2011	3:16:23 PM	Helium MFC set to  0.000000
10/25/2011	3:16:23 PM	H2 MFC set to  0.000000
10/25/2011	3:16:23 PM	BCl3 MFC set to  0.000000
10/25/2011	3:16:23 PM	PHl3 MFC set to  0.000000
10/25/2011	3:16:23 PM	SiCl4 MFC set to  0.000000
10/25/2011	3:16:23 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	3:16:23 PM	Tube furnace set to 0
10/25/2011	3:16:24 PM	Run finished at 3:16 PM
10/25/2011	3:16:24 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/25/2011	3:16:31 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/25/2011	3:16:32 PM	Recipe started at 3:16 PM
10/25/2011	3:16:32 PM	Helium valve closed
10/25/2011	3:16:32 PM	H2 valve closed
10/25/2011	3:16:32 PM	BCl3 valve closed
10/25/2011	3:16:32 PM	PH3 valve closed
10/25/2011	3:16:32 PM	SiCl4 pre valve closed
10/25/2011	3:16:32 PM	SiCl4 post valve closed
10/25/2011	3:16:32 PM	Main Vac valve closed
10/25/2011	3:16:32 PM	Bypass valve closed
10/25/2011	3:16:32 PM	Bubbler valve closed
10/25/2011	3:16:32 PM	Helium MFC set to  0.000000
10/25/2011	3:16:32 PM	H2 MFC set to  0.000000
10/25/2011	3:16:32 PM	BCl3 MFC set to  0.000000
10/25/2011	3:16:32 PM	PHl3 MFC set to  0.000000
10/25/2011	3:16:32 PM	SiCl4 MFC set to  0.000000
10/25/2011	3:16:32 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	3:16:32 PM	Tube furnace set to 0
10/25/2011	3:16:35 PM	H2 valve closed
10/25/2011	3:16:35 PM	BCl3 valve closed
10/25/2011	3:16:35 PM	PH3 valve closed
10/25/2011	3:16:35 PM	SiCl4 pre valve closed
10/25/2011	3:16:35 PM	SiCl4 post valve closed
10/25/2011	3:16:35 PM	Main Vac valve closed
10/25/2011	3:16:35 PM	Bypass valve closed
10/25/2011	3:16:35 PM	Bubbler valve closed
10/25/2011	3:16:35 PM	Helium valve opened
10/25/2011	3:16:35 PM	Helium MFC set to  500.000000
10/25/2011	3:16:35 PM	H2 MFC set to  0.000000
10/25/2011	3:16:35 PM	BCl3 MFC set to  0.000000
10/25/2011	3:16:35 PM	PHl3 MFC set to  0.000000
10/25/2011	3:16:35 PM	SiCl4 MFC set to  0.000000
10/25/2011	3:16:35 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	3:16:35 PM	Tube furnace set to 0
10/25/2011	3:16:46 PM	Helium valve closed
10/25/2011	3:16:46 PM	H2 valve closed
10/25/2011	3:16:46 PM	BCl3 valve closed
10/25/2011	3:16:46 PM	PH3 valve closed
10/25/2011	3:16:46 PM	SiCl4 pre valve closed
10/25/2011	3:16:46 PM	SiCl4 post valve closed
10/25/2011	3:16:46 PM	Main Vac valve closed
10/25/2011	3:16:46 PM	Bypass valve closed
10/25/2011	3:16:46 PM	Bubbler valve closed
10/25/2011	3:16:46 PM	Helium MFC set to  0.000000
10/25/2011	3:16:46 PM	H2 MFC set to  0.000000
10/25/2011	3:16:46 PM	BCl3 MFC set to  0.000000
10/25/2011	3:16:46 PM	PHl3 MFC set to  0.000000
10/25/2011	3:16:46 PM	SiCl4 MFC set to  0.000000
10/25/2011	3:16:46 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	3:16:46 PM	Tube furnace set to 0
10/25/2011	3:16:47 PM	Run finished at 3:16 PM
10/25/2011	3:16:47 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/25/2011	3:24:29 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/25/2011	3:24:30 PM	Recipe started at 3:24 PM
10/25/2011	3:24:30 PM	Helium valve closed
10/25/2011	3:24:30 PM	H2 valve closed
10/25/2011	3:24:30 PM	BCl3 valve closed
10/25/2011	3:24:30 PM	PH3 valve closed
10/25/2011	3:24:30 PM	SiCl4 pre valve closed
10/25/2011	3:24:30 PM	SiCl4 post valve closed
10/25/2011	3:24:30 PM	Main Vac valve closed
10/25/2011	3:24:30 PM	Bubbler valve closed
10/25/2011	3:24:30 PM	Bypass valve opened
10/25/2011	3:24:30 PM	Helium MFC set to  0.000000
10/25/2011	3:24:30 PM	H2 MFC set to  0.000000
10/25/2011	3:24:30 PM	BCl3 MFC set to  0.000000
10/25/2011	3:24:30 PM	PHl3 MFC set to  0.000000
10/25/2011	3:24:30 PM	SiCl4 MFC set to  0.000000
10/25/2011	3:24:30 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	3:24:30 PM	Tube furnace set to 0
10/25/2011	3:25:01 PM	Run aborted at 3:25 PM
10/25/2011	3:25:01 PM	Helium valve closed
10/25/2011	3:25:01 PM	H2 valve closed
10/25/2011	3:25:01 PM	BCl3 valve closed
10/25/2011	3:25:01 PM	PH3 valve closed
10/25/2011	3:25:01 PM	SiCl4 pre valve closed
10/25/2011	3:25:01 PM	SiCl4 post valve closed
10/25/2011	3:25:01 PM	Bypass valve closed
10/25/2011	3:25:01 PM	Main Vac valve closed
10/25/2011	3:25:01 PM	Bubbler valve closed
10/25/2011	3:25:01 PM	Helium MFC set to  0.000000
10/25/2011	3:25:01 PM	H2 MFC set to  0.000000
10/25/2011	3:25:01 PM	BCl3 MFC set to  0.000000
10/25/2011	3:25:01 PM	PHl3 MFC set to  0.000000
10/25/2011	3:25:01 PM	SiCl4 MFC set to  0.000000
10/25/2011	3:25:01 PM	Tube furnace set to 0
10/25/2011	3:25:01 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/25/2011	3:25:06 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/25/2011	3:25:07 PM	Recipe started at 3:25 PM
10/25/2011	3:25:07 PM	Helium valve closed
10/25/2011	3:25:07 PM	H2 valve closed
10/25/2011	3:25:07 PM	BCl3 valve closed
10/25/2011	3:25:07 PM	PH3 valve closed
10/25/2011	3:25:07 PM	SiCl4 pre valve closed
10/25/2011	3:25:07 PM	SiCl4 post valve closed
10/25/2011	3:25:07 PM	Main Vac valve closed
10/25/2011	3:25:07 PM	Bypass valve closed
10/25/2011	3:25:07 PM	Bubbler valve closed
10/25/2011	3:25:07 PM	Helium MFC set to  0.000000
10/25/2011	3:25:07 PM	H2 MFC set to  0.000000
10/25/2011	3:25:07 PM	BCl3 MFC set to  0.000000
10/25/2011	3:25:07 PM	PHl3 MFC set to  0.000000
10/25/2011	3:25:07 PM	SiCl4 MFC set to  0.000000
10/25/2011	3:25:07 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	3:25:07 PM	Tube furnace set to 0
10/25/2011	3:25:11 PM	H2 valve closed
10/25/2011	3:25:11 PM	BCl3 valve closed
10/25/2011	3:25:11 PM	PH3 valve closed
10/25/2011	3:25:11 PM	SiCl4 pre valve closed
10/25/2011	3:25:11 PM	SiCl4 post valve closed
10/25/2011	3:25:11 PM	Main Vac valve closed
10/25/2011	3:25:11 PM	Bypass valve closed
10/25/2011	3:25:11 PM	Bubbler valve closed
10/25/2011	3:25:11 PM	Helium valve opened
10/25/2011	3:25:11 PM	Helium MFC set to  500.000000
10/25/2011	3:25:11 PM	H2 MFC set to  0.000000
10/25/2011	3:25:11 PM	BCl3 MFC set to  0.000000
10/25/2011	3:25:11 PM	PHl3 MFC set to  0.000000
10/25/2011	3:25:11 PM	SiCl4 MFC set to  0.000000
10/25/2011	3:25:11 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	3:25:11 PM	Tube furnace set to 0
10/25/2011	3:25:11 PM	Helium valve closed
10/25/2011	3:25:11 PM	H2 valve closed
10/25/2011	3:25:11 PM	BCl3 valve closed
10/25/2011	3:25:11 PM	PH3 valve closed
10/25/2011	3:25:11 PM	SiCl4 pre valve closed
10/25/2011	3:25:11 PM	SiCl4 post valve closed
10/25/2011	3:25:11 PM	Main Vac valve closed
10/25/2011	3:25:11 PM	Bypass valve closed
10/25/2011	3:25:11 PM	Bubbler valve closed
10/25/2011	3:25:11 PM	Helium MFC set to  0.000000
10/25/2011	3:25:11 PM	H2 MFC set to  0.000000
10/25/2011	3:25:11 PM	BCl3 MFC set to  0.000000
10/25/2011	3:25:11 PM	PHl3 MFC set to  0.000000
10/25/2011	3:25:11 PM	SiCl4 MFC set to  0.000000
10/25/2011	3:25:11 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	3:25:11 PM	Tube furnace set to 0
10/25/2011	3:25:12 PM	Run finished at 3:25 PM
10/25/2011	3:25:12 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/25/2011	3:33:30 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/25/2011	3:33:31 PM	Recipe started at 3:33 PM
10/25/2011	3:33:31 PM	Helium valve closed
10/25/2011	3:33:31 PM	H2 valve closed
10/25/2011	3:33:31 PM	BCl3 valve closed
10/25/2011	3:33:31 PM	PH3 valve closed
10/25/2011	3:33:31 PM	SiCl4 pre valve closed
10/25/2011	3:33:31 PM	SiCl4 post valve closed
10/25/2011	3:33:31 PM	Main Vac valve closed
10/25/2011	3:33:31 PM	Bubbler valve closed
10/25/2011	3:33:31 PM	Bypass valve opened
10/25/2011	3:33:31 PM	Helium MFC set to  0.000000
10/25/2011	3:33:31 PM	H2 MFC set to  0.000000
10/25/2011	3:33:31 PM	BCl3 MFC set to  0.000000
10/25/2011	3:33:31 PM	PHl3 MFC set to  0.000000
10/25/2011	3:33:31 PM	SiCl4 MFC set to  0.000000
10/25/2011	3:33:31 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	3:33:31 PM	Tube furnace set to 0
10/25/2011	3:33:51 PM	Run aborted at 3:33 PM
10/25/2011	3:33:51 PM	Helium valve closed
10/25/2011	3:33:51 PM	H2 valve closed
10/25/2011	3:33:51 PM	BCl3 valve closed
10/25/2011	3:33:51 PM	PH3 valve closed
10/25/2011	3:33:51 PM	SiCl4 pre valve closed
10/25/2011	3:33:51 PM	SiCl4 post valve closed
10/25/2011	3:33:51 PM	Bypass valve closed
10/25/2011	3:33:51 PM	Main Vac valve closed
10/25/2011	3:33:51 PM	Bubbler valve closed
10/25/2011	3:33:51 PM	Helium MFC set to  0.000000
10/25/2011	3:33:51 PM	H2 MFC set to  0.000000
10/25/2011	3:33:51 PM	BCl3 MFC set to  0.000000
10/25/2011	3:33:51 PM	PHl3 MFC set to  0.000000
10/25/2011	3:33:51 PM	SiCl4 MFC set to  0.000000
10/25/2011	3:33:51 PM	Tube furnace set to 0
10/25/2011	3:33:51 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/25/2011	3:34:20 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/25/2011	3:34:21 PM	Recipe started at 3:34 PM
10/25/2011	3:34:21 PM	Helium valve closed
10/25/2011	3:34:21 PM	H2 valve closed
10/25/2011	3:34:21 PM	BCl3 valve closed
10/25/2011	3:34:21 PM	PH3 valve closed
10/25/2011	3:34:21 PM	SiCl4 pre valve closed
10/25/2011	3:34:21 PM	SiCl4 post valve closed
10/25/2011	3:34:21 PM	Main Vac valve closed
10/25/2011	3:34:21 PM	Bubbler valve closed
10/25/2011	3:34:21 PM	Bypass valve opened
10/25/2011	3:34:21 PM	Helium MFC set to  0.000000
10/25/2011	3:34:21 PM	H2 MFC set to  0.000000
10/25/2011	3:34:21 PM	BCl3 MFC set to  0.000000
10/25/2011	3:34:21 PM	PHl3 MFC set to  0.000000
10/25/2011	3:34:21 PM	SiCl4 MFC set to  0.000000
10/25/2011	3:34:21 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	3:34:22 PM	Tube furnace set to 0
10/25/2011	3:34:36 PM	Run aborted at 3:34 PM
10/25/2011	3:34:36 PM	Helium valve closed
10/25/2011	3:34:36 PM	H2 valve closed
10/25/2011	3:34:36 PM	BCl3 valve closed
10/25/2011	3:34:36 PM	PH3 valve closed
10/25/2011	3:34:36 PM	SiCl4 pre valve closed
10/25/2011	3:34:36 PM	SiCl4 post valve closed
10/25/2011	3:34:36 PM	Bypass valve closed
10/25/2011	3:34:36 PM	Main Vac valve closed
10/25/2011	3:34:36 PM	Bubbler valve closed
10/25/2011	3:34:36 PM	Helium MFC set to  0.000000
10/25/2011	3:34:36 PM	H2 MFC set to  0.000000
10/25/2011	3:34:36 PM	BCl3 MFC set to  0.000000
10/25/2011	3:34:36 PM	PHl3 MFC set to  0.000000
10/25/2011	3:34:36 PM	SiCl4 MFC set to  0.000000
10/25/2011	3:34:36 PM	Tube furnace set to 0
10/25/2011	3:34:36 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/25/2011	3:40:33 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/25/2011	3:40:33 PM	Recipe started at 3:40 PM
10/25/2011	3:40:34 PM	Helium valve closed
10/25/2011	3:40:34 PM	H2 valve closed
10/25/2011	3:40:34 PM	BCl3 valve closed
10/25/2011	3:40:34 PM	PH3 valve closed
10/25/2011	3:40:34 PM	SiCl4 pre valve closed
10/25/2011	3:40:34 PM	SiCl4 post valve closed
10/25/2011	3:40:34 PM	Main Vac valve closed
10/25/2011	3:40:34 PM	Bubbler valve closed
10/25/2011	3:40:34 PM	Bypass valve opened
10/25/2011	3:40:34 PM	Helium MFC set to  0.000000
10/25/2011	3:40:34 PM	H2 MFC set to  0.000000
10/25/2011	3:40:34 PM	BCl3 MFC set to  0.000000
10/25/2011	3:40:34 PM	PHl3 MFC set to  0.000000
10/25/2011	3:40:34 PM	SiCl4 MFC set to  0.000000
10/25/2011	3:40:34 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	3:40:34 PM	Tube furnace set to 0
10/25/2011	3:41:58 PM	Helium valve closed
10/25/2011	3:41:58 PM	H2 valve closed
10/25/2011	3:41:58 PM	BCl3 valve closed
10/25/2011	3:41:58 PM	PH3 valve closed
10/25/2011	3:41:58 PM	SiCl4 pre valve closed
10/25/2011	3:41:58 PM	SiCl4 post valve closed
10/25/2011	3:41:58 PM	Main Vac valve closed
10/25/2011	3:41:58 PM	Bubbler valve closed
10/25/2011	3:41:58 PM	Bypass valve opened
10/25/2011	3:41:58 PM	Helium MFC set to  0.000000
10/25/2011	3:41:58 PM	H2 MFC set to  0.000000
10/25/2011	3:41:58 PM	BCl3 MFC set to  0.000000
10/25/2011	3:41:58 PM	PHl3 MFC set to  0.000000
10/25/2011	3:41:58 PM	SiCl4 MFC set to  0.000000
10/25/2011	3:41:58 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	3:41:58 PM	Tube furnace set to 0
10/25/2011	3:42:58 PM	Helium valve closed
10/25/2011	3:42:58 PM	H2 valve closed
10/25/2011	3:42:58 PM	BCl3 valve closed
10/25/2011	3:42:58 PM	PH3 valve closed
10/25/2011	3:42:58 PM	SiCl4 pre valve closed
10/25/2011	3:42:58 PM	SiCl4 post valve closed
10/25/2011	3:42:58 PM	Bypass valve closed
10/25/2011	3:42:58 PM	Bubbler valve closed
10/25/2011	3:42:58 PM	Main Vac valve opened
10/25/2011	3:42:58 PM	Helium MFC set to  0.000000
10/25/2011	3:42:58 PM	H2 MFC set to  0.000000
10/25/2011	3:42:58 PM	BCl3 MFC set to  0.000000
10/25/2011	3:42:58 PM	PHl3 MFC set to  0.000000
10/25/2011	3:42:58 PM	SiCl4 MFC set to  0.000000
10/25/2011	3:42:58 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	3:42:59 PM	Tube furnace set to 0
10/25/2011	3:43:00 PM	Run finished at 3:43 PM
10/25/2011	3:43:00 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/25/2011	3:47:35 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/25/2011	3:47:36 PM	Recipe started at 3:47 PM
10/25/2011	3:47:36 PM	Helium valve closed
10/25/2011	3:47:36 PM	H2 valve closed
10/25/2011	3:47:36 PM	BCl3 valve closed
10/25/2011	3:47:36 PM	PH3 valve closed
10/25/2011	3:47:36 PM	SiCl4 pre valve closed
10/25/2011	3:47:36 PM	SiCl4 post valve closed
10/25/2011	3:47:36 PM	Main Vac valve closed
10/25/2011	3:47:36 PM	Bypass valve closed
10/25/2011	3:47:36 PM	Bubbler valve closed
10/25/2011	3:47:36 PM	Helium MFC set to  0.000000
10/25/2011	3:47:36 PM	H2 MFC set to  0.000000
10/25/2011	3:47:36 PM	BCl3 MFC set to  0.000000
10/25/2011	3:47:36 PM	PHl3 MFC set to  0.000000
10/25/2011	3:47:36 PM	SiCl4 MFC set to  0.000000
10/25/2011	3:47:36 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	3:47:36 PM	Tube furnace set to 0
10/25/2011	3:47:39 PM	H2 valve closed
10/25/2011	3:47:39 PM	BCl3 valve closed
10/25/2011	3:47:39 PM	PH3 valve closed
10/25/2011	3:47:39 PM	SiCl4 pre valve closed
10/25/2011	3:47:39 PM	SiCl4 post valve closed
10/25/2011	3:47:39 PM	Main Vac valve closed
10/25/2011	3:47:39 PM	Bypass valve closed
10/25/2011	3:47:39 PM	Bubbler valve closed
10/25/2011	3:47:39 PM	Helium valve opened
10/25/2011	3:47:39 PM	Helium MFC set to  500.000000
10/25/2011	3:47:39 PM	H2 MFC set to  0.000000
10/25/2011	3:47:39 PM	BCl3 MFC set to  0.000000
10/25/2011	3:47:39 PM	PHl3 MFC set to  0.000000
10/25/2011	3:47:39 PM	SiCl4 MFC set to  0.000000
10/25/2011	3:47:39 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	3:47:39 PM	Tube furnace set to 0
10/25/2011	3:48:46 PM	Helium valve closed
10/25/2011	3:48:46 PM	H2 valve closed
10/25/2011	3:48:46 PM	BCl3 valve closed
10/25/2011	3:48:46 PM	PH3 valve closed
10/25/2011	3:48:46 PM	SiCl4 pre valve closed
10/25/2011	3:48:46 PM	SiCl4 post valve closed
10/25/2011	3:48:46 PM	Main Vac valve closed
10/25/2011	3:48:46 PM	Bypass valve closed
10/25/2011	3:48:46 PM	Bubbler valve closed
10/25/2011	3:48:46 PM	Helium MFC set to  0.000000
10/25/2011	3:48:46 PM	H2 MFC set to  0.000000
10/25/2011	3:48:46 PM	BCl3 MFC set to  0.000000
10/25/2011	3:48:46 PM	PHl3 MFC set to  0.000000
10/25/2011	3:48:46 PM	SiCl4 MFC set to  0.000000
10/25/2011	3:48:46 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	3:48:46 PM	Tube furnace set to 0
10/25/2011	3:48:47 PM	Run finished at 3:48 PM
10/25/2011	3:48:47 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/25/2011	3:55:29 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/25/2011	3:55:30 PM	Recipe started at 3:55 PM
10/25/2011	3:55:30 PM	Helium valve closed
10/25/2011	3:55:30 PM	H2 valve closed
10/25/2011	3:55:30 PM	BCl3 valve closed
10/25/2011	3:55:30 PM	PH3 valve closed
10/25/2011	3:55:30 PM	SiCl4 pre valve closed
10/25/2011	3:55:30 PM	SiCl4 post valve closed
10/25/2011	3:55:30 PM	Main Vac valve closed
10/25/2011	3:55:30 PM	Bubbler valve closed
10/25/2011	3:55:30 PM	Bypass valve opened
10/25/2011	3:55:30 PM	Helium MFC set to  0.000000
10/25/2011	3:55:30 PM	H2 MFC set to  0.000000
10/25/2011	3:55:30 PM	BCl3 MFC set to  0.000000
10/25/2011	3:55:30 PM	PHl3 MFC set to  0.000000
10/25/2011	3:55:30 PM	SiCl4 MFC set to  0.000000
10/25/2011	3:55:30 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	3:55:30 PM	Tube furnace set to 0
10/25/2011	3:55:44 PM	Run aborted at 3:55 PM
10/25/2011	3:55:44 PM	Helium valve closed
10/25/2011	3:55:44 PM	H2 valve closed
10/25/2011	3:55:44 PM	BCl3 valve closed
10/25/2011	3:55:44 PM	PH3 valve closed
10/25/2011	3:55:44 PM	SiCl4 pre valve closed
10/25/2011	3:55:44 PM	SiCl4 post valve closed
10/25/2011	3:55:44 PM	Bypass valve closed
10/25/2011	3:55:44 PM	Main Vac valve closed
10/25/2011	3:55:44 PM	Bubbler valve closed
10/25/2011	3:55:44 PM	Helium MFC set to  0.000000
10/25/2011	3:55:44 PM	H2 MFC set to  0.000000
10/25/2011	3:55:44 PM	BCl3 MFC set to  0.000000
10/25/2011	3:55:44 PM	PHl3 MFC set to  0.000000
10/25/2011	3:55:44 PM	SiCl4 MFC set to  0.000000
10/25/2011	3:55:44 PM	Tube furnace set to 0
10/25/2011	3:55:44 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/25/2011	4:03:44 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/25/2011	4:03:45 PM	Recipe started at 4:03 PM
10/25/2011	4:03:45 PM	Helium valve closed
10/25/2011	4:03:45 PM	H2 valve closed
10/25/2011	4:03:45 PM	BCl3 valve closed
10/25/2011	4:03:45 PM	PH3 valve closed
10/25/2011	4:03:45 PM	SiCl4 pre valve closed
10/25/2011	4:03:45 PM	SiCl4 post valve closed
10/25/2011	4:03:45 PM	Main Vac valve closed
10/25/2011	4:03:45 PM	Bubbler valve closed
10/25/2011	4:03:45 PM	Bypass valve opened
10/25/2011	4:03:45 PM	Helium MFC set to  0.000000
10/25/2011	4:03:45 PM	H2 MFC set to  0.000000
10/25/2011	4:03:45 PM	BCl3 MFC set to  0.000000
10/25/2011	4:03:45 PM	PHl3 MFC set to  0.000000
10/25/2011	4:03:45 PM	SiCl4 MFC set to  0.000000
10/25/2011	4:03:45 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	4:03:45 PM	Tube furnace set to 0
10/25/2011	4:05:01 PM	Helium valve closed
10/25/2011	4:05:01 PM	H2 valve closed
10/25/2011	4:05:01 PM	BCl3 valve closed
10/25/2011	4:05:01 PM	PH3 valve closed
10/25/2011	4:05:01 PM	SiCl4 pre valve closed
10/25/2011	4:05:01 PM	SiCl4 post valve closed
10/25/2011	4:05:01 PM	Main Vac valve closed
10/25/2011	4:05:01 PM	Bubbler valve closed
10/25/2011	4:05:01 PM	Bypass valve opened
10/25/2011	4:05:01 PM	Helium MFC set to  0.000000
10/25/2011	4:05:01 PM	H2 MFC set to  0.000000
10/25/2011	4:05:01 PM	BCl3 MFC set to  0.000000
10/25/2011	4:05:01 PM	PHl3 MFC set to  0.000000
10/25/2011	4:05:01 PM	SiCl4 MFC set to  0.000000
10/25/2011	4:05:01 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	4:05:01 PM	Tube furnace set to 0
10/25/2011	4:06:01 PM	Helium valve closed
10/25/2011	4:06:01 PM	H2 valve closed
10/25/2011	4:06:01 PM	BCl3 valve closed
10/25/2011	4:06:01 PM	PH3 valve closed
10/25/2011	4:06:01 PM	SiCl4 pre valve closed
10/25/2011	4:06:01 PM	SiCl4 post valve closed
10/25/2011	4:06:01 PM	Bypass valve closed
10/25/2011	4:06:01 PM	Bubbler valve closed
10/25/2011	4:06:01 PM	Main Vac valve opened
10/25/2011	4:06:01 PM	Helium MFC set to  0.000000
10/25/2011	4:06:01 PM	H2 MFC set to  0.000000
10/25/2011	4:06:01 PM	BCl3 MFC set to  0.000000
10/25/2011	4:06:01 PM	PHl3 MFC set to  0.000000
10/25/2011	4:06:01 PM	SiCl4 MFC set to  0.000000
10/25/2011	4:06:01 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	4:06:01 PM	Tube furnace set to 0
10/25/2011	4:06:02 PM	Run finished at 4:06 PM
10/25/2011	4:06:02 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/25/2011	4:06:51 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/25/2011	4:06:52 PM	Recipe started at 4:06 PM
10/25/2011	4:06:52 PM	Helium valve closed
10/25/2011	4:06:52 PM	H2 valve closed
10/25/2011	4:06:52 PM	BCl3 valve closed
10/25/2011	4:06:52 PM	PH3 valve closed
10/25/2011	4:06:52 PM	SiCl4 pre valve closed
10/25/2011	4:06:52 PM	SiCl4 post valve closed
10/25/2011	4:06:52 PM	Main Vac valve closed
10/25/2011	4:06:52 PM	Bypass valve closed
10/25/2011	4:06:52 PM	Bubbler valve closed
10/25/2011	4:06:52 PM	Helium MFC set to  0.000000
10/25/2011	4:06:52 PM	H2 MFC set to  0.000000
10/25/2011	4:06:52 PM	BCl3 MFC set to  0.000000
10/25/2011	4:06:52 PM	PHl3 MFC set to  0.000000
10/25/2011	4:06:52 PM	SiCl4 MFC set to  0.000000
10/25/2011	4:06:52 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	4:06:52 PM	Tube furnace set to 0
10/25/2011	4:06:55 PM	H2 valve closed
10/25/2011	4:06:55 PM	BCl3 valve closed
10/25/2011	4:06:55 PM	PH3 valve closed
10/25/2011	4:06:55 PM	SiCl4 pre valve closed
10/25/2011	4:06:55 PM	SiCl4 post valve closed
10/25/2011	4:06:55 PM	Main Vac valve closed
10/25/2011	4:06:55 PM	Bypass valve closed
10/25/2011	4:06:55 PM	Bubbler valve closed
10/25/2011	4:06:55 PM	Helium valve opened
10/25/2011	4:06:55 PM	Helium MFC set to  500.000000
10/25/2011	4:06:55 PM	H2 MFC set to  0.000000
10/25/2011	4:06:55 PM	BCl3 MFC set to  0.000000
10/25/2011	4:06:55 PM	PHl3 MFC set to  0.000000
10/25/2011	4:06:55 PM	SiCl4 MFC set to  0.000000
10/25/2011	4:06:55 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	4:06:55 PM	Tube furnace set to 0
10/25/2011	4:08:01 PM	Helium valve closed
10/25/2011	4:08:01 PM	H2 valve closed
10/25/2011	4:08:01 PM	BCl3 valve closed
10/25/2011	4:08:01 PM	PH3 valve closed
10/25/2011	4:08:01 PM	SiCl4 pre valve closed
10/25/2011	4:08:01 PM	SiCl4 post valve closed
10/25/2011	4:08:01 PM	Main Vac valve closed
10/25/2011	4:08:01 PM	Bypass valve closed
10/25/2011	4:08:01 PM	Bubbler valve closed
10/25/2011	4:08:01 PM	Helium MFC set to  0.000000
10/25/2011	4:08:01 PM	H2 MFC set to  0.000000
10/25/2011	4:08:01 PM	BCl3 MFC set to  0.000000
10/25/2011	4:08:01 PM	PHl3 MFC set to  0.000000
10/25/2011	4:08:01 PM	SiCl4 MFC set to  0.000000
10/25/2011	4:08:01 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	4:08:01 PM	Tube furnace set to 0
10/25/2011	4:08:02 PM	Run finished at 4:08 PM
10/25/2011	4:08:02 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/25/2011	4:13:40 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/25/2011	4:13:41 PM	Recipe started at 4:13 PM
10/25/2011	4:13:41 PM	Helium valve closed
10/25/2011	4:13:41 PM	H2 valve closed
10/25/2011	4:13:41 PM	BCl3 valve closed
10/25/2011	4:13:41 PM	PH3 valve closed
10/25/2011	4:13:41 PM	SiCl4 pre valve closed
10/25/2011	4:13:41 PM	SiCl4 post valve closed
10/25/2011	4:13:41 PM	Main Vac valve closed
10/25/2011	4:13:41 PM	Bubbler valve closed
10/25/2011	4:13:41 PM	Bypass valve opened
10/25/2011	4:13:41 PM	Helium MFC set to  0.000000
10/25/2011	4:13:41 PM	H2 MFC set to  0.000000
10/25/2011	4:13:41 PM	BCl3 MFC set to  0.000000
10/25/2011	4:13:41 PM	PHl3 MFC set to  0.000000
10/25/2011	4:13:41 PM	SiCl4 MFC set to  0.000000
10/25/2011	4:13:41 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	4:13:41 PM	Tube furnace set to 0
10/25/2011	4:14:48 PM	Helium valve closed
10/25/2011	4:14:48 PM	H2 valve closed
10/25/2011	4:14:48 PM	BCl3 valve closed
10/25/2011	4:14:48 PM	PH3 valve closed
10/25/2011	4:14:48 PM	SiCl4 pre valve closed
10/25/2011	4:14:48 PM	SiCl4 post valve closed
10/25/2011	4:14:48 PM	Main Vac valve closed
10/25/2011	4:14:48 PM	Bubbler valve closed
10/25/2011	4:14:48 PM	Bypass valve opened
10/25/2011	4:14:48 PM	Helium MFC set to  0.000000
10/25/2011	4:14:48 PM	H2 MFC set to  0.000000
10/25/2011	4:14:48 PM	BCl3 MFC set to  0.000000
10/25/2011	4:14:48 PM	PHl3 MFC set to  0.000000
10/25/2011	4:14:48 PM	SiCl4 MFC set to  0.000000
10/25/2011	4:14:48 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	4:14:48 PM	Tube furnace set to 0
10/25/2011	4:15:48 PM	Helium valve closed
10/25/2011	4:15:48 PM	H2 valve closed
10/25/2011	4:15:48 PM	BCl3 valve closed
10/25/2011	4:15:48 PM	PH3 valve closed
10/25/2011	4:15:48 PM	SiCl4 pre valve closed
10/25/2011	4:15:48 PM	SiCl4 post valve closed
10/25/2011	4:15:48 PM	Bypass valve closed
10/25/2011	4:15:48 PM	Bubbler valve closed
10/25/2011	4:15:48 PM	Main Vac valve opened
10/25/2011	4:15:48 PM	Helium MFC set to  0.000000
10/25/2011	4:15:48 PM	H2 MFC set to  0.000000
10/25/2011	4:15:48 PM	BCl3 MFC set to  0.000000
10/25/2011	4:15:48 PM	PHl3 MFC set to  0.000000
10/25/2011	4:15:48 PM	SiCl4 MFC set to  0.000000
10/25/2011	4:15:48 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	4:15:48 PM	Tube furnace set to 0
10/25/2011	4:15:49 PM	Run finished at 4:15 PM
10/25/2011	4:15:49 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/25/2011	4:22:40 PM	Tube furnace set to 150
10/25/2011	4:34:12 PM	Recipe started at 4:34 PM
10/25/2011	4:34:12 PM	Helium valve closed
10/25/2011	4:34:12 PM	H2 valve closed
10/25/2011	4:34:12 PM	BCl3 valve closed
10/25/2011	4:34:12 PM	PH3 valve closed
10/25/2011	4:34:12 PM	SiCl4 pre valve closed
10/25/2011	4:34:12 PM	SiCl4 post valve closed
10/25/2011	4:34:12 PM	Bypass valve closed
10/25/2011	4:34:12 PM	Bubbler valve closed
10/25/2011	4:34:12 PM	Main Vac valve opened
10/25/2011	4:34:12 PM	Helium MFC set to  0.000000
10/25/2011	4:34:12 PM	H2 MFC set to  0.000000
10/25/2011	4:34:12 PM	BCl3 MFC set to  0.000000
10/25/2011	4:34:12 PM	PHl3 MFC set to  0.000000
10/25/2011	4:34:12 PM	SiCl4 MFC set to  0.000000
10/25/2011	4:34:12 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	4:34:13 PM	Tube furnace set to 150
10/25/2011	4:34:17 PM	H2 valve closed
10/25/2011	4:34:17 PM	BCl3 valve closed
10/25/2011	4:34:17 PM	PH3 valve closed
10/25/2011	4:34:17 PM	SiCl4 pre valve closed
10/25/2011	4:34:17 PM	SiCl4 post valve closed
10/25/2011	4:34:17 PM	Bypass valve closed
10/25/2011	4:34:17 PM	Bubbler valve closed
10/25/2011	4:34:17 PM	Helium valve opened
10/25/2011	4:34:17 PM	Main Vac valve opened
10/25/2011	4:34:17 PM	Helium MFC set to  20.000000
10/25/2011	4:34:17 PM	H2 MFC set to  0.000000
10/25/2011	4:34:17 PM	BCl3 MFC set to  0.000000
10/25/2011	4:34:17 PM	PHl3 MFC set to  0.000000
10/25/2011	4:34:17 PM	SiCl4 MFC set to  0.000000
10/25/2011	4:34:17 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	4:34:17 PM	Tube furnace set to 150
10/25/2011	4:34:47 PM	Helium valve closed
10/25/2011	4:34:47 PM	H2 valve closed
10/25/2011	4:34:47 PM	BCl3 valve closed
10/25/2011	4:34:47 PM	PH3 valve closed
10/25/2011	4:34:47 PM	SiCl4 pre valve closed
10/25/2011	4:34:47 PM	SiCl4 post valve closed
10/25/2011	4:34:47 PM	Bypass valve closed
10/25/2011	4:34:47 PM	Bubbler valve closed
10/25/2011	4:34:47 PM	Main Vac valve opened
10/25/2011	4:34:47 PM	Helium MFC set to  0.000000
10/25/2011	4:34:47 PM	H2 MFC set to  0.000000
10/25/2011	4:34:47 PM	BCl3 MFC set to  0.000000
10/25/2011	4:34:47 PM	PHl3 MFC set to  0.000000
10/25/2011	4:34:47 PM	SiCl4 MFC set to  0.000000
10/25/2011	4:34:47 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	4:34:47 PM	Tube furnace set to 150
10/25/2011	4:35:17 PM	H2 valve closed
10/25/2011	4:35:17 PM	BCl3 valve closed
10/25/2011	4:35:17 PM	PH3 valve closed
10/25/2011	4:35:17 PM	SiCl4 pre valve closed
10/25/2011	4:35:17 PM	SiCl4 post valve closed
10/25/2011	4:35:17 PM	Bypass valve closed
10/25/2011	4:35:17 PM	Bubbler valve closed
10/25/2011	4:35:17 PM	Helium valve opened
10/25/2011	4:35:17 PM	Main Vac valve opened
10/25/2011	4:35:17 PM	Helium MFC set to  20.000000
10/25/2011	4:35:17 PM	H2 MFC set to  0.000000
10/25/2011	4:35:17 PM	BCl3 MFC set to  0.000000
10/25/2011	4:35:17 PM	PHl3 MFC set to  0.000000
10/25/2011	4:35:17 PM	SiCl4 MFC set to  0.000000
10/25/2011	4:35:17 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	4:35:17 PM	Tube furnace set to 150
10/25/2011	4:35:47 PM	Helium valve closed
10/25/2011	4:35:47 PM	H2 valve closed
10/25/2011	4:35:47 PM	BCl3 valve closed
10/25/2011	4:35:47 PM	PH3 valve closed
10/25/2011	4:35:47 PM	SiCl4 pre valve closed
10/25/2011	4:35:47 PM	SiCl4 post valve closed
10/25/2011	4:35:47 PM	Bypass valve closed
10/25/2011	4:35:47 PM	Bubbler valve closed
10/25/2011	4:35:47 PM	Main Vac valve opened
10/25/2011	4:35:47 PM	Helium MFC set to  0.000000
10/25/2011	4:35:47 PM	H2 MFC set to  0.000000
10/25/2011	4:35:47 PM	BCl3 MFC set to  0.000000
10/25/2011	4:35:47 PM	PHl3 MFC set to  0.000000
10/25/2011	4:35:47 PM	SiCl4 MFC set to  0.000000
10/25/2011	4:35:47 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	4:35:47 PM	Tube furnace set to 150
10/25/2011	4:36:17 PM	H2 valve closed
10/25/2011	4:36:17 PM	BCl3 valve closed
10/25/2011	4:36:17 PM	PH3 valve closed
10/25/2011	4:36:17 PM	SiCl4 pre valve closed
10/25/2011	4:36:17 PM	SiCl4 post valve closed
10/25/2011	4:36:17 PM	Bypass valve closed
10/25/2011	4:36:17 PM	Bubbler valve closed
10/25/2011	4:36:17 PM	Helium valve opened
10/25/2011	4:36:17 PM	Main Vac valve opened
10/25/2011	4:36:17 PM	Helium MFC set to  20.000000
10/25/2011	4:36:17 PM	H2 MFC set to  0.000000
10/25/2011	4:36:17 PM	BCl3 MFC set to  0.000000
10/25/2011	4:36:17 PM	PHl3 MFC set to  0.000000
10/25/2011	4:36:17 PM	SiCl4 MFC set to  0.000000
10/25/2011	4:36:17 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	4:36:18 PM	Tube furnace set to 150
10/25/2011	4:36:48 PM	Helium valve closed
10/25/2011	4:36:48 PM	H2 valve closed
10/25/2011	4:36:48 PM	BCl3 valve closed
10/25/2011	4:36:48 PM	PH3 valve closed
10/25/2011	4:36:48 PM	SiCl4 pre valve closed
10/25/2011	4:36:48 PM	SiCl4 post valve closed
10/25/2011	4:36:48 PM	Bypass valve closed
10/25/2011	4:36:48 PM	Bubbler valve closed
10/25/2011	4:36:48 PM	Main Vac valve opened
10/25/2011	4:36:48 PM	Helium MFC set to  0.000000
10/25/2011	4:36:48 PM	H2 MFC set to  0.000000
10/25/2011	4:36:48 PM	BCl3 MFC set to  0.000000
10/25/2011	4:36:48 PM	PHl3 MFC set to  0.000000
10/25/2011	4:36:48 PM	SiCl4 MFC set to  0.000000
10/25/2011	4:36:48 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	4:36:48 PM	Tube furnace set to 150
10/25/2011	4:37:18 PM	H2 valve closed
10/25/2011	4:37:18 PM	BCl3 valve closed
10/25/2011	4:37:18 PM	PH3 valve closed
10/25/2011	4:37:18 PM	SiCl4 pre valve closed
10/25/2011	4:37:18 PM	SiCl4 post valve closed
10/25/2011	4:37:18 PM	Bypass valve closed
10/25/2011	4:37:18 PM	Bubbler valve closed
10/25/2011	4:37:18 PM	Helium valve opened
10/25/2011	4:37:18 PM	Main Vac valve opened
10/25/2011	4:37:18 PM	Helium MFC set to  20.000000
10/25/2011	4:37:18 PM	H2 MFC set to  0.000000
10/25/2011	4:37:18 PM	BCl3 MFC set to  0.000000
10/25/2011	4:37:18 PM	PHl3 MFC set to  0.000000
10/25/2011	4:37:18 PM	SiCl4 MFC set to  0.000000
10/25/2011	4:37:18 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	4:37:18 PM	Tube furnace set to 150
10/25/2011	4:37:48 PM	Helium valve closed
10/25/2011	4:37:48 PM	H2 valve closed
10/25/2011	4:37:48 PM	BCl3 valve closed
10/25/2011	4:37:48 PM	PH3 valve closed
10/25/2011	4:37:48 PM	SiCl4 pre valve closed
10/25/2011	4:37:48 PM	SiCl4 post valve closed
10/25/2011	4:37:48 PM	Bypass valve closed
10/25/2011	4:37:48 PM	Bubbler valve closed
10/25/2011	4:37:48 PM	Main Vac valve opened
10/25/2011	4:37:48 PM	Helium MFC set to  0.000000
10/25/2011	4:37:48 PM	H2 MFC set to  0.000000
10/25/2011	4:37:48 PM	BCl3 MFC set to  0.000000
10/25/2011	4:37:48 PM	PHl3 MFC set to  0.000000
10/25/2011	4:37:48 PM	SiCl4 MFC set to  0.000000
10/25/2011	4:37:48 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	4:37:48 PM	Tube furnace set to 150
10/25/2011	4:38:18 PM	H2 valve closed
10/25/2011	4:38:18 PM	BCl3 valve closed
10/25/2011	4:38:18 PM	PH3 valve closed
10/25/2011	4:38:18 PM	SiCl4 pre valve closed
10/25/2011	4:38:18 PM	SiCl4 post valve closed
10/25/2011	4:38:18 PM	Bypass valve closed
10/25/2011	4:38:18 PM	Bubbler valve closed
10/25/2011	4:38:18 PM	Helium valve opened
10/25/2011	4:38:18 PM	Main Vac valve opened
10/25/2011	4:38:18 PM	Helium MFC set to  20.000000
10/25/2011	4:38:18 PM	H2 MFC set to  0.000000
10/25/2011	4:38:18 PM	BCl3 MFC set to  0.000000
10/25/2011	4:38:18 PM	PHl3 MFC set to  0.000000
10/25/2011	4:38:18 PM	SiCl4 MFC set to  0.000000
10/25/2011	4:38:18 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	4:38:18 PM	Tube furnace set to 150
10/25/2011	4:38:48 PM	Helium valve closed
10/25/2011	4:38:48 PM	H2 valve closed
10/25/2011	4:38:48 PM	BCl3 valve closed
10/25/2011	4:38:48 PM	PH3 valve closed
10/25/2011	4:38:48 PM	SiCl4 pre valve closed
10/25/2011	4:38:48 PM	SiCl4 post valve closed
10/25/2011	4:38:48 PM	Bypass valve closed
10/25/2011	4:38:48 PM	Bubbler valve closed
10/25/2011	4:38:48 PM	Main Vac valve opened
10/25/2011	4:38:48 PM	Helium MFC set to  0.000000
10/25/2011	4:38:48 PM	H2 MFC set to  0.000000
10/25/2011	4:38:48 PM	BCl3 MFC set to  0.000000
10/25/2011	4:38:48 PM	PHl3 MFC set to  0.000000
10/25/2011	4:38:48 PM	SiCl4 MFC set to  0.000000
10/25/2011	4:38:48 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	4:38:49 PM	Tube furnace set to 150
10/25/2011	4:39:19 PM	H2 valve closed
10/25/2011	4:39:19 PM	BCl3 valve closed
10/25/2011	4:39:19 PM	PH3 valve closed
10/25/2011	4:39:19 PM	SiCl4 pre valve closed
10/25/2011	4:39:19 PM	SiCl4 post valve closed
10/25/2011	4:39:19 PM	Bypass valve closed
10/25/2011	4:39:19 PM	Bubbler valve closed
10/25/2011	4:39:19 PM	Helium valve opened
10/25/2011	4:39:19 PM	Main Vac valve opened
10/25/2011	4:39:19 PM	Helium MFC set to  20.000000
10/25/2011	4:39:19 PM	H2 MFC set to  0.000000
10/25/2011	4:39:19 PM	BCl3 MFC set to  0.000000
10/25/2011	4:39:19 PM	PHl3 MFC set to  0.000000
10/25/2011	4:39:19 PM	SiCl4 MFC set to  0.000000
10/25/2011	4:39:19 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	4:39:19 PM	Tube furnace set to 150
10/25/2011	4:39:49 PM	Helium valve closed
10/25/2011	4:39:49 PM	H2 valve closed
10/25/2011	4:39:49 PM	BCl3 valve closed
10/25/2011	4:39:49 PM	PH3 valve closed
10/25/2011	4:39:49 PM	SiCl4 pre valve closed
10/25/2011	4:39:49 PM	SiCl4 post valve closed
10/25/2011	4:39:49 PM	Bypass valve closed
10/25/2011	4:39:49 PM	Bubbler valve closed
10/25/2011	4:39:49 PM	Main Vac valve opened
10/25/2011	4:39:49 PM	Helium MFC set to  0.000000
10/25/2011	4:39:49 PM	H2 MFC set to  0.000000
10/25/2011	4:39:49 PM	BCl3 MFC set to  0.000000
10/25/2011	4:39:49 PM	PHl3 MFC set to  0.000000
10/25/2011	4:39:49 PM	SiCl4 MFC set to  0.000000
10/25/2011	4:39:49 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	4:39:49 PM	Tube furnace set to 150
10/25/2011	4:40:19 PM	H2 valve closed
10/25/2011	4:40:19 PM	BCl3 valve closed
10/25/2011	4:40:19 PM	PH3 valve closed
10/25/2011	4:40:19 PM	SiCl4 pre valve closed
10/25/2011	4:40:19 PM	SiCl4 post valve closed
10/25/2011	4:40:19 PM	Bypass valve closed
10/25/2011	4:40:19 PM	Bubbler valve closed
10/25/2011	4:40:19 PM	Helium valve opened
10/25/2011	4:40:19 PM	Main Vac valve opened
10/25/2011	4:40:19 PM	Helium MFC set to  20.000000
10/25/2011	4:40:19 PM	H2 MFC set to  0.000000
10/25/2011	4:40:19 PM	BCl3 MFC set to  0.000000
10/25/2011	4:40:19 PM	PHl3 MFC set to  0.000000
10/25/2011	4:40:19 PM	SiCl4 MFC set to  0.000000
10/25/2011	4:40:19 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	4:40:19 PM	Tube furnace set to 150
10/25/2011	4:40:49 PM	Helium valve closed
10/25/2011	4:40:49 PM	H2 valve closed
10/25/2011	4:40:49 PM	BCl3 valve closed
10/25/2011	4:40:49 PM	PH3 valve closed
10/25/2011	4:40:49 PM	SiCl4 pre valve closed
10/25/2011	4:40:49 PM	SiCl4 post valve closed
10/25/2011	4:40:49 PM	Bypass valve closed
10/25/2011	4:40:49 PM	Bubbler valve closed
10/25/2011	4:40:49 PM	Main Vac valve opened
10/25/2011	4:40:49 PM	Helium MFC set to  0.000000
10/25/2011	4:40:49 PM	H2 MFC set to  0.000000
10/25/2011	4:40:49 PM	BCl3 MFC set to  0.000000
10/25/2011	4:40:49 PM	PHl3 MFC set to  0.000000
10/25/2011	4:40:49 PM	SiCl4 MFC set to  0.000000
10/25/2011	4:40:49 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	4:40:49 PM	Tube furnace set to 150
10/25/2011	4:41:19 PM	H2 valve closed
10/25/2011	4:41:20 PM	BCl3 valve closed
10/25/2011	4:41:20 PM	PH3 valve closed
10/25/2011	4:41:20 PM	SiCl4 pre valve closed
10/25/2011	4:41:20 PM	SiCl4 post valve closed
10/25/2011	4:41:20 PM	Bypass valve closed
10/25/2011	4:41:20 PM	Bubbler valve closed
10/25/2011	4:41:20 PM	Helium valve opened
10/25/2011	4:41:20 PM	Main Vac valve opened
10/25/2011	4:41:20 PM	Helium MFC set to  20.000000
10/25/2011	4:41:20 PM	H2 MFC set to  0.000000
10/25/2011	4:41:20 PM	BCl3 MFC set to  0.000000
10/25/2011	4:41:20 PM	PHl3 MFC set to  0.000000
10/25/2011	4:41:20 PM	SiCl4 MFC set to  0.000000
10/25/2011	4:41:20 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	4:41:20 PM	Tube furnace set to 150
10/25/2011	4:41:50 PM	Helium valve closed
10/25/2011	4:41:50 PM	H2 valve closed
10/25/2011	4:41:50 PM	BCl3 valve closed
10/25/2011	4:41:50 PM	PH3 valve closed
10/25/2011	4:41:50 PM	SiCl4 pre valve closed
10/25/2011	4:41:50 PM	SiCl4 post valve closed
10/25/2011	4:41:50 PM	Bypass valve closed
10/25/2011	4:41:50 PM	Bubbler valve closed
10/25/2011	4:41:50 PM	Main Vac valve opened
10/25/2011	4:41:50 PM	Helium MFC set to  0.000000
10/25/2011	4:41:50 PM	H2 MFC set to  0.000000
10/25/2011	4:41:50 PM	BCl3 MFC set to  0.000000
10/25/2011	4:41:50 PM	PHl3 MFC set to  0.000000
10/25/2011	4:41:50 PM	SiCl4 MFC set to  0.000000
10/25/2011	4:41:50 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	4:41:50 PM	Tube furnace set to 150
10/25/2011	4:42:20 PM	H2 valve closed
10/25/2011	4:42:20 PM	BCl3 valve closed
10/25/2011	4:42:20 PM	PH3 valve closed
10/25/2011	4:42:20 PM	SiCl4 pre valve closed
10/25/2011	4:42:20 PM	SiCl4 post valve closed
10/25/2011	4:42:20 PM	Bypass valve closed
10/25/2011	4:42:20 PM	Bubbler valve closed
10/25/2011	4:42:20 PM	Helium valve opened
10/25/2011	4:42:20 PM	Main Vac valve opened
10/25/2011	4:42:20 PM	Helium MFC set to  20.000000
10/25/2011	4:42:20 PM	H2 MFC set to  0.000000
10/25/2011	4:42:20 PM	BCl3 MFC set to  0.000000
10/25/2011	4:42:20 PM	PHl3 MFC set to  0.000000
10/25/2011	4:42:20 PM	SiCl4 MFC set to  0.000000
10/25/2011	4:42:20 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	4:42:20 PM	Tube furnace set to 150
10/25/2011	4:42:50 PM	Helium valve closed
10/25/2011	4:42:50 PM	H2 valve closed
10/25/2011	4:42:50 PM	BCl3 valve closed
10/25/2011	4:42:50 PM	PH3 valve closed
10/25/2011	4:42:50 PM	SiCl4 pre valve closed
10/25/2011	4:42:50 PM	SiCl4 post valve closed
10/25/2011	4:42:50 PM	Bypass valve closed
10/25/2011	4:42:50 PM	Bubbler valve closed
10/25/2011	4:42:50 PM	Main Vac valve opened
10/25/2011	4:42:50 PM	Helium MFC set to  0.000000
10/25/2011	4:42:50 PM	H2 MFC set to  0.000000
10/25/2011	4:42:50 PM	BCl3 MFC set to  0.000000
10/25/2011	4:42:50 PM	PHl3 MFC set to  0.000000
10/25/2011	4:42:50 PM	SiCl4 MFC set to  0.000000
10/25/2011	4:42:50 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	4:42:50 PM	Tube furnace set to 150
10/25/2011	4:43:20 PM	H2 valve closed
10/25/2011	4:43:20 PM	BCl3 valve closed
10/25/2011	4:43:20 PM	PH3 valve closed
10/25/2011	4:43:20 PM	SiCl4 pre valve closed
10/25/2011	4:43:20 PM	SiCl4 post valve closed
10/25/2011	4:43:20 PM	Bypass valve closed
10/25/2011	4:43:20 PM	Bubbler valve closed
10/25/2011	4:43:20 PM	Helium valve opened
10/25/2011	4:43:20 PM	Main Vac valve opened
10/25/2011	4:43:20 PM	Helium MFC set to  20.000000
10/25/2011	4:43:20 PM	H2 MFC set to  0.000000
10/25/2011	4:43:20 PM	BCl3 MFC set to  0.000000
10/25/2011	4:43:20 PM	PHl3 MFC set to  0.000000
10/25/2011	4:43:20 PM	SiCl4 MFC set to  0.000000
10/25/2011	4:43:20 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	4:43:21 PM	Tube furnace set to 150
10/25/2011	4:43:51 PM	Helium valve closed
10/25/2011	4:43:51 PM	H2 valve closed
10/25/2011	4:43:51 PM	BCl3 valve closed
10/25/2011	4:43:51 PM	PH3 valve closed
10/25/2011	4:43:51 PM	SiCl4 pre valve closed
10/25/2011	4:43:51 PM	SiCl4 post valve closed
10/25/2011	4:43:51 PM	Bypass valve closed
10/25/2011	4:43:51 PM	Bubbler valve closed
10/25/2011	4:43:51 PM	Main Vac valve opened
10/25/2011	4:43:51 PM	Helium MFC set to  0.000000
10/25/2011	4:43:51 PM	H2 MFC set to  0.000000
10/25/2011	4:43:51 PM	BCl3 MFC set to  0.000000
10/25/2011	4:43:51 PM	PHl3 MFC set to  0.000000
10/25/2011	4:43:51 PM	SiCl4 MFC set to  0.000000
10/25/2011	4:43:51 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	4:43:51 PM	Tube furnace set to 150
10/25/2011	4:43:52 PM	Run finished at 4:43 PM
10/25/2011	4:52:10 PM	Recipe started at 4:52 PM
10/25/2011	4:52:10 PM	Helium valve closed
10/25/2011	4:52:10 PM	H2 valve closed
10/25/2011	4:52:10 PM	BCl3 valve closed
10/25/2011	4:52:10 PM	PH3 valve closed
10/25/2011	4:52:10 PM	SiCl4 pre valve closed
10/25/2011	4:52:10 PM	SiCl4 post valve closed
10/25/2011	4:52:10 PM	Bypass valve closed
10/25/2011	4:52:10 PM	Bubbler valve closed
10/25/2011	4:52:10 PM	Main Vac valve opened
10/25/2011	4:52:10 PM	Helium MFC set to  0.000000
10/25/2011	4:52:10 PM	H2 MFC set to  0.000000
10/25/2011	4:52:10 PM	BCl3 MFC set to  0.000000
10/25/2011	4:52:10 PM	PHl3 MFC set to  0.000000
10/25/2011	4:52:10 PM	SiCl4 MFC set to  0.000000
10/25/2011	4:52:10 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	4:52:10 PM	Tube furnace set to 150
10/25/2011	4:52:40 PM	H2 valve closed
10/25/2011	4:52:40 PM	BCl3 valve closed
10/25/2011	4:52:40 PM	PH3 valve closed
10/25/2011	4:52:40 PM	SiCl4 pre valve closed
10/25/2011	4:52:40 PM	SiCl4 post valve closed
10/25/2011	4:52:40 PM	Bypass valve closed
10/25/2011	4:52:40 PM	Bubbler valve closed
10/25/2011	4:52:40 PM	Helium valve opened
10/25/2011	4:52:40 PM	Main Vac valve opened
10/25/2011	4:52:40 PM	Helium MFC set to  20.000000
10/25/2011	4:52:40 PM	H2 MFC set to  0.000000
10/25/2011	4:52:40 PM	BCl3 MFC set to  0.000000
10/25/2011	4:52:40 PM	PHl3 MFC set to  0.000000
10/25/2011	4:52:40 PM	SiCl4 MFC set to  0.000000
10/25/2011	4:52:40 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	4:52:40 PM	Tube furnace set to 150
10/25/2011	4:53:11 PM	Helium valve closed
10/25/2011	4:53:11 PM	H2 valve closed
10/25/2011	4:53:11 PM	BCl3 valve closed
10/25/2011	4:53:11 PM	PH3 valve closed
10/25/2011	4:53:11 PM	SiCl4 pre valve closed
10/25/2011	4:53:11 PM	SiCl4 post valve closed
10/25/2011	4:53:11 PM	Bypass valve closed
10/25/2011	4:53:11 PM	Bubbler valve closed
10/25/2011	4:53:11 PM	Main Vac valve opened
10/25/2011	4:53:11 PM	Helium MFC set to  0.000000
10/25/2011	4:53:11 PM	H2 MFC set to  0.000000
10/25/2011	4:53:11 PM	BCl3 MFC set to  0.000000
10/25/2011	4:53:11 PM	PHl3 MFC set to  0.000000
10/25/2011	4:53:11 PM	SiCl4 MFC set to  0.000000
10/25/2011	4:53:11 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	4:53:11 PM	Tube furnace set to 150
10/25/2011	4:53:41 PM	H2 valve closed
10/25/2011	4:53:41 PM	BCl3 valve closed
10/25/2011	4:53:41 PM	PH3 valve closed
10/25/2011	4:53:41 PM	SiCl4 pre valve closed
10/25/2011	4:53:41 PM	SiCl4 post valve closed
10/25/2011	4:53:41 PM	Bypass valve closed
10/25/2011	4:53:41 PM	Bubbler valve closed
10/25/2011	4:53:41 PM	Helium valve opened
10/25/2011	4:53:41 PM	Main Vac valve opened
10/25/2011	4:53:41 PM	Helium MFC set to  20.000000
10/25/2011	4:53:41 PM	H2 MFC set to  0.000000
10/25/2011	4:53:41 PM	BCl3 MFC set to  0.000000
10/25/2011	4:53:41 PM	PHl3 MFC set to  0.000000
10/25/2011	4:53:41 PM	SiCl4 MFC set to  0.000000
10/25/2011	4:53:41 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	4:53:41 PM	Tube furnace set to 150
10/25/2011	4:54:11 PM	Helium valve closed
10/25/2011	4:54:11 PM	H2 valve closed
10/25/2011	4:54:11 PM	BCl3 valve closed
10/25/2011	4:54:11 PM	PH3 valve closed
10/25/2011	4:54:11 PM	SiCl4 pre valve closed
10/25/2011	4:54:11 PM	SiCl4 post valve closed
10/25/2011	4:54:11 PM	Bypass valve closed
10/25/2011	4:54:11 PM	Bubbler valve closed
10/25/2011	4:54:11 PM	Main Vac valve opened
10/25/2011	4:54:11 PM	Helium MFC set to  0.000000
10/25/2011	4:54:11 PM	H2 MFC set to  0.000000
10/25/2011	4:54:11 PM	BCl3 MFC set to  0.000000
10/25/2011	4:54:11 PM	PHl3 MFC set to  0.000000
10/25/2011	4:54:11 PM	SiCl4 MFC set to  0.000000
10/25/2011	4:54:11 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	4:54:11 PM	Tube furnace set to 150
10/25/2011	4:54:41 PM	H2 valve closed
10/25/2011	4:54:41 PM	BCl3 valve closed
10/25/2011	4:54:41 PM	PH3 valve closed
10/25/2011	4:54:41 PM	SiCl4 pre valve closed
10/25/2011	4:54:41 PM	SiCl4 post valve closed
10/25/2011	4:54:41 PM	Bypass valve closed
10/25/2011	4:54:41 PM	Bubbler valve closed
10/25/2011	4:54:41 PM	Helium valve opened
10/25/2011	4:54:41 PM	Main Vac valve opened
10/25/2011	4:54:41 PM	Helium MFC set to  20.000000
10/25/2011	4:54:41 PM	H2 MFC set to  0.000000
10/25/2011	4:54:41 PM	BCl3 MFC set to  0.000000
10/25/2011	4:54:41 PM	PHl3 MFC set to  0.000000
10/25/2011	4:54:41 PM	SiCl4 MFC set to  0.000000
10/25/2011	4:54:41 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	4:54:41 PM	Tube furnace set to 150
10/25/2011	4:55:11 PM	Helium valve closed
10/25/2011	4:55:11 PM	H2 valve closed
10/25/2011	4:55:11 PM	BCl3 valve closed
10/25/2011	4:55:11 PM	PH3 valve closed
10/25/2011	4:55:11 PM	SiCl4 pre valve closed
10/25/2011	4:55:11 PM	SiCl4 post valve closed
10/25/2011	4:55:11 PM	Bypass valve closed
10/25/2011	4:55:11 PM	Bubbler valve closed
10/25/2011	4:55:11 PM	Main Vac valve opened
10/25/2011	4:55:11 PM	Helium MFC set to  0.000000
10/25/2011	4:55:11 PM	H2 MFC set to  0.000000
10/25/2011	4:55:11 PM	BCl3 MFC set to  0.000000
10/25/2011	4:55:11 PM	PHl3 MFC set to  0.000000
10/25/2011	4:55:11 PM	SiCl4 MFC set to  0.000000
10/25/2011	4:55:11 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	4:55:11 PM	Tube furnace set to 150
10/25/2011	4:55:41 PM	H2 valve closed
10/25/2011	4:55:41 PM	BCl3 valve closed
10/25/2011	4:55:41 PM	PH3 valve closed
10/25/2011	4:55:41 PM	SiCl4 pre valve closed
10/25/2011	4:55:41 PM	SiCl4 post valve closed
10/25/2011	4:55:42 PM	Bypass valve closed
10/25/2011	4:55:42 PM	Bubbler valve closed
10/25/2011	4:55:42 PM	Helium valve opened
10/25/2011	4:55:42 PM	Main Vac valve opened
10/25/2011	4:55:42 PM	Helium MFC set to  20.000000
10/25/2011	4:55:42 PM	H2 MFC set to  0.000000
10/25/2011	4:55:42 PM	BCl3 MFC set to  0.000000
10/25/2011	4:55:42 PM	PHl3 MFC set to  0.000000
10/25/2011	4:55:42 PM	SiCl4 MFC set to  0.000000
10/25/2011	4:55:42 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	4:55:42 PM	Tube furnace set to 150
10/25/2011	4:56:12 PM	Helium valve closed
10/25/2011	4:56:12 PM	H2 valve closed
10/25/2011	4:56:12 PM	BCl3 valve closed
10/25/2011	4:56:12 PM	PH3 valve closed
10/25/2011	4:56:12 PM	SiCl4 pre valve closed
10/25/2011	4:56:12 PM	SiCl4 post valve closed
10/25/2011	4:56:12 PM	Bypass valve closed
10/25/2011	4:56:12 PM	Bubbler valve closed
10/25/2011	4:56:12 PM	Main Vac valve opened
10/25/2011	4:56:12 PM	Helium MFC set to  0.000000
10/25/2011	4:56:12 PM	H2 MFC set to  0.000000
10/25/2011	4:56:12 PM	BCl3 MFC set to  0.000000
10/25/2011	4:56:12 PM	PHl3 MFC set to  0.000000
10/25/2011	4:56:12 PM	SiCl4 MFC set to  0.000000
10/25/2011	4:56:12 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	4:56:12 PM	Tube furnace set to 150
10/25/2011	4:56:42 PM	H2 valve closed
10/25/2011	4:56:42 PM	BCl3 valve closed
10/25/2011	4:56:42 PM	PH3 valve closed
10/25/2011	4:56:42 PM	SiCl4 pre valve closed
10/25/2011	4:56:42 PM	SiCl4 post valve closed
10/25/2011	4:56:42 PM	Bypass valve closed
10/25/2011	4:56:42 PM	Bubbler valve closed
10/25/2011	4:56:42 PM	Helium valve opened
10/25/2011	4:56:42 PM	Main Vac valve opened
10/25/2011	4:56:42 PM	Helium MFC set to  20.000000
10/25/2011	4:56:42 PM	H2 MFC set to  0.000000
10/25/2011	4:56:42 PM	BCl3 MFC set to  0.000000
10/25/2011	4:56:42 PM	PHl3 MFC set to  0.000000
10/25/2011	4:56:42 PM	SiCl4 MFC set to  0.000000
10/25/2011	4:56:42 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	4:56:42 PM	Tube furnace set to 150
10/25/2011	4:57:12 PM	Helium valve closed
10/25/2011	4:57:12 PM	H2 valve closed
10/25/2011	4:57:12 PM	BCl3 valve closed
10/25/2011	4:57:12 PM	PH3 valve closed
10/25/2011	4:57:12 PM	SiCl4 pre valve closed
10/25/2011	4:57:12 PM	SiCl4 post valve closed
10/25/2011	4:57:12 PM	Bypass valve closed
10/25/2011	4:57:12 PM	Bubbler valve closed
10/25/2011	4:57:12 PM	Main Vac valve opened
10/25/2011	4:57:12 PM	Helium MFC set to  0.000000
10/25/2011	4:57:12 PM	H2 MFC set to  0.000000
10/25/2011	4:57:12 PM	BCl3 MFC set to  0.000000
10/25/2011	4:57:12 PM	PHl3 MFC set to  0.000000
10/25/2011	4:57:12 PM	SiCl4 MFC set to  0.000000
10/25/2011	4:57:12 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	4:57:12 PM	Tube furnace set to 150
10/25/2011	4:57:42 PM	H2 valve closed
10/25/2011	4:57:42 PM	BCl3 valve closed
10/25/2011	4:57:42 PM	PH3 valve closed
10/25/2011	4:57:42 PM	SiCl4 pre valve closed
10/25/2011	4:57:42 PM	SiCl4 post valve closed
10/25/2011	4:57:42 PM	Bypass valve closed
10/25/2011	4:57:42 PM	Bubbler valve closed
10/25/2011	4:57:42 PM	Helium valve opened
10/25/2011	4:57:42 PM	Main Vac valve opened
10/25/2011	4:57:42 PM	Helium MFC set to  20.000000
10/25/2011	4:57:42 PM	H2 MFC set to  0.000000
10/25/2011	4:57:42 PM	BCl3 MFC set to  0.000000
10/25/2011	4:57:42 PM	PHl3 MFC set to  0.000000
10/25/2011	4:57:42 PM	SiCl4 MFC set to  0.000000
10/25/2011	4:57:42 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	4:57:42 PM	Tube furnace set to 150
10/25/2011	4:58:12 PM	Helium valve closed
10/25/2011	4:58:12 PM	H2 valve closed
10/25/2011	4:58:12 PM	BCl3 valve closed
10/25/2011	4:58:12 PM	PH3 valve closed
10/25/2011	4:58:12 PM	SiCl4 pre valve closed
10/25/2011	4:58:12 PM	SiCl4 post valve closed
10/25/2011	4:58:12 PM	Bypass valve closed
10/25/2011	4:58:12 PM	Bubbler valve closed
10/25/2011	4:58:12 PM	Main Vac valve opened
10/25/2011	4:58:12 PM	Helium MFC set to  0.000000
10/25/2011	4:58:12 PM	H2 MFC set to  0.000000
10/25/2011	4:58:12 PM	BCl3 MFC set to  0.000000
10/25/2011	4:58:12 PM	PHl3 MFC set to  0.000000
10/25/2011	4:58:12 PM	SiCl4 MFC set to  0.000000
10/25/2011	4:58:12 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	4:58:13 PM	Tube furnace set to 150
10/25/2011	4:58:43 PM	H2 valve closed
10/25/2011	4:58:43 PM	BCl3 valve closed
10/25/2011	4:58:43 PM	PH3 valve closed
10/25/2011	4:58:43 PM	SiCl4 pre valve closed
10/25/2011	4:58:43 PM	SiCl4 post valve closed
10/25/2011	4:58:43 PM	Bypass valve closed
10/25/2011	4:58:43 PM	Bubbler valve closed
10/25/2011	4:58:43 PM	Helium valve opened
10/25/2011	4:58:43 PM	Main Vac valve opened
10/25/2011	4:58:43 PM	Helium MFC set to  20.000000
10/25/2011	4:58:43 PM	H2 MFC set to  0.000000
10/25/2011	4:58:43 PM	BCl3 MFC set to  0.000000
10/25/2011	4:58:43 PM	PHl3 MFC set to  0.000000
10/25/2011	4:58:43 PM	SiCl4 MFC set to  0.000000
10/25/2011	4:58:43 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	4:58:43 PM	Tube furnace set to 150
10/25/2011	4:59:13 PM	Helium valve closed
10/25/2011	4:59:13 PM	H2 valve closed
10/25/2011	4:59:13 PM	BCl3 valve closed
10/25/2011	4:59:13 PM	PH3 valve closed
10/25/2011	4:59:13 PM	SiCl4 pre valve closed
10/25/2011	4:59:13 PM	SiCl4 post valve closed
10/25/2011	4:59:13 PM	Bypass valve closed
10/25/2011	4:59:13 PM	Bubbler valve closed
10/25/2011	4:59:13 PM	Main Vac valve opened
10/25/2011	4:59:13 PM	Helium MFC set to  0.000000
10/25/2011	4:59:13 PM	H2 MFC set to  0.000000
10/25/2011	4:59:13 PM	BCl3 MFC set to  0.000000
10/25/2011	4:59:13 PM	PHl3 MFC set to  0.000000
10/25/2011	4:59:13 PM	SiCl4 MFC set to  0.000000
10/25/2011	4:59:13 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	4:59:13 PM	Tube furnace set to 150
10/25/2011	4:59:43 PM	H2 valve closed
10/25/2011	4:59:43 PM	BCl3 valve closed
10/25/2011	4:59:43 PM	PH3 valve closed
10/25/2011	4:59:43 PM	SiCl4 pre valve closed
10/25/2011	4:59:43 PM	SiCl4 post valve closed
10/25/2011	4:59:43 PM	Bypass valve closed
10/25/2011	4:59:43 PM	Bubbler valve closed
10/25/2011	4:59:43 PM	Helium valve opened
10/25/2011	4:59:43 PM	Main Vac valve opened
10/25/2011	4:59:43 PM	Helium MFC set to  20.000000
10/25/2011	4:59:43 PM	H2 MFC set to  0.000000
10/25/2011	4:59:43 PM	BCl3 MFC set to  0.000000
10/25/2011	4:59:43 PM	PHl3 MFC set to  0.000000
10/25/2011	4:59:43 PM	SiCl4 MFC set to  0.000000
10/25/2011	4:59:43 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	4:59:43 PM	Tube furnace set to 150
10/25/2011	5:00:31 PM	Helium valve closed
10/25/2011	5:00:31 PM	H2 valve closed
10/25/2011	5:00:31 PM	BCl3 valve closed
10/25/2011	5:00:31 PM	PH3 valve closed
10/25/2011	5:00:31 PM	SiCl4 pre valve closed
10/25/2011	5:00:31 PM	SiCl4 post valve closed
10/25/2011	5:00:31 PM	Bypass valve closed
10/25/2011	5:00:31 PM	Bubbler valve closed
10/25/2011	5:00:31 PM	Main Vac valve opened
10/25/2011	5:00:31 PM	Helium MFC set to  0.000000
10/25/2011	5:00:31 PM	H2 MFC set to  0.000000
10/25/2011	5:00:31 PM	BCl3 MFC set to  0.000000
10/25/2011	5:00:31 PM	PHl3 MFC set to  0.000000
10/25/2011	5:00:31 PM	SiCl4 MFC set to  0.000000
10/25/2011	5:00:31 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	5:00:31 PM	Tube furnace set to 150
10/25/2011	5:01:01 PM	H2 valve closed
10/25/2011	5:01:01 PM	BCl3 valve closed
10/25/2011	5:01:01 PM	PH3 valve closed
10/25/2011	5:01:01 PM	SiCl4 pre valve closed
10/25/2011	5:01:01 PM	SiCl4 post valve closed
10/25/2011	5:01:01 PM	Bypass valve closed
10/25/2011	5:01:01 PM	Bubbler valve closed
10/25/2011	5:01:01 PM	Helium valve opened
10/25/2011	5:01:01 PM	Main Vac valve opened
10/25/2011	5:01:01 PM	Helium MFC set to  20.000000
10/25/2011	5:01:01 PM	H2 MFC set to  0.000000
10/25/2011	5:01:01 PM	BCl3 MFC set to  0.000000
10/25/2011	5:01:01 PM	PHl3 MFC set to  0.000000
10/25/2011	5:01:01 PM	SiCl4 MFC set to  0.000000
10/25/2011	5:01:01 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	5:01:01 PM	Tube furnace set to 150
10/25/2011	5:01:31 PM	Helium valve closed
10/25/2011	5:01:31 PM	H2 valve closed
10/25/2011	5:01:31 PM	BCl3 valve closed
10/25/2011	5:01:31 PM	PH3 valve closed
10/25/2011	5:01:31 PM	SiCl4 pre valve closed
10/25/2011	5:01:32 PM	SiCl4 post valve closed
10/25/2011	5:01:32 PM	Bypass valve closed
10/25/2011	5:01:32 PM	Bubbler valve closed
10/25/2011	5:01:32 PM	Main Vac valve opened
10/25/2011	5:01:32 PM	Helium MFC set to  0.000000
10/25/2011	5:01:32 PM	H2 MFC set to  0.000000
10/25/2011	5:01:32 PM	BCl3 MFC set to  0.000000
10/25/2011	5:01:32 PM	PHl3 MFC set to  0.000000
10/25/2011	5:01:32 PM	SiCl4 MFC set to  0.000000
10/25/2011	5:01:32 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	5:01:32 PM	Tube furnace set to 150
10/25/2011	5:02:02 PM	H2 valve closed
10/25/2011	5:02:02 PM	BCl3 valve closed
10/25/2011	5:02:02 PM	PH3 valve closed
10/25/2011	5:02:02 PM	SiCl4 pre valve closed
10/25/2011	5:02:02 PM	SiCl4 post valve closed
10/25/2011	5:02:02 PM	Bypass valve closed
10/25/2011	5:02:02 PM	Bubbler valve closed
10/25/2011	5:02:02 PM	Helium valve opened
10/25/2011	5:02:02 PM	Main Vac valve opened
10/25/2011	5:02:02 PM	Helium MFC set to  20.000000
10/25/2011	5:02:02 PM	H2 MFC set to  0.000000
10/25/2011	5:02:02 PM	BCl3 MFC set to  0.000000
10/25/2011	5:02:02 PM	PHl3 MFC set to  0.000000
10/25/2011	5:02:02 PM	SiCl4 MFC set to  0.000000
10/25/2011	5:02:02 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	5:02:02 PM	Tube furnace set to 150
10/25/2011	5:02:32 PM	Helium valve closed
10/25/2011	5:02:32 PM	H2 valve closed
10/25/2011	5:02:32 PM	BCl3 valve closed
10/25/2011	5:02:32 PM	PH3 valve closed
10/25/2011	5:02:32 PM	SiCl4 pre valve closed
10/25/2011	5:02:32 PM	SiCl4 post valve closed
10/25/2011	5:02:32 PM	Bypass valve closed
10/25/2011	5:02:32 PM	Bubbler valve closed
10/25/2011	5:02:32 PM	Main Vac valve opened
10/25/2011	5:02:32 PM	Helium MFC set to  0.000000
10/25/2011	5:02:32 PM	H2 MFC set to  0.000000
10/25/2011	5:02:32 PM	BCl3 MFC set to  0.000000
10/25/2011	5:02:32 PM	PHl3 MFC set to  0.000000
10/25/2011	5:02:32 PM	SiCl4 MFC set to  0.000000
10/25/2011	5:02:32 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	5:02:32 PM	Tube furnace set to 150
10/25/2011	5:02:33 PM	Run finished at 5:02 PM
10/25/2011	5:07:28 PM	Recipe started at 5:07 PM
10/25/2011	5:07:28 PM	Helium valve closed
10/25/2011	5:07:28 PM	H2 valve closed
10/25/2011	5:07:28 PM	BCl3 valve closed
10/25/2011	5:07:28 PM	PH3 valve closed
10/25/2011	5:07:28 PM	SiCl4 pre valve closed
10/25/2011	5:07:28 PM	SiCl4 post valve closed
10/25/2011	5:07:28 PM	Bypass valve closed
10/25/2011	5:07:28 PM	Bubbler valve closed
10/25/2011	5:07:28 PM	Main Vac valve opened
10/25/2011	5:07:28 PM	Helium MFC set to  0.000000
10/25/2011	5:07:28 PM	H2 MFC set to  0.000000
10/25/2011	5:07:28 PM	BCl3 MFC set to  0.000000
10/25/2011	5:07:28 PM	PHl3 MFC set to  0.000000
10/25/2011	5:07:28 PM	SiCl4 MFC set to  0.000000
10/25/2011	5:07:28 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	5:07:28 PM	Tube furnace set to 150
10/25/2011	5:07:28 PM	H2 valve closed
10/25/2011	5:07:28 PM	BCl3 valve closed
10/25/2011	5:07:28 PM	PH3 valve closed
10/25/2011	5:07:28 PM	SiCl4 pre valve closed
10/25/2011	5:07:28 PM	SiCl4 post valve closed
10/25/2011	5:07:28 PM	Bypass valve closed
10/25/2011	5:07:28 PM	Bubbler valve closed
10/25/2011	5:07:28 PM	Helium valve opened
10/25/2011	5:07:28 PM	Main Vac valve opened
10/25/2011	5:07:28 PM	Helium MFC set to  20.000000
10/25/2011	5:07:28 PM	H2 MFC set to  0.000000
10/25/2011	5:07:28 PM	BCl3 MFC set to  0.000000
10/25/2011	5:07:28 PM	PHl3 MFC set to  0.000000
10/25/2011	5:07:28 PM	SiCl4 MFC set to  0.000000
10/25/2011	5:07:28 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	5:07:28 PM	Tube furnace set to 150
10/25/2011	5:07:58 PM	Helium valve closed
10/25/2011	5:07:58 PM	H2 valve closed
10/25/2011	5:07:58 PM	BCl3 valve closed
10/25/2011	5:07:58 PM	PH3 valve closed
10/25/2011	5:07:58 PM	SiCl4 pre valve closed
10/25/2011	5:07:58 PM	SiCl4 post valve closed
10/25/2011	5:07:58 PM	Bypass valve closed
10/25/2011	5:07:58 PM	Bubbler valve closed
10/25/2011	5:07:58 PM	Main Vac valve opened
10/25/2011	5:07:58 PM	Helium MFC set to  0.000000
10/25/2011	5:07:58 PM	H2 MFC set to  0.000000
10/25/2011	5:07:58 PM	BCl3 MFC set to  0.000000
10/25/2011	5:07:58 PM	PHl3 MFC set to  0.000000
10/25/2011	5:07:58 PM	SiCl4 MFC set to  0.000000
10/25/2011	5:07:58 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	5:07:58 PM	Tube furnace set to 150
10/25/2011	5:08:28 PM	H2 valve closed
10/25/2011	5:08:28 PM	BCl3 valve closed
10/25/2011	5:08:28 PM	PH3 valve closed
10/25/2011	5:08:28 PM	SiCl4 pre valve closed
10/25/2011	5:08:28 PM	SiCl4 post valve closed
10/25/2011	5:08:28 PM	Bypass valve closed
10/25/2011	5:08:28 PM	Bubbler valve closed
10/25/2011	5:08:28 PM	Helium valve opened
10/25/2011	5:08:28 PM	Main Vac valve opened
10/25/2011	5:08:28 PM	Helium MFC set to  20.000000
10/25/2011	5:08:28 PM	H2 MFC set to  0.000000
10/25/2011	5:08:28 PM	BCl3 MFC set to  0.000000
10/25/2011	5:08:28 PM	PHl3 MFC set to  0.000000
10/25/2011	5:08:28 PM	SiCl4 MFC set to  0.000000
10/25/2011	5:08:28 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	5:08:29 PM	Tube furnace set to 150
10/25/2011	5:08:59 PM	Helium valve closed
10/25/2011	5:08:59 PM	H2 valve closed
10/25/2011	5:08:59 PM	BCl3 valve closed
10/25/2011	5:08:59 PM	PH3 valve closed
10/25/2011	5:08:59 PM	SiCl4 pre valve closed
10/25/2011	5:08:59 PM	SiCl4 post valve closed
10/25/2011	5:08:59 PM	Bypass valve closed
10/25/2011	5:08:59 PM	Bubbler valve closed
10/25/2011	5:08:59 PM	Main Vac valve opened
10/25/2011	5:08:59 PM	Helium MFC set to  0.000000
10/25/2011	5:08:59 PM	H2 MFC set to  0.000000
10/25/2011	5:08:59 PM	BCl3 MFC set to  0.000000
10/25/2011	5:08:59 PM	PHl3 MFC set to  0.000000
10/25/2011	5:08:59 PM	SiCl4 MFC set to  0.000000
10/25/2011	5:08:59 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	5:08:59 PM	Tube furnace set to 150
10/25/2011	5:09:29 PM	H2 valve closed
10/25/2011	5:09:29 PM	BCl3 valve closed
10/25/2011	5:09:29 PM	PH3 valve closed
10/25/2011	5:09:29 PM	SiCl4 pre valve closed
10/25/2011	5:09:29 PM	SiCl4 post valve closed
10/25/2011	5:09:29 PM	Bypass valve closed
10/25/2011	5:09:29 PM	Bubbler valve closed
10/25/2011	5:09:29 PM	Helium valve opened
10/25/2011	5:09:29 PM	Main Vac valve opened
10/25/2011	5:09:29 PM	Helium MFC set to  20.000000
10/25/2011	5:09:29 PM	H2 MFC set to  0.000000
10/25/2011	5:09:29 PM	BCl3 MFC set to  0.000000
10/25/2011	5:09:29 PM	PHl3 MFC set to  0.000000
10/25/2011	5:09:29 PM	SiCl4 MFC set to  0.000000
10/25/2011	5:09:29 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	5:09:29 PM	Tube furnace set to 150
10/25/2011	5:09:59 PM	Helium valve closed
10/25/2011	5:09:59 PM	H2 valve closed
10/25/2011	5:09:59 PM	BCl3 valve closed
10/25/2011	5:09:59 PM	PH3 valve closed
10/25/2011	5:09:59 PM	SiCl4 pre valve closed
10/25/2011	5:09:59 PM	SiCl4 post valve closed
10/25/2011	5:09:59 PM	Bypass valve closed
10/25/2011	5:09:59 PM	Bubbler valve closed
10/25/2011	5:09:59 PM	Main Vac valve opened
10/25/2011	5:09:59 PM	Helium MFC set to  0.000000
10/25/2011	5:09:59 PM	H2 MFC set to  0.000000
10/25/2011	5:09:59 PM	BCl3 MFC set to  0.000000
10/25/2011	5:09:59 PM	PHl3 MFC set to  0.000000
10/25/2011	5:09:59 PM	SiCl4 MFC set to  0.000000
10/25/2011	5:09:59 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	5:09:59 PM	Tube furnace set to 150
10/25/2011	5:10:29 PM	H2 valve closed
10/25/2011	5:10:29 PM	BCl3 valve closed
10/25/2011	5:10:29 PM	PH3 valve closed
10/25/2011	5:10:29 PM	SiCl4 pre valve closed
10/25/2011	5:10:29 PM	SiCl4 post valve closed
10/25/2011	5:10:29 PM	Bypass valve closed
10/25/2011	5:10:29 PM	Bubbler valve closed
10/25/2011	5:10:29 PM	Helium valve opened
10/25/2011	5:10:29 PM	Main Vac valve opened
10/25/2011	5:10:29 PM	Helium MFC set to  20.000000
10/25/2011	5:10:29 PM	H2 MFC set to  0.000000
10/25/2011	5:10:29 PM	BCl3 MFC set to  0.000000
10/25/2011	5:10:29 PM	PHl3 MFC set to  0.000000
10/25/2011	5:10:29 PM	SiCl4 MFC set to  0.000000
10/25/2011	5:10:29 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	5:10:29 PM	Tube furnace set to 150
10/25/2011	5:10:59 PM	Helium valve closed
10/25/2011	5:10:59 PM	H2 valve closed
10/25/2011	5:10:59 PM	BCl3 valve closed
10/25/2011	5:10:59 PM	PH3 valve closed
10/25/2011	5:10:59 PM	SiCl4 pre valve closed
10/25/2011	5:10:59 PM	SiCl4 post valve closed
10/25/2011	5:10:59 PM	Bypass valve closed
10/25/2011	5:10:59 PM	Bubbler valve closed
10/25/2011	5:10:59 PM	Main Vac valve opened
10/25/2011	5:10:59 PM	Helium MFC set to  0.000000
10/25/2011	5:10:59 PM	H2 MFC set to  0.000000
10/25/2011	5:10:59 PM	BCl3 MFC set to  0.000000
10/25/2011	5:10:59 PM	PHl3 MFC set to  0.000000
10/25/2011	5:10:59 PM	SiCl4 MFC set to  0.000000
10/25/2011	5:10:59 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	5:11:00 PM	Tube furnace set to 150
10/25/2011	5:11:30 PM	H2 valve closed
10/25/2011	5:11:30 PM	BCl3 valve closed
10/25/2011	5:11:30 PM	PH3 valve closed
10/25/2011	5:11:30 PM	SiCl4 pre valve closed
10/25/2011	5:11:30 PM	SiCl4 post valve closed
10/25/2011	5:11:30 PM	Bypass valve closed
10/25/2011	5:11:30 PM	Bubbler valve closed
10/25/2011	5:11:30 PM	Helium valve opened
10/25/2011	5:11:30 PM	Main Vac valve opened
10/25/2011	5:11:30 PM	Helium MFC set to  20.000000
10/25/2011	5:11:30 PM	H2 MFC set to  0.000000
10/25/2011	5:11:30 PM	BCl3 MFC set to  0.000000
10/25/2011	5:11:30 PM	PHl3 MFC set to  0.000000
10/25/2011	5:11:30 PM	SiCl4 MFC set to  0.000000
10/25/2011	5:11:30 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	5:11:30 PM	Tube furnace set to 150
10/25/2011	5:12:00 PM	Helium valve closed
10/25/2011	5:12:00 PM	H2 valve closed
10/25/2011	5:12:00 PM	BCl3 valve closed
10/25/2011	5:12:00 PM	PH3 valve closed
10/25/2011	5:12:00 PM	SiCl4 pre valve closed
10/25/2011	5:12:00 PM	SiCl4 post valve closed
10/25/2011	5:12:00 PM	Bypass valve closed
10/25/2011	5:12:00 PM	Bubbler valve closed
10/25/2011	5:12:00 PM	Main Vac valve opened
10/25/2011	5:12:00 PM	Helium MFC set to  0.000000
10/25/2011	5:12:00 PM	H2 MFC set to  0.000000
10/25/2011	5:12:00 PM	BCl3 MFC set to  0.000000
10/25/2011	5:12:00 PM	PHl3 MFC set to  0.000000
10/25/2011	5:12:00 PM	SiCl4 MFC set to  0.000000
10/25/2011	5:12:00 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	5:12:00 PM	Tube furnace set to 150
10/25/2011	5:12:30 PM	H2 valve closed
10/25/2011	5:12:30 PM	BCl3 valve closed
10/25/2011	5:12:30 PM	PH3 valve closed
10/25/2011	5:12:30 PM	SiCl4 pre valve closed
10/25/2011	5:12:30 PM	SiCl4 post valve closed
10/25/2011	5:12:30 PM	Bypass valve closed
10/25/2011	5:12:30 PM	Bubbler valve closed
10/25/2011	5:12:30 PM	Helium valve opened
10/25/2011	5:12:30 PM	Main Vac valve opened
10/25/2011	5:12:30 PM	Helium MFC set to  20.000000
10/25/2011	5:12:30 PM	H2 MFC set to  0.000000
10/25/2011	5:12:30 PM	BCl3 MFC set to  0.000000
10/25/2011	5:12:30 PM	PHl3 MFC set to  0.000000
10/25/2011	5:12:30 PM	SiCl4 MFC set to  0.000000
10/25/2011	5:12:30 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	5:12:30 PM	Tube furnace set to 150
10/25/2011	5:13:00 PM	Helium valve closed
10/25/2011	5:13:00 PM	H2 valve closed
10/25/2011	5:13:00 PM	BCl3 valve closed
10/25/2011	5:13:00 PM	PH3 valve closed
10/25/2011	5:13:00 PM	SiCl4 pre valve closed
10/25/2011	5:13:00 PM	SiCl4 post valve closed
10/25/2011	5:13:00 PM	Bypass valve closed
10/25/2011	5:13:00 PM	Bubbler valve closed
10/25/2011	5:13:00 PM	Main Vac valve opened
10/25/2011	5:13:00 PM	Helium MFC set to  0.000000
10/25/2011	5:13:00 PM	H2 MFC set to  0.000000
10/25/2011	5:13:00 PM	BCl3 MFC set to  0.000000
10/25/2011	5:13:00 PM	PHl3 MFC set to  0.000000
10/25/2011	5:13:00 PM	SiCl4 MFC set to  0.000000
10/25/2011	5:13:00 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	5:13:00 PM	Tube furnace set to 150
10/25/2011	5:13:30 PM	H2 valve closed
10/25/2011	5:13:30 PM	BCl3 valve closed
10/25/2011	5:13:30 PM	PH3 valve closed
10/25/2011	5:13:30 PM	SiCl4 pre valve closed
10/25/2011	5:13:30 PM	SiCl4 post valve closed
10/25/2011	5:13:30 PM	Bypass valve closed
10/25/2011	5:13:30 PM	Bubbler valve closed
10/25/2011	5:13:30 PM	Helium valve opened
10/25/2011	5:13:30 PM	Main Vac valve opened
10/25/2011	5:13:30 PM	Helium MFC set to  20.000000
10/25/2011	5:13:30 PM	H2 MFC set to  0.000000
10/25/2011	5:13:30 PM	BCl3 MFC set to  0.000000
10/25/2011	5:13:30 PM	PHl3 MFC set to  0.000000
10/25/2011	5:13:30 PM	SiCl4 MFC set to  0.000000
10/25/2011	5:13:30 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	5:13:31 PM	Tube furnace set to 150
10/25/2011	5:14:01 PM	Helium valve closed
10/25/2011	5:14:01 PM	H2 valve closed
10/25/2011	5:14:01 PM	BCl3 valve closed
10/25/2011	5:14:01 PM	PH3 valve closed
10/25/2011	5:14:01 PM	SiCl4 pre valve closed
10/25/2011	5:14:01 PM	SiCl4 post valve closed
10/25/2011	5:14:01 PM	Bypass valve closed
10/25/2011	5:14:01 PM	Bubbler valve closed
10/25/2011	5:14:01 PM	Main Vac valve opened
10/25/2011	5:14:01 PM	Helium MFC set to  0.000000
10/25/2011	5:14:01 PM	H2 MFC set to  0.000000
10/25/2011	5:14:01 PM	BCl3 MFC set to  0.000000
10/25/2011	5:14:01 PM	PHl3 MFC set to  0.000000
10/25/2011	5:14:01 PM	SiCl4 MFC set to  0.000000
10/25/2011	5:14:01 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	5:14:01 PM	Tube furnace set to 150
10/25/2011	5:14:31 PM	H2 valve closed
10/25/2011	5:14:31 PM	BCl3 valve closed
10/25/2011	5:14:31 PM	PH3 valve closed
10/25/2011	5:14:31 PM	SiCl4 pre valve closed
10/25/2011	5:14:31 PM	SiCl4 post valve closed
10/25/2011	5:14:31 PM	Bypass valve closed
10/25/2011	5:14:31 PM	Bubbler valve closed
10/25/2011	5:14:31 PM	Helium valve opened
10/25/2011	5:14:31 PM	Main Vac valve opened
10/25/2011	5:14:31 PM	Helium MFC set to  20.000000
10/25/2011	5:14:31 PM	H2 MFC set to  0.000000
10/25/2011	5:14:31 PM	BCl3 MFC set to  0.000000
10/25/2011	5:14:31 PM	PHl3 MFC set to  0.000000
10/25/2011	5:14:31 PM	SiCl4 MFC set to  0.000000
10/25/2011	5:14:31 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	5:14:31 PM	Tube furnace set to 150
10/25/2011	5:15:01 PM	Helium valve closed
10/25/2011	5:15:01 PM	H2 valve closed
10/25/2011	5:15:01 PM	BCl3 valve closed
10/25/2011	5:15:01 PM	PH3 valve closed
10/25/2011	5:15:01 PM	SiCl4 pre valve closed
10/25/2011	5:15:01 PM	SiCl4 post valve closed
10/25/2011	5:15:01 PM	Bypass valve closed
10/25/2011	5:15:01 PM	Bubbler valve closed
10/25/2011	5:15:01 PM	Main Vac valve opened
10/25/2011	5:15:01 PM	Helium MFC set to  0.000000
10/25/2011	5:15:01 PM	H2 MFC set to  0.000000
10/25/2011	5:15:01 PM	BCl3 MFC set to  0.000000
10/25/2011	5:15:01 PM	PHl3 MFC set to  0.000000
10/25/2011	5:15:01 PM	SiCl4 MFC set to  0.000000
10/25/2011	5:15:01 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	5:15:01 PM	Tube furnace set to 150
10/25/2011	5:15:31 PM	H2 valve closed
10/25/2011	5:15:31 PM	BCl3 valve closed
10/25/2011	5:15:31 PM	PH3 valve closed
10/25/2011	5:15:31 PM	SiCl4 pre valve closed
10/25/2011	5:15:31 PM	SiCl4 post valve closed
10/25/2011	5:15:31 PM	Bypass valve closed
10/25/2011	5:15:31 PM	Bubbler valve closed
10/25/2011	5:15:31 PM	Helium valve opened
10/25/2011	5:15:31 PM	Main Vac valve opened
10/25/2011	5:15:31 PM	Helium MFC set to  20.000000
10/25/2011	5:15:31 PM	H2 MFC set to  0.000000
10/25/2011	5:15:31 PM	BCl3 MFC set to  0.000000
10/25/2011	5:15:31 PM	PHl3 MFC set to  0.000000
10/25/2011	5:15:31 PM	SiCl4 MFC set to  0.000000
10/25/2011	5:15:31 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	5:15:31 PM	Tube furnace set to 150
10/25/2011	5:16:01 PM	Helium valve closed
10/25/2011	5:16:01 PM	H2 valve closed
10/25/2011	5:16:01 PM	BCl3 valve closed
10/25/2011	5:16:01 PM	PH3 valve closed
10/25/2011	5:16:01 PM	SiCl4 pre valve closed
10/25/2011	5:16:01 PM	SiCl4 post valve closed
10/25/2011	5:16:01 PM	Bypass valve closed
10/25/2011	5:16:01 PM	Bubbler valve closed
10/25/2011	5:16:01 PM	Main Vac valve opened
10/25/2011	5:16:01 PM	Helium MFC set to  0.000000
10/25/2011	5:16:01 PM	H2 MFC set to  0.000000
10/25/2011	5:16:01 PM	BCl3 MFC set to  0.000000
10/25/2011	5:16:01 PM	PHl3 MFC set to  0.000000
10/25/2011	5:16:01 PM	SiCl4 MFC set to  0.000000
10/25/2011	5:16:01 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	5:16:01 PM	Tube furnace set to 150
10/25/2011	5:16:32 PM	H2 valve closed
10/25/2011	5:16:32 PM	BCl3 valve closed
10/25/2011	5:16:32 PM	PH3 valve closed
10/25/2011	5:16:32 PM	SiCl4 pre valve closed
10/25/2011	5:16:32 PM	SiCl4 post valve closed
10/25/2011	5:16:32 PM	Bypass valve closed
10/25/2011	5:16:32 PM	Bubbler valve closed
10/25/2011	5:16:32 PM	Helium valve opened
10/25/2011	5:16:32 PM	Main Vac valve opened
10/25/2011	5:16:32 PM	Helium MFC set to  20.000000
10/25/2011	5:16:32 PM	H2 MFC set to  0.000000
10/25/2011	5:16:32 PM	BCl3 MFC set to  0.000000
10/25/2011	5:16:32 PM	PHl3 MFC set to  0.000000
10/25/2011	5:16:32 PM	SiCl4 MFC set to  0.000000
10/25/2011	5:16:32 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	5:16:32 PM	Tube furnace set to 150
10/25/2011	5:17:02 PM	Helium valve closed
10/25/2011	5:17:02 PM	H2 valve closed
10/25/2011	5:17:02 PM	BCl3 valve closed
10/25/2011	5:17:02 PM	PH3 valve closed
10/25/2011	5:17:02 PM	SiCl4 pre valve closed
10/25/2011	5:17:02 PM	SiCl4 post valve closed
10/25/2011	5:17:02 PM	Bypass valve closed
10/25/2011	5:17:02 PM	Bubbler valve closed
10/25/2011	5:17:02 PM	Main Vac valve opened
10/25/2011	5:17:02 PM	Helium MFC set to  0.000000
10/25/2011	5:17:02 PM	H2 MFC set to  0.000000
10/25/2011	5:17:02 PM	BCl3 MFC set to  0.000000
10/25/2011	5:17:02 PM	PHl3 MFC set to  0.000000
10/25/2011	5:17:02 PM	SiCl4 MFC set to  0.000000
10/25/2011	5:17:02 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	5:17:02 PM	Tube furnace set to 150
10/25/2011	5:17:03 PM	Run finished at 5:17 PM
10/25/2011	5:36:49 PM	Recipe started at 5:36 PM
10/25/2011	5:36:49 PM	Helium valve closed
10/25/2011	5:36:49 PM	H2 valve closed
10/25/2011	5:36:49 PM	BCl3 valve closed
10/25/2011	5:36:49 PM	PH3 valve closed
10/25/2011	5:36:49 PM	SiCl4 pre valve closed
10/25/2011	5:36:49 PM	SiCl4 post valve closed
10/25/2011	5:36:49 PM	Bypass valve closed
10/25/2011	5:36:49 PM	Bubbler valve closed
10/25/2011	5:36:49 PM	Main Vac valve opened
10/25/2011	5:36:49 PM	Helium MFC set to  0.000000
10/25/2011	5:36:49 PM	H2 MFC set to  0.000000
10/25/2011	5:36:49 PM	BCl3 MFC set to  0.000000
10/25/2011	5:36:49 PM	PHl3 MFC set to  0.000000
10/25/2011	5:36:49 PM	SiCl4 MFC set to  0.000000
10/25/2011	5:36:49 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	5:36:49 PM	Tube furnace set to 150
10/25/2011	5:37:19 PM	H2 valve closed
10/25/2011	5:37:19 PM	BCl3 valve closed
10/25/2011	5:37:19 PM	PH3 valve closed
10/25/2011	5:37:19 PM	SiCl4 pre valve closed
10/25/2011	5:37:19 PM	SiCl4 post valve closed
10/25/2011	5:37:19 PM	Bypass valve closed
10/25/2011	5:37:19 PM	Bubbler valve closed
10/25/2011	5:37:19 PM	Helium valve opened
10/25/2011	5:37:19 PM	Main Vac valve opened
10/25/2011	5:37:19 PM	Helium MFC set to  20.000000
10/25/2011	5:37:19 PM	H2 MFC set to  0.000000
10/25/2011	5:37:19 PM	BCl3 MFC set to  0.000000
10/25/2011	5:37:19 PM	PHl3 MFC set to  0.000000
10/25/2011	5:37:19 PM	SiCl4 MFC set to  0.000000
10/25/2011	5:37:19 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	5:37:19 PM	Tube furnace set to 150
10/25/2011	5:37:49 PM	Helium valve closed
10/25/2011	5:37:49 PM	H2 valve closed
10/25/2011	5:37:49 PM	BCl3 valve closed
10/25/2011	5:37:49 PM	PH3 valve closed
10/25/2011	5:37:49 PM	SiCl4 pre valve closed
10/25/2011	5:37:49 PM	SiCl4 post valve closed
10/25/2011	5:37:49 PM	Bypass valve closed
10/25/2011	5:37:49 PM	Bubbler valve closed
10/25/2011	5:37:49 PM	Main Vac valve opened
10/25/2011	5:37:49 PM	Helium MFC set to  0.000000
10/25/2011	5:37:49 PM	H2 MFC set to  0.000000
10/25/2011	5:37:49 PM	BCl3 MFC set to  0.000000
10/25/2011	5:37:49 PM	PHl3 MFC set to  0.000000
10/25/2011	5:37:49 PM	SiCl4 MFC set to  0.000000
10/25/2011	5:37:49 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	5:37:49 PM	Tube furnace set to 150
10/25/2011	5:38:19 PM	H2 valve closed
10/25/2011	5:38:19 PM	BCl3 valve closed
10/25/2011	5:38:19 PM	PH3 valve closed
10/25/2011	5:38:19 PM	SiCl4 pre valve closed
10/25/2011	5:38:19 PM	SiCl4 post valve closed
10/25/2011	5:38:19 PM	Bypass valve closed
10/25/2011	5:38:19 PM	Bubbler valve closed
10/25/2011	5:38:19 PM	Helium valve opened
10/25/2011	5:38:19 PM	Main Vac valve opened
10/25/2011	5:38:19 PM	Helium MFC set to  20.000000
10/25/2011	5:38:19 PM	H2 MFC set to  0.000000
10/25/2011	5:38:19 PM	BCl3 MFC set to  0.000000
10/25/2011	5:38:19 PM	PHl3 MFC set to  0.000000
10/25/2011	5:38:19 PM	SiCl4 MFC set to  0.000000
10/25/2011	5:38:19 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	5:38:20 PM	Tube furnace set to 150
10/25/2011	5:38:50 PM	Helium valve closed
10/25/2011	5:38:50 PM	H2 valve closed
10/25/2011	5:38:50 PM	BCl3 valve closed
10/25/2011	5:38:50 PM	PH3 valve closed
10/25/2011	5:38:50 PM	SiCl4 pre valve closed
10/25/2011	5:38:50 PM	SiCl4 post valve closed
10/25/2011	5:38:50 PM	Bypass valve closed
10/25/2011	5:38:50 PM	Bubbler valve closed
10/25/2011	5:38:50 PM	Main Vac valve opened
10/25/2011	5:38:50 PM	Helium MFC set to  0.000000
10/25/2011	5:38:50 PM	H2 MFC set to  0.000000
10/25/2011	5:38:50 PM	BCl3 MFC set to  0.000000
10/25/2011	5:38:50 PM	PHl3 MFC set to  0.000000
10/25/2011	5:38:50 PM	SiCl4 MFC set to  0.000000
10/25/2011	5:38:50 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	5:38:50 PM	Tube furnace set to 150
10/25/2011	5:39:20 PM	H2 valve closed
10/25/2011	5:39:20 PM	BCl3 valve closed
10/25/2011	5:39:20 PM	PH3 valve closed
10/25/2011	5:39:20 PM	SiCl4 pre valve closed
10/25/2011	5:39:20 PM	SiCl4 post valve closed
10/25/2011	5:39:20 PM	Bypass valve closed
10/25/2011	5:39:20 PM	Bubbler valve closed
10/25/2011	5:39:20 PM	Helium valve opened
10/25/2011	5:39:20 PM	Main Vac valve opened
10/25/2011	5:39:20 PM	Helium MFC set to  20.000000
10/25/2011	5:39:20 PM	H2 MFC set to  0.000000
10/25/2011	5:39:20 PM	BCl3 MFC set to  0.000000
10/25/2011	5:39:20 PM	PHl3 MFC set to  0.000000
10/25/2011	5:39:20 PM	SiCl4 MFC set to  0.000000
10/25/2011	5:39:20 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	5:39:20 PM	Tube furnace set to 150
10/25/2011	5:39:50 PM	Helium valve closed
10/25/2011	5:39:50 PM	H2 valve closed
10/25/2011	5:39:50 PM	BCl3 valve closed
10/25/2011	5:39:50 PM	PH3 valve closed
10/25/2011	5:39:50 PM	SiCl4 pre valve closed
10/25/2011	5:39:50 PM	SiCl4 post valve closed
10/25/2011	5:39:50 PM	Bypass valve closed
10/25/2011	5:39:50 PM	Bubbler valve closed
10/25/2011	5:39:50 PM	Main Vac valve opened
10/25/2011	5:39:50 PM	Helium MFC set to  0.000000
10/25/2011	5:39:50 PM	H2 MFC set to  0.000000
10/25/2011	5:39:50 PM	BCl3 MFC set to  0.000000
10/25/2011	5:39:50 PM	PHl3 MFC set to  0.000000
10/25/2011	5:39:50 PM	SiCl4 MFC set to  0.000000
10/25/2011	5:39:50 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	5:39:50 PM	Tube furnace set to 150
10/25/2011	5:40:20 PM	H2 valve closed
10/25/2011	5:40:20 PM	BCl3 valve closed
10/25/2011	5:40:20 PM	PH3 valve closed
10/25/2011	5:40:20 PM	SiCl4 pre valve closed
10/25/2011	5:40:20 PM	SiCl4 post valve closed
10/25/2011	5:40:20 PM	Bypass valve closed
10/25/2011	5:40:20 PM	Bubbler valve closed
10/25/2011	5:40:20 PM	Helium valve opened
10/25/2011	5:40:20 PM	Main Vac valve opened
10/25/2011	5:40:20 PM	Helium MFC set to  20.000000
10/25/2011	5:40:20 PM	H2 MFC set to  0.000000
10/25/2011	5:40:20 PM	BCl3 MFC set to  0.000000
10/25/2011	5:40:20 PM	PHl3 MFC set to  0.000000
10/25/2011	5:40:20 PM	SiCl4 MFC set to  0.000000
10/25/2011	5:40:20 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	5:40:20 PM	Tube furnace set to 150
10/25/2011	5:40:50 PM	Helium valve closed
10/25/2011	5:40:50 PM	H2 valve closed
10/25/2011	5:40:50 PM	BCl3 valve closed
10/25/2011	5:40:50 PM	PH3 valve closed
10/25/2011	5:40:50 PM	SiCl4 pre valve closed
10/25/2011	5:40:50 PM	SiCl4 post valve closed
10/25/2011	5:40:50 PM	Bypass valve closed
10/25/2011	5:40:50 PM	Bubbler valve closed
10/25/2011	5:40:50 PM	Main Vac valve opened
10/25/2011	5:40:50 PM	Helium MFC set to  0.000000
10/25/2011	5:40:50 PM	H2 MFC set to  0.000000
10/25/2011	5:40:50 PM	BCl3 MFC set to  0.000000
10/25/2011	5:40:50 PM	PHl3 MFC set to  0.000000
10/25/2011	5:40:50 PM	SiCl4 MFC set to  0.000000
10/25/2011	5:40:50 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	5:40:51 PM	Tube furnace set to 150
10/25/2011	5:41:21 PM	H2 valve closed
10/25/2011	5:41:21 PM	BCl3 valve closed
10/25/2011	5:41:21 PM	PH3 valve closed
10/25/2011	5:41:21 PM	SiCl4 pre valve closed
10/25/2011	5:41:21 PM	SiCl4 post valve closed
10/25/2011	5:41:21 PM	Bypass valve closed
10/25/2011	5:41:21 PM	Bubbler valve closed
10/25/2011	5:41:21 PM	Helium valve opened
10/25/2011	5:41:21 PM	Main Vac valve opened
10/25/2011	5:41:21 PM	Helium MFC set to  20.000000
10/25/2011	5:41:21 PM	H2 MFC set to  0.000000
10/25/2011	5:41:21 PM	BCl3 MFC set to  0.000000
10/25/2011	5:41:21 PM	PHl3 MFC set to  0.000000
10/25/2011	5:41:21 PM	SiCl4 MFC set to  0.000000
10/25/2011	5:41:21 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	5:41:21 PM	Tube furnace set to 150
10/25/2011	5:41:51 PM	Helium valve closed
10/25/2011	5:41:51 PM	H2 valve closed
10/25/2011	5:41:51 PM	BCl3 valve closed
10/25/2011	5:41:51 PM	PH3 valve closed
10/25/2011	5:41:51 PM	SiCl4 pre valve closed
10/25/2011	5:41:51 PM	SiCl4 post valve closed
10/25/2011	5:41:51 PM	Bypass valve closed
10/25/2011	5:41:51 PM	Bubbler valve closed
10/25/2011	5:41:51 PM	Main Vac valve opened
10/25/2011	5:41:51 PM	Helium MFC set to  0.000000
10/25/2011	5:41:51 PM	H2 MFC set to  0.000000
10/25/2011	5:41:51 PM	BCl3 MFC set to  0.000000
10/25/2011	5:41:51 PM	PHl3 MFC set to  0.000000
10/25/2011	5:41:51 PM	SiCl4 MFC set to  0.000000
10/25/2011	5:41:51 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	5:41:51 PM	Tube furnace set to 150
10/25/2011	5:42:21 PM	H2 valve closed
10/25/2011	5:42:21 PM	BCl3 valve closed
10/25/2011	5:42:21 PM	PH3 valve closed
10/25/2011	5:42:21 PM	SiCl4 pre valve closed
10/25/2011	5:42:21 PM	SiCl4 post valve closed
10/25/2011	5:42:21 PM	Bypass valve closed
10/25/2011	5:42:21 PM	Bubbler valve closed
10/25/2011	5:42:21 PM	Helium valve opened
10/25/2011	5:42:21 PM	Main Vac valve opened
10/25/2011	5:42:21 PM	Helium MFC set to  20.000000
10/25/2011	5:42:21 PM	H2 MFC set to  0.000000
10/25/2011	5:42:21 PM	BCl3 MFC set to  0.000000
10/25/2011	5:42:21 PM	PHl3 MFC set to  0.000000
10/25/2011	5:42:21 PM	SiCl4 MFC set to  0.000000
10/25/2011	5:42:21 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	5:42:21 PM	Tube furnace set to 150
10/25/2011	5:42:51 PM	Helium valve closed
10/25/2011	5:42:51 PM	H2 valve closed
10/25/2011	5:42:51 PM	BCl3 valve closed
10/25/2011	5:42:51 PM	PH3 valve closed
10/25/2011	5:42:51 PM	SiCl4 pre valve closed
10/25/2011	5:42:51 PM	SiCl4 post valve closed
10/25/2011	5:42:51 PM	Bypass valve closed
10/25/2011	5:42:51 PM	Bubbler valve closed
10/25/2011	5:42:51 PM	Main Vac valve opened
10/25/2011	5:42:51 PM	Helium MFC set to  0.000000
10/25/2011	5:42:51 PM	H2 MFC set to  0.000000
10/25/2011	5:42:51 PM	BCl3 MFC set to  0.000000
10/25/2011	5:42:51 PM	PHl3 MFC set to  0.000000
10/25/2011	5:42:51 PM	SiCl4 MFC set to  0.000000
10/25/2011	5:42:51 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	5:42:51 PM	Tube furnace set to 150
10/25/2011	5:43:21 PM	H2 valve closed
10/25/2011	5:43:21 PM	BCl3 valve closed
10/25/2011	5:43:21 PM	PH3 valve closed
10/25/2011	5:43:21 PM	SiCl4 pre valve closed
10/25/2011	5:43:21 PM	SiCl4 post valve closed
10/25/2011	5:43:21 PM	Bypass valve closed
10/25/2011	5:43:21 PM	Bubbler valve closed
10/25/2011	5:43:21 PM	Helium valve opened
10/25/2011	5:43:21 PM	Main Vac valve opened
10/25/2011	5:43:21 PM	Helium MFC set to  20.000000
10/25/2011	5:43:21 PM	H2 MFC set to  0.000000
10/25/2011	5:43:21 PM	BCl3 MFC set to  0.000000
10/25/2011	5:43:21 PM	PHl3 MFC set to  0.000000
10/25/2011	5:43:21 PM	SiCl4 MFC set to  0.000000
10/25/2011	5:43:21 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	5:43:22 PM	Tube furnace set to 150
10/25/2011	5:43:52 PM	Helium valve closed
10/25/2011	5:43:52 PM	H2 valve closed
10/25/2011	5:43:52 PM	BCl3 valve closed
10/25/2011	5:43:52 PM	PH3 valve closed
10/25/2011	5:43:52 PM	SiCl4 pre valve closed
10/25/2011	5:43:52 PM	SiCl4 post valve closed
10/25/2011	5:43:52 PM	Bypass valve closed
10/25/2011	5:43:52 PM	Bubbler valve closed
10/25/2011	5:43:52 PM	Main Vac valve opened
10/25/2011	5:43:52 PM	Helium MFC set to  0.000000
10/25/2011	5:43:52 PM	H2 MFC set to  0.000000
10/25/2011	5:43:52 PM	BCl3 MFC set to  0.000000
10/25/2011	5:43:52 PM	PHl3 MFC set to  0.000000
10/25/2011	5:43:52 PM	SiCl4 MFC set to  0.000000
10/25/2011	5:43:52 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	5:43:52 PM	Tube furnace set to 150
10/25/2011	5:44:22 PM	H2 valve closed
10/25/2011	5:44:22 PM	BCl3 valve closed
10/25/2011	5:44:22 PM	PH3 valve closed
10/25/2011	5:44:22 PM	SiCl4 pre valve closed
10/25/2011	5:44:22 PM	SiCl4 post valve closed
10/25/2011	5:44:22 PM	Bypass valve closed
10/25/2011	5:44:22 PM	Bubbler valve closed
10/25/2011	5:44:22 PM	Helium valve opened
10/25/2011	5:44:22 PM	Main Vac valve opened
10/25/2011	5:44:22 PM	Helium MFC set to  20.000000
10/25/2011	5:44:22 PM	H2 MFC set to  0.000000
10/25/2011	5:44:22 PM	BCl3 MFC set to  0.000000
10/25/2011	5:44:22 PM	PHl3 MFC set to  0.000000
10/25/2011	5:44:22 PM	SiCl4 MFC set to  0.000000
10/25/2011	5:44:22 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	5:44:22 PM	Tube furnace set to 150
10/25/2011	5:44:52 PM	Helium valve closed
10/25/2011	5:44:52 PM	H2 valve closed
10/25/2011	5:44:52 PM	BCl3 valve closed
10/25/2011	5:44:52 PM	PH3 valve closed
10/25/2011	5:44:52 PM	SiCl4 pre valve closed
10/25/2011	5:44:52 PM	SiCl4 post valve closed
10/25/2011	5:44:52 PM	Bypass valve closed
10/25/2011	5:44:52 PM	Bubbler valve closed
10/25/2011	5:44:52 PM	Main Vac valve opened
10/25/2011	5:44:52 PM	Helium MFC set to  0.000000
10/25/2011	5:44:52 PM	H2 MFC set to  0.000000
10/25/2011	5:44:52 PM	BCl3 MFC set to  0.000000
10/25/2011	5:44:52 PM	PHl3 MFC set to  0.000000
10/25/2011	5:44:52 PM	SiCl4 MFC set to  0.000000
10/25/2011	5:44:52 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	5:44:52 PM	Tube furnace set to 150
10/25/2011	5:45:22 PM	H2 valve closed
10/25/2011	5:45:22 PM	BCl3 valve closed
10/25/2011	5:45:22 PM	PH3 valve closed
10/25/2011	5:45:22 PM	SiCl4 pre valve closed
10/25/2011	5:45:22 PM	SiCl4 post valve closed
10/25/2011	5:45:22 PM	Bypass valve closed
10/25/2011	5:45:22 PM	Bubbler valve closed
10/25/2011	5:45:22 PM	Helium valve opened
10/25/2011	5:45:22 PM	Main Vac valve opened
10/25/2011	5:45:22 PM	Helium MFC set to  20.000000
10/25/2011	5:45:22 PM	H2 MFC set to  0.000000
10/25/2011	5:45:22 PM	BCl3 MFC set to  0.000000
10/25/2011	5:45:22 PM	PHl3 MFC set to  0.000000
10/25/2011	5:45:22 PM	SiCl4 MFC set to  0.000000
10/25/2011	5:45:22 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	5:45:22 PM	Tube furnace set to 150
10/25/2011	5:45:52 PM	Helium valve closed
10/25/2011	5:45:52 PM	H2 valve closed
10/25/2011	5:45:52 PM	BCl3 valve closed
10/25/2011	5:45:52 PM	PH3 valve closed
10/25/2011	5:45:52 PM	SiCl4 pre valve closed
10/25/2011	5:45:52 PM	SiCl4 post valve closed
10/25/2011	5:45:52 PM	Bypass valve closed
10/25/2011	5:45:52 PM	Bubbler valve closed
10/25/2011	5:45:52 PM	Main Vac valve opened
10/25/2011	5:45:52 PM	Helium MFC set to  0.000000
10/25/2011	5:45:52 PM	H2 MFC set to  0.000000
10/25/2011	5:45:52 PM	BCl3 MFC set to  0.000000
10/25/2011	5:45:52 PM	PHl3 MFC set to  0.000000
10/25/2011	5:45:52 PM	SiCl4 MFC set to  0.000000
10/25/2011	5:45:52 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	5:45:53 PM	Tube furnace set to 150
10/25/2011	5:46:23 PM	H2 valve closed
10/25/2011	5:46:23 PM	BCl3 valve closed
10/25/2011	5:46:23 PM	PH3 valve closed
10/25/2011	5:46:23 PM	SiCl4 pre valve closed
10/25/2011	5:46:23 PM	SiCl4 post valve closed
10/25/2011	5:46:23 PM	Bypass valve closed
10/25/2011	5:46:23 PM	Bubbler valve closed
10/25/2011	5:46:23 PM	Helium valve opened
10/25/2011	5:46:23 PM	Main Vac valve opened
10/25/2011	5:46:23 PM	Helium MFC set to  20.000000
10/25/2011	5:46:23 PM	H2 MFC set to  0.000000
10/25/2011	5:46:23 PM	BCl3 MFC set to  0.000000
10/25/2011	5:46:23 PM	PHl3 MFC set to  0.000000
10/25/2011	5:46:23 PM	SiCl4 MFC set to  0.000000
10/25/2011	5:46:23 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	5:46:23 PM	Tube furnace set to 150
10/25/2011	5:46:53 PM	Helium valve closed
10/25/2011	5:46:53 PM	H2 valve closed
10/25/2011	5:46:53 PM	BCl3 valve closed
10/25/2011	5:46:53 PM	PH3 valve closed
10/25/2011	5:46:53 PM	SiCl4 pre valve closed
10/25/2011	5:46:53 PM	SiCl4 post valve closed
10/25/2011	5:46:53 PM	Bypass valve closed
10/25/2011	5:46:53 PM	Bubbler valve closed
10/25/2011	5:46:53 PM	Main Vac valve opened
10/25/2011	5:46:53 PM	Helium MFC set to  0.000000
10/25/2011	5:46:53 PM	H2 MFC set to  0.000000
10/25/2011	5:46:53 PM	BCl3 MFC set to  0.000000
10/25/2011	5:46:53 PM	PHl3 MFC set to  0.000000
10/25/2011	5:46:53 PM	SiCl4 MFC set to  0.000000
10/25/2011	5:46:53 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	5:46:53 PM	Tube furnace set to 150
10/25/2011	5:46:54 PM	Run finished at 5:46 PM
10/25/2011	5:48:28 PM	Recipe started at 5:48 PM
10/25/2011	5:48:28 PM	Helium valve closed
10/25/2011	5:48:28 PM	H2 valve closed
10/25/2011	5:48:28 PM	BCl3 valve closed
10/25/2011	5:48:28 PM	PH3 valve closed
10/25/2011	5:48:28 PM	SiCl4 pre valve closed
10/25/2011	5:48:28 PM	SiCl4 post valve closed
10/25/2011	5:48:28 PM	Bypass valve closed
10/25/2011	5:48:28 PM	Bubbler valve closed
10/25/2011	5:48:28 PM	Main Vac valve opened
10/25/2011	5:48:28 PM	Helium MFC set to  0.000000
10/25/2011	5:48:28 PM	H2 MFC set to  0.000000
10/25/2011	5:48:28 PM	BCl3 MFC set to  0.000000
10/25/2011	5:48:28 PM	PHl3 MFC set to  0.000000
10/25/2011	5:48:28 PM	SiCl4 MFC set to  0.000000
10/25/2011	5:48:28 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	5:48:28 PM	Tube furnace set to 150
10/25/2011	5:48:58 PM	H2 valve closed
10/25/2011	5:48:58 PM	BCl3 valve closed
10/25/2011	5:48:58 PM	PH3 valve closed
10/25/2011	5:48:58 PM	SiCl4 pre valve closed
10/25/2011	5:48:58 PM	SiCl4 post valve closed
10/25/2011	5:48:58 PM	Bypass valve closed
10/25/2011	5:48:58 PM	Bubbler valve closed
10/25/2011	5:48:58 PM	Helium valve opened
10/25/2011	5:48:58 PM	Main Vac valve opened
10/25/2011	5:48:58 PM	Helium MFC set to  20.000000
10/25/2011	5:48:58 PM	H2 MFC set to  0.000000
10/25/2011	5:48:58 PM	BCl3 MFC set to  0.000000
10/25/2011	5:48:58 PM	PHl3 MFC set to  0.000000
10/25/2011	5:48:58 PM	SiCl4 MFC set to  0.000000
10/25/2011	5:48:58 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	5:48:58 PM	Tube furnace set to 150
10/25/2011	5:49:28 PM	Helium valve closed
10/25/2011	5:49:28 PM	H2 valve closed
10/25/2011	5:49:28 PM	BCl3 valve closed
10/25/2011	5:49:28 PM	PH3 valve closed
10/25/2011	5:49:28 PM	SiCl4 pre valve closed
10/25/2011	5:49:28 PM	SiCl4 post valve closed
10/25/2011	5:49:28 PM	Bypass valve closed
10/25/2011	5:49:28 PM	Bubbler valve closed
10/25/2011	5:49:28 PM	Main Vac valve opened
10/25/2011	5:49:28 PM	Helium MFC set to  0.000000
10/25/2011	5:49:28 PM	H2 MFC set to  0.000000
10/25/2011	5:49:28 PM	BCl3 MFC set to  0.000000
10/25/2011	5:49:28 PM	PHl3 MFC set to  0.000000
10/25/2011	5:49:28 PM	SiCl4 MFC set to  0.000000
10/25/2011	5:49:28 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	5:49:28 PM	Tube furnace set to 150
10/25/2011	5:49:58 PM	H2 valve closed
10/25/2011	5:49:58 PM	BCl3 valve closed
10/25/2011	5:49:58 PM	PH3 valve closed
10/25/2011	5:49:58 PM	SiCl4 pre valve closed
10/25/2011	5:49:58 PM	SiCl4 post valve closed
10/25/2011	5:49:58 PM	Bypass valve closed
10/25/2011	5:49:58 PM	Bubbler valve closed
10/25/2011	5:49:58 PM	Helium valve opened
10/25/2011	5:49:58 PM	Main Vac valve opened
10/25/2011	5:49:58 PM	Helium MFC set to  20.000000
10/25/2011	5:49:58 PM	H2 MFC set to  0.000000
10/25/2011	5:49:58 PM	BCl3 MFC set to  0.000000
10/25/2011	5:49:58 PM	PHl3 MFC set to  0.000000
10/25/2011	5:49:58 PM	SiCl4 MFC set to  0.000000
10/25/2011	5:49:58 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	5:49:59 PM	Tube furnace set to 150
10/25/2011	5:50:29 PM	Helium valve closed
10/25/2011	5:50:29 PM	H2 valve closed
10/25/2011	5:50:29 PM	BCl3 valve closed
10/25/2011	5:50:29 PM	PH3 valve closed
10/25/2011	5:50:29 PM	SiCl4 pre valve closed
10/25/2011	5:50:29 PM	SiCl4 post valve closed
10/25/2011	5:50:29 PM	Bypass valve closed
10/25/2011	5:50:29 PM	Bubbler valve closed
10/25/2011	5:50:29 PM	Main Vac valve opened
10/25/2011	5:50:29 PM	Helium MFC set to  0.000000
10/25/2011	5:50:29 PM	H2 MFC set to  0.000000
10/25/2011	5:50:29 PM	BCl3 MFC set to  0.000000
10/25/2011	5:50:29 PM	PHl3 MFC set to  0.000000
10/25/2011	5:50:29 PM	SiCl4 MFC set to  0.000000
10/25/2011	5:50:29 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	5:50:29 PM	Tube furnace set to 150
10/25/2011	5:50:59 PM	H2 valve closed
10/25/2011	5:50:59 PM	BCl3 valve closed
10/25/2011	5:50:59 PM	PH3 valve closed
10/25/2011	5:50:59 PM	SiCl4 pre valve closed
10/25/2011	5:50:59 PM	SiCl4 post valve closed
10/25/2011	5:50:59 PM	Bypass valve closed
10/25/2011	5:50:59 PM	Bubbler valve closed
10/25/2011	5:50:59 PM	Helium valve opened
10/25/2011	5:50:59 PM	Main Vac valve opened
10/25/2011	5:50:59 PM	Helium MFC set to  20.000000
10/25/2011	5:50:59 PM	H2 MFC set to  0.000000
10/25/2011	5:50:59 PM	BCl3 MFC set to  0.000000
10/25/2011	5:50:59 PM	PHl3 MFC set to  0.000000
10/25/2011	5:50:59 PM	SiCl4 MFC set to  0.000000
10/25/2011	5:50:59 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	5:50:59 PM	Tube furnace set to 150
10/25/2011	5:51:29 PM	Helium valve closed
10/25/2011	5:51:29 PM	H2 valve closed
10/25/2011	5:51:29 PM	BCl3 valve closed
10/25/2011	5:51:29 PM	PH3 valve closed
10/25/2011	5:51:29 PM	SiCl4 pre valve closed
10/25/2011	5:51:29 PM	SiCl4 post valve closed
10/25/2011	5:51:29 PM	Bypass valve closed
10/25/2011	5:51:29 PM	Bubbler valve closed
10/25/2011	5:51:29 PM	Main Vac valve opened
10/25/2011	5:51:29 PM	Helium MFC set to  0.000000
10/25/2011	5:51:29 PM	H2 MFC set to  0.000000
10/25/2011	5:51:29 PM	BCl3 MFC set to  0.000000
10/25/2011	5:51:29 PM	PHl3 MFC set to  0.000000
10/25/2011	5:51:29 PM	SiCl4 MFC set to  0.000000
10/25/2011	5:51:29 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	5:51:29 PM	Tube furnace set to 150
10/25/2011	5:51:59 PM	H2 valve closed
10/25/2011	5:51:59 PM	BCl3 valve closed
10/25/2011	5:51:59 PM	PH3 valve closed
10/25/2011	5:51:59 PM	SiCl4 pre valve closed
10/25/2011	5:51:59 PM	SiCl4 post valve closed
10/25/2011	5:51:59 PM	Bypass valve closed
10/25/2011	5:51:59 PM	Bubbler valve closed
10/25/2011	5:51:59 PM	Helium valve opened
10/25/2011	5:51:59 PM	Main Vac valve opened
10/25/2011	5:51:59 PM	Helium MFC set to  20.000000
10/25/2011	5:51:59 PM	H2 MFC set to  0.000000
10/25/2011	5:51:59 PM	BCl3 MFC set to  0.000000
10/25/2011	5:51:59 PM	PHl3 MFC set to  0.000000
10/25/2011	5:51:59 PM	SiCl4 MFC set to  0.000000
10/25/2011	5:51:59 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	5:51:59 PM	Tube furnace set to 150
10/25/2011	5:52:29 PM	Helium valve closed
10/25/2011	5:52:29 PM	H2 valve closed
10/25/2011	5:52:29 PM	BCl3 valve closed
10/25/2011	5:52:29 PM	PH3 valve closed
10/25/2011	5:52:29 PM	SiCl4 pre valve closed
10/25/2011	5:52:29 PM	SiCl4 post valve closed
10/25/2011	5:52:29 PM	Bypass valve closed
10/25/2011	5:52:29 PM	Bubbler valve closed
10/25/2011	5:52:29 PM	Main Vac valve opened
10/25/2011	5:52:29 PM	Helium MFC set to  0.000000
10/25/2011	5:52:29 PM	H2 MFC set to  0.000000
10/25/2011	5:52:29 PM	BCl3 MFC set to  0.000000
10/25/2011	5:52:29 PM	PHl3 MFC set to  0.000000
10/25/2011	5:52:29 PM	SiCl4 MFC set to  0.000000
10/25/2011	5:52:29 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	5:52:30 PM	Tube furnace set to 150
10/25/2011	5:53:00 PM	H2 valve closed
10/25/2011	5:53:00 PM	BCl3 valve closed
10/25/2011	5:53:00 PM	PH3 valve closed
10/25/2011	5:53:00 PM	SiCl4 pre valve closed
10/25/2011	5:53:00 PM	SiCl4 post valve closed
10/25/2011	5:53:00 PM	Bypass valve closed
10/25/2011	5:53:00 PM	Bubbler valve closed
10/25/2011	5:53:00 PM	Helium valve opened
10/25/2011	5:53:00 PM	Main Vac valve opened
10/25/2011	5:53:00 PM	Helium MFC set to  20.000000
10/25/2011	5:53:00 PM	H2 MFC set to  0.000000
10/25/2011	5:53:00 PM	BCl3 MFC set to  0.000000
10/25/2011	5:53:00 PM	PHl3 MFC set to  0.000000
10/25/2011	5:53:00 PM	SiCl4 MFC set to  0.000000
10/25/2011	5:53:00 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	5:53:00 PM	Tube furnace set to 150
10/25/2011	5:53:30 PM	Helium valve closed
10/25/2011	5:53:30 PM	H2 valve closed
10/25/2011	5:53:30 PM	BCl3 valve closed
10/25/2011	5:53:30 PM	PH3 valve closed
10/25/2011	5:53:30 PM	SiCl4 pre valve closed
10/25/2011	5:53:30 PM	SiCl4 post valve closed
10/25/2011	5:53:30 PM	Bypass valve closed
10/25/2011	5:53:30 PM	Bubbler valve closed
10/25/2011	5:53:30 PM	Main Vac valve opened
10/25/2011	5:53:30 PM	Helium MFC set to  0.000000
10/25/2011	5:53:30 PM	H2 MFC set to  0.000000
10/25/2011	5:53:30 PM	BCl3 MFC set to  0.000000
10/25/2011	5:53:30 PM	PHl3 MFC set to  0.000000
10/25/2011	5:53:30 PM	SiCl4 MFC set to  0.000000
10/25/2011	5:53:30 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	5:53:30 PM	Tube furnace set to 150
10/25/2011	5:54:00 PM	H2 valve closed
10/25/2011	5:54:00 PM	BCl3 valve closed
10/25/2011	5:54:00 PM	PH3 valve closed
10/25/2011	5:54:00 PM	SiCl4 pre valve closed
10/25/2011	5:54:00 PM	SiCl4 post valve closed
10/25/2011	5:54:00 PM	Bypass valve closed
10/25/2011	5:54:00 PM	Bubbler valve closed
10/25/2011	5:54:00 PM	Helium valve opened
10/25/2011	5:54:00 PM	Main Vac valve opened
10/25/2011	5:54:00 PM	Helium MFC set to  20.000000
10/25/2011	5:54:00 PM	H2 MFC set to  0.000000
10/25/2011	5:54:00 PM	BCl3 MFC set to  0.000000
10/25/2011	5:54:00 PM	PHl3 MFC set to  0.000000
10/25/2011	5:54:00 PM	SiCl4 MFC set to  0.000000
10/25/2011	5:54:00 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	5:54:00 PM	Tube furnace set to 150
10/25/2011	5:54:30 PM	Helium valve closed
10/25/2011	5:54:30 PM	H2 valve closed
10/25/2011	5:54:30 PM	BCl3 valve closed
10/25/2011	5:54:30 PM	PH3 valve closed
10/25/2011	5:54:30 PM	SiCl4 pre valve closed
10/25/2011	5:54:30 PM	SiCl4 post valve closed
10/25/2011	5:54:30 PM	Bypass valve closed
10/25/2011	5:54:30 PM	Bubbler valve closed
10/25/2011	5:54:30 PM	Main Vac valve opened
10/25/2011	5:54:30 PM	Helium MFC set to  0.000000
10/25/2011	5:54:30 PM	H2 MFC set to  0.000000
10/25/2011	5:54:30 PM	BCl3 MFC set to  0.000000
10/25/2011	5:54:30 PM	PHl3 MFC set to  0.000000
10/25/2011	5:54:30 PM	SiCl4 MFC set to  0.000000
10/25/2011	5:54:30 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	5:54:30 PM	Tube furnace set to 150
10/25/2011	5:55:00 PM	H2 valve closed
10/25/2011	5:55:00 PM	BCl3 valve closed
10/25/2011	5:55:00 PM	PH3 valve closed
10/25/2011	5:55:00 PM	SiCl4 pre valve closed
10/25/2011	5:55:00 PM	SiCl4 post valve closed
10/25/2011	5:55:00 PM	Bypass valve closed
10/25/2011	5:55:00 PM	Bubbler valve closed
10/25/2011	5:55:00 PM	Helium valve opened
10/25/2011	5:55:00 PM	Main Vac valve opened
10/25/2011	5:55:00 PM	Helium MFC set to  20.000000
10/25/2011	5:55:00 PM	H2 MFC set to  0.000000
10/25/2011	5:55:00 PM	BCl3 MFC set to  0.000000
10/25/2011	5:55:00 PM	PHl3 MFC set to  0.000000
10/25/2011	5:55:00 PM	SiCl4 MFC set to  0.000000
10/25/2011	5:55:00 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	5:55:01 PM	Tube furnace set to 150
10/25/2011	5:55:31 PM	Helium valve closed
10/25/2011	5:55:31 PM	H2 valve closed
10/25/2011	5:55:31 PM	BCl3 valve closed
10/25/2011	5:55:31 PM	PH3 valve closed
10/25/2011	5:55:31 PM	SiCl4 pre valve closed
10/25/2011	5:55:31 PM	SiCl4 post valve closed
10/25/2011	5:55:31 PM	Bypass valve closed
10/25/2011	5:55:31 PM	Bubbler valve closed
10/25/2011	5:55:31 PM	Main Vac valve opened
10/25/2011	5:55:31 PM	Helium MFC set to  0.000000
10/25/2011	5:55:31 PM	H2 MFC set to  0.000000
10/25/2011	5:55:31 PM	BCl3 MFC set to  0.000000
10/25/2011	5:55:31 PM	PHl3 MFC set to  0.000000
10/25/2011	5:55:31 PM	SiCl4 MFC set to  0.000000
10/25/2011	5:55:31 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	5:55:31 PM	Tube furnace set to 150
10/25/2011	5:56:01 PM	H2 valve closed
10/25/2011	5:56:01 PM	BCl3 valve closed
10/25/2011	5:56:01 PM	PH3 valve closed
10/25/2011	5:56:01 PM	SiCl4 pre valve closed
10/25/2011	5:56:01 PM	SiCl4 post valve closed
10/25/2011	5:56:01 PM	Bypass valve closed
10/25/2011	5:56:01 PM	Bubbler valve closed
10/25/2011	5:56:01 PM	Helium valve opened
10/25/2011	5:56:01 PM	Main Vac valve opened
10/25/2011	5:56:01 PM	Helium MFC set to  20.000000
10/25/2011	5:56:01 PM	H2 MFC set to  0.000000
10/25/2011	5:56:01 PM	BCl3 MFC set to  0.000000
10/25/2011	5:56:01 PM	PHl3 MFC set to  0.000000
10/25/2011	5:56:01 PM	SiCl4 MFC set to  0.000000
10/25/2011	5:56:01 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	5:56:01 PM	Tube furnace set to 150
10/25/2011	5:56:31 PM	Helium valve closed
10/25/2011	5:56:31 PM	H2 valve closed
10/25/2011	5:56:31 PM	BCl3 valve closed
10/25/2011	5:56:31 PM	PH3 valve closed
10/25/2011	5:56:31 PM	SiCl4 pre valve closed
10/25/2011	5:56:31 PM	SiCl4 post valve closed
10/25/2011	5:56:31 PM	Bypass valve closed
10/25/2011	5:56:31 PM	Bubbler valve closed
10/25/2011	5:56:31 PM	Main Vac valve opened
10/25/2011	5:56:31 PM	Helium MFC set to  0.000000
10/25/2011	5:56:31 PM	H2 MFC set to  0.000000
10/25/2011	5:56:31 PM	BCl3 MFC set to  0.000000
10/25/2011	5:56:31 PM	PHl3 MFC set to  0.000000
10/25/2011	5:56:31 PM	SiCl4 MFC set to  0.000000
10/25/2011	5:56:31 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	5:56:31 PM	Tube furnace set to 150
10/25/2011	5:57:01 PM	H2 valve closed
10/25/2011	5:57:01 PM	BCl3 valve closed
10/25/2011	5:57:01 PM	PH3 valve closed
10/25/2011	5:57:01 PM	SiCl4 pre valve closed
10/25/2011	5:57:01 PM	SiCl4 post valve closed
10/25/2011	5:57:01 PM	Bypass valve closed
10/25/2011	5:57:01 PM	Bubbler valve closed
10/25/2011	5:57:01 PM	Helium valve opened
10/25/2011	5:57:01 PM	Main Vac valve opened
10/25/2011	5:57:01 PM	Helium MFC set to  20.000000
10/25/2011	5:57:01 PM	H2 MFC set to  0.000000
10/25/2011	5:57:01 PM	BCl3 MFC set to  0.000000
10/25/2011	5:57:01 PM	PHl3 MFC set to  0.000000
10/25/2011	5:57:01 PM	SiCl4 MFC set to  0.000000
10/25/2011	5:57:01 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	5:57:01 PM	Tube furnace set to 150
10/25/2011	5:57:31 PM	Helium valve closed
10/25/2011	5:57:31 PM	H2 valve closed
10/25/2011	5:57:31 PM	BCl3 valve closed
10/25/2011	5:57:31 PM	PH3 valve closed
10/25/2011	5:57:31 PM	SiCl4 pre valve closed
10/25/2011	5:57:31 PM	SiCl4 post valve closed
10/25/2011	5:57:31 PM	Bypass valve closed
10/25/2011	5:57:31 PM	Bubbler valve closed
10/25/2011	5:57:31 PM	Main Vac valve opened
10/25/2011	5:57:31 PM	Helium MFC set to  0.000000
10/25/2011	5:57:31 PM	H2 MFC set to  0.000000
10/25/2011	5:57:31 PM	BCl3 MFC set to  0.000000
10/25/2011	5:57:31 PM	PHl3 MFC set to  0.000000
10/25/2011	5:57:31 PM	SiCl4 MFC set to  0.000000
10/25/2011	5:57:31 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	5:57:32 PM	Tube furnace set to 150
10/25/2011	5:58:02 PM	H2 valve closed
10/25/2011	5:58:02 PM	BCl3 valve closed
10/25/2011	5:58:02 PM	PH3 valve closed
10/25/2011	5:58:02 PM	SiCl4 pre valve closed
10/25/2011	5:58:02 PM	SiCl4 post valve closed
10/25/2011	5:58:02 PM	Bypass valve closed
10/25/2011	5:58:02 PM	Bubbler valve closed
10/25/2011	5:58:02 PM	Helium valve opened
10/25/2011	5:58:02 PM	Main Vac valve opened
10/25/2011	5:58:02 PM	Helium MFC set to  20.000000
10/25/2011	5:58:02 PM	H2 MFC set to  0.000000
10/25/2011	5:58:02 PM	BCl3 MFC set to  0.000000
10/25/2011	5:58:02 PM	PHl3 MFC set to  0.000000
10/25/2011	5:58:02 PM	SiCl4 MFC set to  0.000000
10/25/2011	5:58:02 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	5:58:02 PM	Tube furnace set to 150
10/25/2011	5:58:32 PM	Helium valve closed
10/25/2011	5:58:32 PM	H2 valve closed
10/25/2011	5:58:32 PM	BCl3 valve closed
10/25/2011	5:58:32 PM	PH3 valve closed
10/25/2011	5:58:32 PM	SiCl4 pre valve closed
10/25/2011	5:58:32 PM	SiCl4 post valve closed
10/25/2011	5:58:32 PM	Bypass valve closed
10/25/2011	5:58:32 PM	Bubbler valve closed
10/25/2011	5:58:32 PM	Main Vac valve opened
10/25/2011	5:58:32 PM	Helium MFC set to  0.000000
10/25/2011	5:58:32 PM	H2 MFC set to  0.000000
10/25/2011	5:58:32 PM	BCl3 MFC set to  0.000000
10/25/2011	5:58:32 PM	PHl3 MFC set to  0.000000
10/25/2011	5:58:32 PM	SiCl4 MFC set to  0.000000
10/25/2011	5:58:32 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	5:58:32 PM	Tube furnace set to 150
10/25/2011	5:58:33 PM	Run finished at 5:58 PM
10/25/2011	7:01:52 PM	Recipe started at 7:01 PM
10/25/2011	7:01:52 PM	Helium valve closed
10/25/2011	7:01:52 PM	H2 valve closed
10/25/2011	7:01:52 PM	BCl3 valve closed
10/25/2011	7:01:52 PM	PH3 valve closed
10/25/2011	7:01:52 PM	SiCl4 pre valve closed
10/25/2011	7:01:52 PM	SiCl4 post valve closed
10/25/2011	7:01:52 PM	Bypass valve closed
10/25/2011	7:01:52 PM	Bubbler valve closed
10/25/2011	7:01:52 PM	Main Vac valve opened
10/25/2011	7:01:52 PM	Helium MFC set to  0.000000
10/25/2011	7:01:52 PM	H2 MFC set to  0.000000
10/25/2011	7:01:52 PM	BCl3 MFC set to  0.000000
10/25/2011	7:01:52 PM	PHl3 MFC set to  0.000000
10/25/2011	7:01:52 PM	SiCl4 MFC set to  0.000000
10/25/2011	7:01:52 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	7:01:52 PM	Tube furnace set to 150
10/25/2011	7:02:22 PM	H2 valve closed
10/25/2011	7:02:22 PM	BCl3 valve closed
10/25/2011	7:02:22 PM	PH3 valve closed
10/25/2011	7:02:22 PM	SiCl4 pre valve closed
10/25/2011	7:02:22 PM	SiCl4 post valve closed
10/25/2011	7:02:22 PM	Bypass valve closed
10/25/2011	7:02:22 PM	Bubbler valve closed
10/25/2011	7:02:22 PM	Helium valve opened
10/25/2011	7:02:22 PM	Main Vac valve opened
10/25/2011	7:02:22 PM	Helium MFC set to  20.000000
10/25/2011	7:02:22 PM	H2 MFC set to  0.000000
10/25/2011	7:02:22 PM	BCl3 MFC set to  0.000000
10/25/2011	7:02:22 PM	PHl3 MFC set to  0.000000
10/25/2011	7:02:22 PM	SiCl4 MFC set to  0.000000
10/25/2011	7:02:22 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	7:02:22 PM	Tube furnace set to 150
10/25/2011	7:02:53 PM	Helium valve closed
10/25/2011	7:02:53 PM	H2 valve closed
10/25/2011	7:02:53 PM	BCl3 valve closed
10/25/2011	7:02:53 PM	PH3 valve closed
10/25/2011	7:02:53 PM	SiCl4 pre valve closed
10/25/2011	7:02:53 PM	SiCl4 post valve closed
10/25/2011	7:02:53 PM	Bypass valve closed
10/25/2011	7:02:53 PM	Bubbler valve closed
10/25/2011	7:02:53 PM	Main Vac valve opened
10/25/2011	7:02:53 PM	Helium MFC set to  0.000000
10/25/2011	7:02:53 PM	H2 MFC set to  0.000000
10/25/2011	7:02:53 PM	BCl3 MFC set to  0.000000
10/25/2011	7:02:53 PM	PHl3 MFC set to  0.000000
10/25/2011	7:02:53 PM	SiCl4 MFC set to  0.000000
10/25/2011	7:02:53 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	7:02:53 PM	Tube furnace set to 150
10/25/2011	7:03:23 PM	H2 valve closed
10/25/2011	7:03:23 PM	BCl3 valve closed
10/25/2011	7:03:23 PM	PH3 valve closed
10/25/2011	7:03:23 PM	SiCl4 pre valve closed
10/25/2011	7:03:23 PM	SiCl4 post valve closed
10/25/2011	7:03:23 PM	Bypass valve closed
10/25/2011	7:03:23 PM	Bubbler valve closed
10/25/2011	7:03:23 PM	Helium valve opened
10/25/2011	7:03:23 PM	Main Vac valve opened
10/25/2011	7:03:23 PM	Helium MFC set to  20.000000
10/25/2011	7:03:23 PM	H2 MFC set to  0.000000
10/25/2011	7:03:23 PM	BCl3 MFC set to  0.000000
10/25/2011	7:03:23 PM	PHl3 MFC set to  0.000000
10/25/2011	7:03:23 PM	SiCl4 MFC set to  0.000000
10/25/2011	7:03:23 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	7:03:23 PM	Tube furnace set to 150
10/25/2011	7:03:53 PM	Helium valve closed
10/25/2011	7:03:53 PM	H2 valve closed
10/25/2011	7:03:53 PM	BCl3 valve closed
10/25/2011	7:03:53 PM	PH3 valve closed
10/25/2011	7:03:53 PM	SiCl4 pre valve closed
10/25/2011	7:03:53 PM	SiCl4 post valve closed
10/25/2011	7:03:53 PM	Bypass valve closed
10/25/2011	7:03:53 PM	Bubbler valve closed
10/25/2011	7:03:53 PM	Main Vac valve opened
10/25/2011	7:03:53 PM	Helium MFC set to  0.000000
10/25/2011	7:03:53 PM	H2 MFC set to  0.000000
10/25/2011	7:03:53 PM	BCl3 MFC set to  0.000000
10/25/2011	7:03:53 PM	PHl3 MFC set to  0.000000
10/25/2011	7:03:53 PM	SiCl4 MFC set to  0.000000
10/25/2011	7:03:53 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	7:03:53 PM	Tube furnace set to 150
10/25/2011	7:04:23 PM	H2 valve closed
10/25/2011	7:04:23 PM	BCl3 valve closed
10/25/2011	7:04:23 PM	PH3 valve closed
10/25/2011	7:04:23 PM	SiCl4 pre valve closed
10/25/2011	7:04:23 PM	SiCl4 post valve closed
10/25/2011	7:04:23 PM	Bypass valve closed
10/25/2011	7:04:23 PM	Bubbler valve closed
10/25/2011	7:04:23 PM	Helium valve opened
10/25/2011	7:04:23 PM	Main Vac valve opened
10/25/2011	7:04:23 PM	Helium MFC set to  20.000000
10/25/2011	7:04:23 PM	H2 MFC set to  0.000000
10/25/2011	7:04:23 PM	BCl3 MFC set to  0.000000
10/25/2011	7:04:23 PM	PHl3 MFC set to  0.000000
10/25/2011	7:04:23 PM	SiCl4 MFC set to  0.000000
10/25/2011	7:04:23 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	7:04:23 PM	Tube furnace set to 150
10/25/2011	7:04:53 PM	Helium valve closed
10/25/2011	7:04:53 PM	H2 valve closed
10/25/2011	7:04:53 PM	BCl3 valve closed
10/25/2011	7:04:53 PM	PH3 valve closed
10/25/2011	7:04:53 PM	SiCl4 pre valve closed
10/25/2011	7:04:53 PM	SiCl4 post valve closed
10/25/2011	7:04:53 PM	Bypass valve closed
10/25/2011	7:04:53 PM	Bubbler valve closed
10/25/2011	7:04:53 PM	Main Vac valve opened
10/25/2011	7:04:53 PM	Helium MFC set to  0.000000
10/25/2011	7:04:53 PM	H2 MFC set to  0.000000
10/25/2011	7:04:53 PM	BCl3 MFC set to  0.000000
10/25/2011	7:04:53 PM	PHl3 MFC set to  0.000000
10/25/2011	7:04:53 PM	SiCl4 MFC set to  0.000000
10/25/2011	7:04:53 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	7:04:53 PM	Tube furnace set to 150
10/25/2011	7:05:23 PM	H2 valve closed
10/25/2011	7:05:23 PM	BCl3 valve closed
10/25/2011	7:05:23 PM	PH3 valve closed
10/25/2011	7:05:24 PM	SiCl4 pre valve closed
10/25/2011	7:05:24 PM	SiCl4 post valve closed
10/25/2011	7:05:24 PM	Bypass valve closed
10/25/2011	7:05:24 PM	Bubbler valve closed
10/25/2011	7:05:24 PM	Helium valve opened
10/25/2011	7:05:24 PM	Main Vac valve opened
10/25/2011	7:05:24 PM	Helium MFC set to  20.000000
10/25/2011	7:05:24 PM	H2 MFC set to  0.000000
10/25/2011	7:05:24 PM	BCl3 MFC set to  0.000000
10/25/2011	7:05:24 PM	PHl3 MFC set to  0.000000
10/25/2011	7:05:24 PM	SiCl4 MFC set to  0.000000
10/25/2011	7:05:24 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	7:05:24 PM	Tube furnace set to 150
10/25/2011	7:05:54 PM	Helium valve closed
10/25/2011	7:05:54 PM	H2 valve closed
10/25/2011	7:05:54 PM	BCl3 valve closed
10/25/2011	7:05:54 PM	PH3 valve closed
10/25/2011	7:05:54 PM	SiCl4 pre valve closed
10/25/2011	7:05:54 PM	SiCl4 post valve closed
10/25/2011	7:05:54 PM	Bypass valve closed
10/25/2011	7:05:54 PM	Bubbler valve closed
10/25/2011	7:05:54 PM	Main Vac valve opened
10/25/2011	7:05:54 PM	Helium MFC set to  0.000000
10/25/2011	7:05:54 PM	H2 MFC set to  0.000000
10/25/2011	7:05:54 PM	BCl3 MFC set to  0.000000
10/25/2011	7:05:54 PM	PHl3 MFC set to  0.000000
10/25/2011	7:05:54 PM	SiCl4 MFC set to  0.000000
10/25/2011	7:05:54 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	7:05:54 PM	Tube furnace set to 150
10/25/2011	7:06:24 PM	H2 valve closed
10/25/2011	7:06:24 PM	BCl3 valve closed
10/25/2011	7:06:24 PM	PH3 valve closed
10/25/2011	7:06:24 PM	SiCl4 pre valve closed
10/25/2011	7:06:24 PM	SiCl4 post valve closed
10/25/2011	7:06:24 PM	Bypass valve closed
10/25/2011	7:06:24 PM	Bubbler valve closed
10/25/2011	7:06:24 PM	Helium valve opened
10/25/2011	7:06:24 PM	Main Vac valve opened
10/25/2011	7:06:24 PM	Helium MFC set to  20.000000
10/25/2011	7:06:24 PM	H2 MFC set to  0.000000
10/25/2011	7:06:24 PM	BCl3 MFC set to  0.000000
10/25/2011	7:06:24 PM	PHl3 MFC set to  0.000000
10/25/2011	7:06:24 PM	SiCl4 MFC set to  0.000000
10/25/2011	7:06:24 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	7:06:24 PM	Tube furnace set to 150
10/25/2011	7:06:54 PM	Helium valve closed
10/25/2011	7:06:54 PM	H2 valve closed
10/25/2011	7:06:54 PM	BCl3 valve closed
10/25/2011	7:06:54 PM	PH3 valve closed
10/25/2011	7:06:54 PM	SiCl4 pre valve closed
10/25/2011	7:06:54 PM	SiCl4 post valve closed
10/25/2011	7:06:54 PM	Bypass valve closed
10/25/2011	7:06:54 PM	Bubbler valve closed
10/25/2011	7:06:54 PM	Main Vac valve opened
10/25/2011	7:06:54 PM	Helium MFC set to  0.000000
10/25/2011	7:06:54 PM	H2 MFC set to  0.000000
10/25/2011	7:06:54 PM	BCl3 MFC set to  0.000000
10/25/2011	7:06:54 PM	PHl3 MFC set to  0.000000
10/25/2011	7:06:54 PM	SiCl4 MFC set to  0.000000
10/25/2011	7:06:54 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	7:06:54 PM	Tube furnace set to 150
10/25/2011	7:07:24 PM	H2 valve closed
10/25/2011	7:07:24 PM	BCl3 valve closed
10/25/2011	7:07:24 PM	PH3 valve closed
10/25/2011	7:07:24 PM	SiCl4 pre valve closed
10/25/2011	7:07:24 PM	SiCl4 post valve closed
10/25/2011	7:07:24 PM	Bypass valve closed
10/25/2011	7:07:24 PM	Bubbler valve closed
10/25/2011	7:07:24 PM	Helium valve opened
10/25/2011	7:07:24 PM	Main Vac valve opened
10/25/2011	7:07:24 PM	Helium MFC set to  20.000000
10/25/2011	7:07:24 PM	H2 MFC set to  0.000000
10/25/2011	7:07:24 PM	BCl3 MFC set to  0.000000
10/25/2011	7:07:24 PM	PHl3 MFC set to  0.000000
10/25/2011	7:07:24 PM	SiCl4 MFC set to  0.000000
10/25/2011	7:07:24 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	7:07:25 PM	Tube furnace set to 150
10/25/2011	7:07:55 PM	Helium valve closed
10/25/2011	7:07:55 PM	H2 valve closed
10/25/2011	7:07:55 PM	BCl3 valve closed
10/25/2011	7:07:55 PM	PH3 valve closed
10/25/2011	7:07:55 PM	SiCl4 pre valve closed
10/25/2011	7:07:55 PM	SiCl4 post valve closed
10/25/2011	7:07:55 PM	Bypass valve closed
10/25/2011	7:07:55 PM	Bubbler valve closed
10/25/2011	7:07:55 PM	Main Vac valve opened
10/25/2011	7:07:55 PM	Helium MFC set to  0.000000
10/25/2011	7:07:55 PM	H2 MFC set to  0.000000
10/25/2011	7:07:55 PM	BCl3 MFC set to  0.000000
10/25/2011	7:07:55 PM	PHl3 MFC set to  0.000000
10/25/2011	7:07:55 PM	SiCl4 MFC set to  0.000000
10/25/2011	7:07:55 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	7:07:55 PM	Tube furnace set to 150
10/25/2011	7:08:25 PM	H2 valve closed
10/25/2011	7:08:25 PM	BCl3 valve closed
10/25/2011	7:08:25 PM	PH3 valve closed
10/25/2011	7:08:25 PM	SiCl4 pre valve closed
10/25/2011	7:08:25 PM	SiCl4 post valve closed
10/25/2011	7:08:25 PM	Bypass valve closed
10/25/2011	7:08:25 PM	Bubbler valve closed
10/25/2011	7:08:25 PM	Helium valve opened
10/25/2011	7:08:25 PM	Main Vac valve opened
10/25/2011	7:08:25 PM	Helium MFC set to  20.000000
10/25/2011	7:08:25 PM	H2 MFC set to  0.000000
10/25/2011	7:08:25 PM	BCl3 MFC set to  0.000000
10/25/2011	7:08:25 PM	PHl3 MFC set to  0.000000
10/25/2011	7:08:25 PM	SiCl4 MFC set to  0.000000
10/25/2011	7:08:25 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	7:08:25 PM	Tube furnace set to 150
10/25/2011	7:08:55 PM	Helium valve closed
10/25/2011	7:08:55 PM	H2 valve closed
10/25/2011	7:08:55 PM	BCl3 valve closed
10/25/2011	7:08:55 PM	PH3 valve closed
10/25/2011	7:08:55 PM	SiCl4 pre valve closed
10/25/2011	7:08:55 PM	SiCl4 post valve closed
10/25/2011	7:08:55 PM	Bypass valve closed
10/25/2011	7:08:55 PM	Bubbler valve closed
10/25/2011	7:08:55 PM	Main Vac valve opened
10/25/2011	7:08:55 PM	Helium MFC set to  0.000000
10/25/2011	7:08:55 PM	H2 MFC set to  0.000000
10/25/2011	7:08:55 PM	BCl3 MFC set to  0.000000
10/25/2011	7:08:55 PM	PHl3 MFC set to  0.000000
10/25/2011	7:08:55 PM	SiCl4 MFC set to  0.000000
10/25/2011	7:08:55 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	7:08:55 PM	Tube furnace set to 150
10/25/2011	7:09:25 PM	H2 valve closed
10/25/2011	7:09:25 PM	BCl3 valve closed
10/25/2011	7:09:25 PM	PH3 valve closed
10/25/2011	7:09:25 PM	SiCl4 pre valve closed
10/25/2011	7:09:25 PM	SiCl4 post valve closed
10/25/2011	7:09:25 PM	Bypass valve closed
10/25/2011	7:09:25 PM	Bubbler valve closed
10/25/2011	7:09:25 PM	Helium valve opened
10/25/2011	7:09:25 PM	Main Vac valve opened
10/25/2011	7:09:25 PM	Helium MFC set to  20.000000
10/25/2011	7:09:25 PM	H2 MFC set to  0.000000
10/25/2011	7:09:25 PM	BCl3 MFC set to  0.000000
10/25/2011	7:09:25 PM	PHl3 MFC set to  0.000000
10/25/2011	7:09:25 PM	SiCl4 MFC set to  0.000000
10/25/2011	7:09:25 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	7:09:25 PM	Tube furnace set to 150
10/25/2011	7:09:55 PM	Helium valve closed
10/25/2011	7:09:55 PM	H2 valve closed
10/25/2011	7:09:55 PM	BCl3 valve closed
10/25/2011	7:09:55 PM	PH3 valve closed
10/25/2011	7:09:55 PM	SiCl4 pre valve closed
10/25/2011	7:09:55 PM	SiCl4 post valve closed
10/25/2011	7:09:55 PM	Bypass valve closed
10/25/2011	7:09:55 PM	Bubbler valve closed
10/25/2011	7:09:55 PM	Main Vac valve opened
10/25/2011	7:09:55 PM	Helium MFC set to  0.000000
10/25/2011	7:09:55 PM	H2 MFC set to  0.000000
10/25/2011	7:09:55 PM	BCl3 MFC set to  0.000000
10/25/2011	7:09:55 PM	PHl3 MFC set to  0.000000
10/25/2011	7:09:55 PM	SiCl4 MFC set to  0.000000
10/25/2011	7:09:55 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	7:09:56 PM	Tube furnace set to 150
10/25/2011	7:10:26 PM	H2 valve closed
10/25/2011	7:10:26 PM	BCl3 valve closed
10/25/2011	7:10:26 PM	PH3 valve closed
10/25/2011	7:10:26 PM	SiCl4 pre valve closed
10/25/2011	7:10:26 PM	SiCl4 post valve closed
10/25/2011	7:10:26 PM	Bypass valve closed
10/25/2011	7:10:26 PM	Bubbler valve closed
10/25/2011	7:10:26 PM	Helium valve opened
10/25/2011	7:10:26 PM	Main Vac valve opened
10/25/2011	7:10:26 PM	Helium MFC set to  20.000000
10/25/2011	7:10:26 PM	H2 MFC set to  0.000000
10/25/2011	7:10:26 PM	BCl3 MFC set to  0.000000
10/25/2011	7:10:26 PM	PHl3 MFC set to  0.000000
10/25/2011	7:10:26 PM	SiCl4 MFC set to  0.000000
10/25/2011	7:10:26 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	7:10:26 PM	Tube furnace set to 150
10/25/2011	7:10:56 PM	Helium valve closed
10/25/2011	7:10:56 PM	H2 valve closed
10/25/2011	7:10:56 PM	BCl3 valve closed
10/25/2011	7:10:56 PM	PH3 valve closed
10/25/2011	7:10:56 PM	SiCl4 pre valve closed
10/25/2011	7:10:56 PM	SiCl4 post valve closed
10/25/2011	7:10:56 PM	Bypass valve closed
10/25/2011	7:10:56 PM	Bubbler valve closed
10/25/2011	7:10:56 PM	Main Vac valve opened
10/25/2011	7:10:56 PM	Helium MFC set to  0.000000
10/25/2011	7:10:56 PM	H2 MFC set to  0.000000
10/25/2011	7:10:56 PM	BCl3 MFC set to  0.000000
10/25/2011	7:10:56 PM	PHl3 MFC set to  0.000000
10/25/2011	7:10:56 PM	SiCl4 MFC set to  0.000000
10/25/2011	7:10:56 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	7:10:56 PM	Tube furnace set to 150
10/25/2011	7:11:26 PM	H2 valve closed
10/25/2011	7:11:26 PM	BCl3 valve closed
10/25/2011	7:11:26 PM	PH3 valve closed
10/25/2011	7:11:26 PM	SiCl4 pre valve closed
10/25/2011	7:11:26 PM	SiCl4 post valve closed
10/25/2011	7:11:26 PM	Bypass valve closed
10/25/2011	7:11:26 PM	Bubbler valve closed
10/25/2011	7:11:26 PM	Helium valve opened
10/25/2011	7:11:26 PM	Main Vac valve opened
10/25/2011	7:11:26 PM	Helium MFC set to  20.000000
10/25/2011	7:11:26 PM	H2 MFC set to  0.000000
10/25/2011	7:11:26 PM	BCl3 MFC set to  0.000000
10/25/2011	7:11:26 PM	PHl3 MFC set to  0.000000
10/25/2011	7:11:26 PM	SiCl4 MFC set to  0.000000
10/25/2011	7:11:26 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	7:11:26 PM	Tube furnace set to 150
10/25/2011	7:11:56 PM	Helium valve closed
10/25/2011	7:11:56 PM	H2 valve closed
10/25/2011	7:11:56 PM	BCl3 valve closed
10/25/2011	7:11:56 PM	PH3 valve closed
10/25/2011	7:11:56 PM	SiCl4 pre valve closed
10/25/2011	7:11:56 PM	SiCl4 post valve closed
10/25/2011	7:11:56 PM	Bypass valve closed
10/25/2011	7:11:56 PM	Bubbler valve closed
10/25/2011	7:11:56 PM	Main Vac valve opened
10/25/2011	7:11:56 PM	Helium MFC set to  0.000000
10/25/2011	7:11:56 PM	H2 MFC set to  0.000000
10/25/2011	7:11:56 PM	BCl3 MFC set to  0.000000
10/25/2011	7:11:56 PM	PHl3 MFC set to  0.000000
10/25/2011	7:11:56 PM	SiCl4 MFC set to  0.000000
10/25/2011	7:11:56 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	7:11:56 PM	Tube furnace set to 150
10/25/2011	7:11:57 PM	Run finished at 7:11 PM
10/25/2011	7:12:25 PM	Recipe started at 7:12 PM
10/25/2011	7:12:25 PM	Helium valve closed
10/25/2011	7:12:25 PM	H2 valve closed
10/25/2011	7:12:25 PM	BCl3 valve closed
10/25/2011	7:12:25 PM	PH3 valve closed
10/25/2011	7:12:25 PM	SiCl4 pre valve closed
10/25/2011	7:12:25 PM	SiCl4 post valve closed
10/25/2011	7:12:25 PM	Bypass valve closed
10/25/2011	7:12:25 PM	Bubbler valve closed
10/25/2011	7:12:25 PM	Main Vac valve opened
10/25/2011	7:12:25 PM	Helium MFC set to  0.000000
10/25/2011	7:12:25 PM	H2 MFC set to  0.000000
10/25/2011	7:12:25 PM	BCl3 MFC set to  0.000000
10/25/2011	7:12:25 PM	PHl3 MFC set to  0.000000
10/25/2011	7:12:25 PM	SiCl4 MFC set to  0.000000
10/25/2011	7:12:25 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	7:12:25 PM	Tube furnace set to 150
10/25/2011	7:12:55 PM	H2 valve closed
10/25/2011	7:12:55 PM	BCl3 valve closed
10/25/2011	7:12:55 PM	PH3 valve closed
10/25/2011	7:12:55 PM	SiCl4 pre valve closed
10/25/2011	7:12:55 PM	SiCl4 post valve closed
10/25/2011	7:12:55 PM	Bypass valve closed
10/25/2011	7:12:55 PM	Bubbler valve closed
10/25/2011	7:12:55 PM	Helium valve opened
10/25/2011	7:12:55 PM	Main Vac valve opened
10/25/2011	7:12:55 PM	Helium MFC set to  20.000000
10/25/2011	7:12:55 PM	H2 MFC set to  0.000000
10/25/2011	7:12:55 PM	BCl3 MFC set to  0.000000
10/25/2011	7:12:55 PM	PHl3 MFC set to  0.000000
10/25/2011	7:12:55 PM	SiCl4 MFC set to  0.000000
10/25/2011	7:12:55 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	7:12:55 PM	Tube furnace set to 150
10/25/2011	7:13:25 PM	Helium valve closed
10/25/2011	7:13:25 PM	H2 valve closed
10/25/2011	7:13:25 PM	BCl3 valve closed
10/25/2011	7:13:25 PM	PH3 valve closed
10/25/2011	7:13:25 PM	SiCl4 pre valve closed
10/25/2011	7:13:25 PM	SiCl4 post valve closed
10/25/2011	7:13:25 PM	Bypass valve closed
10/25/2011	7:13:25 PM	Bubbler valve closed
10/25/2011	7:13:25 PM	Main Vac valve opened
10/25/2011	7:13:25 PM	Helium MFC set to  0.000000
10/25/2011	7:13:25 PM	H2 MFC set to  0.000000
10/25/2011	7:13:25 PM	BCl3 MFC set to  0.000000
10/25/2011	7:13:25 PM	PHl3 MFC set to  0.000000
10/25/2011	7:13:25 PM	SiCl4 MFC set to  0.000000
10/25/2011	7:13:25 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	7:13:25 PM	Tube furnace set to 150
10/25/2011	7:13:55 PM	H2 valve closed
10/25/2011	7:13:55 PM	BCl3 valve closed
10/25/2011	7:13:55 PM	PH3 valve closed
10/25/2011	7:13:55 PM	SiCl4 pre valve closed
10/25/2011	7:13:55 PM	SiCl4 post valve closed
10/25/2011	7:13:55 PM	Bypass valve closed
10/25/2011	7:13:55 PM	Bubbler valve closed
10/25/2011	7:13:55 PM	Helium valve opened
10/25/2011	7:13:55 PM	Main Vac valve opened
10/25/2011	7:13:55 PM	Helium MFC set to  20.000000
10/25/2011	7:13:55 PM	H2 MFC set to  0.000000
10/25/2011	7:13:55 PM	BCl3 MFC set to  0.000000
10/25/2011	7:13:55 PM	PHl3 MFC set to  0.000000
10/25/2011	7:13:55 PM	SiCl4 MFC set to  0.000000
10/25/2011	7:13:55 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	7:13:56 PM	Tube furnace set to 150
10/25/2011	7:14:26 PM	Helium valve closed
10/25/2011	7:14:26 PM	H2 valve closed
10/25/2011	7:14:26 PM	BCl3 valve closed
10/25/2011	7:14:26 PM	PH3 valve closed
10/25/2011	7:14:26 PM	SiCl4 pre valve closed
10/25/2011	7:14:26 PM	SiCl4 post valve closed
10/25/2011	7:14:26 PM	Bypass valve closed
10/25/2011	7:14:26 PM	Bubbler valve closed
10/25/2011	7:14:26 PM	Main Vac valve opened
10/25/2011	7:14:26 PM	Helium MFC set to  0.000000
10/25/2011	7:14:26 PM	H2 MFC set to  0.000000
10/25/2011	7:14:26 PM	BCl3 MFC set to  0.000000
10/25/2011	7:14:26 PM	PHl3 MFC set to  0.000000
10/25/2011	7:14:26 PM	SiCl4 MFC set to  0.000000
10/25/2011	7:14:26 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	7:14:26 PM	Tube furnace set to 150
10/25/2011	7:14:56 PM	H2 valve closed
10/25/2011	7:14:56 PM	BCl3 valve closed
10/25/2011	7:14:56 PM	PH3 valve closed
10/25/2011	7:14:56 PM	SiCl4 pre valve closed
10/25/2011	7:14:56 PM	SiCl4 post valve closed
10/25/2011	7:14:56 PM	Bypass valve closed
10/25/2011	7:14:56 PM	Bubbler valve closed
10/25/2011	7:14:56 PM	Helium valve opened
10/25/2011	7:14:56 PM	Main Vac valve opened
10/25/2011	7:14:56 PM	Helium MFC set to  20.000000
10/25/2011	7:14:56 PM	H2 MFC set to  0.000000
10/25/2011	7:14:56 PM	BCl3 MFC set to  0.000000
10/25/2011	7:14:56 PM	PHl3 MFC set to  0.000000
10/25/2011	7:14:56 PM	SiCl4 MFC set to  0.000000
10/25/2011	7:14:56 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	7:14:56 PM	Tube furnace set to 150
10/25/2011	7:15:26 PM	Helium valve closed
10/25/2011	7:15:26 PM	H2 valve closed
10/25/2011	7:15:26 PM	BCl3 valve closed
10/25/2011	7:15:26 PM	PH3 valve closed
10/25/2011	7:15:26 PM	SiCl4 pre valve closed
10/25/2011	7:15:26 PM	SiCl4 post valve closed
10/25/2011	7:15:26 PM	Bypass valve closed
10/25/2011	7:15:26 PM	Bubbler valve closed
10/25/2011	7:15:26 PM	Main Vac valve opened
10/25/2011	7:15:26 PM	Helium MFC set to  0.000000
10/25/2011	7:15:26 PM	H2 MFC set to  0.000000
10/25/2011	7:15:26 PM	BCl3 MFC set to  0.000000
10/25/2011	7:15:26 PM	PHl3 MFC set to  0.000000
10/25/2011	7:15:26 PM	SiCl4 MFC set to  0.000000
10/25/2011	7:15:26 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	7:15:26 PM	Tube furnace set to 150
10/25/2011	7:15:56 PM	H2 valve closed
10/25/2011	7:15:56 PM	BCl3 valve closed
10/25/2011	7:15:56 PM	PH3 valve closed
10/25/2011	7:15:56 PM	SiCl4 pre valve closed
10/25/2011	7:15:56 PM	SiCl4 post valve closed
10/25/2011	7:15:56 PM	Bypass valve closed
10/25/2011	7:15:56 PM	Bubbler valve closed
10/25/2011	7:15:56 PM	Helium valve opened
10/25/2011	7:15:56 PM	Main Vac valve opened
10/25/2011	7:15:56 PM	Helium MFC set to  20.000000
10/25/2011	7:15:56 PM	H2 MFC set to  0.000000
10/25/2011	7:15:56 PM	BCl3 MFC set to  0.000000
10/25/2011	7:15:56 PM	PHl3 MFC set to  0.000000
10/25/2011	7:15:56 PM	SiCl4 MFC set to  0.000000
10/25/2011	7:15:56 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	7:15:56 PM	Tube furnace set to 150
10/25/2011	7:16:26 PM	Helium valve closed
10/25/2011	7:16:26 PM	H2 valve closed
10/25/2011	7:16:26 PM	BCl3 valve closed
10/25/2011	7:16:26 PM	PH3 valve closed
10/25/2011	7:16:26 PM	SiCl4 pre valve closed
10/25/2011	7:16:26 PM	SiCl4 post valve closed
10/25/2011	7:16:26 PM	Bypass valve closed
10/25/2011	7:16:26 PM	Bubbler valve closed
10/25/2011	7:16:26 PM	Main Vac valve opened
10/25/2011	7:16:26 PM	Helium MFC set to  0.000000
10/25/2011	7:16:26 PM	H2 MFC set to  0.000000
10/25/2011	7:16:26 PM	BCl3 MFC set to  0.000000
10/25/2011	7:16:26 PM	PHl3 MFC set to  0.000000
10/25/2011	7:16:26 PM	SiCl4 MFC set to  0.000000
10/25/2011	7:16:26 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	7:16:27 PM	Tube furnace set to 150
10/25/2011	7:16:57 PM	H2 valve closed
10/25/2011	7:16:57 PM	BCl3 valve closed
10/25/2011	7:16:57 PM	PH3 valve closed
10/25/2011	7:16:57 PM	SiCl4 pre valve closed
10/25/2011	7:16:57 PM	SiCl4 post valve closed
10/25/2011	7:16:57 PM	Bypass valve closed
10/25/2011	7:16:57 PM	Bubbler valve closed
10/25/2011	7:16:57 PM	Helium valve opened
10/25/2011	7:16:57 PM	Main Vac valve opened
10/25/2011	7:16:57 PM	Helium MFC set to  20.000000
10/25/2011	7:16:57 PM	H2 MFC set to  0.000000
10/25/2011	7:16:57 PM	BCl3 MFC set to  0.000000
10/25/2011	7:16:57 PM	PHl3 MFC set to  0.000000
10/25/2011	7:16:57 PM	SiCl4 MFC set to  0.000000
10/25/2011	7:16:57 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	7:16:57 PM	Tube furnace set to 150
10/25/2011	7:17:27 PM	Helium valve closed
10/25/2011	7:17:27 PM	H2 valve closed
10/25/2011	7:17:27 PM	BCl3 valve closed
10/25/2011	7:17:27 PM	PH3 valve closed
10/25/2011	7:17:27 PM	SiCl4 pre valve closed
10/25/2011	7:17:27 PM	SiCl4 post valve closed
10/25/2011	7:17:27 PM	Bypass valve closed
10/25/2011	7:17:27 PM	Bubbler valve closed
10/25/2011	7:17:27 PM	Main Vac valve opened
10/25/2011	7:17:27 PM	Helium MFC set to  0.000000
10/25/2011	7:17:27 PM	H2 MFC set to  0.000000
10/25/2011	7:17:27 PM	BCl3 MFC set to  0.000000
10/25/2011	7:17:27 PM	PHl3 MFC set to  0.000000
10/25/2011	7:17:27 PM	SiCl4 MFC set to  0.000000
10/25/2011	7:17:27 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	7:17:27 PM	Tube furnace set to 150
10/25/2011	7:17:57 PM	H2 valve closed
10/25/2011	7:17:57 PM	BCl3 valve closed
10/25/2011	7:17:57 PM	PH3 valve closed
10/25/2011	7:17:57 PM	SiCl4 pre valve closed
10/25/2011	7:17:57 PM	SiCl4 post valve closed
10/25/2011	7:17:57 PM	Bypass valve closed
10/25/2011	7:17:57 PM	Bubbler valve closed
10/25/2011	7:17:57 PM	Helium valve opened
10/25/2011	7:17:57 PM	Main Vac valve opened
10/25/2011	7:17:57 PM	Helium MFC set to  20.000000
10/25/2011	7:17:57 PM	H2 MFC set to  0.000000
10/25/2011	7:17:57 PM	BCl3 MFC set to  0.000000
10/25/2011	7:17:57 PM	PHl3 MFC set to  0.000000
10/25/2011	7:17:57 PM	SiCl4 MFC set to  0.000000
10/25/2011	7:17:57 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	7:17:57 PM	Tube furnace set to 150
10/25/2011	7:18:27 PM	Helium valve closed
10/25/2011	7:18:27 PM	H2 valve closed
10/25/2011	7:18:27 PM	BCl3 valve closed
10/25/2011	7:18:27 PM	PH3 valve closed
10/25/2011	7:18:27 PM	SiCl4 pre valve closed
10/25/2011	7:18:27 PM	SiCl4 post valve closed
10/25/2011	7:18:27 PM	Bypass valve closed
10/25/2011	7:18:27 PM	Bubbler valve closed
10/25/2011	7:18:27 PM	Main Vac valve opened
10/25/2011	7:18:27 PM	Helium MFC set to  0.000000
10/25/2011	7:18:27 PM	H2 MFC set to  0.000000
10/25/2011	7:18:27 PM	BCl3 MFC set to  0.000000
10/25/2011	7:18:27 PM	PHl3 MFC set to  0.000000
10/25/2011	7:18:27 PM	SiCl4 MFC set to  0.000000
10/25/2011	7:18:27 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	7:18:27 PM	Tube furnace set to 150
10/25/2011	7:18:57 PM	H2 valve closed
10/25/2011	7:18:57 PM	BCl3 valve closed
10/25/2011	7:18:57 PM	PH3 valve closed
10/25/2011	7:18:57 PM	SiCl4 pre valve closed
10/25/2011	7:18:57 PM	SiCl4 post valve closed
10/25/2011	7:18:57 PM	Bypass valve closed
10/25/2011	7:18:57 PM	Bubbler valve closed
10/25/2011	7:18:57 PM	Helium valve opened
10/25/2011	7:18:57 PM	Main Vac valve opened
10/25/2011	7:18:57 PM	Helium MFC set to  20.000000
10/25/2011	7:18:57 PM	H2 MFC set to  0.000000
10/25/2011	7:18:57 PM	BCl3 MFC set to  0.000000
10/25/2011	7:18:57 PM	PHl3 MFC set to  0.000000
10/25/2011	7:18:57 PM	SiCl4 MFC set to  0.000000
10/25/2011	7:18:57 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	7:18:58 PM	Tube furnace set to 150
10/25/2011	7:19:28 PM	Helium valve closed
10/25/2011	7:19:28 PM	H2 valve closed
10/25/2011	7:19:28 PM	BCl3 valve closed
10/25/2011	7:19:28 PM	PH3 valve closed
10/25/2011	7:19:28 PM	SiCl4 pre valve closed
10/25/2011	7:19:28 PM	SiCl4 post valve closed
10/25/2011	7:19:28 PM	Bypass valve closed
10/25/2011	7:19:28 PM	Bubbler valve closed
10/25/2011	7:19:28 PM	Main Vac valve opened
10/25/2011	7:19:28 PM	Helium MFC set to  0.000000
10/25/2011	7:19:28 PM	H2 MFC set to  0.000000
10/25/2011	7:19:28 PM	BCl3 MFC set to  0.000000
10/25/2011	7:19:28 PM	PHl3 MFC set to  0.000000
10/25/2011	7:19:28 PM	SiCl4 MFC set to  0.000000
10/25/2011	7:19:28 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	7:19:28 PM	Tube furnace set to 150
10/25/2011	7:19:58 PM	H2 valve closed
10/25/2011	7:19:58 PM	BCl3 valve closed
10/25/2011	7:19:58 PM	PH3 valve closed
10/25/2011	7:19:58 PM	SiCl4 pre valve closed
10/25/2011	7:19:58 PM	SiCl4 post valve closed
10/25/2011	7:19:58 PM	Bypass valve closed
10/25/2011	7:19:58 PM	Bubbler valve closed
10/25/2011	7:19:58 PM	Helium valve opened
10/25/2011	7:19:58 PM	Main Vac valve opened
10/25/2011	7:19:58 PM	Helium MFC set to  20.000000
10/25/2011	7:19:58 PM	H2 MFC set to  0.000000
10/25/2011	7:19:58 PM	BCl3 MFC set to  0.000000
10/25/2011	7:19:58 PM	PHl3 MFC set to  0.000000
10/25/2011	7:19:58 PM	SiCl4 MFC set to  0.000000
10/25/2011	7:19:58 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	7:19:58 PM	Tube furnace set to 150
10/25/2011	7:20:28 PM	Helium valve closed
10/25/2011	7:20:28 PM	H2 valve closed
10/25/2011	7:20:28 PM	BCl3 valve closed
10/25/2011	7:20:28 PM	PH3 valve closed
10/25/2011	7:20:28 PM	SiCl4 pre valve closed
10/25/2011	7:20:28 PM	SiCl4 post valve closed
10/25/2011	7:20:28 PM	Bypass valve closed
10/25/2011	7:20:28 PM	Bubbler valve closed
10/25/2011	7:20:28 PM	Main Vac valve opened
10/25/2011	7:20:28 PM	Helium MFC set to  0.000000
10/25/2011	7:20:28 PM	H2 MFC set to  0.000000
10/25/2011	7:20:28 PM	BCl3 MFC set to  0.000000
10/25/2011	7:20:28 PM	PHl3 MFC set to  0.000000
10/25/2011	7:20:28 PM	SiCl4 MFC set to  0.000000
10/25/2011	7:20:28 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	7:20:28 PM	Tube furnace set to 150
10/25/2011	7:20:58 PM	H2 valve closed
10/25/2011	7:20:58 PM	BCl3 valve closed
10/25/2011	7:20:58 PM	PH3 valve closed
10/25/2011	7:20:58 PM	SiCl4 pre valve closed
10/25/2011	7:20:58 PM	SiCl4 post valve closed
10/25/2011	7:20:58 PM	Bypass valve closed
10/25/2011	7:20:58 PM	Bubbler valve closed
10/25/2011	7:20:58 PM	Helium valve opened
10/25/2011	7:20:58 PM	Main Vac valve opened
10/25/2011	7:20:58 PM	Helium MFC set to  20.000000
10/25/2011	7:20:58 PM	H2 MFC set to  0.000000
10/25/2011	7:20:58 PM	BCl3 MFC set to  0.000000
10/25/2011	7:20:58 PM	PHl3 MFC set to  0.000000
10/25/2011	7:20:58 PM	SiCl4 MFC set to  0.000000
10/25/2011	7:20:58 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	7:20:58 PM	Tube furnace set to 150
10/25/2011	7:21:28 PM	Helium valve closed
10/25/2011	7:21:28 PM	H2 valve closed
10/25/2011	7:21:28 PM	BCl3 valve closed
10/25/2011	7:21:28 PM	PH3 valve closed
10/25/2011	7:21:28 PM	SiCl4 pre valve closed
10/25/2011	7:21:28 PM	SiCl4 post valve closed
10/25/2011	7:21:28 PM	Bypass valve closed
10/25/2011	7:21:28 PM	Bubbler valve closed
10/25/2011	7:21:28 PM	Main Vac valve opened
10/25/2011	7:21:28 PM	Helium MFC set to  0.000000
10/25/2011	7:21:28 PM	H2 MFC set to  0.000000
10/25/2011	7:21:28 PM	BCl3 MFC set to  0.000000
10/25/2011	7:21:28 PM	PHl3 MFC set to  0.000000
10/25/2011	7:21:28 PM	SiCl4 MFC set to  0.000000
10/25/2011	7:21:28 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	7:21:29 PM	Tube furnace set to 150
10/25/2011	7:21:59 PM	H2 valve closed
10/25/2011	7:21:59 PM	BCl3 valve closed
10/25/2011	7:21:59 PM	PH3 valve closed
10/25/2011	7:21:59 PM	SiCl4 pre valve closed
10/25/2011	7:21:59 PM	SiCl4 post valve closed
10/25/2011	7:21:59 PM	Bypass valve closed
10/25/2011	7:21:59 PM	Bubbler valve closed
10/25/2011	7:21:59 PM	Helium valve opened
10/25/2011	7:21:59 PM	Main Vac valve opened
10/25/2011	7:21:59 PM	Helium MFC set to  20.000000
10/25/2011	7:21:59 PM	H2 MFC set to  0.000000
10/25/2011	7:21:59 PM	BCl3 MFC set to  0.000000
10/25/2011	7:21:59 PM	PHl3 MFC set to  0.000000
10/25/2011	7:21:59 PM	SiCl4 MFC set to  0.000000
10/25/2011	7:21:59 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	7:21:59 PM	Tube furnace set to 150
10/25/2011	7:22:29 PM	Helium valve closed
10/25/2011	7:22:29 PM	H2 valve closed
10/25/2011	7:22:29 PM	BCl3 valve closed
10/25/2011	7:22:29 PM	PH3 valve closed
10/25/2011	7:22:29 PM	SiCl4 pre valve closed
10/25/2011	7:22:29 PM	SiCl4 post valve closed
10/25/2011	7:22:29 PM	Bypass valve closed
10/25/2011	7:22:29 PM	Bubbler valve closed
10/25/2011	7:22:29 PM	Main Vac valve opened
10/25/2011	7:22:29 PM	Helium MFC set to  0.000000
10/25/2011	7:22:29 PM	H2 MFC set to  0.000000
10/25/2011	7:22:29 PM	BCl3 MFC set to  0.000000
10/25/2011	7:22:29 PM	PHl3 MFC set to  0.000000
10/25/2011	7:22:29 PM	SiCl4 MFC set to  0.000000
10/25/2011	7:22:29 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	7:22:29 PM	Tube furnace set to 150
10/25/2011	7:22:30 PM	Run finished at 7:22 PM
10/25/2011	7:23:09 PM	Recipe started at 7:23 PM
10/25/2011	7:23:09 PM	Helium valve closed
10/25/2011	7:23:09 PM	H2 valve closed
10/25/2011	7:23:09 PM	BCl3 valve closed
10/25/2011	7:23:09 PM	PH3 valve closed
10/25/2011	7:23:09 PM	SiCl4 pre valve closed
10/25/2011	7:23:09 PM	SiCl4 post valve closed
10/25/2011	7:23:09 PM	Bypass valve closed
10/25/2011	7:23:09 PM	Bubbler valve closed
10/25/2011	7:23:09 PM	Main Vac valve opened
10/25/2011	7:23:09 PM	Helium MFC set to  0.000000
10/25/2011	7:23:09 PM	H2 MFC set to  0.000000
10/25/2011	7:23:09 PM	BCl3 MFC set to  0.000000
10/25/2011	7:23:09 PM	PHl3 MFC set to  0.000000
10/25/2011	7:23:09 PM	SiCl4 MFC set to  0.000000
10/25/2011	7:23:09 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	7:23:09 PM	Tube furnace set to 150
10/25/2011	7:23:39 PM	H2 valve closed
10/25/2011	7:23:39 PM	BCl3 valve closed
10/25/2011	7:23:39 PM	PH3 valve closed
10/25/2011	7:23:39 PM	SiCl4 pre valve closed
10/25/2011	7:23:39 PM	SiCl4 post valve closed
10/25/2011	7:23:39 PM	Bypass valve closed
10/25/2011	7:23:39 PM	Bubbler valve closed
10/25/2011	7:23:39 PM	Helium valve opened
10/25/2011	7:23:39 PM	Main Vac valve opened
10/25/2011	7:23:39 PM	Helium MFC set to  20.000000
10/25/2011	7:23:39 PM	H2 MFC set to  0.000000
10/25/2011	7:23:40 PM	BCl3 MFC set to  0.000000
10/25/2011	7:23:40 PM	PHl3 MFC set to  0.000000
10/25/2011	7:23:40 PM	SiCl4 MFC set to  0.000000
10/25/2011	7:23:40 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	7:23:40 PM	Tube furnace set to 150
10/25/2011	7:24:10 PM	Helium valve closed
10/25/2011	7:24:10 PM	H2 valve closed
10/25/2011	7:24:10 PM	BCl3 valve closed
10/25/2011	7:24:10 PM	PH3 valve closed
10/25/2011	7:24:10 PM	SiCl4 pre valve closed
10/25/2011	7:24:10 PM	SiCl4 post valve closed
10/25/2011	7:24:10 PM	Bypass valve closed
10/25/2011	7:24:10 PM	Bubbler valve closed
10/25/2011	7:24:10 PM	Main Vac valve opened
10/25/2011	7:24:10 PM	Helium MFC set to  0.000000
10/25/2011	7:24:10 PM	H2 MFC set to  0.000000
10/25/2011	7:24:10 PM	BCl3 MFC set to  0.000000
10/25/2011	7:24:10 PM	PHl3 MFC set to  0.000000
10/25/2011	7:24:10 PM	SiCl4 MFC set to  0.000000
10/25/2011	7:24:10 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	7:24:10 PM	Tube furnace set to 150
10/25/2011	7:24:40 PM	H2 valve closed
10/25/2011	7:24:40 PM	BCl3 valve closed
10/25/2011	7:24:40 PM	PH3 valve closed
10/25/2011	7:24:40 PM	SiCl4 pre valve closed
10/25/2011	7:24:40 PM	SiCl4 post valve closed
10/25/2011	7:24:40 PM	Bypass valve closed
10/25/2011	7:24:40 PM	Bubbler valve closed
10/25/2011	7:24:40 PM	Helium valve opened
10/25/2011	7:24:40 PM	Main Vac valve opened
10/25/2011	7:24:40 PM	Helium MFC set to  20.000000
10/25/2011	7:24:40 PM	H2 MFC set to  0.000000
10/25/2011	7:24:40 PM	BCl3 MFC set to  0.000000
10/25/2011	7:24:40 PM	PHl3 MFC set to  0.000000
10/25/2011	7:24:40 PM	SiCl4 MFC set to  0.000000
10/25/2011	7:24:40 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	7:24:40 PM	Tube furnace set to 150
10/25/2011	7:25:10 PM	Helium valve closed
10/25/2011	7:25:10 PM	H2 valve closed
10/25/2011	7:25:10 PM	BCl3 valve closed
10/25/2011	7:25:10 PM	PH3 valve closed
10/25/2011	7:25:10 PM	SiCl4 pre valve closed
10/25/2011	7:25:10 PM	SiCl4 post valve closed
10/25/2011	7:25:10 PM	Bypass valve closed
10/25/2011	7:25:10 PM	Bubbler valve closed
10/25/2011	7:25:10 PM	Main Vac valve opened
10/25/2011	7:25:10 PM	Helium MFC set to  0.000000
10/25/2011	7:25:10 PM	H2 MFC set to  0.000000
10/25/2011	7:25:10 PM	BCl3 MFC set to  0.000000
10/25/2011	7:25:10 PM	PHl3 MFC set to  0.000000
10/25/2011	7:25:10 PM	SiCl4 MFC set to  0.000000
10/25/2011	7:25:10 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	7:25:10 PM	Tube furnace set to 150
10/25/2011	7:25:40 PM	H2 valve closed
10/25/2011	7:25:40 PM	BCl3 valve closed
10/25/2011	7:25:40 PM	PH3 valve closed
10/25/2011	7:25:40 PM	SiCl4 pre valve closed
10/25/2011	7:25:40 PM	SiCl4 post valve closed
10/25/2011	7:25:40 PM	Bypass valve closed
10/25/2011	7:25:40 PM	Bubbler valve closed
10/25/2011	7:25:40 PM	Helium valve opened
10/25/2011	7:25:40 PM	Main Vac valve opened
10/25/2011	7:25:40 PM	Helium MFC set to  20.000000
10/25/2011	7:25:40 PM	H2 MFC set to  0.000000
10/25/2011	7:25:40 PM	BCl3 MFC set to  0.000000
10/25/2011	7:25:40 PM	PHl3 MFC set to  0.000000
10/25/2011	7:25:40 PM	SiCl4 MFC set to  0.000000
10/25/2011	7:25:40 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	7:25:40 PM	Tube furnace set to 150
10/25/2011	7:26:10 PM	Helium valve closed
10/25/2011	7:26:10 PM	H2 valve closed
10/25/2011	7:26:10 PM	BCl3 valve closed
10/25/2011	7:26:10 PM	PH3 valve closed
10/25/2011	7:26:10 PM	SiCl4 pre valve closed
10/25/2011	7:26:10 PM	SiCl4 post valve closed
10/25/2011	7:26:10 PM	Bypass valve closed
10/25/2011	7:26:10 PM	Bubbler valve closed
10/25/2011	7:26:10 PM	Main Vac valve opened
10/25/2011	7:26:10 PM	Helium MFC set to  0.000000
10/25/2011	7:26:10 PM	H2 MFC set to  0.000000
10/25/2011	7:26:10 PM	BCl3 MFC set to  0.000000
10/25/2011	7:26:10 PM	PHl3 MFC set to  0.000000
10/25/2011	7:26:10 PM	SiCl4 MFC set to  0.000000
10/25/2011	7:26:10 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	7:26:11 PM	Tube furnace set to 150
10/25/2011	7:26:41 PM	H2 valve closed
10/25/2011	7:26:41 PM	BCl3 valve closed
10/25/2011	7:26:41 PM	PH3 valve closed
10/25/2011	7:26:41 PM	SiCl4 pre valve closed
10/25/2011	7:26:41 PM	SiCl4 post valve closed
10/25/2011	7:26:41 PM	Bypass valve closed
10/25/2011	7:26:41 PM	Bubbler valve closed
10/25/2011	7:26:41 PM	Helium valve opened
10/25/2011	7:26:41 PM	Main Vac valve opened
10/25/2011	7:26:41 PM	Helium MFC set to  20.000000
10/25/2011	7:26:41 PM	H2 MFC set to  0.000000
10/25/2011	7:26:41 PM	BCl3 MFC set to  0.000000
10/25/2011	7:26:41 PM	PHl3 MFC set to  0.000000
10/25/2011	7:26:41 PM	SiCl4 MFC set to  0.000000
10/25/2011	7:26:41 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	7:26:41 PM	Tube furnace set to 150
10/25/2011	7:27:11 PM	Helium valve closed
10/25/2011	7:27:11 PM	H2 valve closed
10/25/2011	7:27:11 PM	BCl3 valve closed
10/25/2011	7:27:11 PM	PH3 valve closed
10/25/2011	7:27:11 PM	SiCl4 pre valve closed
10/25/2011	7:27:11 PM	SiCl4 post valve closed
10/25/2011	7:27:11 PM	Bypass valve closed
10/25/2011	7:27:11 PM	Bubbler valve closed
10/25/2011	7:27:11 PM	Main Vac valve opened
10/25/2011	7:27:11 PM	Helium MFC set to  0.000000
10/25/2011	7:27:11 PM	H2 MFC set to  0.000000
10/25/2011	7:27:11 PM	BCl3 MFC set to  0.000000
10/25/2011	7:27:11 PM	PHl3 MFC set to  0.000000
10/25/2011	7:27:11 PM	SiCl4 MFC set to  0.000000
10/25/2011	7:27:11 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	7:27:11 PM	Tube furnace set to 150
10/25/2011	7:27:41 PM	H2 valve closed
10/25/2011	7:27:41 PM	BCl3 valve closed
10/25/2011	7:27:41 PM	PH3 valve closed
10/25/2011	7:27:41 PM	SiCl4 pre valve closed
10/25/2011	7:27:41 PM	SiCl4 post valve closed
10/25/2011	7:27:41 PM	Bypass valve closed
10/25/2011	7:27:41 PM	Bubbler valve closed
10/25/2011	7:27:41 PM	Helium valve opened
10/25/2011	7:27:41 PM	Main Vac valve opened
10/25/2011	7:27:41 PM	Helium MFC set to  20.000000
10/25/2011	7:27:41 PM	H2 MFC set to  0.000000
10/25/2011	7:27:41 PM	BCl3 MFC set to  0.000000
10/25/2011	7:27:41 PM	PHl3 MFC set to  0.000000
10/25/2011	7:27:41 PM	SiCl4 MFC set to  0.000000
10/25/2011	7:27:41 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	7:27:41 PM	Tube furnace set to 150
10/25/2011	7:28:11 PM	Helium valve closed
10/25/2011	7:28:11 PM	H2 valve closed
10/25/2011	7:28:11 PM	BCl3 valve closed
10/25/2011	7:28:11 PM	PH3 valve closed
10/25/2011	7:28:11 PM	SiCl4 pre valve closed
10/25/2011	7:28:11 PM	SiCl4 post valve closed
10/25/2011	7:28:11 PM	Bypass valve closed
10/25/2011	7:28:11 PM	Bubbler valve closed
10/25/2011	7:28:11 PM	Main Vac valve opened
10/25/2011	7:28:11 PM	Helium MFC set to  0.000000
10/25/2011	7:28:11 PM	H2 MFC set to  0.000000
10/25/2011	7:28:11 PM	BCl3 MFC set to  0.000000
10/25/2011	7:28:11 PM	PHl3 MFC set to  0.000000
10/25/2011	7:28:11 PM	SiCl4 MFC set to  0.000000
10/25/2011	7:28:11 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	7:28:11 PM	Tube furnace set to 150
10/25/2011	7:28:41 PM	H2 valve closed
10/25/2011	7:28:41 PM	BCl3 valve closed
10/25/2011	7:28:41 PM	PH3 valve closed
10/25/2011	7:28:41 PM	SiCl4 pre valve closed
10/25/2011	7:28:41 PM	SiCl4 post valve closed
10/25/2011	7:28:41 PM	Bypass valve closed
10/25/2011	7:28:41 PM	Bubbler valve closed
10/25/2011	7:28:41 PM	Helium valve opened
10/25/2011	7:28:41 PM	Main Vac valve opened
10/25/2011	7:28:41 PM	Helium MFC set to  20.000000
10/25/2011	7:28:41 PM	H2 MFC set to  0.000000
10/25/2011	7:28:41 PM	BCl3 MFC set to  0.000000
10/25/2011	7:28:41 PM	PHl3 MFC set to  0.000000
10/25/2011	7:28:41 PM	SiCl4 MFC set to  0.000000
10/25/2011	7:28:41 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	7:28:42 PM	Tube furnace set to 150
10/25/2011	7:29:12 PM	Helium valve closed
10/25/2011	7:29:12 PM	H2 valve closed
10/25/2011	7:29:12 PM	BCl3 valve closed
10/25/2011	7:29:12 PM	PH3 valve closed
10/25/2011	7:29:12 PM	SiCl4 pre valve closed
10/25/2011	7:29:12 PM	SiCl4 post valve closed
10/25/2011	7:29:12 PM	Bypass valve closed
10/25/2011	7:29:12 PM	Bubbler valve closed
10/25/2011	7:29:12 PM	Main Vac valve opened
10/25/2011	7:29:12 PM	Helium MFC set to  0.000000
10/25/2011	7:29:12 PM	H2 MFC set to  0.000000
10/25/2011	7:29:12 PM	BCl3 MFC set to  0.000000
10/25/2011	7:29:12 PM	PHl3 MFC set to  0.000000
10/25/2011	7:29:12 PM	SiCl4 MFC set to  0.000000
10/25/2011	7:29:12 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	7:29:12 PM	Tube furnace set to 150
10/25/2011	7:29:42 PM	H2 valve closed
10/25/2011	7:29:42 PM	BCl3 valve closed
10/25/2011	7:29:42 PM	PH3 valve closed
10/25/2011	7:29:42 PM	SiCl4 pre valve closed
10/25/2011	7:29:42 PM	SiCl4 post valve closed
10/25/2011	7:29:42 PM	Bypass valve closed
10/25/2011	7:29:42 PM	Bubbler valve closed
10/25/2011	7:29:42 PM	Helium valve opened
10/25/2011	7:29:42 PM	Main Vac valve opened
10/25/2011	7:29:42 PM	Helium MFC set to  20.000000
10/25/2011	7:29:42 PM	H2 MFC set to  0.000000
10/25/2011	7:29:42 PM	BCl3 MFC set to  0.000000
10/25/2011	7:29:42 PM	PHl3 MFC set to  0.000000
10/25/2011	7:29:42 PM	SiCl4 MFC set to  0.000000
10/25/2011	7:29:42 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	7:29:42 PM	Tube furnace set to 150
10/25/2011	7:30:12 PM	Helium valve closed
10/25/2011	7:30:12 PM	H2 valve closed
10/25/2011	7:30:12 PM	BCl3 valve closed
10/25/2011	7:30:12 PM	PH3 valve closed
10/25/2011	7:30:12 PM	SiCl4 pre valve closed
10/25/2011	7:30:12 PM	SiCl4 post valve closed
10/25/2011	7:30:12 PM	Bypass valve closed
10/25/2011	7:30:12 PM	Bubbler valve closed
10/25/2011	7:30:12 PM	Main Vac valve opened
10/25/2011	7:30:12 PM	Helium MFC set to  0.000000
10/25/2011	7:30:12 PM	H2 MFC set to  0.000000
10/25/2011	7:30:12 PM	BCl3 MFC set to  0.000000
10/25/2011	7:30:12 PM	PHl3 MFC set to  0.000000
10/25/2011	7:30:12 PM	SiCl4 MFC set to  0.000000
10/25/2011	7:30:12 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	7:30:12 PM	Tube furnace set to 150
10/25/2011	7:30:42 PM	H2 valve closed
10/25/2011	7:30:42 PM	BCl3 valve closed
10/25/2011	7:30:42 PM	PH3 valve closed
10/25/2011	7:30:42 PM	SiCl4 pre valve closed
10/25/2011	7:30:42 PM	SiCl4 post valve closed
10/25/2011	7:30:42 PM	Bypass valve closed
10/25/2011	7:30:42 PM	Bubbler valve closed
10/25/2011	7:30:42 PM	Helium valve opened
10/25/2011	7:30:42 PM	Main Vac valve opened
10/25/2011	7:30:42 PM	Helium MFC set to  20.000000
10/25/2011	7:30:42 PM	H2 MFC set to  0.000000
10/25/2011	7:30:42 PM	BCl3 MFC set to  0.000000
10/25/2011	7:30:42 PM	PHl3 MFC set to  0.000000
10/25/2011	7:30:42 PM	SiCl4 MFC set to  0.000000
10/25/2011	7:30:42 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	7:30:42 PM	Tube furnace set to 150
10/25/2011	7:31:12 PM	Helium valve closed
10/25/2011	7:31:12 PM	H2 valve closed
10/25/2011	7:31:12 PM	BCl3 valve closed
10/25/2011	7:31:12 PM	PH3 valve closed
10/25/2011	7:31:12 PM	SiCl4 pre valve closed
10/25/2011	7:31:12 PM	SiCl4 post valve closed
10/25/2011	7:31:12 PM	Bypass valve closed
10/25/2011	7:31:12 PM	Bubbler valve closed
10/25/2011	7:31:12 PM	Main Vac valve opened
10/25/2011	7:31:12 PM	Helium MFC set to  0.000000
10/25/2011	7:31:12 PM	H2 MFC set to  0.000000
10/25/2011	7:31:12 PM	BCl3 MFC set to  0.000000
10/25/2011	7:31:12 PM	PHl3 MFC set to  0.000000
10/25/2011	7:31:12 PM	SiCl4 MFC set to  0.000000
10/25/2011	7:31:12 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	7:31:13 PM	Tube furnace set to 150
10/25/2011	7:31:43 PM	H2 valve closed
10/25/2011	7:31:43 PM	BCl3 valve closed
10/25/2011	7:31:43 PM	PH3 valve closed
10/25/2011	7:31:43 PM	SiCl4 pre valve closed
10/25/2011	7:31:43 PM	SiCl4 post valve closed
10/25/2011	7:31:43 PM	Bypass valve closed
10/25/2011	7:31:43 PM	Bubbler valve closed
10/25/2011	7:31:43 PM	Helium valve opened
10/25/2011	7:31:43 PM	Main Vac valve opened
10/25/2011	7:31:43 PM	Helium MFC set to  20.000000
10/25/2011	7:31:43 PM	H2 MFC set to  0.000000
10/25/2011	7:31:43 PM	BCl3 MFC set to  0.000000
10/25/2011	7:31:43 PM	PHl3 MFC set to  0.000000
10/25/2011	7:31:43 PM	SiCl4 MFC set to  0.000000
10/25/2011	7:31:43 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	7:31:43 PM	Tube furnace set to 150
10/25/2011	7:32:13 PM	Helium valve closed
10/25/2011	7:32:13 PM	H2 valve closed
10/25/2011	7:32:13 PM	BCl3 valve closed
10/25/2011	7:32:13 PM	PH3 valve closed
10/25/2011	7:32:13 PM	SiCl4 pre valve closed
10/25/2011	7:32:13 PM	SiCl4 post valve closed
10/25/2011	7:32:13 PM	Bypass valve closed
10/25/2011	7:32:13 PM	Bubbler valve closed
10/25/2011	7:32:13 PM	Main Vac valve opened
10/25/2011	7:32:13 PM	Helium MFC set to  0.000000
10/25/2011	7:32:13 PM	H2 MFC set to  0.000000
10/25/2011	7:32:13 PM	BCl3 MFC set to  0.000000
10/25/2011	7:32:13 PM	PHl3 MFC set to  0.000000
10/25/2011	7:32:13 PM	SiCl4 MFC set to  0.000000
10/25/2011	7:32:13 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	7:32:13 PM	Tube furnace set to 150
10/25/2011	7:32:43 PM	H2 valve closed
10/25/2011	7:32:43 PM	BCl3 valve closed
10/25/2011	7:32:43 PM	PH3 valve closed
10/25/2011	7:32:43 PM	SiCl4 pre valve closed
10/25/2011	7:32:43 PM	SiCl4 post valve closed
10/25/2011	7:32:43 PM	Bypass valve closed
10/25/2011	7:32:43 PM	Bubbler valve closed
10/25/2011	7:32:43 PM	Helium valve opened
10/25/2011	7:32:43 PM	Main Vac valve opened
10/25/2011	7:32:43 PM	Helium MFC set to  20.000000
10/25/2011	7:32:43 PM	H2 MFC set to  0.000000
10/25/2011	7:32:43 PM	BCl3 MFC set to  0.000000
10/25/2011	7:32:43 PM	PHl3 MFC set to  0.000000
10/25/2011	7:32:43 PM	SiCl4 MFC set to  0.000000
10/25/2011	7:32:43 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	7:32:43 PM	Tube furnace set to 150
10/25/2011	7:33:13 PM	Helium valve closed
10/25/2011	7:33:13 PM	H2 valve closed
10/25/2011	7:33:13 PM	BCl3 valve closed
10/25/2011	7:33:13 PM	PH3 valve closed
10/25/2011	7:33:13 PM	SiCl4 pre valve closed
10/25/2011	7:33:13 PM	SiCl4 post valve closed
10/25/2011	7:33:13 PM	Bypass valve closed
10/25/2011	7:33:13 PM	Bubbler valve closed
10/25/2011	7:33:13 PM	Main Vac valve opened
10/25/2011	7:33:13 PM	Helium MFC set to  0.000000
10/25/2011	7:33:13 PM	H2 MFC set to  0.000000
10/25/2011	7:33:13 PM	BCl3 MFC set to  0.000000
10/25/2011	7:33:13 PM	PHl3 MFC set to  0.000000
10/25/2011	7:33:13 PM	SiCl4 MFC set to  0.000000
10/25/2011	7:33:13 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	7:33:13 PM	Tube furnace set to 150
10/25/2011	7:33:14 PM	Run finished at 7:33 PM
10/25/2011	7:34:12 PM	Recipe started at 7:34 PM
10/25/2011	7:34:12 PM	Helium valve closed
10/25/2011	7:34:12 PM	H2 valve closed
10/25/2011	7:34:12 PM	BCl3 valve closed
10/25/2011	7:34:12 PM	PH3 valve closed
10/25/2011	7:34:12 PM	SiCl4 pre valve closed
10/25/2011	7:34:12 PM	SiCl4 post valve closed
10/25/2011	7:34:12 PM	Bypass valve closed
10/25/2011	7:34:12 PM	Bubbler valve closed
10/25/2011	7:34:12 PM	Main Vac valve opened
10/25/2011	7:34:12 PM	Helium MFC set to  0.000000
10/25/2011	7:34:12 PM	H2 MFC set to  0.000000
10/25/2011	7:34:12 PM	BCl3 MFC set to  0.000000
10/25/2011	7:34:12 PM	PHl3 MFC set to  0.000000
10/25/2011	7:34:12 PM	SiCl4 MFC set to  0.000000
10/25/2011	7:34:12 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	7:34:12 PM	Tube furnace set to 150
10/25/2011	7:34:42 PM	H2 valve closed
10/25/2011	7:34:42 PM	BCl3 valve closed
10/25/2011	7:34:42 PM	PH3 valve closed
10/25/2011	7:34:42 PM	SiCl4 pre valve closed
10/25/2011	7:34:42 PM	SiCl4 post valve closed
10/25/2011	7:34:42 PM	Bypass valve closed
10/25/2011	7:34:42 PM	Bubbler valve closed
10/25/2011	7:34:42 PM	Helium valve opened
10/25/2011	7:34:42 PM	Main Vac valve opened
10/25/2011	7:34:42 PM	Helium MFC set to  20.000000
10/25/2011	7:34:42 PM	H2 MFC set to  0.000000
10/25/2011	7:34:42 PM	BCl3 MFC set to  0.000000
10/25/2011	7:34:42 PM	PHl3 MFC set to  0.000000
10/25/2011	7:34:42 PM	SiCl4 MFC set to  0.000000
10/25/2011	7:34:42 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	7:34:43 PM	Tube furnace set to 150
10/25/2011	7:35:13 PM	Helium valve closed
10/25/2011	7:35:13 PM	H2 valve closed
10/25/2011	7:35:13 PM	BCl3 valve closed
10/25/2011	7:35:13 PM	PH3 valve closed
10/25/2011	7:35:13 PM	SiCl4 pre valve closed
10/25/2011	7:35:13 PM	SiCl4 post valve closed
10/25/2011	7:35:13 PM	Bypass valve closed
10/25/2011	7:35:13 PM	Bubbler valve closed
10/25/2011	7:35:13 PM	Main Vac valve opened
10/25/2011	7:35:13 PM	Helium MFC set to  0.000000
10/25/2011	7:35:13 PM	H2 MFC set to  0.000000
10/25/2011	7:35:13 PM	BCl3 MFC set to  0.000000
10/25/2011	7:35:13 PM	PHl3 MFC set to  0.000000
10/25/2011	7:35:13 PM	SiCl4 MFC set to  0.000000
10/25/2011	7:35:13 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	7:35:13 PM	Tube furnace set to 150
10/25/2011	7:35:43 PM	H2 valve closed
10/25/2011	7:35:43 PM	BCl3 valve closed
10/25/2011	7:35:43 PM	PH3 valve closed
10/25/2011	7:35:43 PM	SiCl4 pre valve closed
10/25/2011	7:35:43 PM	SiCl4 post valve closed
10/25/2011	7:35:43 PM	Bypass valve closed
10/25/2011	7:35:43 PM	Bubbler valve closed
10/25/2011	7:35:43 PM	Helium valve opened
10/25/2011	7:35:43 PM	Main Vac valve opened
10/25/2011	7:35:43 PM	Helium MFC set to  20.000000
10/25/2011	7:35:43 PM	H2 MFC set to  0.000000
10/25/2011	7:35:43 PM	BCl3 MFC set to  0.000000
10/25/2011	7:35:43 PM	PHl3 MFC set to  0.000000
10/25/2011	7:35:43 PM	SiCl4 MFC set to  0.000000
10/25/2011	7:35:43 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	7:35:43 PM	Tube furnace set to 150
10/25/2011	7:36:13 PM	Helium valve closed
10/25/2011	7:36:13 PM	H2 valve closed
10/25/2011	7:36:13 PM	BCl3 valve closed
10/25/2011	7:36:13 PM	PH3 valve closed
10/25/2011	7:36:13 PM	SiCl4 pre valve closed
10/25/2011	7:36:13 PM	SiCl4 post valve closed
10/25/2011	7:36:13 PM	Bypass valve closed
10/25/2011	7:36:13 PM	Bubbler valve closed
10/25/2011	7:36:13 PM	Main Vac valve opened
10/25/2011	7:36:13 PM	Helium MFC set to  0.000000
10/25/2011	7:36:13 PM	H2 MFC set to  0.000000
10/25/2011	7:36:13 PM	BCl3 MFC set to  0.000000
10/25/2011	7:36:13 PM	PHl3 MFC set to  0.000000
10/25/2011	7:36:13 PM	SiCl4 MFC set to  0.000000
10/25/2011	7:36:13 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	7:36:13 PM	Tube furnace set to 150
10/25/2011	7:36:43 PM	H2 valve closed
10/25/2011	7:36:43 PM	BCl3 valve closed
10/25/2011	7:36:43 PM	PH3 valve closed
10/25/2011	7:36:43 PM	SiCl4 pre valve closed
10/25/2011	7:36:43 PM	SiCl4 post valve closed
10/25/2011	7:36:43 PM	Bypass valve closed
10/25/2011	7:36:43 PM	Bubbler valve closed
10/25/2011	7:36:43 PM	Helium valve opened
10/25/2011	7:36:43 PM	Main Vac valve opened
10/25/2011	7:36:43 PM	Helium MFC set to  20.000000
10/25/2011	7:36:43 PM	H2 MFC set to  0.000000
10/25/2011	7:36:43 PM	BCl3 MFC set to  0.000000
10/25/2011	7:36:43 PM	PHl3 MFC set to  0.000000
10/25/2011	7:36:43 PM	SiCl4 MFC set to  0.000000
10/25/2011	7:36:43 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	7:36:43 PM	Tube furnace set to 150
10/25/2011	7:37:13 PM	Helium valve closed
10/25/2011	7:37:13 PM	H2 valve closed
10/25/2011	7:37:13 PM	BCl3 valve closed
10/25/2011	7:37:13 PM	PH3 valve closed
10/25/2011	7:37:13 PM	SiCl4 pre valve closed
10/25/2011	7:37:13 PM	SiCl4 post valve closed
10/25/2011	7:37:13 PM	Bypass valve closed
10/25/2011	7:37:13 PM	Bubbler valve closed
10/25/2011	7:37:13 PM	Main Vac valve opened
10/25/2011	7:37:13 PM	Helium MFC set to  0.000000
10/25/2011	7:37:13 PM	H2 MFC set to  0.000000
10/25/2011	7:37:13 PM	BCl3 MFC set to  0.000000
10/25/2011	7:37:13 PM	PHl3 MFC set to  0.000000
10/25/2011	7:37:13 PM	SiCl4 MFC set to  0.000000
10/25/2011	7:37:13 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	7:37:13 PM	Tube furnace set to 150
10/25/2011	7:37:44 PM	H2 valve closed
10/25/2011	7:37:44 PM	BCl3 valve closed
10/25/2011	7:37:44 PM	PH3 valve closed
10/25/2011	7:37:44 PM	SiCl4 pre valve closed
10/25/2011	7:37:44 PM	SiCl4 post valve closed
10/25/2011	7:37:44 PM	Bypass valve closed
10/25/2011	7:37:44 PM	Bubbler valve closed
10/25/2011	7:37:44 PM	Helium valve opened
10/25/2011	7:37:44 PM	Main Vac valve opened
10/25/2011	7:37:44 PM	Helium MFC set to  20.000000
10/25/2011	7:37:44 PM	H2 MFC set to  0.000000
10/25/2011	7:37:44 PM	BCl3 MFC set to  0.000000
10/25/2011	7:37:44 PM	PHl3 MFC set to  0.000000
10/25/2011	7:37:44 PM	SiCl4 MFC set to  0.000000
10/25/2011	7:37:44 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	7:37:44 PM	Tube furnace set to 150
10/25/2011	7:38:14 PM	Helium valve closed
10/25/2011	7:38:14 PM	H2 valve closed
10/25/2011	7:38:14 PM	BCl3 valve closed
10/25/2011	7:38:14 PM	PH3 valve closed
10/25/2011	7:38:14 PM	SiCl4 pre valve closed
10/25/2011	7:38:14 PM	SiCl4 post valve closed
10/25/2011	7:38:14 PM	Bypass valve closed
10/25/2011	7:38:14 PM	Bubbler valve closed
10/25/2011	7:38:14 PM	Main Vac valve opened
10/25/2011	7:38:14 PM	Helium MFC set to  0.000000
10/25/2011	7:38:14 PM	H2 MFC set to  0.000000
10/25/2011	7:38:14 PM	BCl3 MFC set to  0.000000
10/25/2011	7:38:14 PM	PHl3 MFC set to  0.000000
10/25/2011	7:38:14 PM	SiCl4 MFC set to  0.000000
10/25/2011	7:38:14 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	7:38:14 PM	Tube furnace set to 150
10/25/2011	7:38:44 PM	H2 valve closed
10/25/2011	7:38:44 PM	BCl3 valve closed
10/25/2011	7:38:44 PM	PH3 valve closed
10/25/2011	7:38:44 PM	SiCl4 pre valve closed
10/25/2011	7:38:44 PM	SiCl4 post valve closed
10/25/2011	7:38:44 PM	Bypass valve closed
10/25/2011	7:38:44 PM	Bubbler valve closed
10/25/2011	7:38:44 PM	Helium valve opened
10/25/2011	7:38:44 PM	Main Vac valve opened
10/25/2011	7:38:44 PM	Helium MFC set to  20.000000
10/25/2011	7:38:44 PM	H2 MFC set to  0.000000
10/25/2011	7:38:44 PM	BCl3 MFC set to  0.000000
10/25/2011	7:38:44 PM	PHl3 MFC set to  0.000000
10/25/2011	7:38:44 PM	SiCl4 MFC set to  0.000000
10/25/2011	7:38:44 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	7:38:44 PM	Tube furnace set to 150
10/25/2011	7:39:14 PM	Helium valve closed
10/25/2011	7:39:14 PM	H2 valve closed
10/25/2011	7:39:14 PM	BCl3 valve closed
10/25/2011	7:39:14 PM	PH3 valve closed
10/25/2011	7:39:14 PM	SiCl4 pre valve closed
10/25/2011	7:39:14 PM	SiCl4 post valve closed
10/25/2011	7:39:14 PM	Bypass valve closed
10/25/2011	7:39:14 PM	Bubbler valve closed
10/25/2011	7:39:14 PM	Main Vac valve opened
10/25/2011	7:39:14 PM	Helium MFC set to  0.000000
10/25/2011	7:39:14 PM	H2 MFC set to  0.000000
10/25/2011	7:39:14 PM	BCl3 MFC set to  0.000000
10/25/2011	7:39:14 PM	PHl3 MFC set to  0.000000
10/25/2011	7:39:14 PM	SiCl4 MFC set to  0.000000
10/25/2011	7:39:14 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	7:39:14 PM	Tube furnace set to 150
10/25/2011	7:39:44 PM	H2 valve closed
10/25/2011	7:39:44 PM	BCl3 valve closed
10/25/2011	7:39:44 PM	PH3 valve closed
10/25/2011	7:39:44 PM	SiCl4 pre valve closed
10/25/2011	7:39:44 PM	SiCl4 post valve closed
10/25/2011	7:39:44 PM	Bypass valve closed
10/25/2011	7:39:44 PM	Bubbler valve closed
10/25/2011	7:39:44 PM	Helium valve opened
10/25/2011	7:39:44 PM	Main Vac valve opened
10/25/2011	7:39:44 PM	Helium MFC set to  20.000000
10/25/2011	7:39:44 PM	H2 MFC set to  0.000000
10/25/2011	7:39:44 PM	BCl3 MFC set to  0.000000
10/25/2011	7:39:44 PM	PHl3 MFC set to  0.000000
10/25/2011	7:39:44 PM	SiCl4 MFC set to  0.000000
10/25/2011	7:39:44 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	7:39:44 PM	Tube furnace set to 150
10/25/2011	7:40:14 PM	Helium valve closed
10/25/2011	7:40:14 PM	H2 valve closed
10/25/2011	7:40:14 PM	BCl3 valve closed
10/25/2011	7:40:14 PM	PH3 valve closed
10/25/2011	7:40:14 PM	SiCl4 pre valve closed
10/25/2011	7:40:14 PM	SiCl4 post valve closed
10/25/2011	7:40:14 PM	Bypass valve closed
10/25/2011	7:40:15 PM	Bubbler valve closed
10/25/2011	7:40:15 PM	Main Vac valve opened
10/25/2011	7:40:15 PM	Helium MFC set to  0.000000
10/25/2011	7:40:15 PM	H2 MFC set to  0.000000
10/25/2011	7:40:15 PM	BCl3 MFC set to  0.000000
10/25/2011	7:40:15 PM	PHl3 MFC set to  0.000000
10/25/2011	7:40:15 PM	SiCl4 MFC set to  0.000000
10/25/2011	7:40:15 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	7:40:15 PM	Tube furnace set to 150
10/25/2011	7:40:45 PM	H2 valve closed
10/25/2011	7:40:45 PM	BCl3 valve closed
10/25/2011	7:40:45 PM	PH3 valve closed
10/25/2011	7:40:45 PM	SiCl4 pre valve closed
10/25/2011	7:40:45 PM	SiCl4 post valve closed
10/25/2011	7:40:45 PM	Bypass valve closed
10/25/2011	7:40:45 PM	Bubbler valve closed
10/25/2011	7:40:45 PM	Helium valve opened
10/25/2011	7:40:45 PM	Main Vac valve opened
10/25/2011	7:40:45 PM	Helium MFC set to  20.000000
10/25/2011	7:40:45 PM	H2 MFC set to  0.000000
10/25/2011	7:40:45 PM	BCl3 MFC set to  0.000000
10/25/2011	7:40:45 PM	PHl3 MFC set to  0.000000
10/25/2011	7:40:45 PM	SiCl4 MFC set to  0.000000
10/25/2011	7:40:45 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	7:40:45 PM	Tube furnace set to 150
10/25/2011	7:41:15 PM	Helium valve closed
10/25/2011	7:41:15 PM	H2 valve closed
10/25/2011	7:41:15 PM	BCl3 valve closed
10/25/2011	7:41:15 PM	PH3 valve closed
10/25/2011	7:41:15 PM	SiCl4 pre valve closed
10/25/2011	7:41:15 PM	SiCl4 post valve closed
10/25/2011	7:41:15 PM	Bypass valve closed
10/25/2011	7:41:15 PM	Bubbler valve closed
10/25/2011	7:41:15 PM	Main Vac valve opened
10/25/2011	7:41:15 PM	Helium MFC set to  0.000000
10/25/2011	7:41:15 PM	H2 MFC set to  0.000000
10/25/2011	7:41:15 PM	BCl3 MFC set to  0.000000
10/25/2011	7:41:15 PM	PHl3 MFC set to  0.000000
10/25/2011	7:41:15 PM	SiCl4 MFC set to  0.000000
10/25/2011	7:41:15 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	7:41:15 PM	Tube furnace set to 150
10/25/2011	7:41:45 PM	H2 valve closed
10/25/2011	7:41:45 PM	BCl3 valve closed
10/25/2011	7:41:45 PM	PH3 valve closed
10/25/2011	7:41:45 PM	SiCl4 pre valve closed
10/25/2011	7:41:45 PM	SiCl4 post valve closed
10/25/2011	7:41:45 PM	Bypass valve closed
10/25/2011	7:41:45 PM	Bubbler valve closed
10/25/2011	7:41:45 PM	Helium valve opened
10/25/2011	7:41:45 PM	Main Vac valve opened
10/25/2011	7:41:45 PM	Helium MFC set to  20.000000
10/25/2011	7:41:45 PM	H2 MFC set to  0.000000
10/25/2011	7:41:45 PM	BCl3 MFC set to  0.000000
10/25/2011	7:41:45 PM	PHl3 MFC set to  0.000000
10/25/2011	7:41:45 PM	SiCl4 MFC set to  0.000000
10/25/2011	7:41:45 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	7:41:45 PM	Tube furnace set to 150
10/25/2011	7:42:15 PM	Helium valve closed
10/25/2011	7:42:15 PM	H2 valve closed
10/25/2011	7:42:15 PM	BCl3 valve closed
10/25/2011	7:42:15 PM	PH3 valve closed
10/25/2011	7:42:15 PM	SiCl4 pre valve closed
10/25/2011	7:42:15 PM	SiCl4 post valve closed
10/25/2011	7:42:15 PM	Bypass valve closed
10/25/2011	7:42:15 PM	Bubbler valve closed
10/25/2011	7:42:15 PM	Main Vac valve opened
10/25/2011	7:42:15 PM	Helium MFC set to  0.000000
10/25/2011	7:42:15 PM	H2 MFC set to  0.000000
10/25/2011	7:42:15 PM	BCl3 MFC set to  0.000000
10/25/2011	7:42:15 PM	PHl3 MFC set to  0.000000
10/25/2011	7:42:15 PM	SiCl4 MFC set to  0.000000
10/25/2011	7:42:15 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	7:42:15 PM	Tube furnace set to 150
10/25/2011	7:42:45 PM	H2 valve closed
10/25/2011	7:42:45 PM	BCl3 valve closed
10/25/2011	7:42:45 PM	PH3 valve closed
10/25/2011	7:42:45 PM	SiCl4 pre valve closed
10/25/2011	7:42:45 PM	SiCl4 post valve closed
10/25/2011	7:42:45 PM	Bypass valve closed
10/25/2011	7:42:45 PM	Bubbler valve closed
10/25/2011	7:42:45 PM	Helium valve opened
10/25/2011	7:42:45 PM	Main Vac valve opened
10/25/2011	7:42:45 PM	Helium MFC set to  20.000000
10/25/2011	7:42:45 PM	H2 MFC set to  0.000000
10/25/2011	7:42:45 PM	BCl3 MFC set to  0.000000
10/25/2011	7:42:45 PM	PHl3 MFC set to  0.000000
10/25/2011	7:42:45 PM	SiCl4 MFC set to  0.000000
10/25/2011	7:42:45 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	7:42:46 PM	Tube furnace set to 150
10/25/2011	7:43:16 PM	Helium valve closed
10/25/2011	7:43:16 PM	H2 valve closed
10/25/2011	7:43:16 PM	BCl3 valve closed
10/25/2011	7:43:16 PM	PH3 valve closed
10/25/2011	7:43:16 PM	SiCl4 pre valve closed
10/25/2011	7:43:16 PM	SiCl4 post valve closed
10/25/2011	7:43:16 PM	Bypass valve closed
10/25/2011	7:43:16 PM	Bubbler valve closed
10/25/2011	7:43:16 PM	Main Vac valve opened
10/25/2011	7:43:16 PM	Helium MFC set to  0.000000
10/25/2011	7:43:16 PM	H2 MFC set to  0.000000
10/25/2011	7:43:16 PM	BCl3 MFC set to  0.000000
10/25/2011	7:43:16 PM	PHl3 MFC set to  0.000000
10/25/2011	7:43:16 PM	SiCl4 MFC set to  0.000000
10/25/2011	7:43:16 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	7:43:16 PM	Tube furnace set to 150
10/25/2011	7:43:46 PM	H2 valve closed
10/25/2011	7:43:46 PM	BCl3 valve closed
10/25/2011	7:43:46 PM	PH3 valve closed
10/25/2011	7:43:46 PM	SiCl4 pre valve closed
10/25/2011	7:43:46 PM	SiCl4 post valve closed
10/25/2011	7:43:46 PM	Bypass valve closed
10/25/2011	7:43:46 PM	Bubbler valve closed
10/25/2011	7:43:46 PM	Helium valve opened
10/25/2011	7:43:46 PM	Main Vac valve opened
10/25/2011	7:43:46 PM	Helium MFC set to  20.000000
10/25/2011	7:43:46 PM	H2 MFC set to  0.000000
10/25/2011	7:43:46 PM	BCl3 MFC set to  0.000000
10/25/2011	7:43:46 PM	PHl3 MFC set to  0.000000
10/25/2011	7:43:46 PM	SiCl4 MFC set to  0.000000
10/25/2011	7:43:46 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	7:43:46 PM	Tube furnace set to 150
10/25/2011	7:44:16 PM	Helium valve closed
10/25/2011	7:44:16 PM	H2 valve closed
10/25/2011	7:44:16 PM	BCl3 valve closed
10/25/2011	7:44:16 PM	PH3 valve closed
10/25/2011	7:44:16 PM	SiCl4 pre valve closed
10/25/2011	7:44:16 PM	SiCl4 post valve closed
10/25/2011	7:44:16 PM	Bypass valve closed
10/25/2011	7:44:16 PM	Bubbler valve closed
10/25/2011	7:44:16 PM	Main Vac valve opened
10/25/2011	7:44:16 PM	Helium MFC set to  0.000000
10/25/2011	7:44:16 PM	H2 MFC set to  0.000000
10/25/2011	7:44:16 PM	BCl3 MFC set to  0.000000
10/25/2011	7:44:16 PM	PHl3 MFC set to  0.000000
10/25/2011	7:44:16 PM	SiCl4 MFC set to  0.000000
10/25/2011	7:44:16 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	7:44:16 PM	Tube furnace set to 150
10/25/2011	7:44:17 PM	Run finished at 7:44 PM
10/25/2011	7:44:57 PM	Recipe started at 7:44 PM
10/25/2011	7:44:57 PM	Helium valve closed
10/25/2011	7:44:57 PM	H2 valve closed
10/25/2011	7:44:57 PM	BCl3 valve closed
10/25/2011	7:44:57 PM	PH3 valve closed
10/25/2011	7:44:57 PM	SiCl4 pre valve closed
10/25/2011	7:44:57 PM	SiCl4 post valve closed
10/25/2011	7:44:57 PM	Bypass valve closed
10/25/2011	7:44:57 PM	Bubbler valve closed
10/25/2011	7:44:57 PM	Main Vac valve opened
10/25/2011	7:44:57 PM	Helium MFC set to  0.000000
10/25/2011	7:44:57 PM	H2 MFC set to  0.000000
10/25/2011	7:44:57 PM	BCl3 MFC set to  0.000000
10/25/2011	7:44:57 PM	PHl3 MFC set to  0.000000
10/25/2011	7:44:57 PM	SiCl4 MFC set to  0.000000
10/25/2011	7:44:57 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	7:44:57 PM	Tube furnace set to 300
10/25/2011	7:45:27 PM	H2 valve closed
10/25/2011	7:45:27 PM	BCl3 valve closed
10/25/2011	7:45:27 PM	PH3 valve closed
10/25/2011	7:45:27 PM	SiCl4 pre valve closed
10/25/2011	7:45:27 PM	SiCl4 post valve closed
10/25/2011	7:45:27 PM	Bypass valve closed
10/25/2011	7:45:27 PM	Bubbler valve closed
10/25/2011	7:45:27 PM	Helium valve opened
10/25/2011	7:45:27 PM	Main Vac valve opened
10/25/2011	7:45:27 PM	Helium MFC set to  20.000000
10/25/2011	7:45:27 PM	H2 MFC set to  0.000000
10/25/2011	7:45:27 PM	BCl3 MFC set to  0.000000
10/25/2011	7:45:27 PM	PHl3 MFC set to  0.000000
10/25/2011	7:45:27 PM	SiCl4 MFC set to  0.000000
10/25/2011	7:45:27 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	7:45:28 PM	Tube furnace set to 300
10/25/2011	7:45:58 PM	Helium valve closed
10/25/2011	7:45:58 PM	H2 valve closed
10/25/2011	7:45:58 PM	BCl3 valve closed
10/25/2011	7:45:58 PM	PH3 valve closed
10/25/2011	7:45:58 PM	SiCl4 pre valve closed
10/25/2011	7:45:58 PM	SiCl4 post valve closed
10/25/2011	7:45:58 PM	Bypass valve closed
10/25/2011	7:45:58 PM	Bubbler valve closed
10/25/2011	7:45:58 PM	Main Vac valve opened
10/25/2011	7:45:58 PM	Helium MFC set to  0.000000
10/25/2011	7:45:58 PM	H2 MFC set to  0.000000
10/25/2011	7:45:58 PM	BCl3 MFC set to  0.000000
10/25/2011	7:45:58 PM	PHl3 MFC set to  0.000000
10/25/2011	7:45:58 PM	SiCl4 MFC set to  0.000000
10/25/2011	7:45:58 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	7:45:58 PM	Tube furnace set to 300
10/25/2011	7:46:28 PM	H2 valve closed
10/25/2011	7:46:28 PM	BCl3 valve closed
10/25/2011	7:46:28 PM	PH3 valve closed
10/25/2011	7:46:28 PM	SiCl4 pre valve closed
10/25/2011	7:46:28 PM	SiCl4 post valve closed
10/25/2011	7:46:28 PM	Bypass valve closed
10/25/2011	7:46:28 PM	Bubbler valve closed
10/25/2011	7:46:28 PM	Helium valve opened
10/25/2011	7:46:28 PM	Main Vac valve opened
10/25/2011	7:46:28 PM	Helium MFC set to  20.000000
10/25/2011	7:46:28 PM	H2 MFC set to  0.000000
10/25/2011	7:46:28 PM	BCl3 MFC set to  0.000000
10/25/2011	7:46:28 PM	PHl3 MFC set to  0.000000
10/25/2011	7:46:28 PM	SiCl4 MFC set to  0.000000
10/25/2011	7:46:28 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	7:46:28 PM	Tube furnace set to 300
10/25/2011	7:46:58 PM	Helium valve closed
10/25/2011	7:46:58 PM	H2 valve closed
10/25/2011	7:46:58 PM	BCl3 valve closed
10/25/2011	7:46:58 PM	PH3 valve closed
10/25/2011	7:46:58 PM	SiCl4 pre valve closed
10/25/2011	7:46:58 PM	SiCl4 post valve closed
10/25/2011	7:46:58 PM	Bypass valve closed
10/25/2011	7:46:58 PM	Bubbler valve closed
10/25/2011	7:46:58 PM	Main Vac valve opened
10/25/2011	7:46:58 PM	Helium MFC set to  0.000000
10/25/2011	7:46:58 PM	H2 MFC set to  0.000000
10/25/2011	7:46:58 PM	BCl3 MFC set to  0.000000
10/25/2011	7:46:58 PM	PHl3 MFC set to  0.000000
10/25/2011	7:46:58 PM	SiCl4 MFC set to  0.000000
10/25/2011	7:46:58 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	7:46:58 PM	Tube furnace set to 300
10/25/2011	7:47:28 PM	H2 valve closed
10/25/2011	7:47:28 PM	BCl3 valve closed
10/25/2011	7:47:28 PM	PH3 valve closed
10/25/2011	7:47:28 PM	SiCl4 pre valve closed
10/25/2011	7:47:28 PM	SiCl4 post valve closed
10/25/2011	7:47:28 PM	Bypass valve closed
10/25/2011	7:47:28 PM	Bubbler valve closed
10/25/2011	7:47:28 PM	Helium valve opened
10/25/2011	7:47:28 PM	Main Vac valve opened
10/25/2011	7:47:28 PM	Helium MFC set to  20.000000
10/25/2011	7:47:28 PM	H2 MFC set to  0.000000
10/25/2011	7:47:28 PM	BCl3 MFC set to  0.000000
10/25/2011	7:47:28 PM	PHl3 MFC set to  0.000000
10/25/2011	7:47:28 PM	SiCl4 MFC set to  0.000000
10/25/2011	7:47:28 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	7:47:28 PM	Tube furnace set to 300
10/25/2011	7:47:58 PM	Helium valve closed
10/25/2011	7:47:58 PM	H2 valve closed
10/25/2011	7:47:58 PM	BCl3 valve closed
10/25/2011	7:47:58 PM	PH3 valve closed
10/25/2011	7:47:58 PM	SiCl4 pre valve closed
10/25/2011	7:47:58 PM	SiCl4 post valve closed
10/25/2011	7:47:58 PM	Bypass valve closed
10/25/2011	7:47:58 PM	Bubbler valve closed
10/25/2011	7:47:58 PM	Main Vac valve opened
10/25/2011	7:47:58 PM	Helium MFC set to  0.000000
10/25/2011	7:47:58 PM	H2 MFC set to  0.000000
10/25/2011	7:47:58 PM	BCl3 MFC set to  0.000000
10/25/2011	7:47:58 PM	PHl3 MFC set to  0.000000
10/25/2011	7:47:58 PM	SiCl4 MFC set to  0.000000
10/25/2011	7:47:58 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	7:47:59 PM	Tube furnace set to 300
10/25/2011	7:48:29 PM	H2 valve closed
10/25/2011	7:48:29 PM	BCl3 valve closed
10/25/2011	7:48:29 PM	PH3 valve closed
10/25/2011	7:48:29 PM	SiCl4 pre valve closed
10/25/2011	7:48:29 PM	SiCl4 post valve closed
10/25/2011	7:48:29 PM	Bypass valve closed
10/25/2011	7:48:29 PM	Bubbler valve closed
10/25/2011	7:48:29 PM	Helium valve opened
10/25/2011	7:48:29 PM	Main Vac valve opened
10/25/2011	7:48:29 PM	Helium MFC set to  20.000000
10/25/2011	7:48:29 PM	H2 MFC set to  0.000000
10/25/2011	7:48:29 PM	BCl3 MFC set to  0.000000
10/25/2011	7:48:29 PM	PHl3 MFC set to  0.000000
10/25/2011	7:48:29 PM	SiCl4 MFC set to  0.000000
10/25/2011	7:48:29 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	7:48:29 PM	Tube furnace set to 300
10/25/2011	7:48:59 PM	Helium valve closed
10/25/2011	7:48:59 PM	H2 valve closed
10/25/2011	7:48:59 PM	BCl3 valve closed
10/25/2011	7:48:59 PM	PH3 valve closed
10/25/2011	7:48:59 PM	SiCl4 pre valve closed
10/25/2011	7:48:59 PM	SiCl4 post valve closed
10/25/2011	7:48:59 PM	Bypass valve closed
10/25/2011	7:48:59 PM	Bubbler valve closed
10/25/2011	7:48:59 PM	Main Vac valve opened
10/25/2011	7:48:59 PM	Helium MFC set to  0.000000
10/25/2011	7:48:59 PM	H2 MFC set to  0.000000
10/25/2011	7:48:59 PM	BCl3 MFC set to  0.000000
10/25/2011	7:48:59 PM	PHl3 MFC set to  0.000000
10/25/2011	7:48:59 PM	SiCl4 MFC set to  0.000000
10/25/2011	7:48:59 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	7:48:59 PM	Tube furnace set to 300
10/25/2011	7:49:29 PM	H2 valve closed
10/25/2011	7:49:29 PM	BCl3 valve closed
10/25/2011	7:49:29 PM	PH3 valve closed
10/25/2011	7:49:29 PM	SiCl4 pre valve closed
10/25/2011	7:49:29 PM	SiCl4 post valve closed
10/25/2011	7:49:29 PM	Bypass valve closed
10/25/2011	7:49:29 PM	Bubbler valve closed
10/25/2011	7:49:29 PM	Helium valve opened
10/25/2011	7:49:29 PM	Main Vac valve opened
10/25/2011	7:49:29 PM	Helium MFC set to  20.000000
10/25/2011	7:49:29 PM	H2 MFC set to  0.000000
10/25/2011	7:49:29 PM	BCl3 MFC set to  0.000000
10/25/2011	7:49:29 PM	PHl3 MFC set to  0.000000
10/25/2011	7:49:29 PM	SiCl4 MFC set to  0.000000
10/25/2011	7:49:29 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	7:49:29 PM	Tube furnace set to 300
10/25/2011	7:49:59 PM	Helium valve closed
10/25/2011	7:49:59 PM	H2 valve closed
10/25/2011	7:49:59 PM	BCl3 valve closed
10/25/2011	7:49:59 PM	PH3 valve closed
10/25/2011	7:49:59 PM	SiCl4 pre valve closed
10/25/2011	7:49:59 PM	SiCl4 post valve closed
10/25/2011	7:49:59 PM	Bypass valve closed
10/25/2011	7:49:59 PM	Bubbler valve closed
10/25/2011	7:49:59 PM	Main Vac valve opened
10/25/2011	7:49:59 PM	Helium MFC set to  0.000000
10/25/2011	7:49:59 PM	H2 MFC set to  0.000000
10/25/2011	7:49:59 PM	BCl3 MFC set to  0.000000
10/25/2011	7:49:59 PM	PHl3 MFC set to  0.000000
10/25/2011	7:49:59 PM	SiCl4 MFC set to  0.000000
10/25/2011	7:49:59 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	7:50:00 PM	Tube furnace set to 300
10/25/2011	7:50:30 PM	H2 valve closed
10/25/2011	7:50:30 PM	BCl3 valve closed
10/25/2011	7:50:30 PM	PH3 valve closed
10/25/2011	7:50:30 PM	SiCl4 pre valve closed
10/25/2011	7:50:30 PM	SiCl4 post valve closed
10/25/2011	7:50:30 PM	Bypass valve closed
10/25/2011	7:50:30 PM	Bubbler valve closed
10/25/2011	7:50:30 PM	Helium valve opened
10/25/2011	7:50:30 PM	Main Vac valve opened
10/25/2011	7:50:30 PM	Helium MFC set to  20.000000
10/25/2011	7:50:30 PM	H2 MFC set to  0.000000
10/25/2011	7:50:30 PM	BCl3 MFC set to  0.000000
10/25/2011	7:50:30 PM	PHl3 MFC set to  0.000000
10/25/2011	7:50:30 PM	SiCl4 MFC set to  0.000000
10/25/2011	7:50:30 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	7:50:30 PM	Tube furnace set to 300
10/25/2011	7:51:00 PM	Helium valve closed
10/25/2011	7:51:00 PM	H2 valve closed
10/25/2011	7:51:00 PM	BCl3 valve closed
10/25/2011	7:51:00 PM	PH3 valve closed
10/25/2011	7:51:00 PM	SiCl4 pre valve closed
10/25/2011	7:51:00 PM	SiCl4 post valve closed
10/25/2011	7:51:00 PM	Bypass valve closed
10/25/2011	7:51:00 PM	Bubbler valve closed
10/25/2011	7:51:00 PM	Main Vac valve opened
10/25/2011	7:51:00 PM	Helium MFC set to  0.000000
10/25/2011	7:51:00 PM	H2 MFC set to  0.000000
10/25/2011	7:51:00 PM	BCl3 MFC set to  0.000000
10/25/2011	7:51:00 PM	PHl3 MFC set to  0.000000
10/25/2011	7:51:00 PM	SiCl4 MFC set to  0.000000
10/25/2011	7:51:00 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	7:51:00 PM	Tube furnace set to 300
10/25/2011	7:51:30 PM	H2 valve closed
10/25/2011	7:51:30 PM	BCl3 valve closed
10/25/2011	7:51:30 PM	PH3 valve closed
10/25/2011	7:51:30 PM	SiCl4 pre valve closed
10/25/2011	7:51:30 PM	SiCl4 post valve closed
10/25/2011	7:51:30 PM	Bypass valve closed
10/25/2011	7:51:30 PM	Bubbler valve closed
10/25/2011	7:51:30 PM	Helium valve opened
10/25/2011	7:51:30 PM	Main Vac valve opened
10/25/2011	7:51:30 PM	Helium MFC set to  20.000000
10/25/2011	7:51:30 PM	H2 MFC set to  0.000000
10/25/2011	7:51:30 PM	BCl3 MFC set to  0.000000
10/25/2011	7:51:30 PM	PHl3 MFC set to  0.000000
10/25/2011	7:51:30 PM	SiCl4 MFC set to  0.000000
10/25/2011	7:51:30 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	7:51:30 PM	Tube furnace set to 300
10/25/2011	7:52:00 PM	Helium valve closed
10/25/2011	7:52:00 PM	H2 valve closed
10/25/2011	7:52:00 PM	BCl3 valve closed
10/25/2011	7:52:00 PM	PH3 valve closed
10/25/2011	7:52:00 PM	SiCl4 pre valve closed
10/25/2011	7:52:00 PM	SiCl4 post valve closed
10/25/2011	7:52:00 PM	Bypass valve closed
10/25/2011	7:52:00 PM	Bubbler valve closed
10/25/2011	7:52:00 PM	Main Vac valve opened
10/25/2011	7:52:00 PM	Helium MFC set to  0.000000
10/25/2011	7:52:00 PM	H2 MFC set to  0.000000
10/25/2011	7:52:00 PM	BCl3 MFC set to  0.000000
10/25/2011	7:52:00 PM	PHl3 MFC set to  0.000000
10/25/2011	7:52:00 PM	SiCl4 MFC set to  0.000000
10/25/2011	7:52:00 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	7:52:00 PM	Tube furnace set to 300
10/25/2011	7:52:30 PM	H2 valve closed
10/25/2011	7:52:30 PM	BCl3 valve closed
10/25/2011	7:52:30 PM	PH3 valve closed
10/25/2011	7:52:30 PM	SiCl4 pre valve closed
10/25/2011	7:52:30 PM	SiCl4 post valve closed
10/25/2011	7:52:30 PM	Bypass valve closed
10/25/2011	7:52:30 PM	Bubbler valve closed
10/25/2011	7:52:30 PM	Helium valve opened
10/25/2011	7:52:30 PM	Main Vac valve opened
10/25/2011	7:52:30 PM	Helium MFC set to  20.000000
10/25/2011	7:52:30 PM	H2 MFC set to  0.000000
10/25/2011	7:52:30 PM	BCl3 MFC set to  0.000000
10/25/2011	7:52:30 PM	PHl3 MFC set to  0.000000
10/25/2011	7:52:30 PM	SiCl4 MFC set to  0.000000
10/25/2011	7:52:30 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	7:52:31 PM	Tube furnace set to 300
10/25/2011	7:53:01 PM	Helium valve closed
10/25/2011	7:53:01 PM	H2 valve closed
10/25/2011	7:53:01 PM	BCl3 valve closed
10/25/2011	7:53:01 PM	PH3 valve closed
10/25/2011	7:53:01 PM	SiCl4 pre valve closed
10/25/2011	7:53:01 PM	SiCl4 post valve closed
10/25/2011	7:53:01 PM	Bypass valve closed
10/25/2011	7:53:01 PM	Bubbler valve closed
10/25/2011	7:53:01 PM	Main Vac valve opened
10/25/2011	7:53:01 PM	Helium MFC set to  0.000000
10/25/2011	7:53:01 PM	H2 MFC set to  0.000000
10/25/2011	7:53:01 PM	BCl3 MFC set to  0.000000
10/25/2011	7:53:01 PM	PHl3 MFC set to  0.000000
10/25/2011	7:53:01 PM	SiCl4 MFC set to  0.000000
10/25/2011	7:53:01 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	7:53:01 PM	Tube furnace set to 300
10/25/2011	7:53:31 PM	H2 valve closed
10/25/2011	7:53:31 PM	BCl3 valve closed
10/25/2011	7:53:31 PM	PH3 valve closed
10/25/2011	7:53:31 PM	SiCl4 pre valve closed
10/25/2011	7:53:31 PM	SiCl4 post valve closed
10/25/2011	7:53:31 PM	Bypass valve closed
10/25/2011	7:53:31 PM	Bubbler valve closed
10/25/2011	7:53:31 PM	Helium valve opened
10/25/2011	7:53:31 PM	Main Vac valve opened
10/25/2011	7:53:31 PM	Helium MFC set to  20.000000
10/25/2011	7:53:31 PM	H2 MFC set to  0.000000
10/25/2011	7:53:31 PM	BCl3 MFC set to  0.000000
10/25/2011	7:53:31 PM	PHl3 MFC set to  0.000000
10/25/2011	7:53:31 PM	SiCl4 MFC set to  0.000000
10/25/2011	7:53:31 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	7:53:31 PM	Tube furnace set to 300
10/25/2011	7:54:01 PM	Helium valve closed
10/25/2011	7:54:01 PM	H2 valve closed
10/25/2011	7:54:01 PM	BCl3 valve closed
10/25/2011	7:54:01 PM	PH3 valve closed
10/25/2011	7:54:01 PM	SiCl4 pre valve closed
10/25/2011	7:54:01 PM	SiCl4 post valve closed
10/25/2011	7:54:01 PM	Bypass valve closed
10/25/2011	7:54:01 PM	Bubbler valve closed
10/25/2011	7:54:01 PM	Main Vac valve opened
10/25/2011	7:54:01 PM	Helium MFC set to  0.000000
10/25/2011	7:54:01 PM	H2 MFC set to  0.000000
10/25/2011	7:54:01 PM	BCl3 MFC set to  0.000000
10/25/2011	7:54:01 PM	PHl3 MFC set to  0.000000
10/25/2011	7:54:01 PM	SiCl4 MFC set to  0.000000
10/25/2011	7:54:01 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	7:54:01 PM	Tube furnace set to 300
10/25/2011	7:54:31 PM	H2 valve closed
10/25/2011	7:54:31 PM	BCl3 valve closed
10/25/2011	7:54:31 PM	PH3 valve closed
10/25/2011	7:54:31 PM	SiCl4 pre valve closed
10/25/2011	7:54:31 PM	SiCl4 post valve closed
10/25/2011	7:54:31 PM	Bypass valve closed
10/25/2011	7:54:31 PM	Bubbler valve closed
10/25/2011	7:54:31 PM	Helium valve opened
10/25/2011	7:54:31 PM	Main Vac valve opened
10/25/2011	7:54:31 PM	Helium MFC set to  20.000000
10/25/2011	7:54:31 PM	H2 MFC set to  0.000000
10/25/2011	7:54:31 PM	BCl3 MFC set to  0.000000
10/25/2011	7:54:31 PM	PHl3 MFC set to  0.000000
10/25/2011	7:54:31 PM	SiCl4 MFC set to  0.000000
10/25/2011	7:54:31 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	7:54:31 PM	Tube furnace set to 300
10/25/2011	7:55:01 PM	Helium valve closed
10/25/2011	7:55:01 PM	H2 valve closed
10/25/2011	7:55:01 PM	BCl3 valve closed
10/25/2011	7:55:01 PM	PH3 valve closed
10/25/2011	7:55:01 PM	SiCl4 pre valve closed
10/25/2011	7:55:02 PM	SiCl4 post valve closed
10/25/2011	7:55:02 PM	Bypass valve closed
10/25/2011	7:55:02 PM	Bubbler valve closed
10/25/2011	7:55:02 PM	Main Vac valve opened
10/25/2011	7:55:02 PM	Helium MFC set to  0.000000
10/25/2011	7:55:02 PM	H2 MFC set to  0.000000
10/25/2011	7:55:02 PM	BCl3 MFC set to  0.000000
10/25/2011	7:55:02 PM	PHl3 MFC set to  0.000000
10/25/2011	7:55:02 PM	SiCl4 MFC set to  0.000000
10/25/2011	7:55:02 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	7:55:02 PM	Tube furnace set to 300
10/25/2011	7:55:03 PM	Run finished at 7:55 PM
10/25/2011	7:57:13 PM	Recipe started at 7:57 PM
10/25/2011	7:57:13 PM	Helium valve closed
10/25/2011	7:57:13 PM	H2 valve closed
10/25/2011	7:57:13 PM	BCl3 valve closed
10/25/2011	7:57:13 PM	PH3 valve closed
10/25/2011	7:57:13 PM	SiCl4 pre valve closed
10/25/2011	7:57:13 PM	SiCl4 post valve closed
10/25/2011	7:57:13 PM	Bypass valve closed
10/25/2011	7:57:13 PM	Bubbler valve closed
10/25/2011	7:57:13 PM	Main Vac valve opened
10/25/2011	7:57:13 PM	Helium MFC set to  0.000000
10/25/2011	7:57:13 PM	H2 MFC set to  0.000000
10/25/2011	7:57:13 PM	BCl3 MFC set to  0.000000
10/25/2011	7:57:13 PM	PHl3 MFC set to  0.000000
10/25/2011	7:57:13 PM	SiCl4 MFC set to  0.000000
10/25/2011	7:57:13 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	7:57:13 PM	Tube furnace set to 300
10/25/2011	7:57:43 PM	H2 valve closed
10/25/2011	7:57:43 PM	BCl3 valve closed
10/25/2011	7:57:43 PM	PH3 valve closed
10/25/2011	7:57:43 PM	SiCl4 pre valve closed
10/25/2011	7:57:43 PM	SiCl4 post valve closed
10/25/2011	7:57:43 PM	Bypass valve closed
10/25/2011	7:57:43 PM	Bubbler valve closed
10/25/2011	7:57:43 PM	Helium valve opened
10/25/2011	7:57:43 PM	Main Vac valve opened
10/25/2011	7:57:43 PM	Helium MFC set to  20.000000
10/25/2011	7:57:43 PM	H2 MFC set to  0.000000
10/25/2011	7:57:43 PM	BCl3 MFC set to  0.000000
10/25/2011	7:57:43 PM	PHl3 MFC set to  0.000000
10/25/2011	7:57:43 PM	SiCl4 MFC set to  0.000000
10/25/2011	7:57:43 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	7:57:43 PM	Tube furnace set to 300
10/25/2011	7:58:13 PM	Helium valve closed
10/25/2011	7:58:13 PM	H2 valve closed
10/25/2011	7:58:13 PM	BCl3 valve closed
10/25/2011	7:58:13 PM	PH3 valve closed
10/25/2011	7:58:13 PM	SiCl4 pre valve closed
10/25/2011	7:58:13 PM	SiCl4 post valve closed
10/25/2011	7:58:13 PM	Bypass valve closed
10/25/2011	7:58:13 PM	Bubbler valve closed
10/25/2011	7:58:13 PM	Main Vac valve opened
10/25/2011	7:58:13 PM	Helium MFC set to  0.000000
10/25/2011	7:58:13 PM	H2 MFC set to  0.000000
10/25/2011	7:58:13 PM	BCl3 MFC set to  0.000000
10/25/2011	7:58:13 PM	PHl3 MFC set to  0.000000
10/25/2011	7:58:13 PM	SiCl4 MFC set to  0.000000
10/25/2011	7:58:13 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	7:58:14 PM	Tube furnace set to 300
10/25/2011	7:58:44 PM	H2 valve closed
10/25/2011	7:58:44 PM	BCl3 valve closed
10/25/2011	7:58:44 PM	PH3 valve closed
10/25/2011	7:58:44 PM	SiCl4 pre valve closed
10/25/2011	7:58:44 PM	SiCl4 post valve closed
10/25/2011	7:58:44 PM	Bypass valve closed
10/25/2011	7:58:44 PM	Bubbler valve closed
10/25/2011	7:58:44 PM	Helium valve opened
10/25/2011	7:58:44 PM	Main Vac valve opened
10/25/2011	7:58:44 PM	Helium MFC set to  20.000000
10/25/2011	7:58:44 PM	H2 MFC set to  0.000000
10/25/2011	7:58:44 PM	BCl3 MFC set to  0.000000
10/25/2011	7:58:44 PM	PHl3 MFC set to  0.000000
10/25/2011	7:58:44 PM	SiCl4 MFC set to  0.000000
10/25/2011	7:58:44 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	7:58:44 PM	Tube furnace set to 300
10/25/2011	7:59:14 PM	Helium valve closed
10/25/2011	7:59:14 PM	H2 valve closed
10/25/2011	7:59:14 PM	BCl3 valve closed
10/25/2011	7:59:14 PM	PH3 valve closed
10/25/2011	7:59:14 PM	SiCl4 pre valve closed
10/25/2011	7:59:14 PM	SiCl4 post valve closed
10/25/2011	7:59:14 PM	Bypass valve closed
10/25/2011	7:59:14 PM	Bubbler valve closed
10/25/2011	7:59:14 PM	Main Vac valve opened
10/25/2011	7:59:14 PM	Helium MFC set to  0.000000
10/25/2011	7:59:14 PM	H2 MFC set to  0.000000
10/25/2011	7:59:14 PM	BCl3 MFC set to  0.000000
10/25/2011	7:59:14 PM	PHl3 MFC set to  0.000000
10/25/2011	7:59:14 PM	SiCl4 MFC set to  0.000000
10/25/2011	7:59:14 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	7:59:14 PM	Tube furnace set to 300
10/25/2011	7:59:44 PM	H2 valve closed
10/25/2011	7:59:44 PM	BCl3 valve closed
10/25/2011	7:59:44 PM	PH3 valve closed
10/25/2011	7:59:44 PM	SiCl4 pre valve closed
10/25/2011	7:59:44 PM	SiCl4 post valve closed
10/25/2011	7:59:44 PM	Bypass valve closed
10/25/2011	7:59:44 PM	Bubbler valve closed
10/25/2011	7:59:44 PM	Helium valve opened
10/25/2011	7:59:44 PM	Main Vac valve opened
10/25/2011	7:59:44 PM	Helium MFC set to  20.000000
10/25/2011	7:59:44 PM	H2 MFC set to  0.000000
10/25/2011	7:59:44 PM	BCl3 MFC set to  0.000000
10/25/2011	7:59:44 PM	PHl3 MFC set to  0.000000
10/25/2011	7:59:44 PM	SiCl4 MFC set to  0.000000
10/25/2011	7:59:44 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	7:59:44 PM	Tube furnace set to 300
10/25/2011	8:00:14 PM	Helium valve closed
10/25/2011	8:00:14 PM	H2 valve closed
10/25/2011	8:00:14 PM	BCl3 valve closed
10/25/2011	8:00:14 PM	PH3 valve closed
10/25/2011	8:00:14 PM	SiCl4 pre valve closed
10/25/2011	8:00:14 PM	SiCl4 post valve closed
10/25/2011	8:00:14 PM	Bypass valve closed
10/25/2011	8:00:14 PM	Bubbler valve closed
10/25/2011	8:00:14 PM	Main Vac valve opened
10/25/2011	8:00:14 PM	Helium MFC set to  0.000000
10/25/2011	8:00:14 PM	H2 MFC set to  0.000000
10/25/2011	8:00:14 PM	BCl3 MFC set to  0.000000
10/25/2011	8:00:14 PM	PHl3 MFC set to  0.000000
10/25/2011	8:00:14 PM	SiCl4 MFC set to  0.000000
10/25/2011	8:00:14 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	8:00:14 PM	Tube furnace set to 300
10/25/2011	8:00:44 PM	H2 valve closed
10/25/2011	8:00:44 PM	BCl3 valve closed
10/25/2011	8:00:44 PM	PH3 valve closed
10/25/2011	8:00:44 PM	SiCl4 pre valve closed
10/25/2011	8:00:44 PM	SiCl4 post valve closed
10/25/2011	8:00:44 PM	Bypass valve closed
10/25/2011	8:00:44 PM	Bubbler valve closed
10/25/2011	8:00:44 PM	Helium valve opened
10/25/2011	8:00:44 PM	Main Vac valve opened
10/25/2011	8:00:44 PM	Helium MFC set to  20.000000
10/25/2011	8:00:44 PM	H2 MFC set to  0.000000
10/25/2011	8:00:44 PM	BCl3 MFC set to  0.000000
10/25/2011	8:00:44 PM	PHl3 MFC set to  0.000000
10/25/2011	8:00:44 PM	SiCl4 MFC set to  0.000000
10/25/2011	8:00:44 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	8:00:45 PM	Tube furnace set to 300
10/25/2011	8:01:15 PM	Helium valve closed
10/25/2011	8:01:15 PM	H2 valve closed
10/25/2011	8:01:15 PM	BCl3 valve closed
10/25/2011	8:01:15 PM	PH3 valve closed
10/25/2011	8:01:15 PM	SiCl4 pre valve closed
10/25/2011	8:01:15 PM	SiCl4 post valve closed
10/25/2011	8:01:15 PM	Bypass valve closed
10/25/2011	8:01:15 PM	Bubbler valve closed
10/25/2011	8:01:15 PM	Main Vac valve opened
10/25/2011	8:01:15 PM	Helium MFC set to  0.000000
10/25/2011	8:01:15 PM	H2 MFC set to  0.000000
10/25/2011	8:01:15 PM	BCl3 MFC set to  0.000000
10/25/2011	8:01:15 PM	PHl3 MFC set to  0.000000
10/25/2011	8:01:15 PM	SiCl4 MFC set to  0.000000
10/25/2011	8:01:15 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	8:01:15 PM	Tube furnace set to 300
10/25/2011	8:01:45 PM	H2 valve closed
10/25/2011	8:01:45 PM	BCl3 valve closed
10/25/2011	8:01:45 PM	PH3 valve closed
10/25/2011	8:01:45 PM	SiCl4 pre valve closed
10/25/2011	8:01:45 PM	SiCl4 post valve closed
10/25/2011	8:01:45 PM	Bypass valve closed
10/25/2011	8:01:45 PM	Bubbler valve closed
10/25/2011	8:01:45 PM	Helium valve opened
10/25/2011	8:01:45 PM	Main Vac valve opened
10/25/2011	8:01:45 PM	Helium MFC set to  20.000000
10/25/2011	8:01:45 PM	H2 MFC set to  0.000000
10/25/2011	8:01:45 PM	BCl3 MFC set to  0.000000
10/25/2011	8:01:45 PM	PHl3 MFC set to  0.000000
10/25/2011	8:01:45 PM	SiCl4 MFC set to  0.000000
10/25/2011	8:01:45 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	8:01:45 PM	Tube furnace set to 300
10/25/2011	8:02:15 PM	Helium valve closed
10/25/2011	8:02:15 PM	H2 valve closed
10/25/2011	8:02:15 PM	BCl3 valve closed
10/25/2011	8:02:15 PM	PH3 valve closed
10/25/2011	8:02:15 PM	SiCl4 pre valve closed
10/25/2011	8:02:15 PM	SiCl4 post valve closed
10/25/2011	8:02:15 PM	Bypass valve closed
10/25/2011	8:02:15 PM	Bubbler valve closed
10/25/2011	8:02:15 PM	Main Vac valve opened
10/25/2011	8:02:15 PM	Helium MFC set to  0.000000
10/25/2011	8:02:15 PM	H2 MFC set to  0.000000
10/25/2011	8:02:15 PM	BCl3 MFC set to  0.000000
10/25/2011	8:02:15 PM	PHl3 MFC set to  0.000000
10/25/2011	8:02:15 PM	SiCl4 MFC set to  0.000000
10/25/2011	8:02:15 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	8:02:15 PM	Tube furnace set to 300
10/25/2011	8:02:45 PM	H2 valve closed
10/25/2011	8:02:45 PM	BCl3 valve closed
10/25/2011	8:02:45 PM	PH3 valve closed
10/25/2011	8:02:45 PM	SiCl4 pre valve closed
10/25/2011	8:02:45 PM	SiCl4 post valve closed
10/25/2011	8:02:45 PM	Bypass valve closed
10/25/2011	8:02:45 PM	Bubbler valve closed
10/25/2011	8:02:45 PM	Helium valve opened
10/25/2011	8:02:45 PM	Main Vac valve opened
10/25/2011	8:02:45 PM	Helium MFC set to  20.000000
10/25/2011	8:02:45 PM	H2 MFC set to  0.000000
10/25/2011	8:02:45 PM	BCl3 MFC set to  0.000000
10/25/2011	8:02:45 PM	PHl3 MFC set to  0.000000
10/25/2011	8:02:45 PM	SiCl4 MFC set to  0.000000
10/25/2011	8:02:45 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	8:02:45 PM	Tube furnace set to 300
10/25/2011	8:03:15 PM	Helium valve closed
10/25/2011	8:03:15 PM	H2 valve closed
10/25/2011	8:03:15 PM	BCl3 valve closed
10/25/2011	8:03:15 PM	PH3 valve closed
10/25/2011	8:03:15 PM	SiCl4 pre valve closed
10/25/2011	8:03:15 PM	SiCl4 post valve closed
10/25/2011	8:03:15 PM	Bypass valve closed
10/25/2011	8:03:15 PM	Bubbler valve closed
10/25/2011	8:03:15 PM	Main Vac valve opened
10/25/2011	8:03:15 PM	Helium MFC set to  0.000000
10/25/2011	8:03:15 PM	H2 MFC set to  0.000000
10/25/2011	8:03:15 PM	BCl3 MFC set to  0.000000
10/25/2011	8:03:15 PM	PHl3 MFC set to  0.000000
10/25/2011	8:03:15 PM	SiCl4 MFC set to  0.000000
10/25/2011	8:03:15 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	8:03:16 PM	Tube furnace set to 300
10/25/2011	8:03:46 PM	H2 valve closed
10/25/2011	8:03:46 PM	BCl3 valve closed
10/25/2011	8:03:46 PM	PH3 valve closed
10/25/2011	8:03:46 PM	SiCl4 pre valve closed
10/25/2011	8:03:46 PM	SiCl4 post valve closed
10/25/2011	8:03:46 PM	Bypass valve closed
10/25/2011	8:03:46 PM	Bubbler valve closed
10/25/2011	8:03:46 PM	Helium valve opened
10/25/2011	8:03:46 PM	Main Vac valve opened
10/25/2011	8:03:46 PM	Helium MFC set to  20.000000
10/25/2011	8:03:46 PM	H2 MFC set to  0.000000
10/25/2011	8:03:46 PM	BCl3 MFC set to  0.000000
10/25/2011	8:03:46 PM	PHl3 MFC set to  0.000000
10/25/2011	8:03:46 PM	SiCl4 MFC set to  0.000000
10/25/2011	8:03:46 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	8:03:46 PM	Tube furnace set to 300
10/25/2011	8:04:16 PM	Helium valve closed
10/25/2011	8:04:16 PM	H2 valve closed
10/25/2011	8:04:16 PM	BCl3 valve closed
10/25/2011	8:04:16 PM	PH3 valve closed
10/25/2011	8:04:16 PM	SiCl4 pre valve closed
10/25/2011	8:04:16 PM	SiCl4 post valve closed
10/25/2011	8:04:16 PM	Bypass valve closed
10/25/2011	8:04:16 PM	Bubbler valve closed
10/25/2011	8:04:16 PM	Main Vac valve opened
10/25/2011	8:04:16 PM	Helium MFC set to  0.000000
10/25/2011	8:04:16 PM	H2 MFC set to  0.000000
10/25/2011	8:04:16 PM	BCl3 MFC set to  0.000000
10/25/2011	8:04:16 PM	PHl3 MFC set to  0.000000
10/25/2011	8:04:16 PM	SiCl4 MFC set to  0.000000
10/25/2011	8:04:16 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	8:04:16 PM	Tube furnace set to 300
10/25/2011	8:04:46 PM	H2 valve closed
10/25/2011	8:04:46 PM	BCl3 valve closed
10/25/2011	8:04:46 PM	PH3 valve closed
10/25/2011	8:04:46 PM	SiCl4 pre valve closed
10/25/2011	8:04:46 PM	SiCl4 post valve closed
10/25/2011	8:04:46 PM	Bypass valve closed
10/25/2011	8:04:46 PM	Bubbler valve closed
10/25/2011	8:04:46 PM	Helium valve opened
10/25/2011	8:04:46 PM	Main Vac valve opened
10/25/2011	8:04:46 PM	Helium MFC set to  20.000000
10/25/2011	8:04:46 PM	H2 MFC set to  0.000000
10/25/2011	8:04:46 PM	BCl3 MFC set to  0.000000
10/25/2011	8:04:46 PM	PHl3 MFC set to  0.000000
10/25/2011	8:04:46 PM	SiCl4 MFC set to  0.000000
10/25/2011	8:04:46 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	8:04:46 PM	Tube furnace set to 300
10/25/2011	8:05:16 PM	Helium valve closed
10/25/2011	8:05:16 PM	H2 valve closed
10/25/2011	8:05:16 PM	BCl3 valve closed
10/25/2011	8:05:16 PM	PH3 valve closed
10/25/2011	8:05:16 PM	SiCl4 pre valve closed
10/25/2011	8:05:16 PM	SiCl4 post valve closed
10/25/2011	8:05:16 PM	Bypass valve closed
10/25/2011	8:05:16 PM	Bubbler valve closed
10/25/2011	8:05:16 PM	Main Vac valve opened
10/25/2011	8:05:16 PM	Helium MFC set to  0.000000
10/25/2011	8:05:16 PM	H2 MFC set to  0.000000
10/25/2011	8:05:16 PM	BCl3 MFC set to  0.000000
10/25/2011	8:05:16 PM	PHl3 MFC set to  0.000000
10/25/2011	8:05:16 PM	SiCl4 MFC set to  0.000000
10/25/2011	8:05:16 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	8:05:16 PM	Tube furnace set to 300
10/25/2011	8:05:46 PM	H2 valve closed
10/25/2011	8:05:46 PM	BCl3 valve closed
10/25/2011	8:05:46 PM	PH3 valve closed
10/25/2011	8:05:46 PM	SiCl4 pre valve closed
10/25/2011	8:05:46 PM	SiCl4 post valve closed
10/25/2011	8:05:46 PM	Bypass valve closed
10/25/2011	8:05:46 PM	Bubbler valve closed
10/25/2011	8:05:46 PM	Helium valve opened
10/25/2011	8:05:46 PM	Main Vac valve opened
10/25/2011	8:05:46 PM	Helium MFC set to  20.000000
10/25/2011	8:05:46 PM	H2 MFC set to  0.000000
10/25/2011	8:05:46 PM	BCl3 MFC set to  0.000000
10/25/2011	8:05:46 PM	PHl3 MFC set to  0.000000
10/25/2011	8:05:46 PM	SiCl4 MFC set to  0.000000
10/25/2011	8:05:46 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	8:05:47 PM	Tube furnace set to 300
10/25/2011	8:06:17 PM	Helium valve closed
10/25/2011	8:06:17 PM	H2 valve closed
10/25/2011	8:06:17 PM	BCl3 valve closed
10/25/2011	8:06:17 PM	PH3 valve closed
10/25/2011	8:06:17 PM	SiCl4 pre valve closed
10/25/2011	8:06:17 PM	SiCl4 post valve closed
10/25/2011	8:06:17 PM	Bypass valve closed
10/25/2011	8:06:17 PM	Bubbler valve closed
10/25/2011	8:06:17 PM	Main Vac valve opened
10/25/2011	8:06:17 PM	Helium MFC set to  0.000000
10/25/2011	8:06:17 PM	H2 MFC set to  0.000000
10/25/2011	8:06:17 PM	BCl3 MFC set to  0.000000
10/25/2011	8:06:17 PM	PHl3 MFC set to  0.000000
10/25/2011	8:06:17 PM	SiCl4 MFC set to  0.000000
10/25/2011	8:06:17 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	8:06:17 PM	Tube furnace set to 300
10/25/2011	8:06:47 PM	H2 valve closed
10/25/2011	8:06:47 PM	BCl3 valve closed
10/25/2011	8:06:47 PM	PH3 valve closed
10/25/2011	8:06:47 PM	SiCl4 pre valve closed
10/25/2011	8:06:47 PM	SiCl4 post valve closed
10/25/2011	8:06:47 PM	Bypass valve closed
10/25/2011	8:06:47 PM	Bubbler valve closed
10/25/2011	8:06:47 PM	Helium valve opened
10/25/2011	8:06:47 PM	Main Vac valve opened
10/25/2011	8:06:47 PM	Helium MFC set to  20.000000
10/25/2011	8:06:47 PM	H2 MFC set to  0.000000
10/25/2011	8:06:47 PM	BCl3 MFC set to  0.000000
10/25/2011	8:06:47 PM	PHl3 MFC set to  0.000000
10/25/2011	8:06:47 PM	SiCl4 MFC set to  0.000000
10/25/2011	8:06:47 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	8:06:47 PM	Tube furnace set to 300
10/25/2011	8:07:17 PM	Helium valve closed
10/25/2011	8:07:17 PM	H2 valve closed
10/25/2011	8:07:17 PM	BCl3 valve closed
10/25/2011	8:07:17 PM	PH3 valve closed
10/25/2011	8:07:17 PM	SiCl4 pre valve closed
10/25/2011	8:07:17 PM	SiCl4 post valve closed
10/25/2011	8:07:17 PM	Bypass valve closed
10/25/2011	8:07:17 PM	Bubbler valve closed
10/25/2011	8:07:17 PM	Main Vac valve opened
10/25/2011	8:07:17 PM	Helium MFC set to  0.000000
10/25/2011	8:07:17 PM	H2 MFC set to  0.000000
10/25/2011	8:07:17 PM	BCl3 MFC set to  0.000000
10/25/2011	8:07:17 PM	PHl3 MFC set to  0.000000
10/25/2011	8:07:17 PM	SiCl4 MFC set to  0.000000
10/25/2011	8:07:17 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	8:07:17 PM	Tube furnace set to 300
10/25/2011	8:07:18 PM	Run finished at 8:07 PM
10/25/2011	8:11:55 PM	Recipe started at 8:11 PM
10/25/2011	8:11:55 PM	Helium valve closed
10/25/2011	8:11:55 PM	H2 valve closed
10/25/2011	8:11:55 PM	BCl3 valve closed
10/25/2011	8:11:55 PM	PH3 valve closed
10/25/2011	8:11:55 PM	SiCl4 pre valve closed
10/25/2011	8:11:55 PM	SiCl4 post valve closed
10/25/2011	8:11:55 PM	Bypass valve closed
10/25/2011	8:11:55 PM	Bubbler valve closed
10/25/2011	8:11:55 PM	Main Vac valve opened
10/25/2011	8:11:55 PM	Helium MFC set to  0.000000
10/25/2011	8:11:55 PM	H2 MFC set to  0.000000
10/25/2011	8:11:55 PM	BCl3 MFC set to  0.000000
10/25/2011	8:11:55 PM	PHl3 MFC set to  0.000000
10/25/2011	8:11:55 PM	SiCl4 MFC set to  0.000000
10/25/2011	8:11:55 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	8:11:55 PM	Tube furnace set to 300
10/25/2011	8:12:25 PM	H2 valve closed
10/25/2011	8:12:25 PM	BCl3 valve closed
10/25/2011	8:12:25 PM	PH3 valve closed
10/25/2011	8:12:25 PM	SiCl4 pre valve closed
10/25/2011	8:12:25 PM	SiCl4 post valve closed
10/25/2011	8:12:25 PM	Bypass valve closed
10/25/2011	8:12:25 PM	Bubbler valve closed
10/25/2011	8:12:25 PM	Helium valve opened
10/25/2011	8:12:26 PM	Main Vac valve opened
10/25/2011	8:12:26 PM	Helium MFC set to  20.000000
10/25/2011	8:12:26 PM	H2 MFC set to  0.000000
10/25/2011	8:12:26 PM	BCl3 MFC set to  0.000000
10/25/2011	8:12:26 PM	PHl3 MFC set to  0.000000
10/25/2011	8:12:26 PM	SiCl4 MFC set to  0.000000
10/25/2011	8:12:26 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	8:12:26 PM	Tube furnace set to 300
10/25/2011	8:12:56 PM	Helium valve closed
10/25/2011	8:12:56 PM	H2 valve closed
10/25/2011	8:12:56 PM	BCl3 valve closed
10/25/2011	8:12:56 PM	PH3 valve closed
10/25/2011	8:12:56 PM	SiCl4 pre valve closed
10/25/2011	8:12:56 PM	SiCl4 post valve closed
10/25/2011	8:12:56 PM	Bypass valve closed
10/25/2011	8:12:56 PM	Bubbler valve closed
10/25/2011	8:12:56 PM	Main Vac valve opened
10/25/2011	8:12:56 PM	Helium MFC set to  0.000000
10/25/2011	8:12:56 PM	H2 MFC set to  0.000000
10/25/2011	8:12:56 PM	BCl3 MFC set to  0.000000
10/25/2011	8:12:56 PM	PHl3 MFC set to  0.000000
10/25/2011	8:12:56 PM	SiCl4 MFC set to  0.000000
10/25/2011	8:12:56 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	8:12:56 PM	Tube furnace set to 300
10/25/2011	8:13:26 PM	H2 valve closed
10/25/2011	8:13:26 PM	BCl3 valve closed
10/25/2011	8:13:26 PM	PH3 valve closed
10/25/2011	8:13:26 PM	SiCl4 pre valve closed
10/25/2011	8:13:26 PM	SiCl4 post valve closed
10/25/2011	8:13:26 PM	Bypass valve closed
10/25/2011	8:13:26 PM	Bubbler valve closed
10/25/2011	8:13:26 PM	Helium valve opened
10/25/2011	8:13:26 PM	Main Vac valve opened
10/25/2011	8:13:26 PM	Helium MFC set to  20.000000
10/25/2011	8:13:26 PM	H2 MFC set to  0.000000
10/25/2011	8:13:26 PM	BCl3 MFC set to  0.000000
10/25/2011	8:13:26 PM	PHl3 MFC set to  0.000000
10/25/2011	8:13:26 PM	SiCl4 MFC set to  0.000000
10/25/2011	8:13:26 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	8:13:26 PM	Tube furnace set to 300
10/25/2011	8:13:56 PM	Helium valve closed
10/25/2011	8:13:56 PM	H2 valve closed
10/25/2011	8:13:56 PM	BCl3 valve closed
10/25/2011	8:13:56 PM	PH3 valve closed
10/25/2011	8:13:56 PM	SiCl4 pre valve closed
10/25/2011	8:13:56 PM	SiCl4 post valve closed
10/25/2011	8:13:56 PM	Bypass valve closed
10/25/2011	8:13:56 PM	Bubbler valve closed
10/25/2011	8:13:56 PM	Main Vac valve opened
10/25/2011	8:13:56 PM	Helium MFC set to  0.000000
10/25/2011	8:13:56 PM	H2 MFC set to  0.000000
10/25/2011	8:13:56 PM	BCl3 MFC set to  0.000000
10/25/2011	8:13:56 PM	PHl3 MFC set to  0.000000
10/25/2011	8:13:56 PM	SiCl4 MFC set to  0.000000
10/25/2011	8:13:56 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	8:13:56 PM	Tube furnace set to 300
10/25/2011	8:14:26 PM	H2 valve closed
10/25/2011	8:14:26 PM	BCl3 valve closed
10/25/2011	8:14:26 PM	PH3 valve closed
10/25/2011	8:14:26 PM	SiCl4 pre valve closed
10/25/2011	8:14:26 PM	SiCl4 post valve closed
10/25/2011	8:14:26 PM	Bypass valve closed
10/25/2011	8:14:26 PM	Bubbler valve closed
10/25/2011	8:14:26 PM	Helium valve opened
10/25/2011	8:14:26 PM	Main Vac valve opened
10/25/2011	8:14:26 PM	Helium MFC set to  20.000000
10/25/2011	8:14:26 PM	H2 MFC set to  0.000000
10/25/2011	8:14:26 PM	BCl3 MFC set to  0.000000
10/25/2011	8:14:26 PM	PHl3 MFC set to  0.000000
10/25/2011	8:14:26 PM	SiCl4 MFC set to  0.000000
10/25/2011	8:14:26 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	8:14:26 PM	Tube furnace set to 300
10/25/2011	8:14:56 PM	Helium valve closed
10/25/2011	8:14:56 PM	H2 valve closed
10/25/2011	8:14:56 PM	BCl3 valve closed
10/25/2011	8:14:56 PM	PH3 valve closed
10/25/2011	8:14:56 PM	SiCl4 pre valve closed
10/25/2011	8:14:56 PM	SiCl4 post valve closed
10/25/2011	8:14:56 PM	Bypass valve closed
10/25/2011	8:14:56 PM	Bubbler valve closed
10/25/2011	8:14:56 PM	Main Vac valve opened
10/25/2011	8:14:56 PM	Helium MFC set to  0.000000
10/25/2011	8:14:56 PM	H2 MFC set to  0.000000
10/25/2011	8:14:56 PM	BCl3 MFC set to  0.000000
10/25/2011	8:14:56 PM	PHl3 MFC set to  0.000000
10/25/2011	8:14:56 PM	SiCl4 MFC set to  0.000000
10/25/2011	8:14:56 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	8:14:57 PM	Tube furnace set to 300
10/25/2011	8:15:27 PM	H2 valve closed
10/25/2011	8:15:27 PM	BCl3 valve closed
10/25/2011	8:15:27 PM	PH3 valve closed
10/25/2011	8:15:27 PM	SiCl4 pre valve closed
10/25/2011	8:15:27 PM	SiCl4 post valve closed
10/25/2011	8:15:27 PM	Bypass valve closed
10/25/2011	8:15:27 PM	Bubbler valve closed
10/25/2011	8:15:27 PM	Helium valve opened
10/25/2011	8:15:27 PM	Main Vac valve opened
10/25/2011	8:15:27 PM	Helium MFC set to  20.000000
10/25/2011	8:15:27 PM	H2 MFC set to  0.000000
10/25/2011	8:15:27 PM	BCl3 MFC set to  0.000000
10/25/2011	8:15:27 PM	PHl3 MFC set to  0.000000
10/25/2011	8:15:27 PM	SiCl4 MFC set to  0.000000
10/25/2011	8:15:27 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	8:15:27 PM	Tube furnace set to 300
10/25/2011	8:15:57 PM	Helium valve closed
10/25/2011	8:15:57 PM	H2 valve closed
10/25/2011	8:15:57 PM	BCl3 valve closed
10/25/2011	8:15:57 PM	PH3 valve closed
10/25/2011	8:15:57 PM	SiCl4 pre valve closed
10/25/2011	8:15:57 PM	SiCl4 post valve closed
10/25/2011	8:15:57 PM	Bypass valve closed
10/25/2011	8:15:57 PM	Bubbler valve closed
10/25/2011	8:15:57 PM	Main Vac valve opened
10/25/2011	8:15:57 PM	Helium MFC set to  0.000000
10/25/2011	8:15:57 PM	H2 MFC set to  0.000000
10/25/2011	8:15:57 PM	BCl3 MFC set to  0.000000
10/25/2011	8:15:57 PM	PHl3 MFC set to  0.000000
10/25/2011	8:15:57 PM	SiCl4 MFC set to  0.000000
10/25/2011	8:15:57 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	8:15:57 PM	Tube furnace set to 300
10/25/2011	8:16:27 PM	H2 valve closed
10/25/2011	8:16:27 PM	BCl3 valve closed
10/25/2011	8:16:27 PM	PH3 valve closed
10/25/2011	8:16:27 PM	SiCl4 pre valve closed
10/25/2011	8:16:27 PM	SiCl4 post valve closed
10/25/2011	8:16:27 PM	Bypass valve closed
10/25/2011	8:16:27 PM	Bubbler valve closed
10/25/2011	8:16:27 PM	Helium valve opened
10/25/2011	8:16:27 PM	Main Vac valve opened
10/25/2011	8:16:27 PM	Helium MFC set to  20.000000
10/25/2011	8:16:27 PM	H2 MFC set to  0.000000
10/25/2011	8:16:27 PM	BCl3 MFC set to  0.000000
10/25/2011	8:16:27 PM	PHl3 MFC set to  0.000000
10/25/2011	8:16:27 PM	SiCl4 MFC set to  0.000000
10/25/2011	8:16:27 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	8:16:27 PM	Tube furnace set to 300
10/25/2011	8:16:57 PM	Helium valve closed
10/25/2011	8:16:57 PM	H2 valve closed
10/25/2011	8:16:57 PM	BCl3 valve closed
10/25/2011	8:16:57 PM	PH3 valve closed
10/25/2011	8:16:57 PM	SiCl4 pre valve closed
10/25/2011	8:16:57 PM	SiCl4 post valve closed
10/25/2011	8:16:57 PM	Bypass valve closed
10/25/2011	8:16:57 PM	Bubbler valve closed
10/25/2011	8:16:57 PM	Main Vac valve opened
10/25/2011	8:16:57 PM	Helium MFC set to  0.000000
10/25/2011	8:16:57 PM	H2 MFC set to  0.000000
10/25/2011	8:16:57 PM	BCl3 MFC set to  0.000000
10/25/2011	8:16:57 PM	PHl3 MFC set to  0.000000
10/25/2011	8:16:57 PM	SiCl4 MFC set to  0.000000
10/25/2011	8:16:57 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	8:16:57 PM	Tube furnace set to 300
10/25/2011	8:17:27 PM	H2 valve closed
10/25/2011	8:17:27 PM	BCl3 valve closed
10/25/2011	8:17:27 PM	PH3 valve closed
10/25/2011	8:17:27 PM	SiCl4 pre valve closed
10/25/2011	8:17:27 PM	SiCl4 post valve closed
10/25/2011	8:17:27 PM	Bypass valve closed
10/25/2011	8:17:27 PM	Bubbler valve closed
10/25/2011	8:17:27 PM	Helium valve opened
10/25/2011	8:17:27 PM	Main Vac valve opened
10/25/2011	8:17:27 PM	Helium MFC set to  20.000000
10/25/2011	8:17:27 PM	H2 MFC set to  0.000000
10/25/2011	8:17:27 PM	BCl3 MFC set to  0.000000
10/25/2011	8:17:27 PM	PHl3 MFC set to  0.000000
10/25/2011	8:17:27 PM	SiCl4 MFC set to  0.000000
10/25/2011	8:17:27 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	8:17:28 PM	Tube furnace set to 300
10/25/2011	8:17:58 PM	Helium valve closed
10/25/2011	8:17:58 PM	H2 valve closed
10/25/2011	8:17:58 PM	BCl3 valve closed
10/25/2011	8:17:58 PM	PH3 valve closed
10/25/2011	8:17:58 PM	SiCl4 pre valve closed
10/25/2011	8:17:58 PM	SiCl4 post valve closed
10/25/2011	8:17:58 PM	Bypass valve closed
10/25/2011	8:17:58 PM	Bubbler valve closed
10/25/2011	8:17:58 PM	Main Vac valve opened
10/25/2011	8:17:58 PM	Helium MFC set to  0.000000
10/25/2011	8:17:58 PM	H2 MFC set to  0.000000
10/25/2011	8:17:58 PM	BCl3 MFC set to  0.000000
10/25/2011	8:17:58 PM	PHl3 MFC set to  0.000000
10/25/2011	8:17:58 PM	SiCl4 MFC set to  0.000000
10/25/2011	8:17:58 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	8:17:58 PM	Tube furnace set to 300
10/25/2011	8:18:28 PM	H2 valve closed
10/25/2011	8:18:28 PM	BCl3 valve closed
10/25/2011	8:18:28 PM	PH3 valve closed
10/25/2011	8:18:28 PM	SiCl4 pre valve closed
10/25/2011	8:18:28 PM	SiCl4 post valve closed
10/25/2011	8:18:28 PM	Bypass valve closed
10/25/2011	8:18:28 PM	Bubbler valve closed
10/25/2011	8:18:28 PM	Helium valve opened
10/25/2011	8:18:28 PM	Main Vac valve opened
10/25/2011	8:18:28 PM	Helium MFC set to  20.000000
10/25/2011	8:18:28 PM	H2 MFC set to  0.000000
10/25/2011	8:18:28 PM	BCl3 MFC set to  0.000000
10/25/2011	8:18:28 PM	PHl3 MFC set to  0.000000
10/25/2011	8:18:28 PM	SiCl4 MFC set to  0.000000
10/25/2011	8:18:28 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	8:18:28 PM	Tube furnace set to 300
10/25/2011	8:18:58 PM	Helium valve closed
10/25/2011	8:18:58 PM	H2 valve closed
10/25/2011	8:18:58 PM	BCl3 valve closed
10/25/2011	8:18:58 PM	PH3 valve closed
10/25/2011	8:18:58 PM	SiCl4 pre valve closed
10/25/2011	8:18:58 PM	SiCl4 post valve closed
10/25/2011	8:18:58 PM	Bypass valve closed
10/25/2011	8:18:58 PM	Bubbler valve closed
10/25/2011	8:18:58 PM	Main Vac valve opened
10/25/2011	8:18:58 PM	Helium MFC set to  0.000000
10/25/2011	8:18:58 PM	H2 MFC set to  0.000000
10/25/2011	8:18:58 PM	BCl3 MFC set to  0.000000
10/25/2011	8:18:58 PM	PHl3 MFC set to  0.000000
10/25/2011	8:18:58 PM	SiCl4 MFC set to  0.000000
10/25/2011	8:18:58 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	8:18:58 PM	Tube furnace set to 300
10/25/2011	8:19:28 PM	H2 valve closed
10/25/2011	8:19:28 PM	BCl3 valve closed
10/25/2011	8:19:28 PM	PH3 valve closed
10/25/2011	8:19:28 PM	SiCl4 pre valve closed
10/25/2011	8:19:28 PM	SiCl4 post valve closed
10/25/2011	8:19:28 PM	Bypass valve closed
10/25/2011	8:19:28 PM	Bubbler valve closed
10/25/2011	8:19:28 PM	Helium valve opened
10/25/2011	8:19:28 PM	Main Vac valve opened
10/25/2011	8:19:28 PM	Helium MFC set to  20.000000
10/25/2011	8:19:28 PM	H2 MFC set to  0.000000
10/25/2011	8:19:28 PM	BCl3 MFC set to  0.000000
10/25/2011	8:19:28 PM	PHl3 MFC set to  0.000000
10/25/2011	8:19:28 PM	SiCl4 MFC set to  0.000000
10/25/2011	8:19:28 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	8:19:28 PM	Tube furnace set to 300
10/25/2011	8:19:58 PM	Helium valve closed
10/25/2011	8:19:58 PM	H2 valve closed
10/25/2011	8:19:58 PM	BCl3 valve closed
10/25/2011	8:19:58 PM	PH3 valve closed
10/25/2011	8:19:58 PM	SiCl4 pre valve closed
10/25/2011	8:19:58 PM	SiCl4 post valve closed
10/25/2011	8:19:58 PM	Bypass valve closed
10/25/2011	8:19:58 PM	Bubbler valve closed
10/25/2011	8:19:58 PM	Main Vac valve opened
10/25/2011	8:19:58 PM	Helium MFC set to  0.000000
10/25/2011	8:19:58 PM	H2 MFC set to  0.000000
10/25/2011	8:19:58 PM	BCl3 MFC set to  0.000000
10/25/2011	8:19:58 PM	PHl3 MFC set to  0.000000
10/25/2011	8:19:58 PM	SiCl4 MFC set to  0.000000
10/25/2011	8:19:58 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	8:19:59 PM	Tube furnace set to 300
10/25/2011	8:20:29 PM	H2 valve closed
10/25/2011	8:20:29 PM	BCl3 valve closed
10/25/2011	8:20:29 PM	PH3 valve closed
10/25/2011	8:20:29 PM	SiCl4 pre valve closed
10/25/2011	8:20:29 PM	SiCl4 post valve closed
10/25/2011	8:20:29 PM	Bypass valve closed
10/25/2011	8:20:29 PM	Bubbler valve closed
10/25/2011	8:20:29 PM	Helium valve opened
10/25/2011	8:20:29 PM	Main Vac valve opened
10/25/2011	8:20:29 PM	Helium MFC set to  20.000000
10/25/2011	8:20:29 PM	H2 MFC set to  0.000000
10/25/2011	8:20:29 PM	BCl3 MFC set to  0.000000
10/25/2011	8:20:29 PM	PHl3 MFC set to  0.000000
10/25/2011	8:20:29 PM	SiCl4 MFC set to  0.000000
10/25/2011	8:20:29 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	8:20:29 PM	Tube furnace set to 300
10/25/2011	8:20:59 PM	Helium valve closed
10/25/2011	8:20:59 PM	H2 valve closed
10/25/2011	8:20:59 PM	BCl3 valve closed
10/25/2011	8:20:59 PM	PH3 valve closed
10/25/2011	8:20:59 PM	SiCl4 pre valve closed
10/25/2011	8:20:59 PM	SiCl4 post valve closed
10/25/2011	8:20:59 PM	Bypass valve closed
10/25/2011	8:20:59 PM	Bubbler valve closed
10/25/2011	8:20:59 PM	Main Vac valve opened
10/25/2011	8:20:59 PM	Helium MFC set to  0.000000
10/25/2011	8:20:59 PM	H2 MFC set to  0.000000
10/25/2011	8:20:59 PM	BCl3 MFC set to  0.000000
10/25/2011	8:20:59 PM	PHl3 MFC set to  0.000000
10/25/2011	8:20:59 PM	SiCl4 MFC set to  0.000000
10/25/2011	8:20:59 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	8:20:59 PM	Tube furnace set to 300
10/25/2011	8:21:29 PM	H2 valve closed
10/25/2011	8:21:29 PM	BCl3 valve closed
10/25/2011	8:21:29 PM	PH3 valve closed
10/25/2011	8:21:29 PM	SiCl4 pre valve closed
10/25/2011	8:21:29 PM	SiCl4 post valve closed
10/25/2011	8:21:29 PM	Bypass valve closed
10/25/2011	8:21:29 PM	Bubbler valve closed
10/25/2011	8:21:29 PM	Helium valve opened
10/25/2011	8:21:29 PM	Main Vac valve opened
10/25/2011	8:21:29 PM	Helium MFC set to  20.000000
10/25/2011	8:21:29 PM	H2 MFC set to  0.000000
10/25/2011	8:21:29 PM	BCl3 MFC set to  0.000000
10/25/2011	8:21:29 PM	PHl3 MFC set to  0.000000
10/25/2011	8:21:29 PM	SiCl4 MFC set to  0.000000
10/25/2011	8:21:29 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	8:21:29 PM	Tube furnace set to 300
10/25/2011	8:21:59 PM	Helium valve closed
10/25/2011	8:21:59 PM	H2 valve closed
10/25/2011	8:21:59 PM	BCl3 valve closed
10/25/2011	8:21:59 PM	PH3 valve closed
10/25/2011	8:21:59 PM	SiCl4 pre valve closed
10/25/2011	8:21:59 PM	SiCl4 post valve closed
10/25/2011	8:21:59 PM	Bypass valve closed
10/25/2011	8:21:59 PM	Bubbler valve closed
10/25/2011	8:21:59 PM	Main Vac valve opened
10/25/2011	8:21:59 PM	Helium MFC set to  0.000000
10/25/2011	8:21:59 PM	H2 MFC set to  0.000000
10/25/2011	8:21:59 PM	BCl3 MFC set to  0.000000
10/25/2011	8:21:59 PM	PHl3 MFC set to  0.000000
10/25/2011	8:21:59 PM	SiCl4 MFC set to  0.000000
10/25/2011	8:21:59 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	8:21:59 PM	Tube furnace set to 300
10/25/2011	8:22:00 PM	Run finished at 8:22 PM
10/25/2011	8:23:18 PM	Main Vac valve closed
10/25/2011	8:23:37 PM	Main Vac valve opened
10/25/2011	8:27:57 PM	Recipe started at 8:27 PM
10/25/2011	8:27:57 PM	Helium valve closed
10/25/2011	8:27:57 PM	H2 valve closed
10/25/2011	8:27:57 PM	BCl3 valve closed
10/25/2011	8:27:57 PM	PH3 valve closed
10/25/2011	8:27:57 PM	SiCl4 pre valve closed
10/25/2011	8:27:57 PM	SiCl4 post valve closed
10/25/2011	8:27:57 PM	Main Vac valve closed
10/25/2011	8:27:57 PM	Bypass valve closed
10/25/2011	8:27:57 PM	Bubbler valve closed
10/25/2011	8:27:57 PM	Helium MFC set to  0.000000
10/25/2011	8:27:57 PM	H2 MFC set to  0.000000
10/25/2011	8:27:57 PM	BCl3 MFC set to  0.000000
10/25/2011	8:27:57 PM	PHl3 MFC set to  0.000000
10/25/2011	8:27:57 PM	SiCl4 MFC set to  0.000000
10/25/2011	8:27:57 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	8:27:57 PM	Tube furnace set to 0
10/25/2011	8:28:00 PM	Helium valve closed
10/25/2011	8:28:00 PM	BCl3 valve closed
10/25/2011	8:28:00 PM	PH3 valve closed
10/25/2011	8:28:00 PM	SiCl4 pre valve closed
10/25/2011	8:28:00 PM	SiCl4 post valve closed
10/25/2011	8:28:00 PM	Main Vac valve closed
10/25/2011	8:28:00 PM	Bypass valve closed
10/25/2011	8:28:00 PM	Bubbler valve closed
10/25/2011	8:28:00 PM	H2 valve opened
10/25/2011	8:28:00 PM	Helium MFC set to  0.000000
10/25/2011	8:28:00 PM	H2 MFC set to  500.000000
10/25/2011	8:28:00 PM	BCl3 MFC set to  0.000000
10/25/2011	8:28:00 PM	PHl3 MFC set to  0.000000
10/25/2011	8:28:00 PM	SiCl4 MFC set to  0.000000
10/25/2011	8:28:00 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	8:28:01 PM	Tube furnace set to 0
10/25/2011	8:29:01 PM	Helium valve closed
10/25/2011	8:29:01 PM	BCl3 valve closed
10/25/2011	8:29:01 PM	PH3 valve closed
10/25/2011	8:29:01 PM	SiCl4 pre valve closed
10/25/2011	8:29:01 PM	SiCl4 post valve closed
10/25/2011	8:29:01 PM	Main Vac valve closed
10/25/2011	8:29:01 PM	Bypass valve closed
10/25/2011	8:29:01 PM	H2 valve opened
10/25/2011	8:29:01 PM	Bubbler valve opened
10/25/2011	8:29:01 PM	Helium MFC set to  0.000000
10/25/2011	8:29:01 PM	H2 MFC set to  500.000000
10/25/2011	8:29:01 PM	BCl3 MFC set to  0.000000
10/25/2011	8:29:01 PM	PHl3 MFC set to  0.000000
10/25/2011	8:29:01 PM	SiCl4 MFC set to  0.000000
10/25/2011	8:29:01 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	8:29:01 PM	Tube furnace set to 0
10/25/2011	8:29:02 PM	Helium valve closed
10/25/2011	8:29:02 PM	BCl3 valve closed
10/25/2011	8:29:02 PM	PH3 valve closed
10/25/2011	8:29:02 PM	SiCl4 pre valve closed
10/25/2011	8:29:02 PM	SiCl4 post valve closed
10/25/2011	8:29:02 PM	Main Vac valve closed
10/25/2011	8:29:02 PM	Bypass valve closed
10/25/2011	8:29:02 PM	H2 valve opened
10/25/2011	8:29:02 PM	Bubbler valve opened
10/25/2011	8:29:02 PM	Helium MFC set to  0.000000
10/25/2011	8:29:02 PM	H2 MFC set to  500.000000
10/25/2011	8:29:02 PM	BCl3 MFC set to  0.000000
10/25/2011	8:29:02 PM	PHl3 MFC set to  0.000000
10/25/2011	8:29:02 PM	SiCl4 MFC set to  0.000000
10/25/2011	8:29:02 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	8:29:02 PM	Tube furnace set to 1048
10/25/2011	8:59:02 PM	Helium valve closed
10/25/2011	8:59:02 PM	PH3 valve closed
10/25/2011	8:59:02 PM	Main Vac valve closed
10/25/2011	8:59:02 PM	Bypass valve closed
10/25/2011	8:59:02 PM	H2 valve opened
10/25/2011	8:59:02 PM	BCl3 valve opened
10/25/2011	8:59:02 PM	SiCl4 pre valve opened
10/25/2011	8:59:02 PM	SiCl4 post valve opened
10/25/2011	8:59:02 PM	Bubbler valve opened
10/25/2011	8:59:02 PM	Helium MFC set to  0.000000
10/25/2011	8:59:02 PM	H2 MFC set to  500.000000
10/25/2011	8:59:02 PM	BCl3 MFC set to  2.000000
10/25/2011	8:59:02 PM	PHl3 MFC set to  0.000000
10/25/2011	8:59:02 PM	SiCl4 MFC set to  50.000000
10/25/2011	8:59:02 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	8:59:03 PM	Tube furnace set to 1048
10/25/2011	9:24:03 PM	Helium valve closed
10/25/2011	9:24:03 PM	BCl3 valve closed
10/25/2011	9:24:03 PM	PH3 valve closed
10/25/2011	9:24:03 PM	SiCl4 pre valve closed
10/25/2011	9:24:03 PM	SiCl4 post valve closed
10/25/2011	9:24:03 PM	Main Vac valve closed
10/25/2011	9:24:03 PM	Bypass valve closed
10/25/2011	9:24:03 PM	H2 valve opened
10/25/2011	9:24:03 PM	Bubbler valve opened
10/25/2011	9:24:03 PM	Helium MFC set to  0.000000
10/25/2011	9:24:03 PM	H2 MFC set to  500.000000
10/25/2011	9:24:03 PM	BCl3 MFC set to  0.000000
10/25/2011	9:24:03 PM	PHl3 MFC set to  0.000000
10/25/2011	9:24:03 PM	SiCl4 MFC set to  0.000000
10/25/2011	9:24:03 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	9:24:03 PM	Tube furnace set to 750
10/25/2011	9:34:03 PM	H2 valve closed
10/25/2011	9:34:03 PM	BCl3 valve closed
10/25/2011	9:34:03 PM	PH3 valve closed
10/25/2011	9:34:03 PM	SiCl4 pre valve closed
10/25/2011	9:34:03 PM	SiCl4 post valve closed
10/25/2011	9:34:03 PM	Main Vac valve closed
10/25/2011	9:34:03 PM	Bypass valve closed
10/25/2011	9:34:03 PM	Helium valve opened
10/25/2011	9:34:03 PM	Bubbler valve opened
10/25/2011	9:34:03 PM	Helium MFC set to  500.000000
10/25/2011	9:34:03 PM	H2 MFC set to  0.000000
10/25/2011	9:34:03 PM	BCl3 MFC set to  0.000000
10/25/2011	9:34:03 PM	PHl3 MFC set to  0.000000
10/25/2011	9:34:03 PM	SiCl4 MFC set to  0.000000
10/25/2011	9:34:03 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	9:34:03 PM	Tube furnace set to 0
10/25/2011	9:54:03 PM	Helium valve closed
10/25/2011	9:54:03 PM	H2 valve closed
10/25/2011	9:54:03 PM	BCl3 valve closed
10/25/2011	9:54:03 PM	PH3 valve closed
10/25/2011	9:54:03 PM	SiCl4 pre valve closed
10/25/2011	9:54:03 PM	SiCl4 post valve closed
10/25/2011	9:54:03 PM	Main Vac valve closed
10/25/2011	9:54:03 PM	Bypass valve closed
10/25/2011	9:54:03 PM	Bubbler valve closed
10/25/2011	9:54:03 PM	Helium MFC set to  0.000000
10/25/2011	9:54:03 PM	H2 MFC set to  0.000000
10/25/2011	9:54:03 PM	BCl3 MFC set to  0.000000
10/25/2011	9:54:03 PM	PHl3 MFC set to  0.000000
10/25/2011	9:54:03 PM	SiCl4 MFC set to  0.000000
10/25/2011	9:54:03 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	9:54:03 PM	Tube furnace set to 0
10/25/2011	9:54:04 PM	Run finished at 9:54 PM
10/25/2011	9:57:17 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/25/2011	9:57:18 PM	Recipe started at 9:57 PM
10/25/2011	9:57:18 PM	Helium valve closed
10/25/2011	9:57:18 PM	H2 valve closed
10/25/2011	9:57:18 PM	BCl3 valve closed
10/25/2011	9:57:18 PM	PH3 valve closed
10/25/2011	9:57:18 PM	SiCl4 pre valve closed
10/25/2011	9:57:18 PM	SiCl4 post valve closed
10/25/2011	9:57:18 PM	Main Vac valve closed
10/25/2011	9:57:18 PM	Bypass valve closed
10/25/2011	9:57:18 PM	Bubbler valve closed
10/25/2011	9:57:18 PM	Helium MFC set to  0.000000
10/25/2011	9:57:18 PM	H2 MFC set to  0.000000
10/25/2011	9:57:18 PM	BCl3 MFC set to  0.000000
10/25/2011	9:57:18 PM	PHl3 MFC set to  0.000000
10/25/2011	9:57:18 PM	SiCl4 MFC set to  0.000000
10/25/2011	9:57:18 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	9:57:18 PM	Tube furnace set to 0
10/25/2011	9:57:21 PM	H2 valve closed
10/25/2011	9:57:21 PM	BCl3 valve closed
10/25/2011	9:57:21 PM	PH3 valve closed
10/25/2011	9:57:21 PM	SiCl4 pre valve closed
10/25/2011	9:57:21 PM	SiCl4 post valve closed
10/25/2011	9:57:21 PM	Main Vac valve closed
10/25/2011	9:57:21 PM	Bypass valve closed
10/25/2011	9:57:21 PM	Bubbler valve closed
10/25/2011	9:57:21 PM	Helium valve opened
10/25/2011	9:57:21 PM	Helium MFC set to  500.000000
10/25/2011	9:57:21 PM	H2 MFC set to  0.000000
10/25/2011	9:57:21 PM	BCl3 MFC set to  0.000000
10/25/2011	9:57:21 PM	PHl3 MFC set to  0.000000
10/25/2011	9:57:21 PM	SiCl4 MFC set to  0.000000
10/25/2011	9:57:21 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	9:57:21 PM	Tube furnace set to 0
10/25/2011	9:57:22 PM	Helium valve closed
10/25/2011	9:57:22 PM	H2 valve closed
10/25/2011	9:57:22 PM	BCl3 valve closed
10/25/2011	9:57:22 PM	PH3 valve closed
10/25/2011	9:57:22 PM	SiCl4 pre valve closed
10/25/2011	9:57:22 PM	SiCl4 post valve closed
10/25/2011	9:57:22 PM	Main Vac valve closed
10/25/2011	9:57:22 PM	Bypass valve closed
10/25/2011	9:57:22 PM	Bubbler valve closed
10/25/2011	9:57:22 PM	Helium MFC set to  0.000000
10/25/2011	9:57:22 PM	H2 MFC set to  0.000000
10/25/2011	9:57:22 PM	BCl3 MFC set to  0.000000
10/25/2011	9:57:22 PM	PHl3 MFC set to  0.000000
10/25/2011	9:57:22 PM	SiCl4 MFC set to  0.000000
10/25/2011	9:57:22 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	9:57:22 PM	Tube furnace set to 0
10/25/2011	9:57:23 PM	Run finished at 9:57 PM
10/25/2011	9:57:23 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/25/2011	9:59:15 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/25/2011	9:59:16 PM	Recipe started at 9:59 PM
10/25/2011	9:59:16 PM	Helium valve closed
10/25/2011	9:59:16 PM	H2 valve closed
10/25/2011	9:59:16 PM	BCl3 valve closed
10/25/2011	9:59:16 PM	PH3 valve closed
10/25/2011	9:59:16 PM	SiCl4 pre valve closed
10/25/2011	9:59:16 PM	SiCl4 post valve closed
10/25/2011	9:59:16 PM	Main Vac valve closed
10/25/2011	9:59:16 PM	Bypass valve closed
10/25/2011	9:59:16 PM	Bubbler valve closed
10/25/2011	9:59:16 PM	Helium MFC set to  0.000000
10/25/2011	9:59:16 PM	H2 MFC set to  0.000000
10/25/2011	9:59:16 PM	BCl3 MFC set to  0.000000
10/25/2011	9:59:16 PM	PHl3 MFC set to  0.000000
10/25/2011	9:59:16 PM	SiCl4 MFC set to  0.000000
10/25/2011	9:59:16 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	9:59:16 PM	Tube furnace set to 0
10/25/2011	9:59:19 PM	H2 valve closed
10/25/2011	9:59:19 PM	BCl3 valve closed
10/25/2011	9:59:19 PM	PH3 valve closed
10/25/2011	9:59:19 PM	SiCl4 pre valve closed
10/25/2011	9:59:19 PM	SiCl4 post valve closed
10/25/2011	9:59:19 PM	Main Vac valve closed
10/25/2011	9:59:19 PM	Bypass valve closed
10/25/2011	9:59:19 PM	Bubbler valve closed
10/25/2011	9:59:19 PM	Helium valve opened
10/25/2011	9:59:19 PM	Helium MFC set to  500.000000
10/25/2011	9:59:19 PM	H2 MFC set to  0.000000
10/25/2011	9:59:19 PM	BCl3 MFC set to  0.000000
10/25/2011	9:59:19 PM	PHl3 MFC set to  0.000000
10/25/2011	9:59:19 PM	SiCl4 MFC set to  0.000000
10/25/2011	9:59:19 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	9:59:19 PM	Tube furnace set to 0
10/25/2011	9:59:21 PM	Helium valve closed
10/25/2011	9:59:21 PM	H2 valve closed
10/25/2011	9:59:21 PM	BCl3 valve closed
10/25/2011	9:59:21 PM	PH3 valve closed
10/25/2011	9:59:21 PM	SiCl4 pre valve closed
10/25/2011	9:59:21 PM	SiCl4 post valve closed
10/25/2011	9:59:21 PM	Main Vac valve closed
10/25/2011	9:59:21 PM	Bypass valve closed
10/25/2011	9:59:21 PM	Bubbler valve closed
10/25/2011	9:59:21 PM	Helium MFC set to  0.000000
10/25/2011	9:59:21 PM	H2 MFC set to  0.000000
10/25/2011	9:59:21 PM	BCl3 MFC set to  0.000000
10/25/2011	9:59:21 PM	PHl3 MFC set to  0.000000
10/25/2011	9:59:21 PM	SiCl4 MFC set to  0.000000
10/25/2011	9:59:21 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	9:59:21 PM	Tube furnace set to 0
10/25/2011	9:59:22 PM	Run finished at 9:59 PM
10/25/2011	9:59:22 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/25/2011	10:03:49 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/25/2011	10:03:50 PM	Recipe started at 10:03 PM
10/25/2011	10:03:50 PM	Helium valve closed
10/25/2011	10:03:50 PM	H2 valve closed
10/25/2011	10:03:50 PM	BCl3 valve closed
10/25/2011	10:03:50 PM	PH3 valve closed
10/25/2011	10:03:50 PM	SiCl4 pre valve closed
10/25/2011	10:03:50 PM	SiCl4 post valve closed
10/25/2011	10:03:50 PM	Main Vac valve closed
10/25/2011	10:03:50 PM	Bubbler valve closed
10/25/2011	10:03:50 PM	Bypass valve opened
10/25/2011	10:03:50 PM	Helium MFC set to  0.000000
10/25/2011	10:03:50 PM	H2 MFC set to  0.000000
10/25/2011	10:03:50 PM	BCl3 MFC set to  0.000000
10/25/2011	10:03:50 PM	PHl3 MFC set to  0.000000
10/25/2011	10:03:50 PM	SiCl4 MFC set to  0.000000
10/25/2011	10:03:50 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	10:03:50 PM	Tube furnace set to 0
10/25/2011	10:04:51 PM	Helium valve closed
10/25/2011	10:04:51 PM	H2 valve closed
10/25/2011	10:04:51 PM	BCl3 valve closed
10/25/2011	10:04:51 PM	PH3 valve closed
10/25/2011	10:04:51 PM	SiCl4 pre valve closed
10/25/2011	10:04:51 PM	SiCl4 post valve closed
10/25/2011	10:04:51 PM	Main Vac valve closed
10/25/2011	10:04:51 PM	Bubbler valve closed
10/25/2011	10:04:51 PM	Bypass valve opened
10/25/2011	10:04:51 PM	Helium MFC set to  0.000000
10/25/2011	10:04:51 PM	H2 MFC set to  0.000000
10/25/2011	10:04:51 PM	BCl3 MFC set to  0.000000
10/25/2011	10:04:51 PM	PHl3 MFC set to  0.000000
10/25/2011	10:04:51 PM	SiCl4 MFC set to  0.000000
10/25/2011	10:04:51 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	10:04:51 PM	Tube furnace set to 0
10/25/2011	10:05:51 PM	Helium valve closed
10/25/2011	10:05:51 PM	H2 valve closed
10/25/2011	10:05:51 PM	BCl3 valve closed
10/25/2011	10:05:51 PM	PH3 valve closed
10/25/2011	10:05:51 PM	SiCl4 pre valve closed
10/25/2011	10:05:51 PM	SiCl4 post valve closed
10/25/2011	10:05:51 PM	Bypass valve closed
10/25/2011	10:05:51 PM	Bubbler valve closed
10/25/2011	10:05:51 PM	Main Vac valve opened
10/25/2011	10:05:51 PM	Helium MFC set to  0.000000
10/25/2011	10:05:51 PM	H2 MFC set to  0.000000
10/25/2011	10:05:51 PM	BCl3 MFC set to  0.000000
10/25/2011	10:05:51 PM	PHl3 MFC set to  0.000000
10/25/2011	10:05:51 PM	SiCl4 MFC set to  0.000000
10/25/2011	10:05:51 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	10:05:51 PM	Tube furnace set to 0
10/25/2011	10:05:52 PM	Run finished at 10:05 PM
10/25/2011	10:05:52 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/25/2011	10:24:50 PM	Recipe started at 10:24 PM
10/25/2011	10:24:50 PM	Helium valve closed
10/25/2011	10:24:50 PM	H2 valve closed
10/25/2011	10:24:50 PM	BCl3 valve closed
10/25/2011	10:24:50 PM	PH3 valve closed
10/25/2011	10:24:50 PM	SiCl4 pre valve closed
10/25/2011	10:24:50 PM	SiCl4 post valve closed
10/25/2011	10:24:50 PM	Bypass valve closed
10/25/2011	10:24:50 PM	Bubbler valve closed
10/25/2011	10:24:50 PM	Main Vac valve opened
10/25/2011	10:24:50 PM	Helium MFC set to  0.000000
10/25/2011	10:24:50 PM	H2 MFC set to  0.000000
10/25/2011	10:24:50 PM	BCl3 MFC set to  0.000000
10/25/2011	10:24:50 PM	PHl3 MFC set to  0.000000
10/25/2011	10:24:50 PM	SiCl4 MFC set to  0.000000
10/25/2011	10:24:50 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	10:24:51 PM	Tube furnace set to 150
10/25/2011	10:24:55 PM	H2 valve closed
10/25/2011	10:24:55 PM	BCl3 valve closed
10/25/2011	10:24:55 PM	PH3 valve closed
10/25/2011	10:24:55 PM	SiCl4 pre valve closed
10/25/2011	10:24:55 PM	SiCl4 post valve closed
10/25/2011	10:24:55 PM	Bypass valve closed
10/25/2011	10:24:55 PM	Bubbler valve closed
10/25/2011	10:24:55 PM	Helium valve opened
10/25/2011	10:24:55 PM	Main Vac valve opened
10/25/2011	10:24:55 PM	Helium MFC set to  20.000000
10/25/2011	10:24:55 PM	H2 MFC set to  0.000000
10/25/2011	10:24:55 PM	BCl3 MFC set to  0.000000
10/25/2011	10:24:55 PM	PHl3 MFC set to  0.000000
10/25/2011	10:24:55 PM	SiCl4 MFC set to  0.000000
10/25/2011	10:24:55 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	10:24:55 PM	Tube furnace set to 150
10/25/2011	10:25:25 PM	Helium valve closed
10/25/2011	10:25:25 PM	H2 valve closed
10/25/2011	10:25:25 PM	BCl3 valve closed
10/25/2011	10:25:25 PM	PH3 valve closed
10/25/2011	10:25:25 PM	SiCl4 pre valve closed
10/25/2011	10:25:25 PM	SiCl4 post valve closed
10/25/2011	10:25:25 PM	Bypass valve closed
10/25/2011	10:25:25 PM	Bubbler valve closed
10/25/2011	10:25:25 PM	Main Vac valve opened
10/25/2011	10:25:25 PM	Helium MFC set to  0.000000
10/25/2011	10:25:25 PM	H2 MFC set to  0.000000
10/25/2011	10:25:25 PM	BCl3 MFC set to  0.000000
10/25/2011	10:25:25 PM	PHl3 MFC set to  0.000000
10/25/2011	10:25:25 PM	SiCl4 MFC set to  0.000000
10/25/2011	10:25:25 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	10:25:25 PM	Tube furnace set to 150
10/25/2011	10:25:55 PM	H2 valve closed
10/25/2011	10:25:55 PM	BCl3 valve closed
10/25/2011	10:25:55 PM	PH3 valve closed
10/25/2011	10:25:55 PM	SiCl4 pre valve closed
10/25/2011	10:25:55 PM	SiCl4 post valve closed
10/25/2011	10:25:55 PM	Bypass valve closed
10/25/2011	10:25:55 PM	Bubbler valve closed
10/25/2011	10:25:55 PM	Helium valve opened
10/25/2011	10:25:55 PM	Main Vac valve opened
10/25/2011	10:25:55 PM	Helium MFC set to  20.000000
10/25/2011	10:25:55 PM	H2 MFC set to  0.000000
10/25/2011	10:25:55 PM	BCl3 MFC set to  0.000000
10/25/2011	10:25:55 PM	PHl3 MFC set to  0.000000
10/25/2011	10:25:55 PM	SiCl4 MFC set to  0.000000
10/25/2011	10:25:55 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	10:25:55 PM	Tube furnace set to 150
10/25/2011	10:26:25 PM	Helium valve closed
10/25/2011	10:26:25 PM	H2 valve closed
10/25/2011	10:26:25 PM	BCl3 valve closed
10/25/2011	10:26:25 PM	PH3 valve closed
10/25/2011	10:26:25 PM	SiCl4 pre valve closed
10/25/2011	10:26:25 PM	SiCl4 post valve closed
10/25/2011	10:26:25 PM	Bypass valve closed
10/25/2011	10:26:25 PM	Bubbler valve closed
10/25/2011	10:26:25 PM	Main Vac valve opened
10/25/2011	10:26:25 PM	Helium MFC set to  0.000000
10/25/2011	10:26:25 PM	H2 MFC set to  0.000000
10/25/2011	10:26:25 PM	BCl3 MFC set to  0.000000
10/25/2011	10:26:25 PM	PHl3 MFC set to  0.000000
10/25/2011	10:26:25 PM	SiCl4 MFC set to  0.000000
10/25/2011	10:26:25 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	10:26:25 PM	Tube furnace set to 150
10/25/2011	10:26:55 PM	H2 valve closed
10/25/2011	10:26:55 PM	BCl3 valve closed
10/25/2011	10:26:55 PM	PH3 valve closed
10/25/2011	10:26:55 PM	SiCl4 pre valve closed
10/25/2011	10:26:55 PM	SiCl4 post valve closed
10/25/2011	10:26:55 PM	Bypass valve closed
10/25/2011	10:26:55 PM	Bubbler valve closed
10/25/2011	10:26:55 PM	Helium valve opened
10/25/2011	10:26:55 PM	Main Vac valve opened
10/25/2011	10:26:55 PM	Helium MFC set to  20.000000
10/25/2011	10:26:55 PM	H2 MFC set to  0.000000
10/25/2011	10:26:55 PM	BCl3 MFC set to  0.000000
10/25/2011	10:26:55 PM	PHl3 MFC set to  0.000000
10/25/2011	10:26:55 PM	SiCl4 MFC set to  0.000000
10/25/2011	10:26:55 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	10:26:56 PM	Tube furnace set to 150
10/25/2011	10:27:26 PM	Helium valve closed
10/25/2011	10:27:26 PM	H2 valve closed
10/25/2011	10:27:26 PM	BCl3 valve closed
10/25/2011	10:27:26 PM	PH3 valve closed
10/25/2011	10:27:26 PM	SiCl4 pre valve closed
10/25/2011	10:27:26 PM	SiCl4 post valve closed
10/25/2011	10:27:26 PM	Bypass valve closed
10/25/2011	10:27:26 PM	Bubbler valve closed
10/25/2011	10:27:26 PM	Main Vac valve opened
10/25/2011	10:27:26 PM	Helium MFC set to  0.000000
10/25/2011	10:27:26 PM	H2 MFC set to  0.000000
10/25/2011	10:27:26 PM	BCl3 MFC set to  0.000000
10/25/2011	10:27:26 PM	PHl3 MFC set to  0.000000
10/25/2011	10:27:26 PM	SiCl4 MFC set to  0.000000
10/25/2011	10:27:26 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	10:27:26 PM	Tube furnace set to 150
10/25/2011	10:27:56 PM	H2 valve closed
10/25/2011	10:27:56 PM	BCl3 valve closed
10/25/2011	10:27:56 PM	PH3 valve closed
10/25/2011	10:27:56 PM	SiCl4 pre valve closed
10/25/2011	10:27:56 PM	SiCl4 post valve closed
10/25/2011	10:27:56 PM	Bypass valve closed
10/25/2011	10:27:56 PM	Bubbler valve closed
10/25/2011	10:27:56 PM	Helium valve opened
10/25/2011	10:27:56 PM	Main Vac valve opened
10/25/2011	10:27:56 PM	Helium MFC set to  20.000000
10/25/2011	10:27:56 PM	H2 MFC set to  0.000000
10/25/2011	10:27:56 PM	BCl3 MFC set to  0.000000
10/25/2011	10:27:56 PM	PHl3 MFC set to  0.000000
10/25/2011	10:27:56 PM	SiCl4 MFC set to  0.000000
10/25/2011	10:27:56 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	10:27:56 PM	Tube furnace set to 150
10/25/2011	10:28:26 PM	Helium valve closed
10/25/2011	10:28:26 PM	H2 valve closed
10/25/2011	10:28:26 PM	BCl3 valve closed
10/25/2011	10:28:26 PM	PH3 valve closed
10/25/2011	10:28:26 PM	SiCl4 pre valve closed
10/25/2011	10:28:26 PM	SiCl4 post valve closed
10/25/2011	10:28:26 PM	Bypass valve closed
10/25/2011	10:28:26 PM	Bubbler valve closed
10/25/2011	10:28:26 PM	Main Vac valve opened
10/25/2011	10:28:26 PM	Helium MFC set to  0.000000
10/25/2011	10:28:26 PM	H2 MFC set to  0.000000
10/25/2011	10:28:26 PM	BCl3 MFC set to  0.000000
10/25/2011	10:28:26 PM	PHl3 MFC set to  0.000000
10/25/2011	10:28:26 PM	SiCl4 MFC set to  0.000000
10/25/2011	10:28:26 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	10:28:26 PM	Tube furnace set to 150
10/25/2011	10:28:56 PM	H2 valve closed
10/25/2011	10:28:56 PM	BCl3 valve closed
10/25/2011	10:28:56 PM	PH3 valve closed
10/25/2011	10:28:56 PM	SiCl4 pre valve closed
10/25/2011	10:28:56 PM	SiCl4 post valve closed
10/25/2011	10:28:56 PM	Bypass valve closed
10/25/2011	10:28:56 PM	Bubbler valve closed
10/25/2011	10:28:56 PM	Helium valve opened
10/25/2011	10:28:56 PM	Main Vac valve opened
10/25/2011	10:28:56 PM	Helium MFC set to  20.000000
10/25/2011	10:28:56 PM	H2 MFC set to  0.000000
10/25/2011	10:28:56 PM	BCl3 MFC set to  0.000000
10/25/2011	10:28:56 PM	PHl3 MFC set to  0.000000
10/25/2011	10:28:56 PM	SiCl4 MFC set to  0.000000
10/25/2011	10:28:56 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	10:28:56 PM	Tube furnace set to 150
10/25/2011	10:29:26 PM	Helium valve closed
10/25/2011	10:29:26 PM	H2 valve closed
10/25/2011	10:29:26 PM	BCl3 valve closed
10/25/2011	10:29:26 PM	PH3 valve closed
10/25/2011	10:29:26 PM	SiCl4 pre valve closed
10/25/2011	10:29:26 PM	SiCl4 post valve closed
10/25/2011	10:29:26 PM	Bypass valve closed
10/25/2011	10:29:26 PM	Bubbler valve closed
10/25/2011	10:29:26 PM	Main Vac valve opened
10/25/2011	10:29:26 PM	Helium MFC set to  0.000000
10/25/2011	10:29:26 PM	H2 MFC set to  0.000000
10/25/2011	10:29:26 PM	BCl3 MFC set to  0.000000
10/25/2011	10:29:26 PM	PHl3 MFC set to  0.000000
10/25/2011	10:29:26 PM	SiCl4 MFC set to  0.000000
10/25/2011	10:29:26 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	10:29:27 PM	Tube furnace set to 150
10/25/2011	10:29:57 PM	H2 valve closed
10/25/2011	10:29:57 PM	BCl3 valve closed
10/25/2011	10:29:57 PM	PH3 valve closed
10/25/2011	10:29:57 PM	SiCl4 pre valve closed
10/25/2011	10:29:57 PM	SiCl4 post valve closed
10/25/2011	10:29:57 PM	Bypass valve closed
10/25/2011	10:29:57 PM	Bubbler valve closed
10/25/2011	10:29:57 PM	Helium valve opened
10/25/2011	10:29:57 PM	Main Vac valve opened
10/25/2011	10:29:57 PM	Helium MFC set to  20.000000
10/25/2011	10:29:57 PM	H2 MFC set to  0.000000
10/25/2011	10:29:57 PM	BCl3 MFC set to  0.000000
10/25/2011	10:29:57 PM	PHl3 MFC set to  0.000000
10/25/2011	10:29:57 PM	SiCl4 MFC set to  0.000000
10/25/2011	10:29:57 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	10:29:57 PM	Tube furnace set to 150
10/25/2011	10:30:27 PM	Helium valve closed
10/25/2011	10:30:27 PM	H2 valve closed
10/25/2011	10:30:27 PM	BCl3 valve closed
10/25/2011	10:30:27 PM	PH3 valve closed
10/25/2011	10:30:27 PM	SiCl4 pre valve closed
10/25/2011	10:30:27 PM	SiCl4 post valve closed
10/25/2011	10:30:27 PM	Bypass valve closed
10/25/2011	10:30:27 PM	Bubbler valve closed
10/25/2011	10:30:27 PM	Main Vac valve opened
10/25/2011	10:30:27 PM	Helium MFC set to  0.000000
10/25/2011	10:30:27 PM	H2 MFC set to  0.000000
10/25/2011	10:30:27 PM	BCl3 MFC set to  0.000000
10/25/2011	10:30:27 PM	PHl3 MFC set to  0.000000
10/25/2011	10:30:27 PM	SiCl4 MFC set to  0.000000
10/25/2011	10:30:27 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	10:30:27 PM	Tube furnace set to 150
10/25/2011	10:30:57 PM	H2 valve closed
10/25/2011	10:30:57 PM	BCl3 valve closed
10/25/2011	10:30:57 PM	PH3 valve closed
10/25/2011	10:30:57 PM	SiCl4 pre valve closed
10/25/2011	10:30:57 PM	SiCl4 post valve closed
10/25/2011	10:30:57 PM	Bypass valve closed
10/25/2011	10:30:57 PM	Bubbler valve closed
10/25/2011	10:30:57 PM	Helium valve opened
10/25/2011	10:30:57 PM	Main Vac valve opened
10/25/2011	10:30:57 PM	Helium MFC set to  20.000000
10/25/2011	10:30:57 PM	H2 MFC set to  0.000000
10/25/2011	10:30:57 PM	BCl3 MFC set to  0.000000
10/25/2011	10:30:57 PM	PHl3 MFC set to  0.000000
10/25/2011	10:30:57 PM	SiCl4 MFC set to  0.000000
10/25/2011	10:30:57 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	10:30:57 PM	Tube furnace set to 150
10/25/2011	10:31:27 PM	Helium valve closed
10/25/2011	10:31:27 PM	H2 valve closed
10/25/2011	10:31:27 PM	BCl3 valve closed
10/25/2011	10:31:27 PM	PH3 valve closed
10/25/2011	10:31:27 PM	SiCl4 pre valve closed
10/25/2011	10:31:27 PM	SiCl4 post valve closed
10/25/2011	10:31:27 PM	Bypass valve closed
10/25/2011	10:31:27 PM	Bubbler valve closed
10/25/2011	10:31:27 PM	Main Vac valve opened
10/25/2011	10:31:27 PM	Helium MFC set to  0.000000
10/25/2011	10:31:27 PM	H2 MFC set to  0.000000
10/25/2011	10:31:27 PM	BCl3 MFC set to  0.000000
10/25/2011	10:31:27 PM	PHl3 MFC set to  0.000000
10/25/2011	10:31:27 PM	SiCl4 MFC set to  0.000000
10/25/2011	10:31:27 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	10:31:27 PM	Tube furnace set to 150
10/25/2011	10:31:57 PM	H2 valve closed
10/25/2011	10:31:57 PM	BCl3 valve closed
10/25/2011	10:31:57 PM	PH3 valve closed
10/25/2011	10:31:57 PM	SiCl4 pre valve closed
10/25/2011	10:31:57 PM	SiCl4 post valve closed
10/25/2011	10:31:57 PM	Bypass valve closed
10/25/2011	10:31:57 PM	Bubbler valve closed
10/25/2011	10:31:57 PM	Helium valve opened
10/25/2011	10:31:57 PM	Main Vac valve opened
10/25/2011	10:31:57 PM	Helium MFC set to  20.000000
10/25/2011	10:31:57 PM	H2 MFC set to  0.000000
10/25/2011	10:31:57 PM	BCl3 MFC set to  0.000000
10/25/2011	10:31:57 PM	PHl3 MFC set to  0.000000
10/25/2011	10:31:58 PM	SiCl4 MFC set to  0.000000
10/25/2011	10:31:58 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	10:31:58 PM	Tube furnace set to 150
10/25/2011	10:32:28 PM	Helium valve closed
10/25/2011	10:32:28 PM	H2 valve closed
10/25/2011	10:32:28 PM	BCl3 valve closed
10/25/2011	10:32:28 PM	PH3 valve closed
10/25/2011	10:32:28 PM	SiCl4 pre valve closed
10/25/2011	10:32:28 PM	SiCl4 post valve closed
10/25/2011	10:32:28 PM	Bypass valve closed
10/25/2011	10:32:28 PM	Bubbler valve closed
10/25/2011	10:32:28 PM	Main Vac valve opened
10/25/2011	10:32:28 PM	Helium MFC set to  0.000000
10/25/2011	10:32:28 PM	H2 MFC set to  0.000000
10/25/2011	10:32:28 PM	BCl3 MFC set to  0.000000
10/25/2011	10:32:28 PM	PHl3 MFC set to  0.000000
10/25/2011	10:32:28 PM	SiCl4 MFC set to  0.000000
10/25/2011	10:32:28 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	10:32:28 PM	Tube furnace set to 150
10/25/2011	10:32:58 PM	H2 valve closed
10/25/2011	10:32:58 PM	BCl3 valve closed
10/25/2011	10:32:58 PM	PH3 valve closed
10/25/2011	10:32:58 PM	SiCl4 pre valve closed
10/25/2011	10:32:58 PM	SiCl4 post valve closed
10/25/2011	10:32:58 PM	Bypass valve closed
10/25/2011	10:32:58 PM	Bubbler valve closed
10/25/2011	10:32:58 PM	Helium valve opened
10/25/2011	10:32:58 PM	Main Vac valve opened
10/25/2011	10:32:58 PM	Helium MFC set to  20.000000
10/25/2011	10:32:58 PM	H2 MFC set to  0.000000
10/25/2011	10:32:58 PM	BCl3 MFC set to  0.000000
10/25/2011	10:32:58 PM	PHl3 MFC set to  0.000000
10/25/2011	10:32:58 PM	SiCl4 MFC set to  0.000000
10/25/2011	10:32:58 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	10:32:58 PM	Tube furnace set to 150
10/25/2011	10:33:28 PM	Helium valve closed
10/25/2011	10:33:28 PM	H2 valve closed
10/25/2011	10:33:28 PM	BCl3 valve closed
10/25/2011	10:33:28 PM	PH3 valve closed
10/25/2011	10:33:28 PM	SiCl4 pre valve closed
10/25/2011	10:33:28 PM	SiCl4 post valve closed
10/25/2011	10:33:28 PM	Bypass valve closed
10/25/2011	10:33:28 PM	Bubbler valve closed
10/25/2011	10:33:28 PM	Main Vac valve opened
10/25/2011	10:33:28 PM	Helium MFC set to  0.000000
10/25/2011	10:33:28 PM	H2 MFC set to  0.000000
10/25/2011	10:33:28 PM	BCl3 MFC set to  0.000000
10/25/2011	10:33:28 PM	PHl3 MFC set to  0.000000
10/25/2011	10:33:28 PM	SiCl4 MFC set to  0.000000
10/25/2011	10:33:28 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	10:33:28 PM	Tube furnace set to 150
10/25/2011	10:33:58 PM	H2 valve closed
10/25/2011	10:33:58 PM	BCl3 valve closed
10/25/2011	10:33:58 PM	PH3 valve closed
10/25/2011	10:33:58 PM	SiCl4 pre valve closed
10/25/2011	10:33:58 PM	SiCl4 post valve closed
10/25/2011	10:33:58 PM	Bypass valve closed
10/25/2011	10:33:58 PM	Bubbler valve closed
10/25/2011	10:33:58 PM	Helium valve opened
10/25/2011	10:33:58 PM	Main Vac valve opened
10/25/2011	10:33:58 PM	Helium MFC set to  20.000000
10/25/2011	10:33:58 PM	H2 MFC set to  0.000000
10/25/2011	10:33:58 PM	BCl3 MFC set to  0.000000
10/25/2011	10:33:58 PM	PHl3 MFC set to  0.000000
10/25/2011	10:33:58 PM	SiCl4 MFC set to  0.000000
10/25/2011	10:33:58 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	10:33:59 PM	Tube furnace set to 150
10/25/2011	10:34:29 PM	Helium valve closed
10/25/2011	10:34:29 PM	H2 valve closed
10/25/2011	10:34:29 PM	BCl3 valve closed
10/25/2011	10:34:29 PM	PH3 valve closed
10/25/2011	10:34:29 PM	SiCl4 pre valve closed
10/25/2011	10:34:29 PM	SiCl4 post valve closed
10/25/2011	10:34:29 PM	Bypass valve closed
10/25/2011	10:34:29 PM	Bubbler valve closed
10/25/2011	10:34:29 PM	Main Vac valve opened
10/25/2011	10:34:29 PM	Helium MFC set to  0.000000
10/25/2011	10:34:29 PM	H2 MFC set to  0.000000
10/25/2011	10:34:29 PM	BCl3 MFC set to  0.000000
10/25/2011	10:34:29 PM	PHl3 MFC set to  0.000000
10/25/2011	10:34:29 PM	SiCl4 MFC set to  0.000000
10/25/2011	10:34:29 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	10:34:29 PM	Tube furnace set to 150
10/25/2011	10:34:30 PM	Run finished at 10:34 PM
10/25/2011	10:36:02 PM	Recipe started at 10:35 PM
10/25/2011	10:36:02 PM	Helium valve closed
10/25/2011	10:36:02 PM	H2 valve closed
10/25/2011	10:36:02 PM	BCl3 valve closed
10/25/2011	10:36:02 PM	PH3 valve closed
10/25/2011	10:36:02 PM	SiCl4 pre valve closed
10/25/2011	10:36:02 PM	SiCl4 post valve closed
10/25/2011	10:36:02 PM	Bypass valve closed
10/25/2011	10:36:02 PM	Bubbler valve closed
10/25/2011	10:36:02 PM	Main Vac valve opened
10/25/2011	10:36:02 PM	Helium MFC set to  0.000000
10/25/2011	10:36:02 PM	H2 MFC set to  0.000000
10/25/2011	10:36:02 PM	BCl3 MFC set to  0.000000
10/25/2011	10:36:02 PM	PHl3 MFC set to  0.000000
10/25/2011	10:36:02 PM	SiCl4 MFC set to  0.000000
10/25/2011	10:36:02 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	10:36:02 PM	Tube furnace set to 150
10/25/2011	10:36:32 PM	H2 valve closed
10/25/2011	10:36:32 PM	BCl3 valve closed
10/25/2011	10:36:32 PM	PH3 valve closed
10/25/2011	10:36:32 PM	SiCl4 pre valve closed
10/25/2011	10:36:32 PM	SiCl4 post valve closed
10/25/2011	10:36:32 PM	Bypass valve closed
10/25/2011	10:36:32 PM	Bubbler valve closed
10/25/2011	10:36:32 PM	Helium valve opened
10/25/2011	10:36:32 PM	Main Vac valve opened
10/25/2011	10:36:32 PM	Helium MFC set to  20.000000
10/25/2011	10:36:32 PM	H2 MFC set to  0.000000
10/25/2011	10:36:32 PM	BCl3 MFC set to  0.000000
10/25/2011	10:36:32 PM	PHl3 MFC set to  0.000000
10/25/2011	10:36:32 PM	SiCl4 MFC set to  0.000000
10/25/2011	10:36:32 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	10:36:32 PM	Tube furnace set to 150
10/25/2011	10:37:02 PM	Helium valve closed
10/25/2011	10:37:02 PM	H2 valve closed
10/25/2011	10:37:02 PM	BCl3 valve closed
10/25/2011	10:37:02 PM	PH3 valve closed
10/25/2011	10:37:02 PM	SiCl4 pre valve closed
10/25/2011	10:37:02 PM	SiCl4 post valve closed
10/25/2011	10:37:02 PM	Bypass valve closed
10/25/2011	10:37:02 PM	Bubbler valve closed
10/25/2011	10:37:02 PM	Main Vac valve opened
10/25/2011	10:37:02 PM	Helium MFC set to  0.000000
10/25/2011	10:37:02 PM	H2 MFC set to  0.000000
10/25/2011	10:37:02 PM	BCl3 MFC set to  0.000000
10/25/2011	10:37:02 PM	PHl3 MFC set to  0.000000
10/25/2011	10:37:02 PM	SiCl4 MFC set to  0.000000
10/25/2011	10:37:02 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	10:37:02 PM	Tube furnace set to 150
10/25/2011	10:37:32 PM	H2 valve closed
10/25/2011	10:37:32 PM	BCl3 valve closed
10/25/2011	10:37:32 PM	PH3 valve closed
10/25/2011	10:37:32 PM	SiCl4 pre valve closed
10/25/2011	10:37:32 PM	SiCl4 post valve closed
10/25/2011	10:37:32 PM	Bypass valve closed
10/25/2011	10:37:32 PM	Bubbler valve closed
10/25/2011	10:37:32 PM	Helium valve opened
10/25/2011	10:37:32 PM	Main Vac valve opened
10/25/2011	10:37:32 PM	Helium MFC set to  20.000000
10/25/2011	10:37:32 PM	H2 MFC set to  0.000000
10/25/2011	10:37:32 PM	BCl3 MFC set to  0.000000
10/25/2011	10:37:32 PM	PHl3 MFC set to  0.000000
10/25/2011	10:37:32 PM	SiCl4 MFC set to  0.000000
10/25/2011	10:37:32 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	10:37:32 PM	Tube furnace set to 150
10/25/2011	10:38:02 PM	Helium valve closed
10/25/2011	10:38:02 PM	H2 valve closed
10/25/2011	10:38:02 PM	BCl3 valve closed
10/25/2011	10:38:02 PM	PH3 valve closed
10/25/2011	10:38:02 PM	SiCl4 pre valve closed
10/25/2011	10:38:02 PM	SiCl4 post valve closed
10/25/2011	10:38:02 PM	Bypass valve closed
10/25/2011	10:38:02 PM	Bubbler valve closed
10/25/2011	10:38:02 PM	Main Vac valve opened
10/25/2011	10:38:02 PM	Helium MFC set to  0.000000
10/25/2011	10:38:02 PM	H2 MFC set to  0.000000
10/25/2011	10:38:02 PM	BCl3 MFC set to  0.000000
10/25/2011	10:38:02 PM	PHl3 MFC set to  0.000000
10/25/2011	10:38:02 PM	SiCl4 MFC set to  0.000000
10/25/2011	10:38:02 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	10:38:03 PM	Tube furnace set to 150
10/25/2011	10:38:33 PM	H2 valve closed
10/25/2011	10:38:33 PM	BCl3 valve closed
10/25/2011	10:38:33 PM	PH3 valve closed
10/25/2011	10:38:33 PM	SiCl4 pre valve closed
10/25/2011	10:38:33 PM	SiCl4 post valve closed
10/25/2011	10:38:33 PM	Bypass valve closed
10/25/2011	10:38:33 PM	Bubbler valve closed
10/25/2011	10:38:33 PM	Helium valve opened
10/25/2011	10:38:33 PM	Main Vac valve opened
10/25/2011	10:38:33 PM	Helium MFC set to  20.000000
10/25/2011	10:38:33 PM	H2 MFC set to  0.000000
10/25/2011	10:38:33 PM	BCl3 MFC set to  0.000000
10/25/2011	10:38:33 PM	PHl3 MFC set to  0.000000
10/25/2011	10:38:33 PM	SiCl4 MFC set to  0.000000
10/25/2011	10:38:33 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	10:38:33 PM	Tube furnace set to 150
10/25/2011	10:39:03 PM	Helium valve closed
10/25/2011	10:39:03 PM	H2 valve closed
10/25/2011	10:39:03 PM	BCl3 valve closed
10/25/2011	10:39:03 PM	PH3 valve closed
10/25/2011	10:39:03 PM	SiCl4 pre valve closed
10/25/2011	10:39:03 PM	SiCl4 post valve closed
10/25/2011	10:39:03 PM	Bypass valve closed
10/25/2011	10:39:03 PM	Bubbler valve closed
10/25/2011	10:39:03 PM	Main Vac valve opened
10/25/2011	10:39:03 PM	Helium MFC set to  0.000000
10/25/2011	10:39:03 PM	H2 MFC set to  0.000000
10/25/2011	10:39:03 PM	BCl3 MFC set to  0.000000
10/25/2011	10:39:03 PM	PHl3 MFC set to  0.000000
10/25/2011	10:39:03 PM	SiCl4 MFC set to  0.000000
10/25/2011	10:39:03 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	10:39:03 PM	Tube furnace set to 150
10/25/2011	10:39:33 PM	H2 valve closed
10/25/2011	10:39:33 PM	BCl3 valve closed
10/25/2011	10:39:33 PM	PH3 valve closed
10/25/2011	10:39:33 PM	SiCl4 pre valve closed
10/25/2011	10:39:33 PM	SiCl4 post valve closed
10/25/2011	10:39:33 PM	Bypass valve closed
10/25/2011	10:39:33 PM	Bubbler valve closed
10/25/2011	10:39:33 PM	Helium valve opened
10/25/2011	10:39:33 PM	Main Vac valve opened
10/25/2011	10:39:33 PM	Helium MFC set to  20.000000
10/25/2011	10:39:33 PM	H2 MFC set to  0.000000
10/25/2011	10:39:33 PM	BCl3 MFC set to  0.000000
10/25/2011	10:39:33 PM	PHl3 MFC set to  0.000000
10/25/2011	10:39:33 PM	SiCl4 MFC set to  0.000000
10/25/2011	10:39:33 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	10:39:33 PM	Tube furnace set to 150
10/25/2011	10:40:03 PM	Helium valve closed
10/25/2011	10:40:03 PM	H2 valve closed
10/25/2011	10:40:03 PM	BCl3 valve closed
10/25/2011	10:40:03 PM	PH3 valve closed
10/25/2011	10:40:03 PM	SiCl4 pre valve closed
10/25/2011	10:40:03 PM	SiCl4 post valve closed
10/25/2011	10:40:03 PM	Bypass valve closed
10/25/2011	10:40:03 PM	Bubbler valve closed
10/25/2011	10:40:03 PM	Main Vac valve opened
10/25/2011	10:40:03 PM	Helium MFC set to  0.000000
10/25/2011	10:40:03 PM	H2 MFC set to  0.000000
10/25/2011	10:40:03 PM	BCl3 MFC set to  0.000000
10/25/2011	10:40:03 PM	PHl3 MFC set to  0.000000
10/25/2011	10:40:03 PM	SiCl4 MFC set to  0.000000
10/25/2011	10:40:03 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	10:40:03 PM	Tube furnace set to 150
10/25/2011	10:40:33 PM	H2 valve closed
10/25/2011	10:40:33 PM	BCl3 valve closed
10/25/2011	10:40:33 PM	PH3 valve closed
10/25/2011	10:40:33 PM	SiCl4 pre valve closed
10/25/2011	10:40:33 PM	SiCl4 post valve closed
10/25/2011	10:40:33 PM	Bypass valve closed
10/25/2011	10:40:33 PM	Bubbler valve closed
10/25/2011	10:40:33 PM	Helium valve opened
10/25/2011	10:40:33 PM	Main Vac valve opened
10/25/2011	10:40:33 PM	Helium MFC set to  20.000000
10/25/2011	10:40:33 PM	H2 MFC set to  0.000000
10/25/2011	10:40:33 PM	BCl3 MFC set to  0.000000
10/25/2011	10:40:33 PM	PHl3 MFC set to  0.000000
10/25/2011	10:40:33 PM	SiCl4 MFC set to  0.000000
10/25/2011	10:40:33 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	10:40:34 PM	Tube furnace set to 150
10/25/2011	10:41:04 PM	Helium valve closed
10/25/2011	10:41:04 PM	H2 valve closed
10/25/2011	10:41:04 PM	BCl3 valve closed
10/25/2011	10:41:04 PM	PH3 valve closed
10/25/2011	10:41:04 PM	SiCl4 pre valve closed
10/25/2011	10:41:04 PM	SiCl4 post valve closed
10/25/2011	10:41:04 PM	Bypass valve closed
10/25/2011	10:41:04 PM	Bubbler valve closed
10/25/2011	10:41:04 PM	Main Vac valve opened
10/25/2011	10:41:04 PM	Helium MFC set to  0.000000
10/25/2011	10:41:04 PM	H2 MFC set to  0.000000
10/25/2011	10:41:04 PM	BCl3 MFC set to  0.000000
10/25/2011	10:41:04 PM	PHl3 MFC set to  0.000000
10/25/2011	10:41:04 PM	SiCl4 MFC set to  0.000000
10/25/2011	10:41:04 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	10:41:04 PM	Tube furnace set to 150
10/25/2011	10:41:34 PM	H2 valve closed
10/25/2011	10:41:34 PM	BCl3 valve closed
10/25/2011	10:41:34 PM	PH3 valve closed
10/25/2011	10:41:34 PM	SiCl4 pre valve closed
10/25/2011	10:41:34 PM	SiCl4 post valve closed
10/25/2011	10:41:34 PM	Bypass valve closed
10/25/2011	10:41:34 PM	Bubbler valve closed
10/25/2011	10:41:34 PM	Helium valve opened
10/25/2011	10:41:34 PM	Main Vac valve opened
10/25/2011	10:41:34 PM	Helium MFC set to  20.000000
10/25/2011	10:41:34 PM	H2 MFC set to  0.000000
10/25/2011	10:41:34 PM	BCl3 MFC set to  0.000000
10/25/2011	10:41:34 PM	PHl3 MFC set to  0.000000
10/25/2011	10:41:34 PM	SiCl4 MFC set to  0.000000
10/25/2011	10:41:34 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	10:41:34 PM	Tube furnace set to 150
10/25/2011	10:42:04 PM	Helium valve closed
10/25/2011	10:42:04 PM	H2 valve closed
10/25/2011	10:42:04 PM	BCl3 valve closed
10/25/2011	10:42:04 PM	PH3 valve closed
10/25/2011	10:42:04 PM	SiCl4 pre valve closed
10/25/2011	10:42:04 PM	SiCl4 post valve closed
10/25/2011	10:42:04 PM	Bypass valve closed
10/25/2011	10:42:04 PM	Bubbler valve closed
10/25/2011	10:42:04 PM	Main Vac valve opened
10/25/2011	10:42:04 PM	Helium MFC set to  0.000000
10/25/2011	10:42:04 PM	H2 MFC set to  0.000000
10/25/2011	10:42:04 PM	BCl3 MFC set to  0.000000
10/25/2011	10:42:04 PM	PHl3 MFC set to  0.000000
10/25/2011	10:42:04 PM	SiCl4 MFC set to  0.000000
10/25/2011	10:42:04 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	10:42:04 PM	Tube furnace set to 150
10/25/2011	10:42:34 PM	H2 valve closed
10/25/2011	10:42:34 PM	BCl3 valve closed
10/25/2011	10:42:34 PM	PH3 valve closed
10/25/2011	10:42:34 PM	SiCl4 pre valve closed
10/25/2011	10:42:34 PM	SiCl4 post valve closed
10/25/2011	10:42:34 PM	Bypass valve closed
10/25/2011	10:42:34 PM	Bubbler valve closed
10/25/2011	10:42:34 PM	Helium valve opened
10/25/2011	10:42:34 PM	Main Vac valve opened
10/25/2011	10:42:34 PM	Helium MFC set to  20.000000
10/25/2011	10:42:34 PM	H2 MFC set to  0.000000
10/25/2011	10:42:34 PM	BCl3 MFC set to  0.000000
10/25/2011	10:42:34 PM	PHl3 MFC set to  0.000000
10/25/2011	10:42:34 PM	SiCl4 MFC set to  0.000000
10/25/2011	10:42:34 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	10:42:34 PM	Tube furnace set to 150
10/25/2011	10:43:04 PM	Helium valve closed
10/25/2011	10:43:04 PM	H2 valve closed
10/25/2011	10:43:04 PM	BCl3 valve closed
10/25/2011	10:43:04 PM	PH3 valve closed
10/25/2011	10:43:04 PM	SiCl4 pre valve closed
10/25/2011	10:43:04 PM	SiCl4 post valve closed
10/25/2011	10:43:04 PM	Bypass valve closed
10/25/2011	10:43:04 PM	Bubbler valve closed
10/25/2011	10:43:04 PM	Main Vac valve opened
10/25/2011	10:43:04 PM	Helium MFC set to  0.000000
10/25/2011	10:43:04 PM	H2 MFC set to  0.000000
10/25/2011	10:43:04 PM	BCl3 MFC set to  0.000000
10/25/2011	10:43:04 PM	PHl3 MFC set to  0.000000
10/25/2011	10:43:04 PM	SiCl4 MFC set to  0.000000
10/25/2011	10:43:04 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	10:43:05 PM	Tube furnace set to 150
10/25/2011	10:43:35 PM	H2 valve closed
10/25/2011	10:43:35 PM	BCl3 valve closed
10/25/2011	10:43:35 PM	PH3 valve closed
10/25/2011	10:43:35 PM	SiCl4 pre valve closed
10/25/2011	10:43:35 PM	SiCl4 post valve closed
10/25/2011	10:43:35 PM	Bypass valve closed
10/25/2011	10:43:35 PM	Bubbler valve closed
10/25/2011	10:43:35 PM	Helium valve opened
10/25/2011	10:43:35 PM	Main Vac valve opened
10/25/2011	10:43:35 PM	Helium MFC set to  20.000000
10/25/2011	10:43:35 PM	H2 MFC set to  0.000000
10/25/2011	10:43:35 PM	BCl3 MFC set to  0.000000
10/25/2011	10:43:35 PM	PHl3 MFC set to  0.000000
10/25/2011	10:43:35 PM	SiCl4 MFC set to  0.000000
10/25/2011	10:43:35 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	10:43:35 PM	Tube furnace set to 150
10/25/2011	10:44:05 PM	Helium valve closed
10/25/2011	10:44:05 PM	H2 valve closed
10/25/2011	10:44:05 PM	BCl3 valve closed
10/25/2011	10:44:05 PM	PH3 valve closed
10/25/2011	10:44:05 PM	SiCl4 pre valve closed
10/25/2011	10:44:05 PM	SiCl4 post valve closed
10/25/2011	10:44:05 PM	Bypass valve closed
10/25/2011	10:44:05 PM	Bubbler valve closed
10/25/2011	10:44:05 PM	Main Vac valve opened
10/25/2011	10:44:05 PM	Helium MFC set to  0.000000
10/25/2011	10:44:05 PM	H2 MFC set to  0.000000
10/25/2011	10:44:05 PM	BCl3 MFC set to  0.000000
10/25/2011	10:44:05 PM	PHl3 MFC set to  0.000000
10/25/2011	10:44:05 PM	SiCl4 MFC set to  0.000000
10/25/2011	10:44:05 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	10:44:05 PM	Tube furnace set to 150
10/25/2011	10:44:35 PM	H2 valve closed
10/25/2011	10:44:35 PM	BCl3 valve closed
10/25/2011	10:44:35 PM	PH3 valve closed
10/25/2011	10:44:35 PM	SiCl4 pre valve closed
10/25/2011	10:44:35 PM	SiCl4 post valve closed
10/25/2011	10:44:35 PM	Bypass valve closed
10/25/2011	10:44:35 PM	Bubbler valve closed
10/25/2011	10:44:35 PM	Helium valve opened
10/25/2011	10:44:35 PM	Main Vac valve opened
10/25/2011	10:44:35 PM	Helium MFC set to  20.000000
10/25/2011	10:44:35 PM	H2 MFC set to  0.000000
10/25/2011	10:44:35 PM	BCl3 MFC set to  0.000000
10/25/2011	10:44:35 PM	PHl3 MFC set to  0.000000
10/25/2011	10:44:35 PM	SiCl4 MFC set to  0.000000
10/25/2011	10:44:35 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	10:44:35 PM	Tube furnace set to 150
10/25/2011	10:45:05 PM	Helium valve closed
10/25/2011	10:45:05 PM	H2 valve closed
10/25/2011	10:45:05 PM	BCl3 valve closed
10/25/2011	10:45:05 PM	PH3 valve closed
10/25/2011	10:45:05 PM	SiCl4 pre valve closed
10/25/2011	10:45:05 PM	SiCl4 post valve closed
10/25/2011	10:45:05 PM	Bypass valve closed
10/25/2011	10:45:05 PM	Bubbler valve closed
10/25/2011	10:45:05 PM	Main Vac valve opened
10/25/2011	10:45:05 PM	Helium MFC set to  0.000000
10/25/2011	10:45:05 PM	H2 MFC set to  0.000000
10/25/2011	10:45:05 PM	BCl3 MFC set to  0.000000
10/25/2011	10:45:05 PM	PHl3 MFC set to  0.000000
10/25/2011	10:45:05 PM	SiCl4 MFC set to  0.000000
10/25/2011	10:45:05 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	10:45:05 PM	Tube furnace set to 150
10/25/2011	10:45:35 PM	H2 valve closed
10/25/2011	10:45:35 PM	BCl3 valve closed
10/25/2011	10:45:35 PM	PH3 valve closed
10/25/2011	10:45:35 PM	SiCl4 pre valve closed
10/25/2011	10:45:35 PM	SiCl4 post valve closed
10/25/2011	10:45:35 PM	Bypass valve closed
10/25/2011	10:45:35 PM	Bubbler valve closed
10/25/2011	10:45:35 PM	Helium valve opened
10/25/2011	10:45:35 PM	Main Vac valve opened
10/25/2011	10:45:35 PM	Helium MFC set to  20.000000
10/25/2011	10:45:35 PM	H2 MFC set to  0.000000
10/25/2011	10:45:35 PM	BCl3 MFC set to  0.000000
10/25/2011	10:45:35 PM	PHl3 MFC set to  0.000000
10/25/2011	10:45:35 PM	SiCl4 MFC set to  0.000000
10/25/2011	10:45:35 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	10:45:36 PM	Tube furnace set to 150
10/25/2011	10:46:06 PM	Helium valve closed
10/25/2011	10:46:06 PM	H2 valve closed
10/25/2011	10:46:06 PM	BCl3 valve closed
10/25/2011	10:46:06 PM	PH3 valve closed
10/25/2011	10:46:06 PM	SiCl4 pre valve closed
10/25/2011	10:46:06 PM	SiCl4 post valve closed
10/25/2011	10:46:06 PM	Bypass valve closed
10/25/2011	10:46:06 PM	Bubbler valve closed
10/25/2011	10:46:06 PM	Main Vac valve opened
10/25/2011	10:46:06 PM	Helium MFC set to  0.000000
10/25/2011	10:46:06 PM	H2 MFC set to  0.000000
10/25/2011	10:46:06 PM	BCl3 MFC set to  0.000000
10/25/2011	10:46:06 PM	PHl3 MFC set to  0.000000
10/25/2011	10:46:06 PM	SiCl4 MFC set to  0.000000
10/25/2011	10:46:06 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	10:46:06 PM	Tube furnace set to 150
10/25/2011	10:46:07 PM	Run finished at 10:46 PM
10/25/2011	10:47:22 PM	Recipe started at 10:47 PM
10/25/2011	10:47:22 PM	Helium valve closed
10/25/2011	10:47:22 PM	H2 valve closed
10/25/2011	10:47:22 PM	BCl3 valve closed
10/25/2011	10:47:22 PM	PH3 valve closed
10/25/2011	10:47:22 PM	SiCl4 pre valve closed
10/25/2011	10:47:22 PM	SiCl4 post valve closed
10/25/2011	10:47:22 PM	Bypass valve closed
10/25/2011	10:47:22 PM	Bubbler valve closed
10/25/2011	10:47:22 PM	Main Vac valve opened
10/25/2011	10:47:22 PM	Helium MFC set to  0.000000
10/25/2011	10:47:22 PM	H2 MFC set to  0.000000
10/25/2011	10:47:22 PM	BCl3 MFC set to  0.000000
10/25/2011	10:47:22 PM	PHl3 MFC set to  0.000000
10/25/2011	10:47:22 PM	SiCl4 MFC set to  0.000000
10/25/2011	10:47:22 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	10:47:22 PM	Tube furnace set to 150
10/25/2011	10:47:52 PM	H2 valve closed
10/25/2011	10:47:52 PM	BCl3 valve closed
10/25/2011	10:47:52 PM	PH3 valve closed
10/25/2011	10:47:52 PM	SiCl4 pre valve closed
10/25/2011	10:47:52 PM	SiCl4 post valve closed
10/25/2011	10:47:52 PM	Bypass valve closed
10/25/2011	10:47:52 PM	Bubbler valve closed
10/25/2011	10:47:52 PM	Helium valve opened
10/25/2011	10:47:52 PM	Main Vac valve opened
10/25/2011	10:47:52 PM	Helium MFC set to  20.000000
10/25/2011	10:47:52 PM	H2 MFC set to  0.000000
10/25/2011	10:47:52 PM	BCl3 MFC set to  0.000000
10/25/2011	10:47:52 PM	PHl3 MFC set to  0.000000
10/25/2011	10:47:52 PM	SiCl4 MFC set to  0.000000
10/25/2011	10:47:52 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	10:47:52 PM	Tube furnace set to 150
10/25/2011	10:48:22 PM	Helium valve closed
10/25/2011	10:48:22 PM	H2 valve closed
10/25/2011	10:48:22 PM	BCl3 valve closed
10/25/2011	10:48:22 PM	PH3 valve closed
10/25/2011	10:48:22 PM	SiCl4 pre valve closed
10/25/2011	10:48:22 PM	SiCl4 post valve closed
10/25/2011	10:48:22 PM	Bypass valve closed
10/25/2011	10:48:22 PM	Bubbler valve closed
10/25/2011	10:48:22 PM	Main Vac valve opened
10/25/2011	10:48:22 PM	Helium MFC set to  0.000000
10/25/2011	10:48:22 PM	H2 MFC set to  0.000000
10/25/2011	10:48:22 PM	BCl3 MFC set to  0.000000
10/25/2011	10:48:22 PM	PHl3 MFC set to  0.000000
10/25/2011	10:48:22 PM	SiCl4 MFC set to  0.000000
10/25/2011	10:48:22 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	10:48:23 PM	Tube furnace set to 150
10/25/2011	10:48:53 PM	H2 valve closed
10/25/2011	10:48:53 PM	BCl3 valve closed
10/25/2011	10:48:53 PM	PH3 valve closed
10/25/2011	10:48:53 PM	SiCl4 pre valve closed
10/25/2011	10:48:53 PM	SiCl4 post valve closed
10/25/2011	10:48:53 PM	Bypass valve closed
10/25/2011	10:48:53 PM	Bubbler valve closed
10/25/2011	10:48:53 PM	Helium valve opened
10/25/2011	10:48:53 PM	Main Vac valve opened
10/25/2011	10:48:53 PM	Helium MFC set to  20.000000
10/25/2011	10:48:53 PM	H2 MFC set to  0.000000
10/25/2011	10:48:53 PM	BCl3 MFC set to  0.000000
10/25/2011	10:48:53 PM	PHl3 MFC set to  0.000000
10/25/2011	10:48:53 PM	SiCl4 MFC set to  0.000000
10/25/2011	10:48:53 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	10:48:53 PM	Tube furnace set to 150
10/25/2011	10:49:23 PM	Helium valve closed
10/25/2011	10:49:23 PM	H2 valve closed
10/25/2011	10:49:23 PM	BCl3 valve closed
10/25/2011	10:49:23 PM	PH3 valve closed
10/25/2011	10:49:23 PM	SiCl4 pre valve closed
10/25/2011	10:49:23 PM	SiCl4 post valve closed
10/25/2011	10:49:23 PM	Bypass valve closed
10/25/2011	10:49:23 PM	Bubbler valve closed
10/25/2011	10:49:23 PM	Main Vac valve opened
10/25/2011	10:49:23 PM	Helium MFC set to  0.000000
10/25/2011	10:49:23 PM	H2 MFC set to  0.000000
10/25/2011	10:49:23 PM	BCl3 MFC set to  0.000000
10/25/2011	10:49:23 PM	PHl3 MFC set to  0.000000
10/25/2011	10:49:23 PM	SiCl4 MFC set to  0.000000
10/25/2011	10:49:23 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	10:49:23 PM	Tube furnace set to 150
10/25/2011	10:49:53 PM	H2 valve closed
10/25/2011	10:49:53 PM	BCl3 valve closed
10/25/2011	10:49:53 PM	PH3 valve closed
10/25/2011	10:49:53 PM	SiCl4 pre valve closed
10/25/2011	10:49:53 PM	SiCl4 post valve closed
10/25/2011	10:49:53 PM	Bypass valve closed
10/25/2011	10:49:53 PM	Bubbler valve closed
10/25/2011	10:49:53 PM	Helium valve opened
10/25/2011	10:49:53 PM	Main Vac valve opened
10/25/2011	10:49:53 PM	Helium MFC set to  20.000000
10/25/2011	10:49:53 PM	H2 MFC set to  0.000000
10/25/2011	10:49:53 PM	BCl3 MFC set to  0.000000
10/25/2011	10:49:53 PM	PHl3 MFC set to  0.000000
10/25/2011	10:49:53 PM	SiCl4 MFC set to  0.000000
10/25/2011	10:49:53 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	10:49:53 PM	Tube furnace set to 150
10/25/2011	10:50:23 PM	Helium valve closed
10/25/2011	10:50:23 PM	H2 valve closed
10/25/2011	10:50:23 PM	BCl3 valve closed
10/25/2011	10:50:23 PM	PH3 valve closed
10/25/2011	10:50:23 PM	SiCl4 pre valve closed
10/25/2011	10:50:23 PM	SiCl4 post valve closed
10/25/2011	10:50:23 PM	Bypass valve closed
10/25/2011	10:50:23 PM	Bubbler valve closed
10/25/2011	10:50:23 PM	Main Vac valve opened
10/25/2011	10:50:23 PM	Helium MFC set to  0.000000
10/25/2011	10:50:23 PM	H2 MFC set to  0.000000
10/25/2011	10:50:23 PM	BCl3 MFC set to  0.000000
10/25/2011	10:50:23 PM	PHl3 MFC set to  0.000000
10/25/2011	10:50:23 PM	SiCl4 MFC set to  0.000000
10/25/2011	10:50:23 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	10:50:23 PM	Tube furnace set to 150
10/25/2011	10:50:53 PM	H2 valve closed
10/25/2011	10:50:53 PM	BCl3 valve closed
10/25/2011	10:50:53 PM	PH3 valve closed
10/25/2011	10:50:53 PM	SiCl4 pre valve closed
10/25/2011	10:50:53 PM	SiCl4 post valve closed
10/25/2011	10:50:53 PM	Bypass valve closed
10/25/2011	10:50:53 PM	Bubbler valve closed
10/25/2011	10:50:53 PM	Helium valve opened
10/25/2011	10:50:53 PM	Main Vac valve opened
10/25/2011	10:50:53 PM	Helium MFC set to  20.000000
10/25/2011	10:50:53 PM	H2 MFC set to  0.000000
10/25/2011	10:50:53 PM	BCl3 MFC set to  0.000000
10/25/2011	10:50:53 PM	PHl3 MFC set to  0.000000
10/25/2011	10:50:53 PM	SiCl4 MFC set to  0.000000
10/25/2011	10:50:53 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	10:50:54 PM	Tube furnace set to 150
10/25/2011	10:51:24 PM	Helium valve closed
10/25/2011	10:51:24 PM	H2 valve closed
10/25/2011	10:51:24 PM	BCl3 valve closed
10/25/2011	10:51:24 PM	PH3 valve closed
10/25/2011	10:51:24 PM	SiCl4 pre valve closed
10/25/2011	10:51:24 PM	SiCl4 post valve closed
10/25/2011	10:51:24 PM	Bypass valve closed
10/25/2011	10:51:24 PM	Bubbler valve closed
10/25/2011	10:51:24 PM	Main Vac valve opened
10/25/2011	10:51:24 PM	Helium MFC set to  0.000000
10/25/2011	10:51:24 PM	H2 MFC set to  0.000000
10/25/2011	10:51:24 PM	BCl3 MFC set to  0.000000
10/25/2011	10:51:24 PM	PHl3 MFC set to  0.000000
10/25/2011	10:51:24 PM	SiCl4 MFC set to  0.000000
10/25/2011	10:51:24 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	10:51:24 PM	Tube furnace set to 150
10/25/2011	10:51:54 PM	H2 valve closed
10/25/2011	10:51:54 PM	BCl3 valve closed
10/25/2011	10:51:54 PM	PH3 valve closed
10/25/2011	10:51:54 PM	SiCl4 pre valve closed
10/25/2011	10:51:54 PM	SiCl4 post valve closed
10/25/2011	10:51:54 PM	Bypass valve closed
10/25/2011	10:51:54 PM	Bubbler valve closed
10/25/2011	10:51:54 PM	Helium valve opened
10/25/2011	10:51:54 PM	Main Vac valve opened
10/25/2011	10:51:54 PM	Helium MFC set to  20.000000
10/25/2011	10:51:54 PM	H2 MFC set to  0.000000
10/25/2011	10:51:54 PM	BCl3 MFC set to  0.000000
10/25/2011	10:51:54 PM	PHl3 MFC set to  0.000000
10/25/2011	10:51:54 PM	SiCl4 MFC set to  0.000000
10/25/2011	10:51:54 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	10:51:54 PM	Tube furnace set to 150
10/25/2011	10:52:24 PM	Helium valve closed
10/25/2011	10:52:24 PM	H2 valve closed
10/25/2011	10:52:24 PM	BCl3 valve closed
10/25/2011	10:52:24 PM	PH3 valve closed
10/25/2011	10:52:24 PM	SiCl4 pre valve closed
10/25/2011	10:52:24 PM	SiCl4 post valve closed
10/25/2011	10:52:24 PM	Bypass valve closed
10/25/2011	10:52:24 PM	Bubbler valve closed
10/25/2011	10:52:24 PM	Main Vac valve opened
10/25/2011	10:52:24 PM	Helium MFC set to  0.000000
10/25/2011	10:52:24 PM	H2 MFC set to  0.000000
10/25/2011	10:52:24 PM	BCl3 MFC set to  0.000000
10/25/2011	10:52:24 PM	PHl3 MFC set to  0.000000
10/25/2011	10:52:24 PM	SiCl4 MFC set to  0.000000
10/25/2011	10:52:24 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	10:52:24 PM	Tube furnace set to 150
10/25/2011	10:52:54 PM	H2 valve closed
10/25/2011	10:52:54 PM	BCl3 valve closed
10/25/2011	10:52:54 PM	PH3 valve closed
10/25/2011	10:52:54 PM	SiCl4 pre valve closed
10/25/2011	10:52:54 PM	SiCl4 post valve closed
10/25/2011	10:52:54 PM	Bypass valve closed
10/25/2011	10:52:54 PM	Bubbler valve closed
10/25/2011	10:52:54 PM	Helium valve opened
10/25/2011	10:52:54 PM	Main Vac valve opened
10/25/2011	10:52:54 PM	Helium MFC set to  20.000000
10/25/2011	10:52:54 PM	H2 MFC set to  0.000000
10/25/2011	10:52:54 PM	BCl3 MFC set to  0.000000
10/25/2011	10:52:54 PM	PHl3 MFC set to  0.000000
10/25/2011	10:52:54 PM	SiCl4 MFC set to  0.000000
10/25/2011	10:52:54 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	10:52:54 PM	Tube furnace set to 150
10/25/2011	10:53:24 PM	Helium valve closed
10/25/2011	10:53:24 PM	H2 valve closed
10/25/2011	10:53:24 PM	BCl3 valve closed
10/25/2011	10:53:24 PM	PH3 valve closed
10/25/2011	10:53:24 PM	SiCl4 pre valve closed
10/25/2011	10:53:24 PM	SiCl4 post valve closed
10/25/2011	10:53:24 PM	Bypass valve closed
10/25/2011	10:53:24 PM	Bubbler valve closed
10/25/2011	10:53:24 PM	Main Vac valve opened
10/25/2011	10:53:24 PM	Helium MFC set to  0.000000
10/25/2011	10:53:24 PM	H2 MFC set to  0.000000
10/25/2011	10:53:24 PM	BCl3 MFC set to  0.000000
10/25/2011	10:53:24 PM	PHl3 MFC set to  0.000000
10/25/2011	10:53:24 PM	SiCl4 MFC set to  0.000000
10/25/2011	10:53:24 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	10:53:25 PM	Tube furnace set to 150
10/25/2011	10:53:55 PM	H2 valve closed
10/25/2011	10:53:55 PM	BCl3 valve closed
10/25/2011	10:53:55 PM	PH3 valve closed
10/25/2011	10:53:55 PM	SiCl4 pre valve closed
10/25/2011	10:53:55 PM	SiCl4 post valve closed
10/25/2011	10:53:55 PM	Bypass valve closed
10/25/2011	10:53:55 PM	Bubbler valve closed
10/25/2011	10:53:55 PM	Helium valve opened
10/25/2011	10:53:55 PM	Main Vac valve opened
10/25/2011	10:53:55 PM	Helium MFC set to  20.000000
10/25/2011	10:53:55 PM	H2 MFC set to  0.000000
10/25/2011	10:53:55 PM	BCl3 MFC set to  0.000000
10/25/2011	10:53:55 PM	PHl3 MFC set to  0.000000
10/25/2011	10:53:55 PM	SiCl4 MFC set to  0.000000
10/25/2011	10:53:55 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	10:53:55 PM	Tube furnace set to 150
10/25/2011	10:54:25 PM	Helium valve closed
10/25/2011	10:54:25 PM	H2 valve closed
10/25/2011	10:54:25 PM	BCl3 valve closed
10/25/2011	10:54:25 PM	PH3 valve closed
10/25/2011	10:54:25 PM	SiCl4 pre valve closed
10/25/2011	10:54:25 PM	SiCl4 post valve closed
10/25/2011	10:54:25 PM	Bypass valve closed
10/25/2011	10:54:25 PM	Bubbler valve closed
10/25/2011	10:54:25 PM	Main Vac valve opened
10/25/2011	10:54:25 PM	Helium MFC set to  0.000000
10/25/2011	10:54:25 PM	H2 MFC set to  0.000000
10/25/2011	10:54:25 PM	BCl3 MFC set to  0.000000
10/25/2011	10:54:25 PM	PHl3 MFC set to  0.000000
10/25/2011	10:54:25 PM	SiCl4 MFC set to  0.000000
10/25/2011	10:54:25 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	10:54:25 PM	Tube furnace set to 150
10/25/2011	10:54:55 PM	H2 valve closed
10/25/2011	10:54:55 PM	BCl3 valve closed
10/25/2011	10:54:55 PM	PH3 valve closed
10/25/2011	10:54:55 PM	SiCl4 pre valve closed
10/25/2011	10:54:55 PM	SiCl4 post valve closed
10/25/2011	10:54:55 PM	Bypass valve closed
10/25/2011	10:54:55 PM	Bubbler valve closed
10/25/2011	10:54:55 PM	Helium valve opened
10/25/2011	10:54:55 PM	Main Vac valve opened
10/25/2011	10:54:55 PM	Helium MFC set to  20.000000
10/25/2011	10:54:55 PM	H2 MFC set to  0.000000
10/25/2011	10:54:55 PM	BCl3 MFC set to  0.000000
10/25/2011	10:54:55 PM	PHl3 MFC set to  0.000000
10/25/2011	10:54:55 PM	SiCl4 MFC set to  0.000000
10/25/2011	10:54:55 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	10:54:55 PM	Tube furnace set to 150
10/25/2011	10:55:25 PM	Helium valve closed
10/25/2011	10:55:25 PM	H2 valve closed
10/25/2011	10:55:25 PM	BCl3 valve closed
10/25/2011	10:55:25 PM	PH3 valve closed
10/25/2011	10:55:25 PM	SiCl4 pre valve closed
10/25/2011	10:55:25 PM	SiCl4 post valve closed
10/25/2011	10:55:25 PM	Bypass valve closed
10/25/2011	10:55:25 PM	Bubbler valve closed
10/25/2011	10:55:25 PM	Main Vac valve opened
10/25/2011	10:55:25 PM	Helium MFC set to  0.000000
10/25/2011	10:55:25 PM	H2 MFC set to  0.000000
10/25/2011	10:55:25 PM	BCl3 MFC set to  0.000000
10/25/2011	10:55:25 PM	PHl3 MFC set to  0.000000
10/25/2011	10:55:25 PM	SiCl4 MFC set to  0.000000
10/25/2011	10:55:25 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	10:55:25 PM	Tube furnace set to 150
10/25/2011	10:55:55 PM	H2 valve closed
10/25/2011	10:55:55 PM	BCl3 valve closed
10/25/2011	10:55:55 PM	PH3 valve closed
10/25/2011	10:55:55 PM	SiCl4 pre valve closed
10/25/2011	10:55:55 PM	SiCl4 post valve closed
10/25/2011	10:55:55 PM	Bypass valve closed
10/25/2011	10:55:55 PM	Bubbler valve closed
10/25/2011	10:55:55 PM	Helium valve opened
10/25/2011	10:55:55 PM	Main Vac valve opened
10/25/2011	10:55:55 PM	Helium MFC set to  20.000000
10/25/2011	10:55:55 PM	H2 MFC set to  0.000000
10/25/2011	10:55:55 PM	BCl3 MFC set to  0.000000
10/25/2011	10:55:55 PM	PHl3 MFC set to  0.000000
10/25/2011	10:55:55 PM	SiCl4 MFC set to  0.000000
10/25/2011	10:55:55 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	10:55:56 PM	Tube furnace set to 150
10/25/2011	10:56:26 PM	Helium valve closed
10/25/2011	10:56:26 PM	H2 valve closed
10/25/2011	10:56:26 PM	BCl3 valve closed
10/25/2011	10:56:26 PM	PH3 valve closed
10/25/2011	10:56:26 PM	SiCl4 pre valve closed
10/25/2011	10:56:26 PM	SiCl4 post valve closed
10/25/2011	10:56:26 PM	Bypass valve closed
10/25/2011	10:56:26 PM	Bubbler valve closed
10/25/2011	10:56:26 PM	Main Vac valve opened
10/25/2011	10:56:26 PM	Helium MFC set to  0.000000
10/25/2011	10:56:26 PM	H2 MFC set to  0.000000
10/25/2011	10:56:26 PM	BCl3 MFC set to  0.000000
10/25/2011	10:56:26 PM	PHl3 MFC set to  0.000000
10/25/2011	10:56:26 PM	SiCl4 MFC set to  0.000000
10/25/2011	10:56:26 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	10:56:26 PM	Tube furnace set to 150
10/25/2011	10:56:56 PM	H2 valve closed
10/25/2011	10:56:56 PM	BCl3 valve closed
10/25/2011	10:56:56 PM	PH3 valve closed
10/25/2011	10:56:56 PM	SiCl4 pre valve closed
10/25/2011	10:56:56 PM	SiCl4 post valve closed
10/25/2011	10:56:56 PM	Bypass valve closed
10/25/2011	10:56:56 PM	Bubbler valve closed
10/25/2011	10:56:56 PM	Helium valve opened
10/25/2011	10:56:56 PM	Main Vac valve opened
10/25/2011	10:56:56 PM	Helium MFC set to  20.000000
10/25/2011	10:56:56 PM	H2 MFC set to  0.000000
10/25/2011	10:56:56 PM	BCl3 MFC set to  0.000000
10/25/2011	10:56:56 PM	PHl3 MFC set to  0.000000
10/25/2011	10:56:56 PM	SiCl4 MFC set to  0.000000
10/25/2011	10:56:56 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	10:56:56 PM	Tube furnace set to 150
10/25/2011	10:57:26 PM	Helium valve closed
10/25/2011	10:57:26 PM	H2 valve closed
10/25/2011	10:57:26 PM	BCl3 valve closed
10/25/2011	10:57:26 PM	PH3 valve closed
10/25/2011	10:57:26 PM	SiCl4 pre valve closed
10/25/2011	10:57:26 PM	SiCl4 post valve closed
10/25/2011	10:57:26 PM	Bypass valve closed
10/25/2011	10:57:26 PM	Bubbler valve closed
10/25/2011	10:57:26 PM	Main Vac valve opened
10/25/2011	10:57:26 PM	Helium MFC set to  0.000000
10/25/2011	10:57:26 PM	H2 MFC set to  0.000000
10/25/2011	10:57:26 PM	BCl3 MFC set to  0.000000
10/25/2011	10:57:26 PM	PHl3 MFC set to  0.000000
10/25/2011	10:57:26 PM	SiCl4 MFC set to  0.000000
10/25/2011	10:57:26 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	10:57:26 PM	Tube furnace set to 150
10/25/2011	10:57:27 PM	Run finished at 10:57 PM
10/25/2011	10:58:42 PM	Recipe started at 10:58 PM
10/25/2011	10:58:42 PM	Helium valve closed
10/25/2011	10:58:42 PM	H2 valve closed
10/25/2011	10:58:42 PM	BCl3 valve closed
10/25/2011	10:58:42 PM	PH3 valve closed
10/25/2011	10:58:42 PM	SiCl4 pre valve closed
10/25/2011	10:58:42 PM	SiCl4 post valve closed
10/25/2011	10:58:42 PM	Bypass valve closed
10/25/2011	10:58:42 PM	Bubbler valve closed
10/25/2011	10:58:42 PM	Main Vac valve opened
10/25/2011	10:58:42 PM	Helium MFC set to  0.000000
10/25/2011	10:58:42 PM	H2 MFC set to  0.000000
10/25/2011	10:58:42 PM	BCl3 MFC set to  0.000000
10/25/2011	10:58:42 PM	PHl3 MFC set to  0.000000
10/25/2011	10:58:42 PM	SiCl4 MFC set to  0.000000
10/25/2011	10:58:42 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	10:58:43 PM	Tube furnace set to 150
10/25/2011	10:59:13 PM	H2 valve closed
10/25/2011	10:59:13 PM	BCl3 valve closed
10/25/2011	10:59:13 PM	PH3 valve closed
10/25/2011	10:59:13 PM	SiCl4 pre valve closed
10/25/2011	10:59:13 PM	SiCl4 post valve closed
10/25/2011	10:59:13 PM	Bypass valve closed
10/25/2011	10:59:13 PM	Bubbler valve closed
10/25/2011	10:59:13 PM	Helium valve opened
10/25/2011	10:59:13 PM	Main Vac valve opened
10/25/2011	10:59:13 PM	Helium MFC set to  20.000000
10/25/2011	10:59:13 PM	H2 MFC set to  0.000000
10/25/2011	10:59:13 PM	BCl3 MFC set to  0.000000
10/25/2011	10:59:13 PM	PHl3 MFC set to  0.000000
10/25/2011	10:59:13 PM	SiCl4 MFC set to  0.000000
10/25/2011	10:59:13 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	10:59:13 PM	Tube furnace set to 150
10/25/2011	10:59:43 PM	Helium valve closed
10/25/2011	10:59:43 PM	H2 valve closed
10/25/2011	10:59:43 PM	BCl3 valve closed
10/25/2011	10:59:43 PM	PH3 valve closed
10/25/2011	10:59:43 PM	SiCl4 pre valve closed
10/25/2011	10:59:43 PM	SiCl4 post valve closed
10/25/2011	10:59:43 PM	Bypass valve closed
10/25/2011	10:59:43 PM	Bubbler valve closed
10/25/2011	10:59:43 PM	Main Vac valve opened
10/25/2011	10:59:43 PM	Helium MFC set to  0.000000
10/25/2011	10:59:43 PM	H2 MFC set to  0.000000
10/25/2011	10:59:43 PM	BCl3 MFC set to  0.000000
10/25/2011	10:59:43 PM	PHl3 MFC set to  0.000000
10/25/2011	10:59:43 PM	SiCl4 MFC set to  0.000000
10/25/2011	10:59:43 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	10:59:43 PM	Tube furnace set to 150
10/25/2011	11:00:13 PM	H2 valve closed
10/25/2011	11:00:13 PM	BCl3 valve closed
10/25/2011	11:00:13 PM	PH3 valve closed
10/25/2011	11:00:13 PM	SiCl4 pre valve closed
10/25/2011	11:00:13 PM	SiCl4 post valve closed
10/25/2011	11:00:13 PM	Bypass valve closed
10/25/2011	11:00:13 PM	Bubbler valve closed
10/25/2011	11:00:13 PM	Helium valve opened
10/25/2011	11:00:13 PM	Main Vac valve opened
10/25/2011	11:00:13 PM	Helium MFC set to  20.000000
10/25/2011	11:00:13 PM	H2 MFC set to  0.000000
10/25/2011	11:00:13 PM	BCl3 MFC set to  0.000000
10/25/2011	11:00:13 PM	PHl3 MFC set to  0.000000
10/25/2011	11:00:13 PM	SiCl4 MFC set to  0.000000
10/25/2011	11:00:13 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	11:00:13 PM	Tube furnace set to 150
10/25/2011	11:00:43 PM	Helium valve closed
10/25/2011	11:00:43 PM	H2 valve closed
10/25/2011	11:00:43 PM	BCl3 valve closed
10/25/2011	11:00:43 PM	PH3 valve closed
10/25/2011	11:00:43 PM	SiCl4 pre valve closed
10/25/2011	11:00:43 PM	SiCl4 post valve closed
10/25/2011	11:00:43 PM	Bypass valve closed
10/25/2011	11:00:43 PM	Bubbler valve closed
10/25/2011	11:00:43 PM	Main Vac valve opened
10/25/2011	11:00:43 PM	Helium MFC set to  0.000000
10/25/2011	11:00:43 PM	H2 MFC set to  0.000000
10/25/2011	11:00:43 PM	BCl3 MFC set to  0.000000
10/25/2011	11:00:43 PM	PHl3 MFC set to  0.000000
10/25/2011	11:00:43 PM	SiCl4 MFC set to  0.000000
10/25/2011	11:00:43 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	11:00:43 PM	Tube furnace set to 150
10/25/2011	11:01:13 PM	H2 valve closed
10/25/2011	11:01:13 PM	BCl3 valve closed
10/25/2011	11:01:13 PM	PH3 valve closed
10/25/2011	11:01:13 PM	SiCl4 pre valve closed
10/25/2011	11:01:13 PM	SiCl4 post valve closed
10/25/2011	11:01:13 PM	Bypass valve closed
10/25/2011	11:01:13 PM	Bubbler valve closed
10/25/2011	11:01:13 PM	Helium valve opened
10/25/2011	11:01:13 PM	Main Vac valve opened
10/25/2011	11:01:13 PM	Helium MFC set to  20.000000
10/25/2011	11:01:13 PM	H2 MFC set to  0.000000
10/25/2011	11:01:13 PM	BCl3 MFC set to  0.000000
10/25/2011	11:01:13 PM	PHl3 MFC set to  0.000000
10/25/2011	11:01:13 PM	SiCl4 MFC set to  0.000000
10/25/2011	11:01:13 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	11:01:13 PM	Tube furnace set to 150
10/25/2011	11:01:44 PM	Helium valve closed
10/25/2011	11:01:44 PM	H2 valve closed
10/25/2011	11:01:44 PM	BCl3 valve closed
10/25/2011	11:01:44 PM	PH3 valve closed
10/25/2011	11:01:44 PM	SiCl4 pre valve closed
10/25/2011	11:01:44 PM	SiCl4 post valve closed
10/25/2011	11:01:44 PM	Bypass valve closed
10/25/2011	11:01:44 PM	Bubbler valve closed
10/25/2011	11:01:44 PM	Main Vac valve opened
10/25/2011	11:01:44 PM	Helium MFC set to  0.000000
10/25/2011	11:01:44 PM	H2 MFC set to  0.000000
10/25/2011	11:01:44 PM	BCl3 MFC set to  0.000000
10/25/2011	11:01:44 PM	PHl3 MFC set to  0.000000
10/25/2011	11:01:44 PM	SiCl4 MFC set to  0.000000
10/25/2011	11:01:44 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	11:01:44 PM	Tube furnace set to 150
10/25/2011	11:02:14 PM	H2 valve closed
10/25/2011	11:02:14 PM	BCl3 valve closed
10/25/2011	11:02:14 PM	PH3 valve closed
10/25/2011	11:02:14 PM	SiCl4 pre valve closed
10/25/2011	11:02:14 PM	SiCl4 post valve closed
10/25/2011	11:02:14 PM	Bypass valve closed
10/25/2011	11:02:14 PM	Bubbler valve closed
10/25/2011	11:02:14 PM	Helium valve opened
10/25/2011	11:02:14 PM	Main Vac valve opened
10/25/2011	11:02:14 PM	Helium MFC set to  20.000000
10/25/2011	11:02:14 PM	H2 MFC set to  0.000000
10/25/2011	11:02:14 PM	BCl3 MFC set to  0.000000
10/25/2011	11:02:14 PM	PHl3 MFC set to  0.000000
10/25/2011	11:02:14 PM	SiCl4 MFC set to  0.000000
10/25/2011	11:02:14 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	11:02:14 PM	Tube furnace set to 150
10/25/2011	11:02:44 PM	Helium valve closed
10/25/2011	11:02:44 PM	H2 valve closed
10/25/2011	11:02:44 PM	BCl3 valve closed
10/25/2011	11:02:44 PM	PH3 valve closed
10/25/2011	11:02:44 PM	SiCl4 pre valve closed
10/25/2011	11:02:44 PM	SiCl4 post valve closed
10/25/2011	11:02:44 PM	Bypass valve closed
10/25/2011	11:02:44 PM	Bubbler valve closed
10/25/2011	11:02:44 PM	Main Vac valve opened
10/25/2011	11:02:44 PM	Helium MFC set to  0.000000
10/25/2011	11:02:44 PM	H2 MFC set to  0.000000
10/25/2011	11:02:44 PM	BCl3 MFC set to  0.000000
10/25/2011	11:02:44 PM	PHl3 MFC set to  0.000000
10/25/2011	11:02:44 PM	SiCl4 MFC set to  0.000000
10/25/2011	11:02:44 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	11:02:44 PM	Tube furnace set to 150
10/25/2011	11:03:14 PM	H2 valve closed
10/25/2011	11:03:14 PM	BCl3 valve closed
10/25/2011	11:03:14 PM	PH3 valve closed
10/25/2011	11:03:14 PM	SiCl4 pre valve closed
10/25/2011	11:03:14 PM	SiCl4 post valve closed
10/25/2011	11:03:14 PM	Bypass valve closed
10/25/2011	11:03:14 PM	Bubbler valve closed
10/25/2011	11:03:14 PM	Helium valve opened
10/25/2011	11:03:14 PM	Main Vac valve opened
10/25/2011	11:03:14 PM	Helium MFC set to  20.000000
10/25/2011	11:03:14 PM	H2 MFC set to  0.000000
10/25/2011	11:03:14 PM	BCl3 MFC set to  0.000000
10/25/2011	11:03:14 PM	PHl3 MFC set to  0.000000
10/25/2011	11:03:14 PM	SiCl4 MFC set to  0.000000
10/25/2011	11:03:14 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	11:03:14 PM	Tube furnace set to 150
10/25/2011	11:03:44 PM	Helium valve closed
10/25/2011	11:03:44 PM	H2 valve closed
10/25/2011	11:03:44 PM	BCl3 valve closed
10/25/2011	11:03:44 PM	PH3 valve closed
10/25/2011	11:03:44 PM	SiCl4 pre valve closed
10/25/2011	11:03:44 PM	SiCl4 post valve closed
10/25/2011	11:03:44 PM	Bypass valve closed
10/25/2011	11:03:44 PM	Bubbler valve closed
10/25/2011	11:03:44 PM	Main Vac valve opened
10/25/2011	11:03:44 PM	Helium MFC set to  0.000000
10/25/2011	11:03:44 PM	H2 MFC set to  0.000000
10/25/2011	11:03:44 PM	BCl3 MFC set to  0.000000
10/25/2011	11:03:44 PM	PHl3 MFC set to  0.000000
10/25/2011	11:03:44 PM	SiCl4 MFC set to  0.000000
10/25/2011	11:03:44 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	11:03:44 PM	Tube furnace set to 150
10/25/2011	11:04:14 PM	H2 valve closed
10/25/2011	11:04:14 PM	BCl3 valve closed
10/25/2011	11:04:14 PM	PH3 valve closed
10/25/2011	11:04:15 PM	SiCl4 pre valve closed
10/25/2011	11:04:15 PM	SiCl4 post valve closed
10/25/2011	11:04:15 PM	Bypass valve closed
10/25/2011	11:04:15 PM	Bubbler valve closed
10/25/2011	11:04:15 PM	Helium valve opened
10/25/2011	11:04:15 PM	Main Vac valve opened
10/25/2011	11:04:15 PM	Helium MFC set to  20.000000
10/25/2011	11:04:15 PM	H2 MFC set to  0.000000
10/25/2011	11:04:15 PM	BCl3 MFC set to  0.000000
10/25/2011	11:04:15 PM	PHl3 MFC set to  0.000000
10/25/2011	11:04:15 PM	SiCl4 MFC set to  0.000000
10/25/2011	11:04:15 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	11:04:15 PM	Tube furnace set to 150
10/25/2011	11:04:45 PM	Helium valve closed
10/25/2011	11:04:45 PM	H2 valve closed
10/25/2011	11:04:45 PM	BCl3 valve closed
10/25/2011	11:04:45 PM	PH3 valve closed
10/25/2011	11:04:45 PM	SiCl4 pre valve closed
10/25/2011	11:04:45 PM	SiCl4 post valve closed
10/25/2011	11:04:45 PM	Bypass valve closed
10/25/2011	11:04:45 PM	Bubbler valve closed
10/25/2011	11:04:45 PM	Main Vac valve opened
10/25/2011	11:04:45 PM	Helium MFC set to  0.000000
10/25/2011	11:04:45 PM	H2 MFC set to  0.000000
10/25/2011	11:04:45 PM	BCl3 MFC set to  0.000000
10/25/2011	11:04:45 PM	PHl3 MFC set to  0.000000
10/25/2011	11:04:45 PM	SiCl4 MFC set to  0.000000
10/25/2011	11:04:45 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	11:04:45 PM	Tube furnace set to 150
10/25/2011	11:05:15 PM	H2 valve closed
10/25/2011	11:05:15 PM	BCl3 valve closed
10/25/2011	11:05:15 PM	PH3 valve closed
10/25/2011	11:05:15 PM	SiCl4 pre valve closed
10/25/2011	11:05:15 PM	SiCl4 post valve closed
10/25/2011	11:05:15 PM	Bypass valve closed
10/25/2011	11:05:15 PM	Bubbler valve closed
10/25/2011	11:05:15 PM	Helium valve opened
10/25/2011	11:05:15 PM	Main Vac valve opened
10/25/2011	11:05:15 PM	Helium MFC set to  20.000000
10/25/2011	11:05:15 PM	H2 MFC set to  0.000000
10/25/2011	11:05:15 PM	BCl3 MFC set to  0.000000
10/25/2011	11:05:15 PM	PHl3 MFC set to  0.000000
10/25/2011	11:05:15 PM	SiCl4 MFC set to  0.000000
10/25/2011	11:05:15 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	11:05:15 PM	Tube furnace set to 150
10/25/2011	11:05:45 PM	Helium valve closed
10/25/2011	11:05:45 PM	H2 valve closed
10/25/2011	11:05:45 PM	BCl3 valve closed
10/25/2011	11:05:45 PM	PH3 valve closed
10/25/2011	11:05:45 PM	SiCl4 pre valve closed
10/25/2011	11:05:45 PM	SiCl4 post valve closed
10/25/2011	11:05:45 PM	Bypass valve closed
10/25/2011	11:05:45 PM	Bubbler valve closed
10/25/2011	11:05:45 PM	Main Vac valve opened
10/25/2011	11:05:45 PM	Helium MFC set to  0.000000
10/25/2011	11:05:45 PM	H2 MFC set to  0.000000
10/25/2011	11:05:45 PM	BCl3 MFC set to  0.000000
10/25/2011	11:05:45 PM	PHl3 MFC set to  0.000000
10/25/2011	11:05:45 PM	SiCl4 MFC set to  0.000000
10/25/2011	11:05:45 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	11:05:45 PM	Tube furnace set to 150
10/25/2011	11:06:15 PM	H2 valve closed
10/25/2011	11:06:15 PM	BCl3 valve closed
10/25/2011	11:06:15 PM	PH3 valve closed
10/25/2011	11:06:15 PM	SiCl4 pre valve closed
10/25/2011	11:06:15 PM	SiCl4 post valve closed
10/25/2011	11:06:15 PM	Bypass valve closed
10/25/2011	11:06:15 PM	Bubbler valve closed
10/25/2011	11:06:15 PM	Helium valve opened
10/25/2011	11:06:15 PM	Main Vac valve opened
10/25/2011	11:06:15 PM	Helium MFC set to  20.000000
10/25/2011	11:06:15 PM	H2 MFC set to  0.000000
10/25/2011	11:06:15 PM	BCl3 MFC set to  0.000000
10/25/2011	11:06:15 PM	PHl3 MFC set to  0.000000
10/25/2011	11:06:15 PM	SiCl4 MFC set to  0.000000
10/25/2011	11:06:15 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	11:06:15 PM	Tube furnace set to 150
10/25/2011	11:06:45 PM	Helium valve closed
10/25/2011	11:06:45 PM	H2 valve closed
10/25/2011	11:06:45 PM	BCl3 valve closed
10/25/2011	11:06:45 PM	PH3 valve closed
10/25/2011	11:06:45 PM	SiCl4 pre valve closed
10/25/2011	11:06:45 PM	SiCl4 post valve closed
10/25/2011	11:06:45 PM	Bypass valve closed
10/25/2011	11:06:45 PM	Bubbler valve closed
10/25/2011	11:06:45 PM	Main Vac valve opened
10/25/2011	11:06:45 PM	Helium MFC set to  0.000000
10/25/2011	11:06:45 PM	H2 MFC set to  0.000000
10/25/2011	11:06:45 PM	BCl3 MFC set to  0.000000
10/25/2011	11:06:46 PM	PHl3 MFC set to  0.000000
10/25/2011	11:06:46 PM	SiCl4 MFC set to  0.000000
10/25/2011	11:06:46 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	11:06:46 PM	Tube furnace set to 150
10/25/2011	11:07:16 PM	H2 valve closed
10/25/2011	11:07:16 PM	BCl3 valve closed
10/25/2011	11:07:16 PM	PH3 valve closed
10/25/2011	11:07:16 PM	SiCl4 pre valve closed
10/25/2011	11:07:16 PM	SiCl4 post valve closed
10/25/2011	11:07:16 PM	Bypass valve closed
10/25/2011	11:07:16 PM	Bubbler valve closed
10/25/2011	11:07:16 PM	Helium valve opened
10/25/2011	11:07:16 PM	Main Vac valve opened
10/25/2011	11:07:16 PM	Helium MFC set to  20.000000
10/25/2011	11:07:16 PM	H2 MFC set to  0.000000
10/25/2011	11:07:16 PM	BCl3 MFC set to  0.000000
10/25/2011	11:07:16 PM	PHl3 MFC set to  0.000000
10/25/2011	11:07:16 PM	SiCl4 MFC set to  0.000000
10/25/2011	11:07:16 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	11:07:16 PM	Tube furnace set to 150
10/25/2011	11:07:46 PM	Helium valve closed
10/25/2011	11:07:46 PM	H2 valve closed
10/25/2011	11:07:46 PM	BCl3 valve closed
10/25/2011	11:07:46 PM	PH3 valve closed
10/25/2011	11:07:46 PM	SiCl4 pre valve closed
10/25/2011	11:07:46 PM	SiCl4 post valve closed
10/25/2011	11:07:46 PM	Bypass valve closed
10/25/2011	11:07:46 PM	Bubbler valve closed
10/25/2011	11:07:46 PM	Main Vac valve opened
10/25/2011	11:07:46 PM	Helium MFC set to  0.000000
10/25/2011	11:07:46 PM	H2 MFC set to  0.000000
10/25/2011	11:07:46 PM	BCl3 MFC set to  0.000000
10/25/2011	11:07:46 PM	PHl3 MFC set to  0.000000
10/25/2011	11:07:46 PM	SiCl4 MFC set to  0.000000
10/25/2011	11:07:46 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	11:07:46 PM	Tube furnace set to 150
10/25/2011	11:08:16 PM	H2 valve closed
10/25/2011	11:08:16 PM	BCl3 valve closed
10/25/2011	11:08:16 PM	PH3 valve closed
10/25/2011	11:08:16 PM	SiCl4 pre valve closed
10/25/2011	11:08:16 PM	SiCl4 post valve closed
10/25/2011	11:08:16 PM	Bypass valve closed
10/25/2011	11:08:16 PM	Bubbler valve closed
10/25/2011	11:08:16 PM	Helium valve opened
10/25/2011	11:08:16 PM	Main Vac valve opened
10/25/2011	11:08:16 PM	Helium MFC set to  20.000000
10/25/2011	11:08:16 PM	H2 MFC set to  0.000000
10/25/2011	11:08:16 PM	BCl3 MFC set to  0.000000
10/25/2011	11:08:16 PM	PHl3 MFC set to  0.000000
10/25/2011	11:08:16 PM	SiCl4 MFC set to  0.000000
10/25/2011	11:08:16 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	11:08:16 PM	Tube furnace set to 150
10/25/2011	11:08:46 PM	Helium valve closed
10/25/2011	11:08:46 PM	H2 valve closed
10/25/2011	11:08:46 PM	BCl3 valve closed
10/25/2011	11:08:46 PM	PH3 valve closed
10/25/2011	11:08:46 PM	SiCl4 pre valve closed
10/25/2011	11:08:46 PM	SiCl4 post valve closed
10/25/2011	11:08:46 PM	Bypass valve closed
10/25/2011	11:08:46 PM	Bubbler valve closed
10/25/2011	11:08:46 PM	Main Vac valve opened
10/25/2011	11:08:46 PM	Helium MFC set to  0.000000
10/25/2011	11:08:46 PM	H2 MFC set to  0.000000
10/25/2011	11:08:46 PM	BCl3 MFC set to  0.000000
10/25/2011	11:08:46 PM	PHl3 MFC set to  0.000000
10/25/2011	11:08:46 PM	SiCl4 MFC set to  0.000000
10/25/2011	11:08:46 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	11:08:46 PM	Tube furnace set to 150
10/25/2011	11:08:47 PM	Run finished at 11:08 PM
10/25/2011	11:09:46 PM	Recipe started at 11:09 PM
10/25/2011	11:09:46 PM	Helium valve closed
10/25/2011	11:09:46 PM	H2 valve closed
10/25/2011	11:09:46 PM	BCl3 valve closed
10/25/2011	11:09:46 PM	PH3 valve closed
10/25/2011	11:09:46 PM	SiCl4 pre valve closed
10/25/2011	11:09:46 PM	SiCl4 post valve closed
10/25/2011	11:09:46 PM	Bypass valve closed
10/25/2011	11:09:46 PM	Bubbler valve closed
10/25/2011	11:09:46 PM	Main Vac valve opened
10/25/2011	11:09:46 PM	Helium MFC set to  0.000000
10/25/2011	11:09:46 PM	H2 MFC set to  0.000000
10/25/2011	11:09:46 PM	BCl3 MFC set to  0.000000
10/25/2011	11:09:46 PM	PHl3 MFC set to  0.000000
10/25/2011	11:09:46 PM	SiCl4 MFC set to  0.000000
10/25/2011	11:09:46 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	11:09:47 PM	Tube furnace set to 300
10/25/2011	11:10:17 PM	H2 valve closed
10/25/2011	11:10:17 PM	BCl3 valve closed
10/25/2011	11:10:17 PM	PH3 valve closed
10/25/2011	11:10:17 PM	SiCl4 pre valve closed
10/25/2011	11:10:17 PM	SiCl4 post valve closed
10/25/2011	11:10:17 PM	Bypass valve closed
10/25/2011	11:10:17 PM	Bubbler valve closed
10/25/2011	11:10:17 PM	Helium valve opened
10/25/2011	11:10:17 PM	Main Vac valve opened
10/25/2011	11:10:17 PM	Helium MFC set to  20.000000
10/25/2011	11:10:17 PM	H2 MFC set to  0.000000
10/25/2011	11:10:17 PM	BCl3 MFC set to  0.000000
10/25/2011	11:10:17 PM	PHl3 MFC set to  0.000000
10/25/2011	11:10:17 PM	SiCl4 MFC set to  0.000000
10/25/2011	11:10:17 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	11:10:17 PM	Tube furnace set to 300
10/25/2011	11:10:47 PM	Helium valve closed
10/25/2011	11:10:47 PM	H2 valve closed
10/25/2011	11:10:47 PM	BCl3 valve closed
10/25/2011	11:10:47 PM	PH3 valve closed
10/25/2011	11:10:47 PM	SiCl4 pre valve closed
10/25/2011	11:10:47 PM	SiCl4 post valve closed
10/25/2011	11:10:47 PM	Bypass valve closed
10/25/2011	11:10:47 PM	Bubbler valve closed
10/25/2011	11:10:47 PM	Main Vac valve opened
10/25/2011	11:10:47 PM	Helium MFC set to  0.000000
10/25/2011	11:10:47 PM	H2 MFC set to  0.000000
10/25/2011	11:10:47 PM	BCl3 MFC set to  0.000000
10/25/2011	11:10:47 PM	PHl3 MFC set to  0.000000
10/25/2011	11:10:47 PM	SiCl4 MFC set to  0.000000
10/25/2011	11:10:47 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	11:10:47 PM	Tube furnace set to 300
10/25/2011	11:11:17 PM	H2 valve closed
10/25/2011	11:11:17 PM	BCl3 valve closed
10/25/2011	11:11:17 PM	PH3 valve closed
10/25/2011	11:11:17 PM	SiCl4 pre valve closed
10/25/2011	11:11:17 PM	SiCl4 post valve closed
10/25/2011	11:11:17 PM	Bypass valve closed
10/25/2011	11:11:17 PM	Bubbler valve closed
10/25/2011	11:11:17 PM	Helium valve opened
10/25/2011	11:11:17 PM	Main Vac valve opened
10/25/2011	11:11:17 PM	Helium MFC set to  20.000000
10/25/2011	11:11:17 PM	H2 MFC set to  0.000000
10/25/2011	11:11:17 PM	BCl3 MFC set to  0.000000
10/25/2011	11:11:17 PM	PHl3 MFC set to  0.000000
10/25/2011	11:11:17 PM	SiCl4 MFC set to  0.000000
10/25/2011	11:11:17 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	11:11:17 PM	Tube furnace set to 300
10/25/2011	11:11:47 PM	Helium valve closed
10/25/2011	11:11:47 PM	H2 valve closed
10/25/2011	11:11:47 PM	BCl3 valve closed
10/25/2011	11:11:47 PM	PH3 valve closed
10/25/2011	11:11:47 PM	SiCl4 pre valve closed
10/25/2011	11:11:47 PM	SiCl4 post valve closed
10/25/2011	11:11:47 PM	Bypass valve closed
10/25/2011	11:11:47 PM	Bubbler valve closed
10/25/2011	11:11:47 PM	Main Vac valve opened
10/25/2011	11:11:47 PM	Helium MFC set to  0.000000
10/25/2011	11:11:47 PM	H2 MFC set to  0.000000
10/25/2011	11:11:47 PM	BCl3 MFC set to  0.000000
10/25/2011	11:11:47 PM	PHl3 MFC set to  0.000000
10/25/2011	11:11:47 PM	SiCl4 MFC set to  0.000000
10/25/2011	11:11:47 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	11:11:47 PM	Tube furnace set to 300
10/25/2011	11:12:17 PM	H2 valve closed
10/25/2011	11:12:17 PM	BCl3 valve closed
10/25/2011	11:12:17 PM	PH3 valve closed
10/25/2011	11:12:17 PM	SiCl4 pre valve closed
10/25/2011	11:12:17 PM	SiCl4 post valve closed
10/25/2011	11:12:17 PM	Bypass valve closed
10/25/2011	11:12:17 PM	Bubbler valve closed
10/25/2011	11:12:17 PM	Helium valve opened
10/25/2011	11:12:17 PM	Main Vac valve opened
10/25/2011	11:12:17 PM	Helium MFC set to  20.000000
10/25/2011	11:12:17 PM	H2 MFC set to  0.000000
10/25/2011	11:12:17 PM	BCl3 MFC set to  0.000000
10/25/2011	11:12:17 PM	PHl3 MFC set to  0.000000
10/25/2011	11:12:17 PM	SiCl4 MFC set to  0.000000
10/25/2011	11:12:17 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	11:12:18 PM	Tube furnace set to 300
10/25/2011	11:12:48 PM	Helium valve closed
10/25/2011	11:12:48 PM	H2 valve closed
10/25/2011	11:12:48 PM	BCl3 valve closed
10/25/2011	11:12:48 PM	PH3 valve closed
10/25/2011	11:12:48 PM	SiCl4 pre valve closed
10/25/2011	11:12:48 PM	SiCl4 post valve closed
10/25/2011	11:12:48 PM	Bypass valve closed
10/25/2011	11:12:48 PM	Bubbler valve closed
10/25/2011	11:12:48 PM	Main Vac valve opened
10/25/2011	11:12:48 PM	Helium MFC set to  0.000000
10/25/2011	11:12:48 PM	H2 MFC set to  0.000000
10/25/2011	11:12:48 PM	BCl3 MFC set to  0.000000
10/25/2011	11:12:48 PM	PHl3 MFC set to  0.000000
10/25/2011	11:12:48 PM	SiCl4 MFC set to  0.000000
10/25/2011	11:12:48 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	11:12:48 PM	Tube furnace set to 300
10/25/2011	11:13:18 PM	H2 valve closed
10/25/2011	11:13:18 PM	BCl3 valve closed
10/25/2011	11:13:18 PM	PH3 valve closed
10/25/2011	11:13:18 PM	SiCl4 pre valve closed
10/25/2011	11:13:18 PM	SiCl4 post valve closed
10/25/2011	11:13:18 PM	Bypass valve closed
10/25/2011	11:13:18 PM	Bubbler valve closed
10/25/2011	11:13:18 PM	Helium valve opened
10/25/2011	11:13:18 PM	Main Vac valve opened
10/25/2011	11:13:18 PM	Helium MFC set to  20.000000
10/25/2011	11:13:18 PM	H2 MFC set to  0.000000
10/25/2011	11:13:18 PM	BCl3 MFC set to  0.000000
10/25/2011	11:13:18 PM	PHl3 MFC set to  0.000000
10/25/2011	11:13:18 PM	SiCl4 MFC set to  0.000000
10/25/2011	11:13:18 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	11:13:18 PM	Tube furnace set to 300
10/25/2011	11:13:48 PM	Helium valve closed
10/25/2011	11:13:48 PM	H2 valve closed
10/25/2011	11:13:48 PM	BCl3 valve closed
10/25/2011	11:13:48 PM	PH3 valve closed
10/25/2011	11:13:48 PM	SiCl4 pre valve closed
10/25/2011	11:13:48 PM	SiCl4 post valve closed
10/25/2011	11:13:48 PM	Bypass valve closed
10/25/2011	11:13:48 PM	Bubbler valve closed
10/25/2011	11:13:48 PM	Main Vac valve opened
10/25/2011	11:13:48 PM	Helium MFC set to  0.000000
10/25/2011	11:13:48 PM	H2 MFC set to  0.000000
10/25/2011	11:13:48 PM	BCl3 MFC set to  0.000000
10/25/2011	11:13:48 PM	PHl3 MFC set to  0.000000
10/25/2011	11:13:48 PM	SiCl4 MFC set to  0.000000
10/25/2011	11:13:48 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	11:13:48 PM	Tube furnace set to 300
10/25/2011	11:14:18 PM	H2 valve closed
10/25/2011	11:14:18 PM	BCl3 valve closed
10/25/2011	11:14:18 PM	PH3 valve closed
10/25/2011	11:14:18 PM	SiCl4 pre valve closed
10/25/2011	11:14:18 PM	SiCl4 post valve closed
10/25/2011	11:14:18 PM	Bypass valve closed
10/25/2011	11:14:18 PM	Bubbler valve closed
10/25/2011	11:14:18 PM	Helium valve opened
10/25/2011	11:14:18 PM	Main Vac valve opened
10/25/2011	11:14:18 PM	Helium MFC set to  20.000000
10/25/2011	11:14:18 PM	H2 MFC set to  0.000000
10/25/2011	11:14:18 PM	BCl3 MFC set to  0.000000
10/25/2011	11:14:18 PM	PHl3 MFC set to  0.000000
10/25/2011	11:14:18 PM	SiCl4 MFC set to  0.000000
10/25/2011	11:14:18 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	11:14:18 PM	Tube furnace set to 300
10/25/2011	11:14:48 PM	Helium valve closed
10/25/2011	11:14:48 PM	H2 valve closed
10/25/2011	11:14:48 PM	BCl3 valve closed
10/25/2011	11:14:48 PM	PH3 valve closed
10/25/2011	11:14:48 PM	SiCl4 pre valve closed
10/25/2011	11:14:48 PM	SiCl4 post valve closed
10/25/2011	11:14:48 PM	Bypass valve closed
10/25/2011	11:14:48 PM	Bubbler valve closed
10/25/2011	11:14:48 PM	Main Vac valve opened
10/25/2011	11:14:48 PM	Helium MFC set to  0.000000
10/25/2011	11:14:48 PM	H2 MFC set to  0.000000
10/25/2011	11:14:48 PM	BCl3 MFC set to  0.000000
10/25/2011	11:14:48 PM	PHl3 MFC set to  0.000000
10/25/2011	11:14:48 PM	SiCl4 MFC set to  0.000000
10/25/2011	11:14:48 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	11:14:49 PM	Tube furnace set to 300
10/25/2011	11:15:19 PM	H2 valve closed
10/25/2011	11:15:19 PM	BCl3 valve closed
10/25/2011	11:15:19 PM	PH3 valve closed
10/25/2011	11:15:19 PM	SiCl4 pre valve closed
10/25/2011	11:15:19 PM	SiCl4 post valve closed
10/25/2011	11:15:19 PM	Bypass valve closed
10/25/2011	11:15:19 PM	Bubbler valve closed
10/25/2011	11:15:19 PM	Helium valve opened
10/25/2011	11:15:19 PM	Main Vac valve opened
10/25/2011	11:15:19 PM	Helium MFC set to  20.000000
10/25/2011	11:15:19 PM	H2 MFC set to  0.000000
10/25/2011	11:15:19 PM	BCl3 MFC set to  0.000000
10/25/2011	11:15:19 PM	PHl3 MFC set to  0.000000
10/25/2011	11:15:19 PM	SiCl4 MFC set to  0.000000
10/25/2011	11:15:19 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	11:15:19 PM	Tube furnace set to 300
10/25/2011	11:15:49 PM	Helium valve closed
10/25/2011	11:15:49 PM	H2 valve closed
10/25/2011	11:15:49 PM	BCl3 valve closed
10/25/2011	11:15:49 PM	PH3 valve closed
10/25/2011	11:15:49 PM	SiCl4 pre valve closed
10/25/2011	11:15:49 PM	SiCl4 post valve closed
10/25/2011	11:15:49 PM	Bypass valve closed
10/25/2011	11:15:49 PM	Bubbler valve closed
10/25/2011	11:15:49 PM	Main Vac valve opened
10/25/2011	11:15:49 PM	Helium MFC set to  0.000000
10/25/2011	11:15:49 PM	H2 MFC set to  0.000000
10/25/2011	11:15:49 PM	BCl3 MFC set to  0.000000
10/25/2011	11:15:49 PM	PHl3 MFC set to  0.000000
10/25/2011	11:15:49 PM	SiCl4 MFC set to  0.000000
10/25/2011	11:15:49 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	11:15:49 PM	Tube furnace set to 300
10/25/2011	11:16:19 PM	H2 valve closed
10/25/2011	11:16:19 PM	BCl3 valve closed
10/25/2011	11:16:19 PM	PH3 valve closed
10/25/2011	11:16:19 PM	SiCl4 pre valve closed
10/25/2011	11:16:19 PM	SiCl4 post valve closed
10/25/2011	11:16:19 PM	Bypass valve closed
10/25/2011	11:16:19 PM	Bubbler valve closed
10/25/2011	11:16:19 PM	Helium valve opened
10/25/2011	11:16:19 PM	Main Vac valve opened
10/25/2011	11:16:19 PM	Helium MFC set to  20.000000
10/25/2011	11:16:19 PM	H2 MFC set to  0.000000
10/25/2011	11:16:19 PM	BCl3 MFC set to  0.000000
10/25/2011	11:16:19 PM	PHl3 MFC set to  0.000000
10/25/2011	11:16:19 PM	SiCl4 MFC set to  0.000000
10/25/2011	11:16:19 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	11:16:19 PM	Tube furnace set to 300
10/25/2011	11:16:49 PM	Helium valve closed
10/25/2011	11:16:49 PM	H2 valve closed
10/25/2011	11:16:49 PM	BCl3 valve closed
10/25/2011	11:16:49 PM	PH3 valve closed
10/25/2011	11:16:49 PM	SiCl4 pre valve closed
10/25/2011	11:16:49 PM	SiCl4 post valve closed
10/25/2011	11:16:49 PM	Bypass valve closed
10/25/2011	11:16:49 PM	Bubbler valve closed
10/25/2011	11:16:49 PM	Main Vac valve opened
10/25/2011	11:16:49 PM	Helium MFC set to  0.000000
10/25/2011	11:16:49 PM	H2 MFC set to  0.000000
10/25/2011	11:16:49 PM	BCl3 MFC set to  0.000000
10/25/2011	11:16:49 PM	PHl3 MFC set to  0.000000
10/25/2011	11:16:49 PM	SiCl4 MFC set to  0.000000
10/25/2011	11:16:49 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	11:16:49 PM	Tube furnace set to 300
10/25/2011	11:17:19 PM	H2 valve closed
10/25/2011	11:17:19 PM	BCl3 valve closed
10/25/2011	11:17:19 PM	PH3 valve closed
10/25/2011	11:17:19 PM	SiCl4 pre valve closed
10/25/2011	11:17:19 PM	SiCl4 post valve closed
10/25/2011	11:17:19 PM	Bypass valve closed
10/25/2011	11:17:19 PM	Bubbler valve closed
10/25/2011	11:17:19 PM	Helium valve opened
10/25/2011	11:17:19 PM	Main Vac valve opened
10/25/2011	11:17:19 PM	Helium MFC set to  20.000000
10/25/2011	11:17:19 PM	H2 MFC set to  0.000000
10/25/2011	11:17:19 PM	BCl3 MFC set to  0.000000
10/25/2011	11:17:19 PM	PHl3 MFC set to  0.000000
10/25/2011	11:17:19 PM	SiCl4 MFC set to  0.000000
10/25/2011	11:17:19 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	11:17:20 PM	Tube furnace set to 300
10/25/2011	11:17:50 PM	Helium valve closed
10/25/2011	11:17:50 PM	H2 valve closed
10/25/2011	11:17:50 PM	BCl3 valve closed
10/25/2011	11:17:50 PM	PH3 valve closed
10/25/2011	11:17:50 PM	SiCl4 pre valve closed
10/25/2011	11:17:50 PM	SiCl4 post valve closed
10/25/2011	11:17:50 PM	Bypass valve closed
10/25/2011	11:17:50 PM	Bubbler valve closed
10/25/2011	11:17:50 PM	Main Vac valve opened
10/25/2011	11:17:50 PM	Helium MFC set to  0.000000
10/25/2011	11:17:50 PM	H2 MFC set to  0.000000
10/25/2011	11:17:50 PM	BCl3 MFC set to  0.000000
10/25/2011	11:17:50 PM	PHl3 MFC set to  0.000000
10/25/2011	11:17:50 PM	SiCl4 MFC set to  0.000000
10/25/2011	11:17:50 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	11:17:50 PM	Tube furnace set to 300
10/25/2011	11:18:20 PM	H2 valve closed
10/25/2011	11:18:20 PM	BCl3 valve closed
10/25/2011	11:18:20 PM	PH3 valve closed
10/25/2011	11:18:20 PM	SiCl4 pre valve closed
10/25/2011	11:18:20 PM	SiCl4 post valve closed
10/25/2011	11:18:20 PM	Bypass valve closed
10/25/2011	11:18:20 PM	Bubbler valve closed
10/25/2011	11:18:20 PM	Helium valve opened
10/25/2011	11:18:20 PM	Main Vac valve opened
10/25/2011	11:18:20 PM	Helium MFC set to  20.000000
10/25/2011	11:18:20 PM	H2 MFC set to  0.000000
10/25/2011	11:18:20 PM	BCl3 MFC set to  0.000000
10/25/2011	11:18:20 PM	PHl3 MFC set to  0.000000
10/25/2011	11:18:20 PM	SiCl4 MFC set to  0.000000
10/25/2011	11:18:20 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	11:18:20 PM	Tube furnace set to 300
10/25/2011	11:18:50 PM	Helium valve closed
10/25/2011	11:18:50 PM	H2 valve closed
10/25/2011	11:18:50 PM	BCl3 valve closed
10/25/2011	11:18:50 PM	PH3 valve closed
10/25/2011	11:18:50 PM	SiCl4 pre valve closed
10/25/2011	11:18:50 PM	SiCl4 post valve closed
10/25/2011	11:18:50 PM	Bypass valve closed
10/25/2011	11:18:50 PM	Bubbler valve closed
10/25/2011	11:18:50 PM	Main Vac valve opened
10/25/2011	11:18:50 PM	Helium MFC set to  0.000000
10/25/2011	11:18:50 PM	H2 MFC set to  0.000000
10/25/2011	11:18:50 PM	BCl3 MFC set to  0.000000
10/25/2011	11:18:50 PM	PHl3 MFC set to  0.000000
10/25/2011	11:18:50 PM	SiCl4 MFC set to  0.000000
10/25/2011	11:18:50 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	11:18:50 PM	Tube furnace set to 300
10/25/2011	11:19:20 PM	H2 valve closed
10/25/2011	11:19:20 PM	BCl3 valve closed
10/25/2011	11:19:20 PM	PH3 valve closed
10/25/2011	11:19:20 PM	SiCl4 pre valve closed
10/25/2011	11:19:20 PM	SiCl4 post valve closed
10/25/2011	11:19:20 PM	Bypass valve closed
10/25/2011	11:19:20 PM	Bubbler valve closed
10/25/2011	11:19:20 PM	Helium valve opened
10/25/2011	11:19:20 PM	Main Vac valve opened
10/25/2011	11:19:20 PM	Helium MFC set to  20.000000
10/25/2011	11:19:20 PM	H2 MFC set to  0.000000
10/25/2011	11:19:20 PM	BCl3 MFC set to  0.000000
10/25/2011	11:19:20 PM	PHl3 MFC set to  0.000000
10/25/2011	11:19:20 PM	SiCl4 MFC set to  0.000000
10/25/2011	11:19:20 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	11:19:20 PM	Tube furnace set to 300
10/25/2011	11:19:50 PM	Helium valve closed
10/25/2011	11:19:50 PM	H2 valve closed
10/25/2011	11:19:50 PM	BCl3 valve closed
10/25/2011	11:19:50 PM	PH3 valve closed
10/25/2011	11:19:50 PM	SiCl4 pre valve closed
10/25/2011	11:19:50 PM	SiCl4 post valve closed
10/25/2011	11:19:50 PM	Bypass valve closed
10/25/2011	11:19:50 PM	Bubbler valve closed
10/25/2011	11:19:50 PM	Main Vac valve opened
10/25/2011	11:19:50 PM	Helium MFC set to  0.000000
10/25/2011	11:19:50 PM	H2 MFC set to  0.000000
10/25/2011	11:19:50 PM	BCl3 MFC set to  0.000000
10/25/2011	11:19:50 PM	PHl3 MFC set to  0.000000
10/25/2011	11:19:50 PM	SiCl4 MFC set to  0.000000
10/25/2011	11:19:50 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	11:19:51 PM	Tube furnace set to 300
10/25/2011	11:19:52 PM	Run finished at 11:19 PM
10/25/2011	11:21:47 PM	Recipe started at 11:21 PM
10/25/2011	11:21:47 PM	Helium valve closed
10/25/2011	11:21:47 PM	H2 valve closed
10/25/2011	11:21:47 PM	BCl3 valve closed
10/25/2011	11:21:47 PM	PH3 valve closed
10/25/2011	11:21:47 PM	SiCl4 pre valve closed
10/25/2011	11:21:47 PM	SiCl4 post valve closed
10/25/2011	11:21:47 PM	Bypass valve closed
10/25/2011	11:21:47 PM	Bubbler valve closed
10/25/2011	11:21:48 PM	Main Vac valve opened
10/25/2011	11:21:48 PM	Helium MFC set to  0.000000
10/25/2011	11:21:48 PM	H2 MFC set to  0.000000
10/25/2011	11:21:48 PM	BCl3 MFC set to  0.000000
10/25/2011	11:21:48 PM	PHl3 MFC set to  0.000000
10/25/2011	11:21:48 PM	SiCl4 MFC set to  0.000000
10/25/2011	11:21:48 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	11:21:48 PM	Tube furnace set to 300
10/25/2011	11:22:18 PM	H2 valve closed
10/25/2011	11:22:18 PM	BCl3 valve closed
10/25/2011	11:22:18 PM	PH3 valve closed
10/25/2011	11:22:18 PM	SiCl4 pre valve closed
10/25/2011	11:22:18 PM	SiCl4 post valve closed
10/25/2011	11:22:18 PM	Bypass valve closed
10/25/2011	11:22:18 PM	Bubbler valve closed
10/25/2011	11:22:18 PM	Helium valve opened
10/25/2011	11:22:18 PM	Main Vac valve opened
10/25/2011	11:22:18 PM	Helium MFC set to  20.000000
10/25/2011	11:22:18 PM	H2 MFC set to  0.000000
10/25/2011	11:22:18 PM	BCl3 MFC set to  0.000000
10/25/2011	11:22:18 PM	PHl3 MFC set to  0.000000
10/25/2011	11:22:18 PM	SiCl4 MFC set to  0.000000
10/25/2011	11:22:18 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	11:22:18 PM	Tube furnace set to 300
10/25/2011	11:22:48 PM	Helium valve closed
10/25/2011	11:22:48 PM	H2 valve closed
10/25/2011	11:22:48 PM	BCl3 valve closed
10/25/2011	11:22:48 PM	PH3 valve closed
10/25/2011	11:22:48 PM	SiCl4 pre valve closed
10/25/2011	11:22:48 PM	SiCl4 post valve closed
10/25/2011	11:22:48 PM	Bypass valve closed
10/25/2011	11:22:48 PM	Bubbler valve closed
10/25/2011	11:22:48 PM	Main Vac valve opened
10/25/2011	11:22:48 PM	Helium MFC set to  0.000000
10/25/2011	11:22:48 PM	H2 MFC set to  0.000000
10/25/2011	11:22:48 PM	BCl3 MFC set to  0.000000
10/25/2011	11:22:48 PM	PHl3 MFC set to  0.000000
10/25/2011	11:22:48 PM	SiCl4 MFC set to  0.000000
10/25/2011	11:22:48 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	11:22:48 PM	Tube furnace set to 300
10/25/2011	11:23:18 PM	H2 valve closed
10/25/2011	11:23:18 PM	BCl3 valve closed
10/25/2011	11:23:18 PM	PH3 valve closed
10/25/2011	11:23:18 PM	SiCl4 pre valve closed
10/25/2011	11:23:18 PM	SiCl4 post valve closed
10/25/2011	11:23:18 PM	Bypass valve closed
10/25/2011	11:23:18 PM	Bubbler valve closed
10/25/2011	11:23:18 PM	Helium valve opened
10/25/2011	11:23:18 PM	Main Vac valve opened
10/25/2011	11:23:18 PM	Helium MFC set to  20.000000
10/25/2011	11:23:18 PM	H2 MFC set to  0.000000
10/25/2011	11:23:18 PM	BCl3 MFC set to  0.000000
10/25/2011	11:23:18 PM	PHl3 MFC set to  0.000000
10/25/2011	11:23:18 PM	SiCl4 MFC set to  0.000000
10/25/2011	11:23:18 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	11:23:18 PM	Tube furnace set to 300
10/25/2011	11:23:48 PM	Helium valve closed
10/25/2011	11:23:48 PM	H2 valve closed
10/25/2011	11:23:48 PM	BCl3 valve closed
10/25/2011	11:23:48 PM	PH3 valve closed
10/25/2011	11:23:48 PM	SiCl4 pre valve closed
10/25/2011	11:23:48 PM	SiCl4 post valve closed
10/25/2011	11:23:48 PM	Bypass valve closed
10/25/2011	11:23:48 PM	Bubbler valve closed
10/25/2011	11:23:48 PM	Main Vac valve opened
10/25/2011	11:23:48 PM	Helium MFC set to  0.000000
10/25/2011	11:23:48 PM	H2 MFC set to  0.000000
10/25/2011	11:23:48 PM	BCl3 MFC set to  0.000000
10/25/2011	11:23:48 PM	PHl3 MFC set to  0.000000
10/25/2011	11:23:48 PM	SiCl4 MFC set to  0.000000
10/25/2011	11:23:48 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	11:23:48 PM	Tube furnace set to 300
10/25/2011	11:24:18 PM	H2 valve closed
10/25/2011	11:24:18 PM	BCl3 valve closed
10/25/2011	11:24:18 PM	PH3 valve closed
10/25/2011	11:24:18 PM	SiCl4 pre valve closed
10/25/2011	11:24:18 PM	SiCl4 post valve closed
10/25/2011	11:24:18 PM	Bypass valve closed
10/25/2011	11:24:18 PM	Bubbler valve closed
10/25/2011	11:24:18 PM	Helium valve opened
10/25/2011	11:24:18 PM	Main Vac valve opened
10/25/2011	11:24:18 PM	Helium MFC set to  20.000000
10/25/2011	11:24:18 PM	H2 MFC set to  0.000000
10/25/2011	11:24:18 PM	BCl3 MFC set to  0.000000
10/25/2011	11:24:18 PM	PHl3 MFC set to  0.000000
10/25/2011	11:24:18 PM	SiCl4 MFC set to  0.000000
10/25/2011	11:24:18 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	11:24:19 PM	Tube furnace set to 300
10/25/2011	11:24:49 PM	Helium valve closed
10/25/2011	11:24:49 PM	H2 valve closed
10/25/2011	11:24:49 PM	BCl3 valve closed
10/25/2011	11:24:49 PM	PH3 valve closed
10/25/2011	11:24:49 PM	SiCl4 pre valve closed
10/25/2011	11:24:49 PM	SiCl4 post valve closed
10/25/2011	11:24:49 PM	Bypass valve closed
10/25/2011	11:24:49 PM	Bubbler valve closed
10/25/2011	11:24:49 PM	Main Vac valve opened
10/25/2011	11:24:49 PM	Helium MFC set to  0.000000
10/25/2011	11:24:49 PM	H2 MFC set to  0.000000
10/25/2011	11:24:49 PM	BCl3 MFC set to  0.000000
10/25/2011	11:24:49 PM	PHl3 MFC set to  0.000000
10/25/2011	11:24:49 PM	SiCl4 MFC set to  0.000000
10/25/2011	11:24:49 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	11:24:49 PM	Tube furnace set to 300
10/25/2011	11:25:19 PM	H2 valve closed
10/25/2011	11:25:19 PM	BCl3 valve closed
10/25/2011	11:25:19 PM	PH3 valve closed
10/25/2011	11:25:19 PM	SiCl4 pre valve closed
10/25/2011	11:25:19 PM	SiCl4 post valve closed
10/25/2011	11:25:19 PM	Bypass valve closed
10/25/2011	11:25:19 PM	Bubbler valve closed
10/25/2011	11:25:19 PM	Helium valve opened
10/25/2011	11:25:19 PM	Main Vac valve opened
10/25/2011	11:25:19 PM	Helium MFC set to  20.000000
10/25/2011	11:25:19 PM	H2 MFC set to  0.000000
10/25/2011	11:25:19 PM	BCl3 MFC set to  0.000000
10/25/2011	11:25:19 PM	PHl3 MFC set to  0.000000
10/25/2011	11:25:19 PM	SiCl4 MFC set to  0.000000
10/25/2011	11:25:19 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	11:25:19 PM	Tube furnace set to 300
10/25/2011	11:25:49 PM	Helium valve closed
10/25/2011	11:25:49 PM	H2 valve closed
10/25/2011	11:25:49 PM	BCl3 valve closed
10/25/2011	11:25:49 PM	PH3 valve closed
10/25/2011	11:25:49 PM	SiCl4 pre valve closed
10/25/2011	11:25:49 PM	SiCl4 post valve closed
10/25/2011	11:25:49 PM	Bypass valve closed
10/25/2011	11:25:49 PM	Bubbler valve closed
10/25/2011	11:25:49 PM	Main Vac valve opened
10/25/2011	11:25:49 PM	Helium MFC set to  0.000000
10/25/2011	11:25:49 PM	H2 MFC set to  0.000000
10/25/2011	11:25:49 PM	BCl3 MFC set to  0.000000
10/25/2011	11:25:49 PM	PHl3 MFC set to  0.000000
10/25/2011	11:25:49 PM	SiCl4 MFC set to  0.000000
10/25/2011	11:25:49 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	11:25:49 PM	Tube furnace set to 300
10/25/2011	11:26:19 PM	H2 valve closed
10/25/2011	11:26:19 PM	BCl3 valve closed
10/25/2011	11:26:19 PM	PH3 valve closed
10/25/2011	11:26:19 PM	SiCl4 pre valve closed
10/25/2011	11:26:19 PM	SiCl4 post valve closed
10/25/2011	11:26:19 PM	Bypass valve closed
10/25/2011	11:26:19 PM	Bubbler valve closed
10/25/2011	11:26:19 PM	Helium valve opened
10/25/2011	11:26:19 PM	Main Vac valve opened
10/25/2011	11:26:19 PM	Helium MFC set to  20.000000
10/25/2011	11:26:19 PM	H2 MFC set to  0.000000
10/25/2011	11:26:19 PM	BCl3 MFC set to  0.000000
10/25/2011	11:26:19 PM	PHl3 MFC set to  0.000000
10/25/2011	11:26:19 PM	SiCl4 MFC set to  0.000000
10/25/2011	11:26:19 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	11:26:19 PM	Tube furnace set to 300
10/25/2011	11:26:50 PM	Helium valve closed
10/25/2011	11:26:50 PM	H2 valve closed
10/25/2011	11:26:50 PM	BCl3 valve closed
10/25/2011	11:26:50 PM	PH3 valve closed
10/25/2011	11:26:50 PM	SiCl4 pre valve closed
10/25/2011	11:26:50 PM	SiCl4 post valve closed
10/25/2011	11:26:50 PM	Bypass valve closed
10/25/2011	11:26:50 PM	Bubbler valve closed
10/25/2011	11:26:50 PM	Main Vac valve opened
10/25/2011	11:26:50 PM	Helium MFC set to  0.000000
10/25/2011	11:26:50 PM	H2 MFC set to  0.000000
10/25/2011	11:26:50 PM	BCl3 MFC set to  0.000000
10/25/2011	11:26:50 PM	PHl3 MFC set to  0.000000
10/25/2011	11:26:50 PM	SiCl4 MFC set to  0.000000
10/25/2011	11:26:50 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	11:26:50 PM	Tube furnace set to 300
10/25/2011	11:27:20 PM	H2 valve closed
10/25/2011	11:27:20 PM	BCl3 valve closed
10/25/2011	11:27:20 PM	PH3 valve closed
10/25/2011	11:27:20 PM	SiCl4 pre valve closed
10/25/2011	11:27:20 PM	SiCl4 post valve closed
10/25/2011	11:27:20 PM	Bypass valve closed
10/25/2011	11:27:20 PM	Bubbler valve closed
10/25/2011	11:27:20 PM	Helium valve opened
10/25/2011	11:27:20 PM	Main Vac valve opened
10/25/2011	11:27:20 PM	Helium MFC set to  20.000000
10/25/2011	11:27:20 PM	H2 MFC set to  0.000000
10/25/2011	11:27:20 PM	BCl3 MFC set to  0.000000
10/25/2011	11:27:20 PM	PHl3 MFC set to  0.000000
10/25/2011	11:27:20 PM	SiCl4 MFC set to  0.000000
10/25/2011	11:27:20 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	11:27:20 PM	Tube furnace set to 300
10/25/2011	11:27:50 PM	Helium valve closed
10/25/2011	11:27:50 PM	H2 valve closed
10/25/2011	11:27:50 PM	BCl3 valve closed
10/25/2011	11:27:50 PM	PH3 valve closed
10/25/2011	11:27:50 PM	SiCl4 pre valve closed
10/25/2011	11:27:50 PM	SiCl4 post valve closed
10/25/2011	11:27:50 PM	Bypass valve closed
10/25/2011	11:27:50 PM	Bubbler valve closed
10/25/2011	11:27:50 PM	Main Vac valve opened
10/25/2011	11:27:50 PM	Helium MFC set to  0.000000
10/25/2011	11:27:50 PM	H2 MFC set to  0.000000
10/25/2011	11:27:50 PM	BCl3 MFC set to  0.000000
10/25/2011	11:27:50 PM	PHl3 MFC set to  0.000000
10/25/2011	11:27:50 PM	SiCl4 MFC set to  0.000000
10/25/2011	11:27:50 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	11:27:50 PM	Tube furnace set to 300
10/25/2011	11:28:20 PM	H2 valve closed
10/25/2011	11:28:20 PM	BCl3 valve closed
10/25/2011	11:28:20 PM	PH3 valve closed
10/25/2011	11:28:20 PM	SiCl4 pre valve closed
10/25/2011	11:28:20 PM	SiCl4 post valve closed
10/25/2011	11:28:20 PM	Bypass valve closed
10/25/2011	11:28:20 PM	Bubbler valve closed
10/25/2011	11:28:20 PM	Helium valve opened
10/25/2011	11:28:20 PM	Main Vac valve opened
10/25/2011	11:28:20 PM	Helium MFC set to  20.000000
10/25/2011	11:28:20 PM	H2 MFC set to  0.000000
10/25/2011	11:28:20 PM	BCl3 MFC set to  0.000000
10/25/2011	11:28:20 PM	PHl3 MFC set to  0.000000
10/25/2011	11:28:20 PM	SiCl4 MFC set to  0.000000
10/25/2011	11:28:20 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	11:28:20 PM	Tube furnace set to 300
10/25/2011	11:28:50 PM	Helium valve closed
10/25/2011	11:28:50 PM	H2 valve closed
10/25/2011	11:28:50 PM	BCl3 valve closed
10/25/2011	11:28:50 PM	PH3 valve closed
10/25/2011	11:28:50 PM	SiCl4 pre valve closed
10/25/2011	11:28:50 PM	SiCl4 post valve closed
10/25/2011	11:28:50 PM	Bypass valve closed
10/25/2011	11:28:50 PM	Bubbler valve closed
10/25/2011	11:28:50 PM	Main Vac valve opened
10/25/2011	11:28:50 PM	Helium MFC set to  0.000000
10/25/2011	11:28:50 PM	H2 MFC set to  0.000000
10/25/2011	11:28:50 PM	BCl3 MFC set to  0.000000
10/25/2011	11:28:50 PM	PHl3 MFC set to  0.000000
10/25/2011	11:28:50 PM	SiCl4 MFC set to  0.000000
10/25/2011	11:28:50 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	11:28:51 PM	Tube furnace set to 300
10/25/2011	11:29:21 PM	H2 valve closed
10/25/2011	11:29:21 PM	BCl3 valve closed
10/25/2011	11:29:21 PM	PH3 valve closed
10/25/2011	11:29:21 PM	SiCl4 pre valve closed
10/25/2011	11:29:21 PM	SiCl4 post valve closed
10/25/2011	11:29:21 PM	Bypass valve closed
10/25/2011	11:29:21 PM	Bubbler valve closed
10/25/2011	11:29:21 PM	Helium valve opened
10/25/2011	11:29:21 PM	Main Vac valve opened
10/25/2011	11:29:21 PM	Helium MFC set to  20.000000
10/25/2011	11:29:21 PM	H2 MFC set to  0.000000
10/25/2011	11:29:21 PM	BCl3 MFC set to  0.000000
10/25/2011	11:29:21 PM	PHl3 MFC set to  0.000000
10/25/2011	11:29:21 PM	SiCl4 MFC set to  0.000000
10/25/2011	11:29:21 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	11:29:21 PM	Tube furnace set to 300
10/25/2011	11:29:51 PM	Helium valve closed
10/25/2011	11:29:51 PM	H2 valve closed
10/25/2011	11:29:51 PM	BCl3 valve closed
10/25/2011	11:29:51 PM	PH3 valve closed
10/25/2011	11:29:51 PM	SiCl4 pre valve closed
10/25/2011	11:29:51 PM	SiCl4 post valve closed
10/25/2011	11:29:51 PM	Bypass valve closed
10/25/2011	11:29:51 PM	Bubbler valve closed
10/25/2011	11:29:51 PM	Main Vac valve opened
10/25/2011	11:29:51 PM	Helium MFC set to  0.000000
10/25/2011	11:29:51 PM	H2 MFC set to  0.000000
10/25/2011	11:29:51 PM	BCl3 MFC set to  0.000000
10/25/2011	11:29:51 PM	PHl3 MFC set to  0.000000
10/25/2011	11:29:51 PM	SiCl4 MFC set to  0.000000
10/25/2011	11:29:51 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	11:29:51 PM	Tube furnace set to 300
10/25/2011	11:30:21 PM	H2 valve closed
10/25/2011	11:30:21 PM	BCl3 valve closed
10/25/2011	11:30:21 PM	PH3 valve closed
10/25/2011	11:30:21 PM	SiCl4 pre valve closed
10/25/2011	11:30:21 PM	SiCl4 post valve closed
10/25/2011	11:30:21 PM	Bypass valve closed
10/25/2011	11:30:21 PM	Bubbler valve closed
10/25/2011	11:30:21 PM	Helium valve opened
10/25/2011	11:30:21 PM	Main Vac valve opened
10/25/2011	11:30:21 PM	Helium MFC set to  20.000000
10/25/2011	11:30:21 PM	H2 MFC set to  0.000000
10/25/2011	11:30:21 PM	BCl3 MFC set to  0.000000
10/25/2011	11:30:21 PM	PHl3 MFC set to  0.000000
10/25/2011	11:30:21 PM	SiCl4 MFC set to  0.000000
10/25/2011	11:30:21 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	11:30:21 PM	Tube furnace set to 300
10/25/2011	11:30:51 PM	Helium valve closed
10/25/2011	11:30:51 PM	H2 valve closed
10/25/2011	11:30:51 PM	BCl3 valve closed
10/25/2011	11:30:51 PM	PH3 valve closed
10/25/2011	11:30:51 PM	SiCl4 pre valve closed
10/25/2011	11:30:51 PM	SiCl4 post valve closed
10/25/2011	11:30:51 PM	Bypass valve closed
10/25/2011	11:30:51 PM	Bubbler valve closed
10/25/2011	11:30:51 PM	Main Vac valve opened
10/25/2011	11:30:51 PM	Helium MFC set to  0.000000
10/25/2011	11:30:51 PM	H2 MFC set to  0.000000
10/25/2011	11:30:51 PM	BCl3 MFC set to  0.000000
10/25/2011	11:30:51 PM	PHl3 MFC set to  0.000000
10/25/2011	11:30:51 PM	SiCl4 MFC set to  0.000000
10/25/2011	11:30:51 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	11:30:51 PM	Tube furnace set to 300
10/25/2011	11:31:21 PM	H2 valve closed
10/25/2011	11:31:21 PM	BCl3 valve closed
10/25/2011	11:31:21 PM	PH3 valve closed
10/25/2011	11:31:21 PM	SiCl4 pre valve closed
10/25/2011	11:31:21 PM	SiCl4 post valve closed
10/25/2011	11:31:21 PM	Bypass valve closed
10/25/2011	11:31:21 PM	Bubbler valve closed
10/25/2011	11:31:21 PM	Helium valve opened
10/25/2011	11:31:21 PM	Main Vac valve opened
10/25/2011	11:31:21 PM	Helium MFC set to  20.000000
10/25/2011	11:31:21 PM	H2 MFC set to  0.000000
10/25/2011	11:31:21 PM	BCl3 MFC set to  0.000000
10/25/2011	11:31:21 PM	PHl3 MFC set to  0.000000
10/25/2011	11:31:21 PM	SiCl4 MFC set to  0.000000
10/25/2011	11:31:21 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	11:31:22 PM	Tube furnace set to 300
10/25/2011	11:31:52 PM	Helium valve closed
10/25/2011	11:31:52 PM	H2 valve closed
10/25/2011	11:31:52 PM	BCl3 valve closed
10/25/2011	11:31:52 PM	PH3 valve closed
10/25/2011	11:31:52 PM	SiCl4 pre valve closed
10/25/2011	11:31:52 PM	SiCl4 post valve closed
10/25/2011	11:31:52 PM	Bypass valve closed
10/25/2011	11:31:52 PM	Bubbler valve closed
10/25/2011	11:31:52 PM	Main Vac valve opened
10/25/2011	11:31:52 PM	Helium MFC set to  0.000000
10/25/2011	11:31:52 PM	H2 MFC set to  0.000000
10/25/2011	11:31:52 PM	BCl3 MFC set to  0.000000
10/25/2011	11:31:52 PM	PHl3 MFC set to  0.000000
10/25/2011	11:31:52 PM	SiCl4 MFC set to  0.000000
10/25/2011	11:31:52 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	11:31:52 PM	Tube furnace set to 300
10/25/2011	11:31:53 PM	Run finished at 11:31 PM
10/25/2011	11:39:33 PM	Main Vac valve closed
10/25/2011	11:39:45 PM	Main Vac valve opened
10/25/2011	11:40:48 PM	Recipe started at 11:40 PM
10/25/2011	11:40:48 PM	Helium valve closed
10/25/2011	11:40:48 PM	H2 valve closed
10/25/2011	11:40:48 PM	BCl3 valve closed
10/25/2011	11:40:48 PM	PH3 valve closed
10/25/2011	11:40:48 PM	SiCl4 pre valve closed
10/25/2011	11:40:48 PM	SiCl4 post valve closed
10/25/2011	11:40:48 PM	Main Vac valve closed
10/25/2011	11:40:48 PM	Bypass valve closed
10/25/2011	11:40:48 PM	Bubbler valve closed
10/25/2011	11:40:48 PM	Helium MFC set to  0.000000
10/25/2011	11:40:48 PM	H2 MFC set to  0.000000
10/25/2011	11:40:48 PM	BCl3 MFC set to  0.000000
10/25/2011	11:40:48 PM	PHl3 MFC set to  0.000000
10/25/2011	11:40:48 PM	SiCl4 MFC set to  0.000000
10/25/2011	11:40:48 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	11:40:48 PM	Tube furnace set to 0
10/25/2011	11:40:51 PM	Helium valve closed
10/25/2011	11:40:51 PM	BCl3 valve closed
10/25/2011	11:40:51 PM	PH3 valve closed
10/25/2011	11:40:51 PM	SiCl4 pre valve closed
10/25/2011	11:40:51 PM	SiCl4 post valve closed
10/25/2011	11:40:51 PM	Main Vac valve closed
10/25/2011	11:40:51 PM	Bypass valve closed
10/25/2011	11:40:51 PM	Bubbler valve closed
10/25/2011	11:40:51 PM	H2 valve opened
10/25/2011	11:40:51 PM	Helium MFC set to  0.000000
10/25/2011	11:40:51 PM	H2 MFC set to  500.000000
10/25/2011	11:40:51 PM	BCl3 MFC set to  0.000000
10/25/2011	11:40:51 PM	PHl3 MFC set to  0.000000
10/25/2011	11:40:51 PM	SiCl4 MFC set to  0.000000
10/25/2011	11:40:51 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	11:40:51 PM	Tube furnace set to 0
10/25/2011	11:41:53 PM	Helium valve closed
10/25/2011	11:41:53 PM	BCl3 valve closed
10/25/2011	11:41:53 PM	PH3 valve closed
10/25/2011	11:41:53 PM	SiCl4 pre valve closed
10/25/2011	11:41:53 PM	SiCl4 post valve closed
10/25/2011	11:41:53 PM	Main Vac valve closed
10/25/2011	11:41:53 PM	Bypass valve closed
10/25/2011	11:41:53 PM	H2 valve opened
10/25/2011	11:41:53 PM	Bubbler valve opened
10/25/2011	11:41:53 PM	Helium MFC set to  0.000000
10/25/2011	11:41:53 PM	H2 MFC set to  500.000000
10/25/2011	11:41:53 PM	BCl3 MFC set to  0.000000
10/25/2011	11:41:53 PM	PHl3 MFC set to  0.000000
10/25/2011	11:41:53 PM	SiCl4 MFC set to  0.000000
10/25/2011	11:41:53 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	11:41:53 PM	Tube furnace set to 0
10/25/2011	11:41:54 PM	Helium valve closed
10/25/2011	11:41:54 PM	BCl3 valve closed
10/25/2011	11:41:54 PM	PH3 valve closed
10/25/2011	11:41:54 PM	SiCl4 pre valve closed
10/25/2011	11:41:54 PM	SiCl4 post valve closed
10/25/2011	11:41:54 PM	Main Vac valve closed
10/25/2011	11:41:54 PM	Bypass valve closed
10/25/2011	11:41:54 PM	H2 valve opened
10/25/2011	11:41:54 PM	Bubbler valve opened
10/25/2011	11:41:54 PM	Helium MFC set to  0.000000
10/25/2011	11:41:54 PM	H2 MFC set to  500.000000
10/25/2011	11:41:54 PM	BCl3 MFC set to  0.000000
10/25/2011	11:41:54 PM	PHl3 MFC set to  0.000000
10/25/2011	11:41:54 PM	SiCl4 MFC set to  0.000000
10/25/2011	11:41:54 PM	Bypass solenoid MFC set to  0.000000
10/25/2011	11:41:54 PM	Tube furnace set to 1048
